公开(公告)号：US20170294429A1

公开(公告)日：2017-10-12

申请号：US15092630

申请日：2016-04-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yung-Feng Cheng ,  Yu-Tse Kuo ,  Chia-Wei Huang ,  Li-Ping Huang ,  Shu-Ru Wang

IPC: H01L27/02 ,  H01L23/522 ,  H01L23/528 ,  H01L27/11

CPC classification number: H01L27/0207 ,  H01L23/5226 ,  H01L23/528 ,  H01L27/1104

Abstract: A semiconductor layout structure includes a substrate comprising a cell edge region and a dummy region abutting thereto, a plurality of dummy contact patterns disposed in the dummy region and arranged along a first direction, and a plurality of dummy gate patterns disposed in the dummy region and arranged along the first direction. The dummy contact patterns and the dummy gate patterns are alternately arranged. Each dummy contact pattern includes an inner dummy contact proximal to the cell edge region and an outer dummy contact distal to the cell edge region, and the inner dummy contact and the outer dummy contact are arranged along a second direction perpendicular to the first direction and spaced apart from each other by a first gap.

公开(公告)号：US09613969B2

公开(公告)日：2017-04-04

申请号：US14793714

申请日：2015-07-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ching-Wen Hung ,  Wei-Cyuan Lo ,  Ming-Jui Chen ,  Chia-Lin Lu ,  Jia-Rong Wu ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-Kuan Wu ,  Chih-Sen Huang ,  Yi-Wei Chen ,  Tan-Ya Yin ,  Chia-Wei Huang ,  Shu-Ru Wang ,  Yung-Feng Cheng

IPC: H01L27/11 ,  H01L29/76 ,  H01L21/768 ,  H01L29/78 ,  H01L23/535 ,  H01L21/8234 ,  H01L21/311

CPC classification number: H01L21/823871 ,  H01L21/31144 ,  H01L21/76802 ,  H01L21/76805 ,  H01L21/76877 ,  H01L21/76895 ,  H01L21/76897 ,  H01L21/823431 ,  H01L21/823475 ,  H01L21/823821 ,  H01L23/485 ,  H01L23/535 ,  H01L27/0922 ,  H01L27/1104 ,  H01L27/1108 ,  H01L29/7851 ,  H01L29/7853

Abstract: The present invention provides a semiconductor structure, including a substrate, a plurality of fin structures, a plurality of gate structures, a dielectric layer and a plurality of contact plugs. The substrate has a memory region. The fin structures are disposed on the substrate in the memory region, each of which stretches along a first direction. The gate structures are disposed on the fin structures, each of which stretches along a second direction. The dielectric layer is disposed on the gate structures and the fin structures. The contact plugs are disposed in the dielectric layer and electrically connected to a source/drain region in the fin structure. From a top view, the contact plug has a trapezoid shape or a pentagon shape. The present invention further provides a method for forming the same.

公开(公告)号：US20160351575A1

公开(公告)日：2016-12-01

申请号：US14793714

申请日：2015-07-07

Applicant: United Microelectronics Corp.

Inventor： Ching-Wen Hung ,  Wei-Cyuan Lo ,  Ming-Jui Chen ,  Chia-Lin Lu ,  Jia-Rong Wu ,  Yi-Hui Lee ,  Ying-Cheng Liu ,  Yi-Kuan Wu ,  Chih-Sen Huang ,  Yi-Wei Chen ,  Tan-Ya Yin ,  Chia-Wei Huang ,  Shu-Ru Wang ,  Yung-Feng Cheng

IPC: H01L27/11 ,  H01L21/768 ,  H01L21/8234 ,  H01L21/311 ,  H01L29/78 ,  H01L23/535

CPC classification number: H01L21/823871 ,  H01L21/31144 ,  H01L21/76802 ,  H01L21/76805 ,  H01L21/76877 ,  H01L21/76895 ,  H01L21/76897 ,  H01L21/823431 ,  H01L21/823475 ,  H01L21/823821 ,  H01L23/485 ,  H01L23/535 ,  H01L27/0922 ,  H01L27/1104 ,  H01L27/1108 ,  H01L29/7851 ,  H01L29/7853

Abstract: The present invention provides a semiconductor structure, including a substrate, a plurality of fin structures, a plurality of gate structures, a dielectric layer and a plurality of contact plugs. The substrate has a memory region. The fin structures are disposed on the substrate in the memory region, each of which stretches along a first direction. The gate structures are disposed on the fin structures, each of which stretches along a second direction. The dielectric layer is disposed on the gate structures and the fin structures. The contact plugs are disposed in the dielectric layer and electrically connected to a source/drain region in the fin structure. From a top view, the contact plug has a trapezoid shape or a pentagon shape. The present invention further provides a method for forming the same.

Abstract translation: 本发明提供一种半导体结构，其包括基板，多个翅片结构，多个栅极结构，电介质层和多个接触插塞。 衬底具有存储区域。 翅片结构设置在存储区域中的基板上，每个沿着第一方向延伸。 栅极结构设置在翅片结构上，每个翼结构沿着第二方向延伸。 电介质层设置在栅极结构和鳍结构上。 接触插头设置在电介质层中并电连接到鳍结构中的源极/漏极区域。 从顶部看，接触塞具有梯形或五边形。 本发明还提供了一种形成该方法的方法。

公开(公告)号：US12224001B2

公开(公告)日：2025-02-11

申请号：US18071658

申请日：2022-11-30

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Li-Ping Huang ,  Yu-Fang Chen ,  Chun-Yen Tseng ,  Tzu-Feng Chang ,  Chun-Chieh Chang

IPC: G11C11/412 ,  H01L29/66 ,  H01L29/78 ,  H10B10/00

Abstract: The invention provides a layout pattern of static random access memory (SRAM), which at least comprises a plurality of gate structures located on a substrate and spanning the plurality of fin structures to form a plurality of transistors distributed on the substrate, wherein the plurality of transistors comprise two pull-up transistors (PU), two pull-down transistors (PD) to form a latch circuit, and two access transistors (PG) connected to the latch circuit. In each SRAM memory cell, the fin structure included in the pull-up transistor (PU) is defined as a PU fin structure, the fin structure included in the pull-down transistor (PD) is defined as a PD fin structure, and the fin structure included in the access transistor (PG) is defined as a PG fin structure, wherein a width of the PD fin structure is wider than a width of the PG fin structure.

公开(公告)号：US20240404587A1

公开(公告)日：2024-12-05

申请号：US18218025

申请日：2023-07-04

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Li-Ping Huang ,  Chun-Yen Tseng

IPC: G11C11/412 ,  G11C5/06

Abstract: The invention provides a layout pattern of static random access memory (SRAM), which comprises a substrate, and a plurality of fin structures and a plurality of gate structures are located on the substrate to form a plurality of transistors. The plurality of transistors comprise a first pull-up transistor (PU1), a first pull-down transistor (PD1), a second pull-up transistor (PU2), a second pull-down transistor (PD2), a first access transistor (PG1A), a second access transistor (PG1B), a third access transistor (PG2A) and a fourth access transistor (PG2B). A first word line contact pad connected to a gate of the first access transistor (PG1A) and a first word line, and a second word line contact pad connected to a gate of the second access transistor (PG1B) and a second word line, the first word line contact pad and the second word line contact pad do not overlap in a vertical direction.

公开(公告)号：US12148809B2

公开(公告)日：2024-11-19

申请号：US17583225

申请日：2022-01-25

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Chien-Hung Chen ,  Li-Ping Huang ,  Chun-Yen Tseng

IPC: H01L29/423 ,  G11C5/06 ,  G11C11/412 ,  H01L29/78 ,  H10B10/00

Abstract: The present invention provides a layout pattern of static random access memory, comprising a PU1 (first pull-up transistor), a PU2 (second pull-up transistor), a PD1A (first pull-down transistor), a PD1B (second pull-down transistor), a PD2A (third pull-down transistor), a PD2B (fourth pull-down transistor), a PG1A (first access transistor), a PG1B (second access transistor), a PG2A (third access transistor) and a PG2B (fourth access transistor) located on the substrate. The PD1A and the PD1B are connected in parallel with each other, the PD2A and the PD2B are connected in parallel with each other, wherein the gate structures include a first J-shaped gate structure, and the first J-shaped gate structure is an integrally formed structure.

公开(公告)号：US20230403837A1

公开(公告)日：2023-12-14

申请号：US17857065

申请日：2022-07-04

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Li-Ping Huang ,  Chun-Yen Tseng

IPC: H01L27/11

CPC classification number: H01L27/1104

Abstract: The invention provides a static random access memory (SRAM) array pattern, which comprises a substrate, a first region, a second region, a third region and a fourth region are defined on the substrate and arranged in an array, each region partially overlaps with the other three regions, and each region contains a SRAM cell, the layout of the SRAM cell in the first region is the same as that in the third region, the layout of the SRAM cell in the second region is the same as that in the fourth region, and the layout of the SRAM cell in the first region and the layout of the SRAM cell in the fourth region are mirror patterns along a horizontal axis.

公开(公告)号：US20230018513A1

公开(公告)日：2023-01-19

申请号：US17952327

申请日：2022-09-26

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Yen Tseng ,  Shu-Ru Wang ,  Yu-Tse Kuo ,  Chang-Hung Chen ,  Yi-Ting Wu ,  Shu-Wei Yeh ,  Ya-Lan Chiou ,  Chun-Hsien Huang

IPC: H01L27/22 ,  H01L43/02

Abstract: A layout pattern of a magnetoresistive random access memory (MRAM) includes a substrate having a first cell region and a second cell region and a diffusion region on the substrate extending through the first cell region and the second cell region. Preferably, the diffusion region includes a first H-shape and a second H-shape according to a top view.

公开(公告)号：US20210118507A1

公开(公告)日：2021-04-22

申请号：US17114373

申请日：2020-12-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hsien Huang ,  Ching-Cheng Lung ,  Yu-Tse Kuo ,  Shu-Ru Wang ,  Chun-Yen Tseng

IPC: G11C15/04 ,  H01L27/02 ,  H01L27/11

Abstract: A layout pattern of a two-port ternary content addressable memory (TCAM) includes a first storage unit, a second storage unit, a first comparison circuit and a second comparison circuit. The first comparison circuit and the second comparison circuit are positioned in a first side area of a side and a second side area of another side of the layout pattern, respectively. The first storage unit and the second storage unit are positioned in a first middle area and a second middle area between the first side area and the second side area, respectively. The first storage unit is connected to the first comparison circuit through a first gate structure and connected to the second comparison circuit through a second gate structure. The second storage unit is connected to the first comparison circuit through a third gate structure and connected to the second comparison circuit through a fourth gate structure.

公开(公告)号：US10706914B2

公开(公告)日：2020-07-07

申请号：US16019521

申请日：2018-06-26

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Yen Tseng ,  Ching-Cheng Lung ,  Yu-Tse Kuo ,  Chun-Hsien Huang ,  Hsin-Chih Yu ,  Shu-Ru Wang

IPC: G11C11/00 ,  G11C11/412 ,  G11C11/419 ,  H01L43/08 ,  G11C7/12 ,  H01L27/11 ,  H01L43/02 ,  H01L43/10 ,  G01R33/09 ,  G11C8/08

Abstract: A static random access memory (SRAM) structure includes a first inverter comprising a first pull-up transistor and a first pull-down transistor, a second inverter comprising a second pull-up transistor and a second pull-down transistor, a first pass transistor coupled to the first inverter, and a second pass transistor coupled to the second inverter. Preferably, the first inverter is coupled to a first tunnel magnetoresistance (TMR) structure and the second inverter is coupled to a second TMR structure.