Method of dry etching, dry etching gas and process for producing perfluoro-2-pentyne
    41.
    发明申请
    Method of dry etching, dry etching gas and process for producing perfluoro-2-pentyne 审中-公开
    干蚀刻方法,干蚀刻气体及全氟-2-戊炔的制造方法

    公开(公告)号:US20050247670A1

    公开(公告)日:2005-11-10

    申请号:US10520272

    申请日:2003-07-16

    摘要: A dry etching method wherein a resist film is irradiated with radiation having a wavelength of not more than 195 nm to form a resist pattern having a minimum line width of not more than 200 nm, and the substrate having the resist pattern formed thereon is subjected to dry etching using a fluorine-containing compound having 4 to 6 carbon atoms and at least one unsaturated bond as an etching gas. As the fluorine-containing compound, perfuloro-2-pentyne, perfuloro-2-butyne, nonafluoro-2-pentene and perfluoro-2-pentene are preferably used. Perfuloro-2-pentyne is produced by a process wherein a 1,1,1-trihalo-2,2,2-trifluoroethane is allowed to react with pentafluoropropionaldehyde to give a 2-halo-1,1,1,4,4,5,5,5-octafluoro-2-pentene, and the thus-produced halo-octafluoro-2-pentene is dehydrohalogenated.

    摘要翻译: 一种干蚀刻方法,其中用波长不大于195nm的辐射照射抗蚀剂膜以形成最小线宽不大于200nm的抗蚀剂图案,并且将其上形成有抗蚀剂图案的基板经受 使用具有4-6个碳原子的含氟化合物和至少一个不饱和键作为蚀刻气体进行干蚀刻。 作为含氟化合物,优选使用perfuloro-2-pentyne,peroforo-2-butyne,nonafluoro-2-pentene和perfluoro-2-pentene。 通过使1,1,1-三卤代-2,2,2-三氟乙烷与五氟丙醛反应得到2-卤代-1,1,1,4,4, 5,5,5-八氟-2-戊烯,由此制备的卤代 - 八氟-2-戊烯脱卤化氢。

    2,7-aryl-9-substituted fluorenes and 9-substituted fluorene oligomers and polymers
    43.
    发明授权
    2,7-aryl-9-substituted fluorenes and 9-substituted fluorene oligomers and polymers 失效
    2,7-芳基-9-取代的芴和9-取代的芴低聚物和聚合物

    公开(公告)号:US06593450B2

    公开(公告)日:2003-07-15

    申请号:US09755507

    申请日:2001-01-05

    IPC分类号: C08G6100

    摘要: The invention relates to 2,7-substituted-9-substituted fluorenes and 9-substituted fluorene oligomers and polymers. The fluorenes, oligomers and polymers are substituted at the 9-position with two hydrocarbyl moieties which may optionally contain one or more of sulfur, nitrogen, oxygen, phosphorous or silicon heteroatoms; a C5-20 ring structure formed with the 9-carbon on the fluorene ring or a C4-20 ring structure formed with the 9-carbon containing one or more heteroatoms of sulfur, nitrogen or oxygen; or a hydrocarbylidene moiety. In one embodiment, the fluorenes are substituted at the 2- and 7-positions with aryl moieties which may further be substituted with moieties which are capable of crosslinking or chain extension or a trialkylsiloxy moiety. The fluorene polymers and oligomers may be substituted at the 2- and 7′-positions. The monomer units of the fluorene oligomers and polymers are bound to one another at the 2- and 7′-positions. The 2,7′-aryl-9-substituted fluorene oligomers and polymers may be further reacted with one another to form higher molecular weight polymers by causing the optional moieties on the terminal 2,7′-aryl moieties, which are capable of crosslinking or chain extension, to undergo chain extension or crosslinking. Also disclosed are processes for preparing the disclosed compounds.

    摘要翻译: 本发明涉及2,7-取代的9-取代的芴和9-取代的芴低聚物和聚合物。 芴,低聚物和聚合物在9位被两个烃基部分取代,该烃基部分可任选地含有一个或多个硫,氮,氧,磷或硅杂原子; 由芴环上的9-碳形成的C5-20环结构或由含有一个或多个硫,氮或氧杂原子的9-碳形成的C 4-20环结构; 或亚烃基部分。 在一个实施方案中,芴在2-和7-位被芳基部分取代,芳基部分可进一步被能够交联或延伸的部分或三烷基甲硅烷氧基部分取代。 芴聚合物和低聚物可以在2-和7-位取代。 芴低聚物和聚合物的单体单元在2和7'位置彼此结合。 2,7'-芳基-9-取代的芴低聚物和聚合物可以进一步彼此反应以通过在端基2,7'-芳基部分上引入任选的部分来形成较高分子量的聚合物,其能够交联或 链延伸,进行链延长或交联。 还公开了制备所公开的化合物的方法。

    Naphthalene derivative and liquid crystal composition comprising the same
    45.
    发明授权
    Naphthalene derivative and liquid crystal composition comprising the same 有权
    萘衍生物和包含它们的液晶组合物

    公开(公告)号:US06468607B1

    公开(公告)日:2002-10-22

    申请号:US09296550

    申请日:1999-04-22

    IPC分类号: C09K1932

    摘要: Disclosed is a novel liquid-crystalline compound which is a naphthalene derivative useful as an electro-optical liquid crystal display material, a liquid crystal composition containing such naphthalene derivatives and a liquid crystal display device comprising the same. The naphthalene derivative provided by the present invention exhibits an excellent liquid-crystallinity and miscibility with currently widely used liquid crystal compositions or compositions. The addition of the naphthalene derivative makes it possible to drastically lower the threshold voltage of the liquid crystal composition while maintaining its high response. The naphthalene derivative of the present invention is characterized by a large birefringence index. Further, most of the naphthalene derivative of the present invention has no strongly polar group in its molecule and thus can also be used for active matrix driving. Moreover, as shown in the foregoing examples, the naphthalene derivative of the present invention can be easily produced and is colorless and chemically stable. Accordingly, the liquid crystal composition comprising the naphthalene derivative of the present invention is extremely useful as a practical liquid crystal composition, particularly a liquid crystal composition which can operate within a wide temperature range and requires a high speed response and a low voltage driving.

    摘要翻译: 公开了一种新颖的液晶化合物,它是一种可用作电光液晶显示材料的萘衍生物,含有该衍生物的液晶组合物和包含该衍生物的液晶显示装置。 由本发明提供的萘衍生物与当前广泛使用的液晶组合物或组合物显示出优异的液晶性和混溶性。 通过加入萘衍生物可以使液晶组合物的阈值电压大大降低,同时保持其高响应性。 本发明的萘衍生物的特征在于双折射率大。 此外,本发明的大多数萘衍生物在其分子中没有强极性基团,因此也可用于有源矩阵驱动。 此外,如前述实施例所示,本发明的萘衍生物可以容易地制备,并且是无色和化学稳定的。 因此,含有本发明的萘衍生物的液晶组合物作为实用的液晶组合物,特别是能够在宽温度范围内工作并需要高速响应和低电压驱动的液晶组合物是非常有用的。

    2,7-aryl-9-substituted fluorenes and 9-substituted fluorene oligomers and polymers
    46.
    发明申请
    2,7-aryl-9-substituted fluorenes and 9-substituted fluorene oligomers and polymers 失效
    2,7-芳基-9-取代的芴和9-取代的芴低聚物和聚合物

    公开(公告)号:US20010053842A1

    公开(公告)日:2001-12-20

    申请号:US09755507

    申请日:2001-01-05

    摘要: The invention relates to 2,7-substituted-9-substituted fluorenes and 9-substituted fluorene oligomers and polymers. The fluorenes, oligomers and polymers are substituted at the 9-position with two hydrocarbyl moieties which may optionally contain one or more of sulfur, nitrogen, oxygen, phosphorous or silicon heteroatoms; a C5-20 ring structure formed with the 9-carbon on the fluorene ring or a C4-20 ring structure formed with the 9-carbon containing one or more heteroatoms of sulfur, nitrogen or oxygen; or a hydrocarbylidene moiety. In one embodiment, the fluorenes are substituted at the 2- and 7-positions with aryl moieties which may further be substituted with moieties which are capable of crosslinking or chain extension or a trialkylsiloxy moiety. The fluorene polymers and oligomers may be substituted at the 2- and 7null-positions. The monomer units of the fluorene oligomers and polymers are bound to one another at the 2- and 7null-positions. The 2,7null-aryl-9-substituted fluorene oligomers and polymers may be further reacted with one another to form higher molecular weight polymers by causing the optional moieties on the terminal 2,7null-aryl moieties, which are capable of crosslinking or chain extension, to undergo chain extension or crosslinking. Also disclosed are processes for preparing the disclosed compounds.

    摘要翻译: 本发明涉及2,7-取代的9-取代的芴和9-取代的芴低聚物和聚合物。 芴,低聚物和聚合物在9位被两个烃基部分取代,该烃基部分可任选地含有一个或多个硫,氮,氧,磷或硅杂原子; 由芴环上的9-碳形成的C5-20环结构或由含有一个或多个硫,氮或氧杂原子的9-碳形成的C 4-20环结构; 或亚烃基部分。 在一个实施方案中,芴在2-和7-位被芳基部分取代,芳基部分可进一步被能够交联或延伸的部分或三烷基甲硅烷氧基部分取代。 芴聚合物和低聚物可以在2-和7-位取代。 芴低聚物和聚合物的单体单元在2和7'位置彼此结合。 2,7'-芳基-9-取代的芴低聚物和聚合物可以进一步彼此反应以通过在端基2,7'-芳基部分上引入任选的部分来形成较高分子量的聚合物,其能够交联或 链延伸,进行链延长或交联。 还公开了制备所公开的化合物的方法。

    Substituted 1,1,1-triaryl-2,2,2-trifluoroethanes and processes for their
synthesis
    49.
    发明授权
    Substituted 1,1,1-triaryl-2,2,2-trifluoroethanes and processes for their synthesis 失效
    取代的1,1,1-三芳基-2,2,2-三氟乙烷及其合成方法

    公开(公告)号:US4912238A

    公开(公告)日:1990-03-27

    申请号:US292049

    申请日:1988-12-30

    摘要: Synthetic procedures to tetraalkyls, tetraacids and dianhydrides substituted 1,1,1-triaryl-2,2,2-trifluoroethanes which comprises: (1) 1,1-bis(dialkylaryl)-1-aryl-2,2,2-trifluoroethane, (2) 1,1-bis(dicarboxyaryl)-1-aryl-2,2,2-trifluoroethane or (3) cyclic dianhydride or diamine of 1,1-bis(dialkylaryl)-1-aryl-2,2,2-trifluoroethanes. The synthesis of (1) is accomplished by the condensation reaction of an aryltrifluoromethyl ketone with a dialkylaryl compound. The synthesis of (2) is accomplished by oxidation of (1). The synthesis dianhydride of (3) is accomplished by the conversion of (2) to its corresponding cyclic dianhydride. The synthesis of the diamine is accomplished by the similar reaction of an aryltrifluoromethyl ketone with aniline or alkyl substituted or disubstituted anilines. Also, other derivatives of the above are formed by nucleophilic displacement reactions.

    摘要翻译: 四烷基,四酸和二酐的合成方法取代1,1,1-三芳基-2,2,2-三氟乙烷,其包括:(1)1,1-双(二烷基芳基)-1-芳基-2,2,2-三氟乙烷 ,(2)1,1-双(二羧基芳基)-1-芳基-2,2,2-三氟乙烷或(3)1,1-双(二烷基芳基)-1-芳基-2,2,2-三氟乙烷的环状二酐或二胺, 2-三氟乙烷。 (1)的合成通过芳基三氟甲基酮与二烷基芳基化合物的缩合反应来实现。 (2)的合成通过(1)的氧化实现。 (3)的合成二酐通过(2)转化成其相应的环状二酐来实现。 二胺的合成通过芳基三氟甲基酮与苯胺或烷基取代或二取代的苯胺的类似反应来实现。 此外,上述的其它衍生物通过亲核取代反应形成。

    Substituted 1,1,1-triaryl-2,2,2-trifluoroethanes and processes for their
synthesis
    50.
    发明授权
    Substituted 1,1,1-triaryl-2,2,2-trifluoroethanes and processes for their synthesis 失效
    取代的1,1,1-三芳基-2,2,2-三氟乙烷及其合成方法

    公开(公告)号:US4885116A

    公开(公告)日:1989-12-05

    申请号:US159071

    申请日:1988-02-23

    摘要: Synthetic procedures to tetraalkyls, tetraacids and dianhydrides substituted 1,1,1-triaryl-2,2,2-trifluoroethanes which comprises: (1) 1,1-bis(dialkylaryl)-1-aryl-2,2,2-trifluoroethane, (2) 1,1-bis(dicarboxyaryl)-1-aryl-2,2,2-trifluoroethane or (3) cyclic dianhydride or diamine of 1,1-bis(dialkylaryl)-1-aryl-2,2,2-trifluoroethanes. The synthesis of (1) is accomplished by the condensation reaction of an aryltrifluoromethyl ketone with a dialkylaryl compound. The synthesis of (2) is accomplished by oxidation of (1). The synthesis dianhydride of (3) is accomplished by the conversion of (2) to its corresponding cyclic dianhydride. The synthesis of the diamine is accomplished by the similar reaction of an aryltrifluoromethyl ketone with aniline or alkyl substituted or disubstituted anilines. Also, other derivatives of the above are formed by nucleophilic displacement reactions.

    摘要翻译: 四烷基,四酸和二酐的合成方法取代1,1,1-三芳基-2,2,2-三氟乙烷,其包括:(1)1,1-双(二烷基芳基)-1-芳基-2,2,2-三氟乙烷 ,(2)1,1-双(二羧基芳基)-1-芳基-2,2,2-三氟乙烷或(3)1,1-双(二烷基芳基)-1-芳基-2,2,2-三氟乙烷的环状二酐或二胺, 2-三氟乙烷。 (1)的合成通过芳基三氟甲基酮与二烷基芳基化合物的缩合反应来实现。 (2)的合成通过(1)的氧化实现。 (3)的合成二酐通过(2)转化成其相应的环状二酐来实现。 二胺的合成通过芳基三氟甲基酮与苯胺或烷基取代或二取代的苯胺的类似反应来实现。 此外,上述的其它衍生物通过亲核取代反应形成。