摘要:
Disclosed are a laser processing apparatus and method that can effectively remove a low-k material formed on a wafer. A laser processing apparatus of the invention is a laser processing apparatus that processes a subject on which a low-k material is formed. The laser processing apparatus includes a laser generating unit that emits a laser beam; and an optical system that splits the laser beam emitted from the laser generating unit into two and irradiates the split laser beams onto the subject In this case, the optical system includes a pair of condensing lenses in which cut surfaces that are cut at a predetermined distance from central axes to be parallel to the central axes contact with each other, and the interval between the two split laser beams is the same as the interval between two edges of the low-k material in a removal subject region. According to the invention, after splitting a laser beam into two laser beams and primarily removing the edges of the low-k material in the removal subject region using the laser beams, the remaining low-k material between the edges is removed. As a result, it is possible to improve processing quality.
摘要:
Provided is a side airbag installed at a roof rail over a driver seat and a rear seat, which includes: a driver seat side airbag having a plurality of division chambers divided by chamber walls projecting therebetween, the chamber walls being curved in a direction opposite to a flow direction of a gas injected from an inflator, and a rear seat side airbag having a plurality of division chambers divided by chamber walls projecting therebetween, the chamber walls of the rear seat side airbag being curved in a direction opposite to the chamber walls of the driver seat side airbag.Therefore, it is possible to protect a driver and a passenger on the rear seat, when the side airbag is deployed, by aligning an inlet of the driver seat side airbag disposed at the driver seat to a flow direction of the gas to rapidly deploy the side airbag. In addition, it is possible to safely protect the head of a driver or a passenger by first deploying a portion of the side airbag at which the driver or the passenger is positioned.
摘要:
A channel estimation method in a Multiple Input Multiple Output (MIMO) mobile communication system having a plurality of transmission antennas and a plurality of reception antennas is provided. In a method of transmitting, by a transmitter, channel estimation signals for channel estimation at a receiver, the transmission antennas transmit the same channel estimation signals for a first frame transmission duration, and transmit predetermined channel estimation signals corresponding to the number of the transmission antennas for a second frame transmission duration.
摘要:
Disclosed herein are a noncontact single side probe and an apparatus and method for testing open and short circuits of pattern electrodes. By feeding power to one end of each of the pattern electrodes and sensing an electrical variation value using a noncontact type single side probe device including an exciter electrode and a sensor electrode as a single module, the open and short circuits of pattern electrodes can be tested by one scanning process. Since the open and short circuits of the pattern electrodes are tested using the noncontact type single side probe device, the pattern electrode can be prevented from being damaged due to a contact failure or pressurized contact and the life span of the probe device can increase compared with a contact type probe device.
摘要:
An apparatus is provided for efficiently allocating a transmission period in a WLAN system. An access point (AP) transmits a PSMP message providing a downlink period and an uplink period provided to each station (STA), and at least one sub PSMP frame indicating a period of at least one of a downlink and an uplink for an STA requiring additional resource allocation. After exchanging data with the AP in the downlink and uplink periods provided by the PSMP frame, if there is a need for additional resource allocation, the STA receives the at least one sub PSMP frame and exchanges data with the AP in the period provided by the each sub PSMP frame.
摘要:
There is provided a bracket for securing a side airbag for an automotive vehicle. The bracket includes a bracket which connects a connection strap, connected to the side airbag, to a pillar of the vehicle, and wherein the bracket includes: an installation aperture to be secured to the pillar; and a fixing bracket aperture through which the connection strap connected to the side airbag passes, and wherein the fixing bracket aperture includes: a fixing bracket central aperture through which the connection strap passes; and extension apertures formed at both ends of the fixing bracket central aperture and each having a greater width than that of the fixing bracket central aperture.
摘要:
In the data transmission method, a MAC layer receives data from an upper layer, classifies the data according to destination addresses and traffic identifiers, aggregates the data by destination address and traffic identifier as a first transmission unit, aggregates the first transmission units having the identical destination address as a second transmission unit, and transmits the second transmission units having different destination addresses in a single frame. The data transmission method allows packets transferred from the upper layer to be hierarchically aggregated by DAs and TIDs and then packaged into a data unit for each destination such that it is possible to transmit the data at an optimal data rate for each destination terminal.
摘要:
A method is provided for allocating a transmission period in a wireless network system. An access point (AP) transmits a PSMP frame indicating a downlink period and an uplink period allocated to each station (STA), and at least one sub PSMP frame indicating an allocated downlink period for at least one of a retransmission of downlink data and a transmission of an ACK indicating successful receipt of uplink data. After exchanging data with the AP in the downlink and uplink periods indicated by the PSMP frame, an STA receives the each sub PSMP frame, and performs at least one of a reception of the retransmitted downlink data and a reception of the ACK in the downlink period indicated by the each sub MAP frame.
摘要:
There are provided a memory transistor having a select transistor with asymmetric gate electrode structure and an inverted T-shaped floating gates and a method for forming the same. A gate electrode of the select transistor adjacent to a memory transistor has substantially an inverted T-shaped figure, whereas the gate electrode of the select transistor opposite to the memory transistor has nearly a box-shaped figure. In order to form the floating gate of the memory transistor in shape of the inverted T, a region for the select transistor is closed when opening a region for the memory transistor.
摘要:
A spin-on glass (SOG) composition and a method of forming a silicon oxide layer utilizing the SOG composition are disclosed. The method includes coating on a semiconductor substrate having a surface discontinuity, an SOG composition containing polysilazane having a compound of the formula —(SiH2NH)n— wherein n represents a positive integer, a weight average molecular weight within the range of about 3,300 to 3,700 to form a planar SOG layer. The SOG layer is converted to a silicon oxide layer with a planar surface by curing the SOG layer. Also disclosed is a semiconductor device made by the method.