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409 条记录 (耗时 0.029 秒)

    Dilute remote plasma clean
    41.
    发明授权
    Dilute remote plasma clean 有权
    稀释远程等离子体清洁

    公开(公告)号：US06329297B1

    公开(公告)日：2001-12-11

    申请号：US09553694

    申请日：2000-04-21

    申请人： Kenneth E. Balish ,  Thomas Nowak ,  Tsutomu Tanaka ,  Mark Beals

    发明人： Kenneth E. Balish ,  Thomas Nowak ,  Tsutomu Tanaka ,  Mark Beals

    IPC分类号： H01L2100

    CPC分类号： H01J37/3244 ,  H01J2237/335 ,  Y10S156/916

    摘要： A method and apparatus for enhancing the etch characteristics of a plasma formed in a remote plasma generator. A plasma formed in a remote plasma generator (27) is flown through a tube (62) to a plenum (60) where it is diluted to form a plasma mixture before flowing the plasma mixture into a processing chamber (15). The plasma mixture is used to clean deposits from the interior surfaces of the processing chamber, or can be used to perform an etch step on a process wafer within the processing chamber. In one embodiment, a plasma formed from NF3 is diluted with N2 to etch residue from the surfaces of a processing chamber used to deposit silicon oxide glass. Diluting the plasma increased the etching rate and made the etching rate more uniform across the diameter of the processing chamber.

    摘要翻译： 一种用于增强在远程等离子体发生器中形成的等离子体的蚀刻特性的方法和装置。 形成在远程等离子体发生器（27）中的等离子体通过管（62）流到增压室（60），在其中稀释以形成等离子体混合物，然后将等离子体混合物流入处理室（15）。 等离子体混合物用于从处理室的内表面清洁沉积物，或者可以用于在处理室内的处理晶片上进行蚀刻步骤。 在一个实施方案中，用N 2稀释由NF 3形成的等离子体，以从用于沉积氧化硅玻璃的处理室的表面蚀刻残留物。 稀释等离子体增加了蚀刻速率，并且使蚀刻速率在处理室的直径上更均匀。

    Locking device for high-voltage cable connectors
    45.
    发明授权
    Locking device for high-voltage cable connectors 失效
    高压电缆连接器锁定装置

    公开(公告)号：US5997333A

    公开(公告)日：1999-12-07

    申请号：US908356

    申请日：1997-08-07

    申请人： Kazumoto Konda ,  Sho Miyazaki ,  Shuichi Kanagawa ,  Tsutomu Tanaka ,  Kunihiko Watanabe

    发明人： Kazumoto Konda ,  Sho Miyazaki ,  Shuichi Kanagawa ,  Tsutomu Tanaka ,  Kunihiko Watanabe

    IPC分类号： H01R13/53 ,  H01R13/627

    CPC分类号： H01R13/6276 ,  H01R13/53

    摘要： To securely lock connectors for charging, a charging connectors 1 is engaged with a vehicle-side connector 25, lock balls 9 are engaged with an engaging groove 28 and a locking member 10 is engaged with the lock balls 9. As a result, the connectors 1 and 25 are locked. Since the connectors 1 and 25 are locked by a ball lock mechanism taking advantage of the engagement of the lock balls 9, the connectors can be more securely locked even if the connectors and wires are heavy as compared to a prior art locking mechanism adopting an elastically deformable resin lance or engaging member and, therefore, a better reliability can be ensured.

    摘要翻译： 为了牢固地锁定用于充电的连接器，充电连接器1与车辆侧连接器25接合，锁定球9与接合槽28接合并且锁定构件10与锁定球9接合。结果，连接器 1和25被锁定。 由于连接器1和25被利用锁定球9的接合的球锁定机构锁定，所以即使连接器和电线比现有技术的锁定机构采用弹性也可以更牢固地锁定连接器 可变形树脂喷枪或接合构件，因此可以确保更好的可靠性。

    Magnetic disk drive recording a signal with a skew angle
    46.
    发明授权
    Magnetic disk drive recording a signal with a skew angle 有权
    磁盘驱动器记录具有歪斜角度的信号

    公开(公告)号：US5995341A

    公开(公告)日：1999-11-30

    申请号：US170088

    申请日：1998-10-13

    申请人： Tsutomu Tanaka ,  Tomoko Taguchi ,  Yoichiro Tanaka

    发明人： Tsutomu Tanaka ,  Tomoko Taguchi ,  Yoichiro Tanaka

    IPC分类号： G11B5/00 ,  G11B5/012 ,  G11B5/10 ,  G11B5/127 ,  G11B5/187 ,  G11B5/48 ,  G11B5/60

    CPC分类号： G11B5/012 ,  G11B5/10 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/4886 ,  G11B2005/0029 ,  G11B5/6011

    摘要： A magnetic disk drive has a magnetic head for recording or reproducing information on or from a magnetic recording medium. The magnetic recording medium includes a magnetic recording layer for information recording which has magnetic anisotropy in a direction perpendicular to a surface of the recording medium, a soft magnetic under layer under the magnetic recording layer and having soft magnetic properties, and a non-magnetic substrate. The magnetic disk drive records a signal with a skew angle on at least some tracks. A main pole has a size satisfying pL

    摘要翻译： 磁盘驱动器具有用于在磁记录介质上记录或再现信息的磁头。 磁记录介质包括用于信息记录的磁记录层，它在与记录介质的表面垂直的方向上具有磁各向异性，在磁记录层下面具有软磁性层，具有软磁特性，以及非磁性基板 。 磁盘驱动器在至少一些轨道上记录具有歪斜角度的信号。 主极具有满足pL <（tP-tWcosθ）/sinθ的尺寸，其中pL是主极在行进方向上的端面的宽度，tW是主极的端面的轨道宽度 极，tP是轨道间距，θ是主极的后缘的倾斜角。

    Magnetic head and magnetic disk drive
    47.
    发明授权
    Magnetic head and magnetic disk drive 失效
    磁头和磁盘驱动器

    公开(公告)号：US5854727A

    公开(公告)日：1998-12-29

    申请号：US895585

    申请日：1997-07-16

    申请人： Tsutomu Tanaka ,  Tomoko Taguchi ,  Yoichiro Tanaka

    发明人： Tsutomu Tanaka ,  Tomoko Taguchi ,  Yoichiro Tanaka

    IPC分类号： G11B5/00 ,  G11B5/012 ,  G11B5/10 ,  G11B5/127 ,  G11B5/187 ,  G11B5/48 ,  G11B5/60

    CPC分类号： G11B5/012 ,  G11B5/10 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/4886 ,  G11B2005/0029 ,  G11B5/6011

    摘要： A ratio tW/pL of a track width tW to a width pL of an end face, in a traveling direction, of a main pole which performs recording or reproduction on or from the magnetic recording layer of a medium, and a saturation magnetic flux density Bs (T: tesla) of a magnetic material constituting the main pole satisfy: (A.sub.1 .times.Bs+B.sub.1).sup.2 +C.sub.1 .ltoreq.tW/pL.ltoreq.(A.sub.2 .times.Bs+B.sub.2).sup.2 +C.sub.2 for A.sub.1 =4.3.times..delta.+0.4, B.sub.1 =-16.2.times..delta.-0.3, C.sub.1 =2.2.times..delta.+0.3, A.sub.2 =378.times..delta..sup.2 -66.times..delta.+4.2, B.sub.2 =264.times..delta..sup.2 -43.times..delta.+2.1, and C.sub.2 =9.times..delta.-2.5 where .delta.(.mu.m) is a distance from the end face of the main pole to the soft magnetic under layer.

    摘要翻译： 磁道宽度tW与在介质的磁记录层上进行记录或再现的主极的行进方向的端面的宽度pL的比tW / pL以及饱和磁通密度 构成主极的磁性材料的Bs（T：特斯拉）满足：（A1xBs + B1）2 + C1

    Breaker device
    49.
    发明授权
    Breaker device 失效
    断路器装置

    公开(公告)号：US5842560A

    公开(公告)日：1998-12-01

    申请号：US800202

    申请日：1997-02-12

    申请人： Heiji Kuki ,  Kazumoto Konda ,  Tsutomu Tanaka ,  Kunihiko Watanabe

    发明人： Heiji Kuki ,  Kazumoto Konda ,  Tsutomu Tanaka ,  Kunihiko Watanabe

    IPC分类号： H01H1/38 ,  H01H3/02 ,  H01H9/00 ,  H01H9/08 ,  H01H9/10 ,  H01R13/633 ,  H01R13/62

    CPC分类号： H01H9/085 ,  H01H3/02 ,  H01R13/6335 ,  H01H1/38 ,  H01H2009/108 ,  H01H9/0066 ,  H01H9/10

    摘要： A breaker device is provided to prevent an insufficient engagement of electrodes. The device, according to the invention, is excellent in safety because of its construction in which a conductive path is located inside the casing 1 and is allowed to have a compact configuration of particularly low height because a handle 40 can be inclined to its resting position. When the handle 40 is inclined to the resting position while a movable electrode 31 is insufficiently engaged, engaging portions 77 come into contact with receiving portions 75 and a lever action works with the contact positions of the engaging portions 77 and the receiving portions 75 as a fulcrum. As a result, a rotating force applied to an operable portion 40A is translated into a downward acting engaging force applied to the movable electrode 31 via rotation center shafts 45 and a mount body 35. In other words, since the movable electrode 31 is brought into its properly engaged state by inclining the handle 40 to the resting position, the insufficient engagement of the movable electrode 31 can be prevented.

    摘要翻译： 提供了一种防止电极接合不足的断路器装置。 根据本发明的装置由于其导电路径位于壳体1内部的结构而具有优异的安全性，并且由于手柄40可以倾斜到其静止位置而被允许具有特别低的高度的紧凑构造 。 当手柄40倾斜到静止位置而可动电极31不充分接合时，接合部分77与接收部分75接触，并且杠杆作用与接合部分77和接收部分75的接触位置一起作为 支点。 结果，施加到可操作部分40A的旋转力被转换成通过旋转中心轴45和安装体35施加到可动电极31的向下作用的接合力。换句话说，由于可动电极31被带入 通过将手柄40倾斜到静止位置，其适当的接合状态，可以防止可动电极31的不充分的接合。