公开(公告)号：US06547842B1

公开(公告)日：2003-04-15

申请号：US09591507

申请日：2000-06-12

申请人： Noristugu Umehara ,  Kazuya Edamura ,  Isao Shibata

发明人： Noristugu Umehara ,  Kazuya Edamura ,  Isao Shibata

IPC分类号： B24B31116

CPC分类号： B24D99/00 ,  B24B1/002 ,  B24B1/005 ,  B24B29/02 ,  B24B31/112 ,  B24B35/005 ,  C09G1/02

摘要： This invention provides a polishing apparatus using a polishing material freely varying its shape in a tri-dimensional space in accordance with the shape of a work, and capable of polishing a narrow, recessed surface inaccessible to human hands or a tool, and a polishing method used therefor.

摘要翻译： 本发明提供了一种使用抛光材料的抛光装置，其可以根据工件的形状在三维空间中自由地改变其形状，并且能够抛光人类手或工具不可接近的狭窄凹陷表面，以及抛光方法 用于此

公开(公告)号：US20020102928A1

公开(公告)日：2002-08-01

申请号：US09775282

申请日：2001-02-01

发明人： William Kordonski ,  Stephen Hogan ,  Jerry Carapella ,  Andrew S. Price

IPC分类号： B24B031/00

CPC分类号： B24B1/005 ,  B24B31/112

摘要： An improved system for magnetorheological finishing of a substrate comprising a vertically oriented bowl-shaped carrier wheel having a horizontal axis. The carrier wheel is preferably an equatorial section of a sphere, such that the carrier surface is spherical. The wheel includes a radial circular plate connected to rotary drive means and supporting the spherical surface which extends laterally from the plate. An electromagnet having planar north and south pole pieces is disposed within the wheel, within the envelope of the sphere and preferably within the envelope of the spherical section defined by the wheel. The magnets extend over a central wheel angle of about 120null such that magnetorheological fluid is maintained in a partially stiffened state ahead of and beyond the work zone. A magnetic scraper removes the MRF from the wheel as the stiffening is relaxed and returns it to a conventional fluid delivery system for conditioning and re-extrusion onto the wheel. The system is useful in finishing large concave substrates, which must extend beyond the edges of the wheel, as well as for finishing very large substrates in a work zone at the bottom dead center position of the wheel.

摘要翻译： 一种用于衬底的磁流变整理的改进系统，包括具有水平轴线的垂直取向的碗状承载轮。 承载轮优选地是球体的赤道部分，使得载体表面是球形的。 轮包括连接到旋转驱动装置的径向圆形板，并且支撑从板横向延伸的球形表面。 具有平面的北极和南极片的电磁体设置在车轮内，在球体的包络内，并且优选地在由车轮限定的球形部分的包络内。 磁体在大约120°的中心轮角度上延伸，使得磁流变流体保持在工作区之前和之外的部分加强状态。 磁力刮刀随着加强松弛而从车轮上移除MRF，并将其返回到常规的流体输送系统，用于调节和重新挤出到车轮上。 该系统可用于整理大型凹形基板，其必须延伸超过车轮的边缘，以及用于在车轮的下死点位置的工作区域中完成非常大的基板。

公开(公告)号：US06332829B1

公开(公告)日：2001-12-25

申请号：US09563918

申请日：2000-05-04

申请人： David Trommer

发明人： David Trommer

IPC分类号： B24B100

CPC分类号： C03C19/00 ,  B24B1/005 ,  B24B13/00 ,  B24B31/112

摘要： A system for polishing a surface including a polishing material and one or more magnetic means in contact with the polishing material. The one or more magnetic means react upon the polishing material to plasticize it, whereby the plasticized material is then used to polish the surface. Preferably the polishing material intermittently and repeatedly contacts with the surface for polishing. A method for polishing a planar surface including bringing two or more magnetic means into contact with a polishing material, thereby plasticizing the polishing material. Then a planar side of the surface contacts the plasticized polishing material, so that the plasticized polishing material polishes the surface. Upon contact with the surface, the plasticized polishing material liquidizes. After termination of the contact with the surface, the liquidized polishing material solidifies. The surface is moved and the above steps are repeated a multiplicity of times until the surface is polished.

摘要翻译： 一种用于抛光包括抛光材料和与抛光材料接触的一个或多个磁性装置的表面的系统。 一个或多个磁性装置对抛光材料进行反应以使其增塑，由此将塑化材料用于抛光表面。 优选地，抛光材料与表面间歇地重复地接触以进行抛光。一种抛光平面的方法，包括使两个或多个磁性装置与抛光材料接触，从而使研磨材料增塑。 然后表面的平面侧接触增塑的抛光材料，使得增塑的抛光材料抛光该表面。 当与表面接触时，塑化的抛光材料液化。 在与表面接触终止后，液化的抛光材料凝固。 表面被移动并且上述步骤重复多次，直到表面被抛光。

公开(公告)号：US5865891A

公开(公告)日：1999-02-02

申请号：US974460

申请日：1997-11-20

申请人： Kung Linliu

发明人： Kung Linliu

IPC分类号： B05D1/00 ,  B05D3/12 ,  B24B31/104 ,  B24B31/112 ,  B24B37/04 ,  H01L21/306 ,  H01L21/3105 ,  H01L21/321 ,  H01L21/768 ,  B05C11/02

CPC分类号： B05D3/12 ,  B05D1/002 ,  B24B31/104 ,  B24B31/112 ,  B24B37/04 ,  H01L21/30625 ,  H01L21/31051 ,  H01L21/31053 ,  H01L21/76819

摘要： The time needed to planarize the surface of an integrated circuit is reduced by causing the planarization liquid to settle in the presence of artificial gravity that supplements natural gravity. A number of different ways to achieve artificial gravity are described. These include centrifuging, magnetic repulsion, vertical pulling by a motor, and providing a pressure differential between the top and bottom sides of the wafer holder.

摘要翻译： 在存在自然重力的人造重力的情况下，通过使平坦化液体沉降来减少平面化集成电路表面所需的时间。 描述了多种实现人造重力的不同方法。 这些包括离心，磁排斥，电动机的垂直拉动，以及在晶片保持器的顶侧和底侧之间提供压力差。

公开(公告)号：US5795212A

公开(公告)日：1998-08-18

申请号：US543426

申请日：1995-10-16

申请人： Stephen David Jacobs ,  William Kordonski ,  Igor Victorovich Prokhorov ,  Donald Golini ,  Gennadii Rafailovich Gorodkin ,  Tvasta David Strafford

发明人： Stephen David Jacobs ,  William Kordonski ,  Igor Victorovich Prokhorov ,  Donald Golini ,  Gennadii Rafailovich Gorodkin ,  Tvasta David Strafford

IPC分类号： B24B1/00 ,  B24B9/14 ,  B24B31/112 ,  H01F1/44

CPC分类号： B24B31/112 ,  B24B1/005 ,  B24B9/14 ,  H01F1/447

摘要： A method and apparatus for finishing a workpiece surface using MR fluid is provided wherein the workpiece is positioned near a carrier surface such that a converging gap is defined between a portion of the workpiece surface and the carrier surface; a magnetic field is applied substantially at said gap; a flow of stiffened MR fluid is introduced into said converging gap such that a work zone is created in the MR fluid to form a sub-aperture transient finishing tool for engaging and causing material removal at the portion of the workpiece surface; and the workpiece or the work zone is moved relative to the other to expose different portions of the workpiece surface to the work zone for predetermined time periods to selectively finish said portions of said workpiece surface to predetermined degrees.

公开(公告)号：US5775976A

公开(公告)日：1998-07-07

申请号：US827158

申请日：1997-03-27

申请人： Gennady Kremen ,  Savva Feigyn ,  Leonid Igelshteyn

发明人： Gennady Kremen ,  Savva Feigyn ,  Leonid Igelshteyn

IPC分类号： B24B1/04 ,  B24B31/112 ,  B24C5/08 ,  B24B1/00 ,  B24C1/00

CPC分类号： B24B31/112 ,  B24B1/04 ,  B24C5/08

摘要： A magnetic-abrasive machining of a part includes generating a magnetic field; introducing a part to be machined into the magnetic field; supplying a magnetic-abrasive powder into a machining zone toward a surface of the part to be machined; and generating a vacuum between the magnetic-abrasive powder and the surface of the part to be machined so that the magnetic-abrasive powder is moved relative to the surface of the part to be machined.

摘要翻译： 部件的磁磨机加工包括产生磁场; 将要加工的零件引入磁场; 向加工区域的表面供给磁性磨料粉末; 并且在所述磁性研磨粉末和所述被加工部件的表面之间产生真空，使得所述磁性研磨粉末相对于所述被加工部件的表面移动。

公开(公告)号：US5714417A

公开(公告)日：1998-02-03

申请号：US703919

申请日：1996-08-22

申请人： Linliu Kung

发明人： Linliu Kung

IPC分类号： B05D1/00 ,  B05D3/12 ,  B24B31/104 ,  B24B31/112 ,  B24B37/04 ,  H01L21/306 ,  H01L21/3105 ,  H01L21/321 ,  H01L21/768 ,  H01L21/4763

CPC分类号： B05D3/12 ,  B05D1/002 ,  B24B31/104 ,  B24B31/112 ,  B24B37/04 ,  H01L21/30625 ,  H01L21/31051 ,  H01L21/31053 ,  H01L21/76819

摘要： The time needed to planarize the surface of an integrated circuit is reduced by causing the planarization liquid to settle in the presence of artificial gravity that supplements natural gravity. A number of different ways to achieve artificial gravity are described. These include centrifuging, magnetic repulsion, vertical pulling by a motor, and providing a pressure differential between the top and bottom sides of the wafer holder.

公开(公告)号：US5616066A

公开(公告)日：1997-04-01

申请号：US603528

申请日：1996-02-21

申请人： Stephen D. Jacobs ,  Igor V. Prokhorov

发明人： Stephen D. Jacobs ,  Igor V. Prokhorov

IPC分类号： B24B1/00 ,  B24B9/14 ,  B24B31/112 ,  H01F1/44

CPC分类号： B24B31/112 ,  B24B1/005 ,  B24B9/14 ,  H01F1/447

摘要： Method and apparatus using magnetorheological fluid for finishing a non-image-forming edge of an optical element to a very high degree of smoothness and for removing microscopic fissures from such edges, the method comprising positioning an optical element near a continuous carrier surface such that a converging gap is defined between an edge of the optical element and the carrier surface, the element being disposed such that image-forming refractive and reflective surfaces thereof do not create a gap with the carrier surface; applying a magnetic field substantially at the gap; introducing a magnetorheological fluid onto the carrier surface; driving the magnetorheological fluid through the gap to cause a flow of magnetic field-stiffened magnetorheological fluid through this gap to create a work zone and to form a transient finishing tool for removing material from the edge of the optical element; and moving the optical element relative to the work zone to expose different portions of the edge to the fluid for predetermined time periods to finish the edge to a predetermined degree. The lateral extent of fluid may be broad enough to permit polishing of a plurality of optical elements simultaneously on a single carrier surface, or a plurality of finishing stations may be ganged to finish a plurality of optical elements on a plurality of carrier surfaces.

摘要翻译： 使用磁流变流体来完成光学元件的非图像形成边缘的方法和装置具有非常高的平滑度并且用于从这些边缘去除微小的裂缝，该方法包括将光学元件定位在连续的载体表面附近，使得 在所述光学元件的边缘和所述载体表面之间限定会聚间隙，所述元件被设置成使得其图像形成折射和反射表面不与所述载体表面产生间隙; 施加基本上在间隙处的磁场; 将磁流变流体引入到载体表面上; 通过间隙驱动磁流变流体，以使磁场加强的磁流变流体流过该间隙，以产生工作区域并形成用于从光学元件的边缘移除材料的瞬时精加工工具; 并且相对于工作区域移动光学元件以将边缘的不同部分暴露于流体预定的时间段以将边缘完成预定的程度。 流体的横向范围可以足够宽以允许在单个载体表面上同时抛光多个光学元件，或者可以组合多个精加工站以在多个载体表面上完成多个光学元件。

公开(公告)号：US4947587A

公开(公告)日：1990-08-14

申请号：US294487

申请日：1988-10-14

申请人： Jury V. Lipukhin ,  Leonid I. Danilov ,  Anatoly N. Subbotin ,  Eduard A. Garber ,  Viktor I. Abramenko

发明人： Jury V. Lipukhin ,  Leonid I. Danilov ,  Anatoly N. Subbotin ,  Eduard A. Garber ,  Viktor I. Abramenko

IPC分类号： B21B45/06 ,  B24B31/112 ,  B24B31/12 ,  E05B63/12

CPC分类号： E05B63/123 ,  B21B45/06 ,  B24B31/112 ,  B24B31/12

摘要： The proposed chamber relates to sheet rolling in metallurgy. The chamber has two halves with a structure for closing, sealing, and opening the halves, and departing one half from the abutment plane, and includes two mechanisms for compacting the abrasive powder. The structure for closing, sealing, and opening the two halves along the abutment plane includes a ring having two cams divided by a slot. The ring sits in annular recesses separated by a slot and arranged on a support of the shaft of the mechanism for compacting the abrasive powder.

摘要翻译： PCT No.PCT / SU88 / 00037 Sec。 371日期：1988年10月14日 102（e）日期1988年10月14日PCT提交1988年2月17日PCT公布。 出版物WO88 / 06065 日期1988年8月25日。提出的房间涉及冶金轧制。 该腔室具有两个半部，其结构用于封闭，密封和打开半部分，并离开邻接平面的一半，并且包括两个用于压实磨料粉末的机构。 用于关闭，密封和沿着邻接平面打开两个半部的结构包括具有由狭槽分开的两个凸轮的环。 环位于由槽间隔开的环形凹部中，并布置在用于压实磨料粉末的机构的轴的支撑件上。

公开(公告)号：US4918960A

公开(公告)日：1990-04-24

申请号：US271951

申请日：1988-09-21

申请人： Jury V. Lipukhim ,  Leonid I. Danilov ,  Eduard A. Garber ,  Anatoly N. Subbotin

发明人： Jury V. Lipukhim ,  Leonid I. Danilov ,  Eduard A. Garber ,  Anatoly N. Subbotin

IPC分类号： B21B45/06 ,  B24B31/112

CPC分类号： B24B31/112 ,  B21B45/06

摘要： A method relates to the metallurgical industry. The claimed method includes stretching of the strip (1) flat in a horizontal position through the cleaning zone with abrasive ferromagnetic powder (6), in so doing, the strip is stretched first in one direction, then in the opposite, direction, enclosing the cleaning zone between the upper (2) and lower (3) branches formed on the strip (1).

摘要翻译： PCT No.PCT / SU88 / 00012 Sec。 371日期：1988年9月21日 102（e）1988年9月21日PCT PCT 1月15日PCT PCT。 出版物WO88 / 05348 日期：1988年7月28日。一种涉及冶金工业的方法。 所要求保护的方法包括在研磨铁磁性粉末（6）上通过清洁区域在水平位置上平坦地拉伸条带（1），这样做，首先在一个方向上拉伸条带，然后在相反的方向上包围条带 在条带（1）上形成的上部（2）和下部（3）分支之间的清洁区域。