公开(公告)号：US20080159794A1

公开(公告)日：2008-07-03

申请号：US11802034

申请日：2007-05-18

申请人： Atsuyuki Kitamura ,  Masahiro Sato ,  Junichi Murakami

发明人： Atsuyuki Kitamura ,  Masahiro Sato ,  Junichi Murakami

IPC分类号： G03G15/00

CPC分类号： G03G15/161 ,  G03G15/1615 ,  G03G15/6555 ,  G03G2215/00409 ,  G03G2215/00413 ,  G03G2215/1623

摘要： A conveyance apparatus includes: a conveyance member that conveys images formed by plural image forming parts or a recording medium on which the images formed by the plural image forming parts are transferred; and a driving unit that drives the conveyance member via a frictional force in at least two positions.

摘要翻译： 输送装置包括：输送由多个图像形成部件形成的图像的输送部件或由多个图像形成部件形成的图像转印到的记录介质; 以及驱动单元，其经由摩擦力在至少两个位置驱动输送构件。

公开(公告)号：US07315034B2

公开(公告)日：2008-01-01

申请号：US11202101

申请日：2005-08-12

申请人： Takanori Yagita ,  Takashi Nishi ,  Michiro Sugitani ,  Junichi Murakami ,  Mitsukuni Tsukihara ,  Mitsuaki Kabasawa ,  Masaki Ishikawa ,  Tetsuya Kudo

发明人： Takanori Yagita ,  Takashi Nishi ,  Michiro Sugitani ,  Junichi Murakami ,  Mitsukuni Tsukihara ,  Mitsuaki Kabasawa ,  Masaki Ishikawa ,  Tetsuya Kudo

IPC分类号： H01J37/147

CPC分类号： H01J37/05 ,  H01J37/317 ,  H01J49/26

摘要： In an irradiation system with an ion beam/charged particle beam having an energy filter, the energy filter is formed by deflection electrodes and a deflection magnet which can be switchingly used. The deflection magnet has a general window-frame shape and is formed with a hollow portion at its center. The deflection electrodes are installed, along with suppression electrodes, in a vacuum chamber arranged in the hollow portion of the deflection magnet. The deflection electrodes are installed with respect to the deflection magnet such that a deflection trajectory of a beam caused by a magnetic field and a deflection trajectory of a beam caused by an electric field overlap each other. Since the deflection electrodes and the deflection magnet can be switchingly used, the system can deal with a wider range of beam conditions and thus is widely usable.

摘要翻译： 在具有能量过滤器的离子束/带电粒子束的照射系统中，能量过滤器由可以切换使用的偏转电极和偏转磁体形成。 偏转磁体具有通常的窗框形状，并且在其中心形成有中空部分。 偏转电极与抑制电极一起安装在布置在偏转磁体的中空部分中的真空室中。 偏转电极相对于偏转磁体安装，使得由电场引起的光束引起的光束的偏转轨迹和由电场引起的偏转轨迹彼此重叠。 由于可以切换使用偏转电极和偏转磁体，所以系统可以处理更宽范围的光束条件，因此可广泛使用。

公开(公告)号：US07304319B2

公开(公告)日：2007-12-04

申请号：US11151308

申请日：2005-06-14

申请人： Hiroshi Kawaguchi ,  Makoto Sano ,  Michiro Sugitani ,  Junichi Murakami ,  Mitsukuni Tsukihara ,  Mitsuaki Kabasawa ,  Takashi Kuroda ,  Kazunari Ueda ,  Hiroshi Sogabe

发明人： Hiroshi Kawaguchi ,  Makoto Sano ,  Michiro Sugitani ,  Junichi Murakami ,  Mitsukuni Tsukihara ,  Mitsuaki Kabasawa ,  Takashi Kuroda ,  Kazunari Ueda ,  Hiroshi Sogabe

IPC分类号： H01J37/317

CPC分类号： H01J49/26 ,  H01J37/026 ,  H01J37/304 ,  H01J37/3171 ,  H01J2237/0041

摘要： A charge compensation device according to this invention is for suppressing charging of a wafer when the wafer is irradiated with a beam from a beam generation source unit. The charge compensation device comprises at least one first arc chamber having at least one first extraction hole and a second arc chamber having at least one second extraction hole faced on the reciprocal swinging beam of the predetermined scan range. A first arc voltage is applied to the first arc chamber to generate first plasma in the first arc chamber. The generated first plasma is extracted from the first arc chamber and introduced into the second arc chamber. Second plasma is produced in the second arc chamber, and second extracted plasma from the second arc chamber forms a plasma bridge between the second extraction hole and the reciprocal swinging beam.

摘要翻译： 根据本发明的电荷补偿装置用于当来自光束产生源单元的光束照射晶片时，用于抑制晶片的充电。 电荷补偿装置包括至少一个具有至少一个第一提取孔的第一弧形腔和具有面对预定扫描范围的往复摆动梁上的至少一个第二提取孔的第二弧形腔。 第一电弧电压被施加到第一电弧室以在第一电弧室中产生第一等离子体。 所产生的第一等离子体从第一电弧室提取并被引入第二电弧室。 在第二电弧室中产生第二等离子体，并且来自第二电弧室的第二提取等离子体在第二提取孔和往复摆动梁之间形成等离子体桥。

公开(公告)号：US20070126185A1

公开(公告)日：2007-06-07

申请号：US10581963

申请日：2004-11-09

申请人： Mitsuharu Fukuzawa ,  Takashi Nakajima ,  Nobuto Kashiwagi ,  Junichi Murakami

发明人： Mitsuharu Fukuzawa ,  Takashi Nakajima ,  Nobuto Kashiwagi ,  Junichi Murakami

IPC分类号： A63F9/30

CPC分类号： A63F9/30 ,  A63F9/305

摘要： An article acquisition game apparatus includes a storage unit storing articles, and an article transferring unit enabling a player to hold the articles in the storage unit and transfer the articles to a predetermined transfer position when the player operates an operation input unit. The game apparatus comprises a distributing unit dividing the articles transferred to the transfer position into two or more groups, a first accumulation unit accumulating at least one group of the articles divided by the distributing unit, an article disbursement unit allowing the player to take out at least one group of the articles other than those accumulated by the first accumulation unit, an operating information generating unit generating operating information based on predetermined conditions, and an ejecting unit ejecting the articles accumulated by the first accumulation unit, to the article disbursement unit, based on the operating information.

摘要翻译： 物品获取游戏装置包括存储物品的存储单元和使玩家能够将物品保持在存储单元中的物品传送单元，并且当玩家操作操作输入单元时将物品传送到预定的转移位置。 游戏装置包括：分配单元，将传送到转移位置的物品分成两组或更多组，第一累积单元，累积由分配单元划分的至少一组物品;物品支付单元，允许玩家取出 至少一组不同于第一累积单元累积的物品的组，基于预定条件产生运行信息的运行信息产生单元和将第一累积单元累积的物品弹出到物品支付单元的排出单元 关于操作信息。

公开(公告)号：US20060113492A1

公开(公告)日：2006-06-01

申请号：US11151308

申请日：2005-06-14

申请人： Hiroshi Kawaguchi ,  Makoto Sano ,  Michiro Sugitani ,  Junichi Murakami ,  Mitsukuni Tsukihara ,  Mitsuaki Kabasawa ,  Takashi Kuroda ,  Kazunari Ueda ,  Hiroshi Sogabe

发明人： Hiroshi Kawaguchi ,  Makoto Sano ,  Michiro Sugitani ,  Junichi Murakami ,  Mitsukuni Tsukihara ,  Mitsuaki Kabasawa ,  Takashi Kuroda ,  Kazunari Ueda ,  Hiroshi Sogabe

IPC分类号： H01J37/08

CPC分类号： H01J49/26 ,  H01J37/026 ,  H01J37/304 ,  H01J37/3171 ,  H01J2237/0041

摘要： A charge compensation device according to this invention is for suppressing charging of a wafer when the wafer is irradiated with a beam from a beam generation source unit. The charge compensation device comprises at least one first arc chamber having at least one first extraction hole and a second arc chamber having at least one second extraction hole faced on the reciprocal swinging beam of the predetermined scan range. A first arc voltage is applied to the first arc chamber to generate first plasma in the first arc chamber. The generated first plasma is extracted from the first arc chamber and introduced into the second arc chamber. Second plasma is produced in the second arc chamber, and second extracted plasma from the second arc chamber forms a plasma bridge between the second extraction hole and the reciprocal swinging beam.

摘要翻译： 根据本发明的电荷补偿装置用于当来自光束产生源单元的光束照射晶片时，用于抑制晶片的充电。 电荷补偿装置包括至少一个具有至少一个第一提取孔的第一弧形腔和具有面对预定扫描范围的往复摆动梁上的至少一个第二提取孔的第二弧形腔。 第一电弧电压被施加到第一电弧室以在第一电弧室中产生第一等离子体。 所产生的第一等离子体从第一电弧室提取并被引入第二电弧室。 在第二电弧室中产生第二等离子体，并且来自第二电弧室的第二提取等离子体在第二提取孔和往复摆动梁之间形成等离子体桥。

公开(公告)号：US20060113467A1

公开(公告)日：2006-06-01

申请号：US11202101

申请日：2005-08-12

申请人： Takanori Yagita ,  Takashi Nishi ,  Michiro Sugitani ,  Junichi Murakami ,  Mitsukuni Tsukihara ,  Mitsuaki Kabasawa ,  Masaki Ishikawa ,  Tetsuya Kudo

发明人： Takanori Yagita ,  Takashi Nishi ,  Michiro Sugitani ,  Junichi Murakami ,  Mitsukuni Tsukihara ,  Mitsuaki Kabasawa ,  Masaki Ishikawa ,  Tetsuya Kudo

IPC分类号： B01D59/44

CPC分类号： H01J37/05 ,  H01J37/317 ,  H01J49/26

摘要： In an irradiation system with an ion beam/charged particle beam having an energy filter, the energy filter is formed by deflection electrodes and a deflection magnet which can be switchingly used. The deflection magnet has a general window-frame shape and is formed with a hollow portion at its center. The deflection electrodes are installed, along with suppression electrodes, in a vacuum chamber arranged in the hollow portion of the deflection magnet. The deflection electrodes are installed with respect to the deflection magnet such that a deflection trajectory of a beam caused by a magnetic field and a deflection trajectory of a beam caused by an electric field overlap each other. Since the deflection electrodes and the deflection magnet can be switchingly used, the system can deal with a wider range of beam conditions and thus is widely usable.

摘要翻译： 在具有能量过滤器的离子束/带电粒子束的照射系统中，能量过滤器由可以切换使用的偏转电极和偏转磁体形成。 偏转磁体具有通常的窗框形状，并且在其中心形成有中空部分。 偏转电极与抑制电极一起安装在布置在偏转磁体的中空部分中的真空室中。 偏转电极相对于偏转磁体安装，使得由电场引起的光束引起的光束的偏转轨迹和由电场引起的偏转轨迹彼此重叠。 由于可以切换使用偏转电极和偏转磁体，所以系统可以处理更宽范围的光束条件，因此可广泛使用。

公开(公告)号：US06734901B1

公开(公告)日：2004-05-11

申请号：US09082301

申请日：1998-05-20

申请人： Toshimichi Kudo ,  Hideo Kawahara ,  Junichi Murakami

发明人： Toshimichi Kudo ,  Hideo Kawahara ,  Junichi Murakami

IPC分类号： H04N5228

CPC分类号： H04N5/23261 ,  G03B2205/0007 ,  G03B2217/005 ,  H04N5/23248 ,  H04N5/23254 ,  H04N5/23258 ,  H04N5/23283

摘要： A vibration correction apparatus has a motion vector detection circuit for detecting a motion vector signal at a predetermined sampling period, a signal processing circuit for calculating a correction target value in accordance with the motion vector signal detected by the motion vector detection circuit, a correction system for correcting a motion in accordance with the correction target value, and a control circuit for generating a new correction target value through interpolation of the correction target value, shortening a correction period of correction by the correction system shorter than a sampling period of the motion vector, and making the period of correction by the correction system variable with each image pickup system.

摘要翻译： 振动校正装置具有用于以预定采样周期检测运动矢量信号的运动矢量检测电路，用于根据由运动矢量检测电路检测的运动矢量信号计算校正目标值的信号处理电路，校正系统 用于根据校正目标值校正运动;以及控制电路，用于通过校正目标值的内插产生新的校正目标值，缩短校正系统的校正周期短于运动矢量的采样周期 并且通过每个图像拾取系统使校正系统的校正周期变化。

公开(公告)号：US06570142B1

公开(公告)日：2003-05-27

申请号：US09489705

申请日：2000-01-24

申请人： Akihiro Kawanami ,  Junichi Murakami

发明人： Akihiro Kawanami ,  Junichi Murakami

IPC分类号： G02B2740

CPC分类号： G02B7/08

摘要： A position control device arranged to store a stop position of a movable lens member and, after the lens member is moved from the stop position to an arbitrary position, to automatically move the lens member to the stored stop position includes a first encoder which divides a movable range of the lens member into a plurality of areas and detects one of the areas in which the stored stop position is located and a second encoder which outputs pulses according to the movement of the lens member at a finer rate of resolution than the resolution of the first encoder. In the position control device, information on the area detected by the first encoder and the number of pulses detected by the second encoder as a position within the detected area is stored as the information on the stored stop position. The position control device compares the output of the first encoder and that of the second encoder with the stored information in moving the lens member to the stored stop position.

摘要翻译： 一种位置控制装置，其设置为存储可移动透镜构件的停止位置，并且在透镜构件从停止位置移动到任意位置之后，将透镜构件自动移动到存储的停止位置包括：第一编码器，其将 透镜构件的可移动范围成多个区域，并且检测存储的停止位置所在的区域之一;以及第二编码器，其以比分辨率更高的分辨率根据透镜构件的移动输出脉冲 第一个编码器。 在位置控制装置中，将关于由第一编码器检测的区域的信息和由第二编码器检测的脉冲数作为检测区域内的位置存储作为关于存储的停止位置的信息。 位置控制装置在将透镜构件移动到存储的停止位置时将第一编码器的输出与第二编码器的输出与存储的信息进行比较。

公开(公告)号：US06333111B1

公开(公告)日：2001-12-25

申请号：US09524743

申请日：2000-03-13

申请人： Junichi Murakami ,  Yutaka Tai ,  Kazuki Yoshimura ,  Kazuo Igarashi ,  Sakae Tanemura ,  Masahiro Goto

发明人： Junichi Murakami ,  Yutaka Tai ,  Kazuki Yoshimura ,  Kazuo Igarashi ,  Sakae Tanemura ,  Masahiro Goto

IPC分类号： G11B566

CPC分类号： C23C14/228 ,  B22F1/02 ,  B22F9/14 ,  B22F2998/00 ,  B82Y10/00 ,  C23C14/35 ,  C30B23/00 ,  C30B29/02 ,  C30B29/605 ,  H01L21/2855 ,  Y10S428/90 ,  Y10T428/1114 ,  Y10T428/2993 ,  B22F1/0018 ,  B22F1/0048

摘要： The present invention provides a method for producing layered aluminum fine particles, and applications to single electron tunneling quantum devices, and the present invention further relates to a method for producing spherical metallic aluminum fine particles (layered aluminum fine particles), characterized in that metallic aluminum is supplied into a mixed gas of helium and 1×10−7 to 3×10−7 torr water vapor by sputtering induced by argon gas discharge to generate aggregates, after which this product is released into a vacuum to generate single crystals in which the surface layer is covered with alumina.

摘要翻译： 本发明提供层状铝微粒的制造方法以及单电子隧道用量子器件的应用，本发明还涉及一种球状金属铝微粒（层状铝微粒）的制造方法，其特征在于，金属铝 通过由氩气放电引起的溅射而被供给到氦和1×10-7至3×10-7乇的水蒸汽的混合气体中以产生聚集体，之后将该产物释放到真空中以产生表面层被覆盖的单晶 与氧化铝。

公开(公告)号：US5572372A

公开(公告)日：1996-11-05

申请号：US200885

申请日：1994-02-22

申请人： Masayoshi Sekine ,  Junichi Murakami ,  Shigeru Ogino ,  Hiroyuki Takahara ,  Masamichi Toyama ,  Sadahiko Tsuji ,  Shigeyuki Suda ,  Jun Tokumitsu

发明人： Masayoshi Sekine ,  Junichi Murakami ,  Shigeru Ogino ,  Hiroyuki Takahara ,  Masamichi Toyama ,  Sadahiko Tsuji ,  Shigeyuki Suda ,  Jun Tokumitsu

IPC分类号： G02B7/08 ,  G02B7/02 ,  G02B15/14

CPC分类号： G02B7/08

摘要： An optical apparatus is provided with a lens unit movable in the direction of the optical axis thereof, a lens barrel, an electromagnetic coil coupled to one of the lens unit and the lens barrel, a driving unit having a magnetic material coupled to the other of the lens unit and the lens barrel, and a guide for slidably guiding the lens unit relative to the lens barrel.

摘要翻译： 一种光学设备设置有可沿其光轴方向移动的透镜单元，透镜镜筒，耦合到透镜单元和镜筒之一的电磁线圈，具有耦合到另一个的磁性材料的驱动单元 透镜单元和镜筒，以及用于相对于镜筒可滑动地引导透镜单元的引导件。