公开(公告)号：US07683740B2

公开(公告)日：2010-03-23

申请号：US11878452

申请日：2007-07-24

申请人： Toshiyuki Yoshizawa ,  Masahiro Miyazaki ,  Akira Furuya ,  Masaomi Ishikura ,  Hajime Kuwajima

发明人： Toshiyuki Yoshizawa ,  Masahiro Miyazaki ,  Akira Furuya ,  Masaomi Ishikura ,  Hajime Kuwajima

IPC分类号： H03H7/01

CPC分类号： H05K1/162 ,  H01L27/016 ,  H01L28/10 ,  H01L28/40 ,  H05K1/165 ,  H05K3/0023 ,  H05K2201/0175 ,  H05K2201/0179 ,  H05K2201/0195 ,  H05K2201/09509 ,  H05K2201/1006

摘要： An electronic component having: a substrate, a lower conductor layer provided on the substrate; an inorganic dielectric film that covers the lower conductor layer; and an upper conductor layer having an upper electrode portion provided on the inorganic dielectric film. The lower conductor layer has a lower electrode portion that together with the upper electrode portion and the inorganic dielectric film constitutes a capacitor, and a coil portion that constitutes an inductor. The entire inorganic dielectric film is formed integrally, and the lower conductor layer is in contact only with the substrate, inorganic dielectric film, and upper conductor layer.

摘要翻译： 一种电子部件，具有：基板，设置在基板上的下导体层; 覆盖下导体层的无机介电膜; 以及具有设置在无机介电膜上的上电极部的上导体层。 下导体层具有与上部电极部分和无机电介质膜一起构成电容器的下部电极部分和构成电感器的线圈部分。 整个无机介电膜一体形成，下导体层仅与基板，无机介电膜和上导体层接触。

公开(公告)号：US07667951B2

公开(公告)日：2010-02-23

申请号：US11598073

申请日：2006-11-13

申请人： Hajime Kuwajima ,  Akira Furuya ,  Masahiro Miyazaki ,  Makoto Shibata

发明人： Hajime Kuwajima ,  Akira Furuya ,  Masahiro Miyazaki ,  Makoto Shibata

IPC分类号： H01G4/06 ,  H01G4/005

CPC分类号： H01G4/33 ,  H01G4/228 ,  H01G4/40 ,  H01L23/5223 ,  H01L27/016 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

摘要： The invention relates to an electronic component including a capacitor and provides an electronic component in which electromigration can be prevented and whose capacitor element has an accurate capacity value. The electronic component includes a bottom conductor formed on a substrate, a dielectric film formed to cover the bottom conductor, an organic insulation film formed on the dielectric film, and a top conductor formed in an opening provided in the organic insulation film over the bottom conductor, the top conductor forming a capacitor element in combination with the bottom conductor and the dielectric film.

摘要翻译： 本发明涉及包括电容器的电子部件，并且提供可以防止电迁移并且其电容器元件具有精确的容量值的电子部件。 电子部件包括形成在基板上的底部导体，形成为覆盖底部导体的电介质膜，形成在电介质膜上的有机绝缘膜，以及在底部导体上设置在有机绝缘膜中的开口中形成的顶部导体 ，顶部导体与底部导体和电介质膜组合形成电容器元件。

公开(公告)号：US07652349B2

公开(公告)日：2010-01-26

申请号：US11583074

申请日：2006-10-19

申请人： Hajime Kuwajima ,  Masahiro Miyazaki ,  Akira Furuya

发明人： Hajime Kuwajima ,  Masahiro Miyazaki ,  Akira Furuya

IPC分类号： H01L29/41

CPC分类号： H01L28/40 ,  H01L27/13

摘要： A thin-film device comprises a substrate and a capacitor provided on the substrate. The capacitor incorporates: a lower conductor layer; a dielectric film a portion of which is disposed on the lower conductor layer; and an upper conductor layer disposed on the dielectric film. The lower conductor layer has a top surface, a side surface, and a corner portion formed by the top and side surfaces. The upper conductor layer incorporates an upper electrode portion having a bottom surface opposed to the top surface of the lower conductor layer with the dielectric film disposed in between. When seen from above the upper conductor layer, the periphery of the bottom surface of the upper electrode portion is located inside the periphery of the top surface of the lower conductor layer without touching the periphery of the top surface of the lower conductor layer.

摘要翻译： 薄膜器件包括衬底和设置在衬底上的电容器。 电容器包括：下导体层; 电介质膜，其一部分设置在下导体层上; 以及设置在电介质膜上的上导体层。 下导体层具有顶表面，侧表面和由顶表面和侧表面形成的角部。 上导体层包括具有与下导体层的顶表面相对的底表面的上电极部分，介电膜设置在其间。 当从上部导体层的上方观察时，上部​​电极部的底面的周围位于下部导体层的上表面的周围的内侧，而不会接触下部导体层的上表面的周围。

公开(公告)号：US07636994B2

公开(公告)日：2009-12-29

申请号：US11360394

申请日：2006-02-24

申请人： Kenichi Tochi ,  Masahiro Miyazaki ,  Takao Noguchi ,  Hiroshi Yamazaki ,  Ken Unno ,  Hirofumi Sasaki

发明人： Kenichi Tochi ,  Masahiro Miyazaki ,  Takao Noguchi ,  Hiroshi Yamazaki ,  Ken Unno ,  Hirofumi Sasaki

IPC分类号： H01L41/22 ,  H01L41/00 ,  H03H9/00

CPC分类号： H01L41/332 ,  Y10T29/42 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49126 ,  Y10T29/49155

摘要： The present invention provides an electronic device with improved characteristics and a method of making the electronic device. In a method of making an electronic device (piezoelectric device) 74 according to the present invention, an outer edge R1 of a piezoelectric film 52A formed on an electrode film 46A of a laminate 60 is located inside an outer edge R2 of the electrode film 46A. For this reason, in removal of a monocrystalline Si substrate 14 from a multilayer board 61, where an etching solution permeates between polyimide 72 and laminate 60, the etching solution circumvents the electrode film 46A before it reaches the piezoelectric film 52A. Namely, a route A of the etching solution to the piezoelectric film 52A is significantly extended by the electrode film 46A. In the method of making the electronic device 74, therefore, the etching solution is less likely to reach the piezoelectric film 52A. It significantly suppresses a situation of dissolution of the piezoelectric film 52A and realizes improvement in characteristics of the piezoelectric device 74 made.

摘要翻译： 本发明提供了具有改进特性的电子设备和制造该电子设备的方法。 在制造根据本发明的电子设备（压电器件）74的方法中，形成在层压体60的电极膜46A上的压电膜52A的外边缘R1位于电极膜46A的外边缘R2的内侧 。 因此，从蚀刻液在聚酰亚胺72和层叠体60之间渗透的多层基板61去除单晶Si基板14时，蚀刻液在其到达压电膜52A之前就绕过电极膜46A。 也就是说，通过电极膜46A显着地延长到压电膜52A的蚀刻溶液的路线A. 因此，在制造电子设备74的方法中，蚀刻溶液不太可能到达压电膜52A。 这显着地抑制了压电膜52A的溶解情况，并且实现了所制作的压电装置74的特性的改善。

公开(公告)号：US07608881B2

公开(公告)日：2009-10-27

申请号：US11588321

申请日：2006-10-27

申请人： Hajime Kuwajima ,  Masahiro Miyazaki ,  Akira Furuya

发明人： Hajime Kuwajima ,  Masahiro Miyazaki ,  Akira Furuya

IPC分类号： H01L27/108 ,  H01L29/94

CPC分类号： H01L28/40

摘要： A thin-film device comprises: a substrate; a flattening film made of an insulating material and disposed on the substrate; and a capacitor provided on the flattening film. The capacitor incorporates: a lower conductor layer disposed on the flattening film; a dielectric film disposed on the lower conductor layer; and an upper conductor layer disposed on the dielectric film. The thickness of the dielectric film falls within a range of 0.02 to 1 μm inclusive and is smaller than the thickness of the lower conductor layer. The surface roughness in maximum height of the top surface of the flattening film is smaller than that of the top surface of the substrate and equal to or smaller than the thickness of the dielectric film. The surface roughness in maximum height of the top surface of the lower conductor layer is equal to or smaller than the thickness of the dielectric film.

摘要翻译： 薄膜器件包括：衬底; 由绝缘材料制成并设置在基板上的扁平薄膜; 以及设置在平坦化膜上的电容器。 电容器包括：设置在平坦化膜上的下导体层; 设置在下导体层上的电介质膜; 和设置在电介质膜上的上导体层。 电介质膜的厚度在0.02〜1μm的范围内，小于下导体层的厚度。 平坦化膜的上表面的最大高度的表面粗糙度小于衬底顶表面的表面粗糙度，等于或小于电介质膜的厚度。 下导体层的上表面的最大高度的表面粗糙度等于或小于电介质膜的厚度。

公开(公告)号：US20090139089A1

公开(公告)日：2009-06-04

申请号：US12296151

申请日：2007-04-05

申请人： Masahiro Miyazaki ,  Yasuji Kawamata

发明人： Masahiro Miyazaki ,  Yasuji Kawamata

IPC分类号： B21D39/06 ,  F16L41/00

CPC分类号： B21D39/06 ,  B21D39/20 ,  F16L5/00 ,  F16L23/0283 ,  Y10T29/49375 ,  Y10T29/49938 ,  Y10T403/46

摘要： A method for joining members capable of firmly joining a first member made of a tubular member, such as, e.g., a pipe, to a second member is provided. The following items are prepared: a tubular first member 1 having a polygonal cross-section and a hollow portion 3, a second member 5 having an insertion hole 6 with a cross-sectional shape corresponding to a cross-sectional shape of the first member 1, and a split die 11 circumferentially split into multiple segments at positions corresponding to flat wall portions 1a of the first member 1. Then, the first member 1 is inserted into the insertion hole 6 of the second member 5, and the split die 11 is disposed in the hollow portion 3 of the first member 1. Next, each segment 11a of the split die 11 is moved radially outward of the first member 1 toward each corner 1b of the first member. As a result, an insertion portion 2a of the first member 1 inserted in the insertion hole 6 and both sections 2b and 2b axially adjacent to the insertion portions 2a are expanded to join the first member 1 and the second member 5.

摘要翻译： 提供了一种用于将能够将例如管状的管状构件制成的第一构件牢固地接合到第二构件的构件的接合方法。 准备以下项目：具有多边形横截面的管状第一构件1和中空部分3，具有插入孔6的第二构件5，其具有对应于第一构件1的横截面形状的横截面形状 以及在与第一部件1的平壁部1a对应的位置周向地分割成多个部分的分割模具11.然后，将第一部件1插入到第二部件5的插入孔6中，分割模具11 配置在第一构件1的中空部3中。接着，分割模11的各段11a朝向第一构件的各个角部1b向第一构件1的径向外侧移动。 结果，插入在插入孔6中的第一构件1的插入部分2a和与插入部分2a轴向相邻的两个部分2b和2b被扩大以使第一构件1和第二构件5接合。

公开(公告)号：US07446145B2

公开(公告)日：2008-11-04

申请号：US11196453

申请日：2005-08-04

申请人： Takafumi Hashimoto ,  Chiaki Yoshida ,  Masahiro Miyazaki ,  Kazunori Sugiyama ,  Syuichiro Sugimoto

发明人： Takafumi Hashimoto ,  Chiaki Yoshida ,  Masahiro Miyazaki ,  Kazunori Sugiyama ,  Syuichiro Sugimoto

IPC分类号： C08K5/02 ,  C08K5/01

CPC分类号： D06M15/21 ,  D06M13/02 ,  D06M13/184 ,  D06M15/277 ,  D06M2200/11 ,  D06M2200/12

摘要： To provide a water and oil repellent aqueous composition which is excellent in water and oil repellency, which is less likely to cause an ending phenomenon, which is excellent in stability of a processing bath, which is excellent in storage stability of the composition and which is excellent in foam suppression properties. A water and oil repellent aqueous composition comprising a fluorinated water and oil repellent (A), an emulsified product (B) comprising a paraffin wax (such as a paraffin wax having a melting point of from 50 to 70° C. and a penetration hardness at 25° C. of at most 20) and a carboxyl group-containing polyethylene (such as a carboxyl group-containing polyethylene having a melting point of from 90 to 135° C. and an acid value of from 10 to 30 mgKOH/g), and an organic acid (C).

摘要翻译： 为了提供防水防油性优异的防油斥斥性，其组合物的保存稳定性优异的加工槽的稳定性优异的不太可能引起结束现象， 泡沫抑制性能优异。 包含氟化防水斥油剂（A）的斥水斥水性水性组合物，包含石蜡（例如熔点为50〜70℃的石蜡和渗透硬度 在25℃下为20以下）和含羧基的聚乙烯（例如含有羧基的聚乙烯，其熔点为90〜135℃，酸值为10〜30mgKOH / g ）和有机酸（C）。

公开(公告)号：US07420785B2

公开(公告)日：2008-09-02

申请号：US11054280

申请日：2005-02-10

申请人： Hiroshi Yamazaki ,  Ken Unno ,  Kenichi Tochi ,  Masahiro Miyazaki ,  Shigeru Shoji

发明人： Hiroshi Yamazaki ,  Ken Unno ,  Kenichi Tochi ,  Masahiro Miyazaki ,  Shigeru Shoji

IPC分类号： G11B21/24

CPC分类号： G11B5/56 ,  G11B5/483 ,  G11B5/5552

摘要： A head slider having a thin film magnetic head is mounted on a suspension assembly. The suspension assembly is comprised of a metal plate-like member, and a piezoelectric actuator for displacing the head slider relative to the suspension assembly. The piezoelectric actuator has a piezoelectric film, and a pair of electrode films placed so as to sandwich the piezoelectric film in between. The piezoelectric film and the pair of electrode films are formed in an order of one electrode film, the piezoelectric film, and the other electrode film on the plate-like member.

摘要翻译： 具有薄膜磁头的磁头滑块安装在悬架组件上。 悬架组件由金属板状构件和用于相对于悬架组件移位头滑块的压电致动器构成。 压电致动器具有压电膜和一对电极膜，以将压电膜夹在其间。 压电膜和一对电极膜按板状构件上的一个电极膜，压电膜和另一个电极膜的顺序形成。

公开(公告)号：US20070165359A1

公开(公告)日：2007-07-19

申请号：US11604215

申请日：2006-11-27

申请人： Hajime Kuwajima ,  Masahiro Miyazaki ,  Akira Furuya

发明人： Hajime Kuwajima ,  Masahiro Miyazaki ,  Akira Furuya

IPC分类号： H01G4/005 ,  H01L29/00

CPC分类号： H01G4/33 ,  H01G4/008 ,  H01L28/40

摘要： A thin-film device comprises: a substrate; a flattening film made of an insulating material and disposed on the substrate; and a capacitor provided on the flattening film. The capacitor incorporates: a lower conductor layer; a dielectric film disposed on the lower conductor layer; and an upper conductor layer disposed on the dielectric film. The lower conductor layer incorporates: an electrode film; a first layer formed on the electrode film by electroplating; and a second layer formed on the first layer by PVD or CVD. The grain diameter of a metallic crystal of the second layer is smaller than that of the first layer.

摘要翻译： 薄膜器件包括：衬底; 由绝缘材料制成并设置在基板上的扁平薄膜; 以及设置在平坦化膜上的电容器。 电容器包括：下导体层; 设置在下导体层上的电介质膜; 以及设置在电介质膜上的上导体层。 下导体层包括：电极膜; 通过电镀形成在电极膜上的第一层; 以及通过PVD或CVD形成在第一层上的第二层。 第二层的金属晶体的粒径小于第一层的晶粒直径。

公开(公告)号：US20070109719A1

公开(公告)日：2007-05-17

申请号：US11598073

申请日：2006-11-13

申请人： Hajime Kuwajima ,  Akira Furuya ,  Masahiro Miyazaki ,  Makoto Shibata

发明人： Hajime Kuwajima ,  Akira Furuya ,  Masahiro Miyazaki ,  Makoto Shibata

IPC分类号： H01G4/06

CPC分类号： H01G4/33 ,  H01G4/228 ,  H01G4/40 ,  H01L23/5223 ,  H01L27/016 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

摘要： The invention relates to an electronic component including a capacitor and provides an electronic component in which electromigration can be prevented and whose capacitor element has an accurate capacity value. The electronic component includes a bottom conductor formed on a substrate, a dielectric film formed to cover the bottom conductor, an organic insulation film formed on the dielectric film, and a top conductor formed in an opening provided in the organic insulation film over the bottom conductor, the top conductor forming a capacitor element in combination with the bottom conductor and the dielectric film.

摘要翻译： 本发明涉及包括电容器的电子部件，并且提供可以防止电迁移并且其电容器元件具有精确的容量值的电子部件。 电子部件包括形成在基板上的底部导体，形成为覆盖底部导体的电介质膜，形成在电介质膜上的有机绝缘膜，以及在底部导体上设置在有机绝缘膜中的开口中形成的顶部导体 ，顶部导体与底部导体和电介质膜组合形成电容器元件。