Process for manufacturing semiconductor integrated circuit device
    51.
    发明授权
    Process for manufacturing semiconductor integrated circuit device 有权
    半导体集成电路器件制造工艺

    公开(公告)号:US06245611B1

    公开(公告)日:2001-06-12

    申请号:US09434385

    申请日:1999-11-05

    IPC分类号: H01L218244

    摘要: In a complete CMOS SRAM having a memory cell composed of six MISFETs formed over a substrate, a capacitor element having a stack structure is formed of a lower electrode covering the memory cell, an upper electrode, and a capacitor insulating film (dielectric film) interposed between the lower electrode and the upper electrode. One electrode (the lower electrode) of the capacitor element is connected to one storage node of a flip-flop circuit, and the other electrode (the upper electrode) is connected to the other storage node. As a result, the storage node capacitance of the memory cell of the SRAM is increased to improve the soft error resistance.

    摘要翻译: 在具有由衬底上形成的六个MISFET构成的存储单元的完整CMOS SRAM中,具有堆叠结构的电容器元件由覆盖存储单元的下电极,上电极和插入了电容器绝缘膜(电介质膜)的电极形成 在下电极和上电极之间。 电容器元件的一个电极(下电极)连接到触发器电路的一个存储节点,另一个电极(上电极)连接到另一个存储节点。 结果,SRAM的存储单元的存储节点电容增加,以提高软错误电阻。

    Method of fusing commutator risers to armature coil in electric motor
    52.
    发明授权
    Method of fusing commutator risers to armature coil in electric motor 失效
    将换向器立管熔接到电动机中的电枢线圈的方法

    公开(公告)号:US5447268A

    公开(公告)日:1995-09-05

    申请号:US244535

    申请日:1994-08-25

    IPC分类号: H01R39/32 H02K13/04 H01R43/06

    摘要: A method which permits easy fusion of commutator risers to armature coils of an electric motor. When there are 20 risers, for example, 10 through-holes are formed in the boss portion of the armature core of the motor, each through-hole being so sized that the back surfaces of two adjacent risers are exposed through each through-hole. Sub-electrodes are inserted into the through-holes such that each sub-electrode supports the back side of the two risers exposed through the through-hole which receives this sub-electrode. First and second main electrodes are so arranged that the first electrode contacts with the first riser of the first riser group exposed through the first through-hole while the second main electrode contacts the second riser of the sixth riser group exposed through the sixth through-hole. After conducting fusing on these risers, the main electrodes are shifted into contact with the risers which are the second as counted from the risers which have just been fused, and fusion is conducted on these risers. This operation is repeated until all the risers are fused.

    摘要翻译: PCT No.PCT / JP93 / 01411 Sec。 371日期:1994年8月25日 102(e)日期1994年8月25日PCT提交1993年10月1日PCT公布。 第WO94 / 09550号公报 日期1994年04月28日。一种允许换向器立管容易地融合到电动机的电枢线圈的方法。 当存在20个立管时,例如,在电动机的电枢铁心的凸起部分中形成10个通孔,每个通孔的尺寸使得两个相邻立管的背面通过每个通孔露出。 子电极插入到通孔中,使得每个子电极支撑通过接收该子电极的通孔暴露的两个提升管的背面。 第一和第二主电极被布置成使得第一电极与通过第一通孔暴露的第一提升管组的第一提升管接触,而第二主电极接触通过第六通孔暴露的第六提升管组的第二提升管 。 在这些立管上进行融合之后,主电极与刚刚融合的立管计数的第二个升降器接触,并且在这些立管上进行融合。 重复此操作直到所有立管融合。

    MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
    54.
    发明申请
    MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE 有权
    半导体器件和半导体器件的制造方法

    公开(公告)号:US20120228711A1

    公开(公告)日:2012-09-13

    申请号:US13409728

    申请日:2012-03-01

    申请人: Yutaka HOSHINO

    发明人: Yutaka HOSHINO

    IPC分类号: H01L27/088 H01L21/336

    摘要: A semiconductor device has a first element region, a second element region, and a first isolation region in a thin film region and a third element region, a fourth element region, and a second isolation region in a thick film region . It is manufactured with step (a) of providing a substrate having a silicon layer formed via an insulating layer , step (b) of forming element isolation insulating films in the silicon layer in the first isolation region and the second isolation region of the substrate step (c) of forming a hard mask in the thin film region , step (d) of forming silicon films over the silicon layer exposed from the hard mask in the third element region and the fourth element region, and step (e) of forming element isolation insulating films between the silicon films in the third element region and the fourth element region.

    摘要翻译: 半导体器件在薄膜区域中具有第一元件区域,第二元件区域和第一隔离区域,并且在厚膜区域中具有第三元件区域,第四元件区域和第二隔离区域。 制造步骤(a),提供具有通过绝缘层形成的硅层的衬底,步骤(b)在第一隔离区域中的硅层和衬底步骤的第二隔离区域中形成元件隔离绝缘膜 (c)在所述薄膜区域中形成硬掩模,在从所述第三元件区域和所述第四元件区域中的所述硬掩模露出的所述硅层上形成硅膜的步骤(d),以及形成元件的步骤(e) 在第三元件区域中的硅膜和第四元件区域之间的隔离绝缘膜。