Method of patterning magnetic products using chemical reaction
    51.
    发明授权
    Method of patterning magnetic products using chemical reaction 有权
    使用化学反应形成磁性产品的方法

    公开(公告)号:US07232621B2

    公开(公告)日:2007-06-19

    申请号:US10885028

    申请日:2004-07-07

    IPC分类号: G11B5/65

    摘要: A method of patterning magnetic material includes forming a ferromagnetic material layer containing one element selected from the group consisting of Fe, Co and Ni on a substrate, selectively masking a surface of the ferromagnetic material layer, and making nonferromagnetic. The making nonferromagnetic step includes exposing an exposed portion in halogen-containing reaction gas, changing magnetism of the exposed portion and a lower layer thereof by chemical reaction, and making the exposed portion a nonferromagnetic material region. A magnetic recording medium is fabricated by using the magnetic material patterning method and includes a plurality of recording regions made of ferromagnetic materials, each containing at least one element selected from the group consisting of Fe, Co and Ni, and a nonferromagnetic material region for separating the recording regions from each other. The nonferromagnetic material region is a compound region of the ferromagnetic material and halogen.

    摘要翻译: 磁性材料的图案化方法包括在基板上形成含有选自Fe,Co和Ni的一种元素的铁磁材料层,选择性地掩蔽铁磁材料层的表面,并制成非铁磁性。 制造非铁磁步骤包括暴露部分在含卤素的反应气体中,通过化学反应改变暴露部分的磁性和下层,并使暴露部分成为非铁磁材料区域。 通过使用磁性材料图案化方法制造磁记录介质,并且包括由铁磁材料制成的多个记录区域,每个记录区域包含选自Fe,Co和Ni中的至少一种元素和用于分离的非铁磁材料区域 记录区域彼此。 非铁磁材料区域是铁磁材料和卤素的化合物区域。

    Method of patterning products using chemical reaction
    53.
    发明授权
    Method of patterning products using chemical reaction 有权
    使用化学反应对产品进行图案化的方法

    公开(公告)号:US07166261B2

    公开(公告)日:2007-01-23

    申请号:US10814257

    申请日:2004-04-01

    IPC分类号: C21D10/00

    摘要: A method of patterning magnetic material includes forming a ferromagnetic material layer containing one element selected from the group consisting of Fe, Co and Ni on a substrate, selectively masking a surface of the ferromagnetic material layer, and making nonferromagnetic. The making nonferromagnetic step includes exposing an exposed portion in halogen-containing reaction gas, changing magnetism of the exposed portion and a lower layer thereof by chemical reaction, and making the exposed portion a nonferromagnetic material region. A magnetic recording medium is fabricated by using the magnetic material patterning method and includes a plurality of recording regions made of ferromagnetic materials, each containing at least one element selected from the group consisting of Fe, Co and Ni, and a nonferromagnetic material region for separating the recording regions from each other. The nonferromagnetic material region is a compound region of the ferromagnetic material and halogen.

    摘要翻译: 磁性材料的图案化方法包括在基板上形成含有选自Fe,Co和Ni的一种元素的铁磁材料层,选择性地掩蔽铁磁材料层的表面,并制成非铁磁性。 制造非铁磁步骤包括暴露部分在含卤素的反应气体中,通过化学反应改变暴露部分的磁性和下层,并使暴露部分成为非铁磁材料区域。 通过使用磁性材料图案化方法制造磁记录介质,并且包括由铁磁材料制成的多个记录区域,每个记录区域包含选自Fe,Co和Ni中的至少一种元素和用于分离的非铁磁材料区域 记录区域彼此。 非铁磁材料区域是铁磁材料和卤素的化合物区域。

    Method and apparatus for manufacturing magnetic recording media
    54.
    发明申请
    Method and apparatus for manufacturing magnetic recording media 失效
    制造磁记录介质的方法和装置

    公开(公告)号:US20070000861A1

    公开(公告)日:2007-01-04

    申请号:US11475873

    申请日:2006-06-28

    摘要: According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.

    摘要翻译: 根据一个实施例,一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上,形成平坦化膜,其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上,并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面,并且基于变化确定平坦化蚀刻的终点 在通过离子计数器安装的入射颗粒的总数中,根据平坦化膜的材料相对于垂直于衬底的方向成角度θ。

    Nano-imprinting method, magnetic printing method and recording medium
    60.
    发明授权
    Nano-imprinting method, magnetic printing method and recording medium 失效
    纳米压印方法,磁性印刷方法和记录介质

    公开(公告)号:US06748865B2

    公开(公告)日:2004-06-15

    申请号:US10301606

    申请日:2002-11-22

    IPC分类号: B41C500

    摘要: A nano-imprinting method includes a process of transferring an embossed pattern from a master plate (120) to a surface of a pattern-receiving or donee substrate (130) by applying a pressure to the master plate (120) having an information carrier region (120A) having formed the embossed pattern and the donee substrate (139) from opposite sides of a pair of press surfaces (100) sandwiching them. When the pressure is applied, a buffer layer (110) shaped in accordance with the information carrier region is interposed in a position aligned with a pattern-forming region between the master plate or donee substrate and the press surface.

    摘要翻译: 纳米压印方法包括通过向具有信息载体区域的母板(120)施加压力将压花图案从母板(120)转移到图案接收或接合衬底(130)的表面的工艺, (120A)从夹着它们的一对按压表面(100)的相对侧形成压花图案和被覆基底(139)。 当施加压力时,根据信息载体区形成的缓冲层(110)被插入到与母板或被补偿基板和压制表面之间的图案形成区域对准的位置。