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公开(公告)号：US5635791A
公开(公告)日：1997-06-03
申请号：US518829
申请日：1995-08-24
Applicant: Kenneth G. Vickers
Inventor： Kenneth G. Vickers
CPC classification number: H01J3/022 , H01J2201/30403 , H01J2201/319 , H01J2329/00
Abstract: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (122) spaced by an insulating layer (25) from a cathode electrode including a conductive mesh (118). Circular arrays (112) of microtips (14) are located concentrically within circular mesh spacings (116) on a resistive layer (15), within apertures (26) formed in extraction electrode (122). Microtips (14) are laterally spaced from mesh structure (118) by substantially identical paths of a ballast-providing resistive layer (15), placing all microtips (14) at generally the same potential.
Abstract translation: 用于FED图像显示器的电子发射器板（110）具有从包括导电网（118）的阴极电极与绝缘层（25）间隔开的提取（栅极）电极（122）。 微尖端（14）的圆形阵列（112）同心地位于电阻层（15）的圆形网格间隔（116）内，形成在引出电极（122）中的孔（26）内。 微型插座（14）通过基本相同的镇流器提供电阻层（15）的路径与网格结构（118）横向隔开，将所有微型插头（14）放置在大致相同的电位。
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公开(公告)号：US5631519A
公开(公告)日：1997-05-20
申请号：US509057
申请日：1995-07-31
Applicant: Jong-min Kim
Inventor： Jong-min Kim
Abstract: A field emission device has a rear substrate (11), a titanium or aluminum adhesive layer (12) and disposed on the substrate (11), a tungsten cathode (13) disposed on the adhesive layer (12), a micro-tip (13') protruding from the cathode (13), a titanium or aluminum mask layer (14) disposed on the cathode (13), and a metal pattern (15) formed on the mask layer (14) for supporting the cathode (13). The micro-tip (13') is formed by the simultaneous etching of the tungsten cathode (13), the adhesive layer (12), and the mask layer (14') resulting in a large internal stress in the micro-tip (13'). The residual internal stress in the micro-tip (13') results in the micro-tip (13') curving away from the substrate (11) which, consequently, facilitates electron emission.
Abstract translation: 场发射器件具有后衬底（11），钛或铝粘合剂层（12）并设置在衬底（11）上，设置在粘合剂层（12）上的钨阴极（13），微尖端 13），设置在阴极（13）上的钛或铝掩模层（14）和形成在用于支撑阴极（13）的掩模层（14）上的金属图案（15） 。 微尖端（13'）通过钨阴极（13），粘合剂层（12）和掩模层（14'）的同时蚀刻而形成，从而在微尖端（13）中产生大的内应力 '）。 微尖端（13'）中的残余内部应力导致微尖端（13'）远离衬底（11）弯曲，因此有助于电子发射。
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553.发明授权Lateral field emission devices for display elements and methods of fabrication 失效用于显示元件的横向场致发射器件和制造方法
公开(公告)号：US5629580A
公开(公告)日：1997-05-13
申请号：US331307
申请日：1994-10-28
Applicant: Jack A. Mandelman , Michael D. Potter
Inventor： Jack A. Mandelman , Michael D. Potter
CPC classification number: H01J3/022 , H01J2201/30423
Abstract: Lateral field emission devices ("FEDs") for display elements and methods of fabrication are set forth. The FED includes a thin-film emitter oriented parallel to, and disposed above, a substrate. The FED further includes a columnar shaped anode having a first lateral surface. A phosphor layer is disposed adjacent to the first lateral surface. Specifically, the anode is oriented such that the lateral surface and adjacent phosphor layer are perpendicular to the substrate. The emitter has a tip which is spaced less than the mean free distance of an electron in air from the phosphor layer. Operationally, when a voltage potential is applied between said anode and said emitter, electrons are emitted from the tip of the emitter into the phosphor layer causing the phosphor layer to emit electromagnetic energy. Further specific details of the field emission device, fabrication method, method of operation, and associated display are set forth.
Abstract translation: 阐述了用于显示元件和制造方法的侧面场致发射器件（“FED”）。 FED包括平行于并设置在基板上方的薄膜发射极。 FED还包括具有第一侧表面的柱状阳极。 磷光体层邻近第一侧面设置。 具体地，阳极被定向成使得侧表面和相邻磷光体层垂直于衬底。 发射器具有一个尖端，该尖端的距离小于空气中的电子与荧光体层的平均自由距离。 在工作上，当在所述阳极和所述发射极之间施加电压电位时，电子从发射极的尖端发射到荧光体层中，从而使荧光层发射电磁能。 阐述了场致发射装置，制造方法，操作方法和相关显示器的进一步具体细节。
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公开(公告)号：US5628663A
公开(公告)日：1997-05-13
申请号：US524171
申请日：1995-09-06
Applicant: Michael D. Potter
Inventor： Michael D. Potter
Abstract: An improved high-frequency field-emission microelectronic device (10) has a substrate (20) and an ultra-thin emitter electrode (30) extending parallel to the substrate and having an electron-emitting lateral edge (110) facing an anode (40) across an emitter-to-anode gap (120). A control electrode (70), having a lateral dimension only a minor fraction of the emitter-to-anode gap width, is disposed parallel to the emitter and spaced apart from the emitter by an insulator (60) of predetermined thickness. A vertical dimension of the control electrode is only a minor fraction of the height of the anode. The control electrode may substantially surround a portion of the anode, spaced from the anode in concentric relationship. Inter-electrode capacitance between the emitter and the control electrode has only an extremely small value, consisting of only a very small area term and a very small fringing-field term, thus allowing operation of the microelectronic device at higher frequencies or switching speeds than heretofore. Inter-electrode capacitance between the control electrode and the anode also has only an extremely small value, thus improving higher frequency performance further. Devices having a plurality of control electrodes may also be made with improved inter-electrode capacitance. In order to consistently realize improved performance, a fabrication process (S1-S18) is specially adapted for manufacturing the device with small and precise dimensions and suitably precise alignment. The specially adapted process uses two sacrificial materials (150 and 160), one of which forms a temporary mandrel, and uses a conformal conductive layer to form each control electrode while automatically achieving the required alignment precision.
Abstract translation: 改进的高频场致发射微电子器件（10）具有基板（20）和平行于基板延伸并且具有面向阳极（40）的电子发射侧向边缘（110）的超薄发射极电极（30） ）跨越发射极到阳极间隙（120）。 具有横向尺寸仅为发射极 - 阳极间隙宽度的一小部分的控制电极（70）平行于发射器设置，并且通过预定厚度的绝缘体（60）与发射器间隔开。 控制电极的垂直尺寸只是阳极高度的一小部分。 控制电极可以基本上围绕阳极的一部分，与阳极以同心的方式间隔开。 发射极和控制电极之间的电极间电容仅具有非常小的值，仅由非常小的面积项和非常小的边缘场项构成，从而允许微电子器件在比以前更高的频率或开关速度下运行 。 控制电极和阳极之间的电极间电容也只有非常小的值，从而进一步提高了更高的频率性能。 具有多个控制电极的器件也可以具有改善的电极间电容。 为了始终如一地实现改进的性能，制造工艺（S1-S18）特别适用于制造具有小而精确尺寸和适当精确对准的装置。 特别适用的工艺使用两种牺牲材料（150和160），其中一种形成临时芯棒，并使用共形导电层形成每个控制电极，同时自动实现所需的对准精度。
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公开(公告)号：US5619097A
公开(公告)日：1997-04-08
申请号：US461498
申请日：1995-06-05
Applicant: Gary W. Jones
Inventor： Gary W. Jones
IPC: G02B27/22 , G09G3/00 , H01J1/304 , H01J3/02 , H01J7/18 , H01J9/02 , H01J9/24 , H01J29/02 , H01J29/82 , H01J29/87 , H01J29/94 , H01J31/12 , H04N5/70 , H04N5/74 , H01J63/04
CPC classification number: H01J31/127 , G02B27/2235 , G09G3/001 , H01J29/028 , H01J29/82 , H01J29/94 , H01J3/022 , H01J9/025 , H01J2201/30426 , H01J2201/30457 , H01J2201/319 , H01J2209/385 , H01J2329/8625 , H01J2329/864 , H01J2329/8645 , H04N5/70 , H04N5/7491
Abstract: A vertical field emitter structure and field emission device such as a flat panel display utilizing such structure. Self-aligned gate and emitter fabrication is described, together with virtual column field emitter structures, comprising an emitter or gated emitter with conductive columns connecting the emitter to an underlying resistor or conductor structure formed by chemical or other modification of portions of an underlying layer. The display of the invention utilizes field emission structures with low turn-voltages and high accelerating voltages, thereby permitting high brightness, small pixel size, low manufacturing costs, uniform brightness, and high energy efficiency to be achieved.
Abstract translation: 垂直场致发射体结构和场致发射器件，例如利用这种结构的平板显示器。 描述了自对准栅极和发射极制造以及虚拟列场发射器结构，其包括发射极或门控发射极，导电柱将发射极连接到通过下层的部分的化学或其它修饰而形成的下伏电阻或导体结构。 本发明的显示器利用具有低匝数和高加速电压的场发射结构，从而可以实现高亮度，小像素尺寸，低制造成本，均匀亮度和高能量效率。
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Patent Agency Ranking
公开(公告)号：US5589728A
公开(公告)日：1996-12-31
申请号：US453043
申请日：1995-05-30
Applicant: Jules D. Levine , Chi-Cheong Shen , Robert Taylor
Inventor： Jules D. Levine , Chi-Cheong Shen , Robert Taylor
Abstract: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by a dielectric insulating spacer (125) from a cathode electrode including a conductive mesh (18). Arrays (12) of microtips (14) are located in mesh spacings (16), within apertures (26) formed in clusters (23) in extraction electrode (22). Microtips (14) are deposited through the apertures (26). Apertures (26) are arranged in regular, periodic arrays (23, 23', 123, 123') defining lattices having occupied apertured positions and internal unapertured vacancy positions (150, 150'). The insulating spacer (125) is etched to undercut electrode (22) to connect apertured lattice positions, forming a common cavity (141) for microtips (14) within each mesh spacing (16), and leaving central posts (143) at the unapertured vacancies (150, 150'). The etch-out reduces the dielectric constant factor of gate-to-cathode capacitance in the finished structure. Placing posts at vacancy positions enables gate support over the cavity without sacrificing high microtip density.
Abstract translation: 用于FED图像显示器的电子发射器板（110）具有从包括导电网（18）的阴极电极与电介质绝缘间隔物（125）间隔开的提取（栅极）电极（22）。 小尖头（14）的阵列（12）位于提取电极（22）中形成为簇（23）的孔（26）内的网格间隔（16）中。 微尖头（14）通过孔（26）沉积。 孔径（26）以规则的周期性阵列（23,23'，123,123'）布置，限定具有占据有孔位置和内部未孔隙位置（150,150'）的格子。 将绝缘间隔物（125）蚀刻到底切电极（22）以连接有孔的晶格位置，在每个网格间隔（16）内形成用于微尖端（14）的公共腔（141），并将中心柱（143）留在未孔 空缺（150,150'）。 蚀刻减少了成品结构中栅极至阴极电容的介电常数因子。 将岗位放置在空缺位置，可以在空腔上实现门支撑，而不会牺牲高的微螺纹密度。
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公开(公告)号：US5587628A
公开(公告)日：1996-12-24
申请号：US426357
申请日：1995-04-21
Applicant: Huei-Pei Kuo
Inventor： Huei-Pei Kuo
CPC classification number: H01J3/022 , H01J2201/30423 , H01J2201/319
Abstract: A field emission device including a substrate, an emitter layer, a spacer layer and a gate layer. In one preferred embodiment, the emitter layer is made of a resistive material, and has a side end that has an edge. The spacer layer is on and over only a portion of the emitter layer to expose the edge. The gate layer, on the spacer layer, also has a side end that is tapered to form a wedge with an edge. In one application, the device is used in a flat panel display, with a screen. The screen is at a selected positive voltage and is positioned above the gate layer. When a selected potential difference is applied between the emitter layer and the gate layer, an electron-extraction field is established between the edge of the gate layer and the edge of the emitter layer to extract electrons from the edge of the emitter layer. Then, the electrons are attracted to the screen. The wedge reduces the amount of electrons collected at the gate and increases the efficiency of the device. The resistive nature of the emitter layer enhances the uniformity of the electrons emitted along the edge of the emitter layer.
Abstract translation: 一种场发射器件，包括衬底，发射极层，间隔层和栅极层。 在一个优选实施例中，发射极层由电阻材料制成，并具有具有边缘的侧端。 间隔层仅在发射极层的一部分上并暴露出边缘。 间隔层上的栅极层也具有锥形的侧端，以形成具有边缘的楔形物。 在一个应用中，该设备用于具有屏幕的平板显示器中。 屏幕处于选定的正电压并且位于栅极层上方。 当在发射极层和栅极层之间施加选择的电位差时，在栅极层的边缘和发射极层的边缘之间建立电子提取场，以从发射极层的边缘提取电子。 然后，电子被吸引到屏幕上。 楔形物减少了在栅极处收集的电子的量，并提高了器件的效率。 发射极层的电阻性质增强沿发射极层边缘发射的电子的均匀性。
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公开(公告)号：US5587623A
公开(公告)日：1996-12-24
申请号：US627922
申请日：1996-04-03
Applicant: Gary W. Jones
Inventor： Gary W. Jones
IPC: G02B27/22 , G09G3/00 , H01J1/304 , H01J3/02 , H01J7/18 , H01J9/02 , H01J9/24 , H01J29/02 , H01J29/82 , H01J29/87 , H01J29/94 , H01J31/12 , H04N5/70 , H04N5/74 , H01J19/24
CPC classification number: H01J31/127 , G02B27/2235 , G09G3/001 , H01J29/028 , H01J29/82 , H01J29/94 , H01J3/022 , H01J9/025 , H01J2201/30426 , H01J2201/30457 , H01J2201/319 , H01J2209/385 , H01J2329/8625 , H01J2329/864 , H01J2329/8645 , H04N5/70 , H04N5/7491
Abstract: A vertical field emitter structure and field emission device such as a flat panel display utilizing such structure. Self-aligned gate and emitter fabrication is described, together with virtual column field emitter structures, comprising an emitter or gated emitter with conductive columns connecting the emitter to an underlying resistor or conductor structure formed by chemical or other modification of portions of an underlying layer. The display of the invention utilizes field emission structures with low turn-voltages and high accelerating voltages, thereby permitting high brightness, small pixel size, low manufacturing costs, uniform brightness, and high energy efficiency to be achieved.
Abstract translation: 垂直场致发射体结构和场致发射器件，例如利用这种结构的平板显示器。 描述了自对准栅极和发射极制造以及虚拟列场发射器结构，其包括发射极或门控发射极，导电柱将发射极连接到通过下层的部分的化学或其它修饰而形成的下伏电阻或导体结构。 本发明的显示器利用具有低匝数和高加速电压的场发射结构，从而可以实现高亮度，小像素尺寸，低制造成本，均匀亮度和高能量效率。
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公开(公告)号：US5578901A
公开(公告)日：1996-11-26
申请号：US387539
申请日：1995-02-13
Applicant: Graciela B. Blanchet-Fincher , Don M. Coates , David J. Devlin , David F. Eaton , Aris K. Silzars , Steven M. Valone
Inventor： Graciela B. Blanchet-Fincher , Don M. Coates , David J. Devlin , David F. Eaton , Aris K. Silzars , Steven M. Valone
CPC classification number: H01J1/304 , H01J2201/30457
Abstract: A field emission electron emitter comprising an electrode formed of at least one diamond, diamond-like carbon or glassy carbon composite fiber, said composite fiber having a non-diamond core and a diamond, diamond-like carbon or glassy carbon coating on said non-diamond core, and electronic devices employing such a field emission electron emitter.
Abstract translation: 一种场发射电子发射器，包括由至少一种金刚石，类金刚石碳或玻璃碳复合纤维形成的电极，所述复合纤维在所述非金刚石芯上具有金刚石，类金刚石碳或玻璃碳涂层， 金刚石芯和采用这种场发射电子发射体的电子器件。
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公开(公告)号：US5578225A
公开(公告)日：1996-11-26
申请号：US374900
申请日：1995-01-19
Applicant: Ho-Ching Chien
Inventor： Ho-Ching Chien
CPC classification number: H01J3/022 , H01J1/3042 , H01J31/127
Abstract: A field emission display that may be viewed through the back plate, thus providing increased luminous efficiency, and methods for making such a display, are described. A glass substrate is provided as a base for the display faceplate. There is a reflective, conductive layer over the glass substrate. A phosphor layer is formed over the reflective, conductive layer. A second glass substrate acts as a transparent base for the display baseplate, which is mounted opposite and parallel to the faceplate. A first transparent insulating layer is formed over the second glass substrate. There are parallel, transparent cathode electrodes with auxiliary metal electrodes, over the first insulating layer. Parallel, transparent gate electrodes are formed over, separate from, and orthogonally to the parallel, transparent cathode electrodes, and also have auxiliary metal electrodes. A second transparent insulating layer is between the gate electrodes and the cathode electrodes. A plurality of openings extend through the second insulating layer and the gate electrodes. At each opening is a field emission microtip connected to and extending up from a cathode electrode, whereby electrons may be selectively emitted from each microtip to form a display image on the faceplate phosphor layer, which is viewable through the baseplate.
Abstract translation: 描述可以通过背板观看场致发射显示器，从而提供增加的发光效率，以及制造这种显示器的方法。 提供玻璃基板作为显示面板的基座。 玻璃基板上有一层反射导电层。 磷光体层形成在反射导电层上。 第二玻璃基板用作显示基板的透明基座，该底板安装成与面板相对并平行。 在第二玻璃基板上形成第一透明绝缘层。 在第一绝缘层上方具有平行的具有辅助金属电极的透明阴极电极。 平行的，透明的栅电极形成在平行的透明阴极电极的上方，与之分开并且与其垂直，并且还具有辅助金属电极。 第二透明绝缘层位于栅电极和阴极之间。 多个开口延伸穿过第二绝缘层和栅电极。 在每个开口处是连接到阴极电极并从阴极电极向上延伸的场发射微尖端，由此可以从每个微尖端选择性地发射电子，以在面板荧光体层上形成可通过基板观察的显示图像。
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