Plasma processing apparatus and plasma processing method using the same
    51.
    发明授权
    Plasma processing apparatus and plasma processing method using the same 失效
    等离子体处理装置和使用其的等离子体处理方法

    公开(公告)号:US5961773A

    公开(公告)日:1999-10-05

    申请号:US823835

    申请日:1997-03-25

    摘要: A plasma processing apparatus is provided with at least one waveguide portion for introducing microwaves, an electron heating space chamber formed on a downstream side with respect to a dielectric body in the waveguide portion, and a plasma generating space chamber coupled with the electron heating space chamber. A first static magnetic field generating device surrounds the electron heating space chamber using permanent magnets, producing a strong magnetic field exceeding an electron cyclotron resonance magnetic field strength along a propagation direction of the microwave in the electron heating space chamber and in a microwave leading-out portion of the dielectric body, and forming a cusped magnetic field. This cusped magnetic field falls steeply from a position of electron cyclotron resonance magnetic field strength to a boundary portion between the electron heating space chamber and the plasma generating space chamber and its direction is reversed to that of the strong magnetic field with decreasing distance from the boundary portion between the electron heating space chamber and the plasma generating space chamber to the plasma generating space chamber. A second static magnetic field generating device is provided with permanent magnets arranged around the plasma generating space chamber. Adjacent ones of the permanent magnets have polarities opposite to each other.

    摘要翻译: 等离子体处理装置设置有至少一个用于引入微波的波导部分,形成在波导部分中的介电体的下游侧的电子加热空间室,以及与电子加热空间室 。 第一静磁场产生装置使用永磁体围绕电子加热空间室,沿着电子加热空间室中的微波的传播方向产生超过电子回旋共振磁场强度的强磁场和微波输出 电介质体的一部分,并且形成一个可选的磁场。 该电磁场强度从电子回旋共振磁场强度的位置急剧下降到电子加热空间室和等离子体发生空间室之间的边界部分,并且其方向与强磁场的方向相反,与边界的距离减小 电子加热空间室和等离子体产生空间室之间的部分到等离子体产生空间室。 第二静磁场产生装置设置有围绕等离子体产生空间室布置的永磁体。 相邻的永磁体具有彼此相反的极性。

    Ion beam processing apparatus
    52.
    发明授权
    Ion beam processing apparatus 失效
    离子束处理装置

    公开(公告)号:US5750987A

    公开(公告)日:1998-05-12

    申请号:US636974

    申请日:1996-04-24

    摘要: When neutralized plasma is generated, the cylindrical electrode 8 is set at a negative potential against the processing chamber 23 by the DC power source 18, so that ions 23 in the neutralized plasma can be collected at the cylindrical electrode 8. Electrons 24 equal to the collected ion charge can be supplied uniformly toward the ion beam 25. Therefore, by allowing the cylindrical electrode to collect ions, the ion collection area can be spread easily, and only by generating neutralized plasma of low density, a sufficient volume of ions can be collected surely from the plasma and a sufficient volume of electrons can be supplied to the ion beam 25 at the same time.

    摘要翻译: 当产生中和的等离子体时,通过直流电源18将圆柱形电极8设置在处理室23的负电位,使得中和的等离子体中的离子23可以被收集在圆柱形电极8上。等于 收集的离子电荷可以均匀地供给到离子束25.因此,通过使圆柱形电极收集离子,离子收集区域可以容易地扩散,并且只有通过产生低密度的中和等离子体,可以有足够的离子体积 从等离子体中可靠地收集,并且可以同时向离子束25供应足够的体积的电子。

    Switch mechanism
    53.
    发明授权
    Switch mechanism 失效
    开关机构

    公开(公告)号:US5502290A

    公开(公告)日:1996-03-26

    申请号:US483878

    申请日:1995-06-07

    IPC分类号: H01H33/34 H01H33/56

    CPC分类号: H01H33/34 H01H33/563

    摘要: A switching mechanism for use e.g. in a circuit breaker of an underground electric substation has a movable rod which causes opening and closing of an electrical contact and a hydraulic operating system. The hydraulic operating system uses a hydraulic fluid which has a high flammability temperature or is incombustible. Thus, even if such fluid leaks from the hydraulic operating system, the risk of fire or explosion is minimized. The hydraulic operating system may have a sealed tank for the fluid, preferably with a variable volume expansion chamber. In a further development, the hydraulic operating system and possibly parts of the movable rod, is enclosed in a casing which is sealed and is filled with a gas which does not support combustion therein. Thus, the risk of fire or explosion is further reduced. The casing may have a variable volume expansion chamber.

    摘要翻译: 一种切换机制。 在地下电力变电站的断路器中具有使电触头和液压操作系统打开和关闭的活动杆。 液压操作系统使用具有高可燃性温度或不燃的液压油。 因此,即使这种液体从液压操作系统泄漏,也会使火灾或爆炸的风险最小化。 液压操作系统可以具有用于流体的密封罐,优选地具有可变体积膨胀室。 在进一步的发展中,液压操作系统和可能的可移动杆的部分被封装在密封的壳体中并且填充有不支持燃烧的气体。 因此,进一步降低了火灾或爆炸的危险。 壳体可以具有可变体积膨胀室。

    Cartridge auto changer
    54.
    发明授权
    Cartridge auto changer 失效
    墨盒自动更换

    公开(公告)号:US4981409A

    公开(公告)日:1991-01-01

    申请号:US492229

    申请日:1990-03-13

    IPC分类号: G03B21/02 G11B15/68 G11B17/26

    摘要: A catridge changer for carrying a cartridge to a utilization position and returning it to its initial position after the utilization thereof has a cartridge containing chamber for containing a number of cartridges therein, a hand member for gripping a selected cartridge, a hand moving device for moving the hand member gripping the selected cartridge to the cartridge containing chamber and the utilization position to carry the cartridge, and a correcting device for correcting the posture of the cartridge gripped by the hand member to a regular posture.

    摘要翻译: 用于将墨盒运送到利用位置并将其返回到其初始位置的卡盘更换器具有用于容纳多个墨盒的墨盒容纳室,用于夹持选定墨盒的手部构件,用于移动的手动装置 将所选择的药筒夹持到药筒容纳室的手部构件和用于携带药筒的利用位置,以及用于将由手部构件夹持的药筒的姿势校正为规则姿势的校正装置。

    Memory device
    57.
    发明授权
    Memory device 失效
    内存设备

    公开(公告)号:US4891727A

    公开(公告)日:1990-01-02

    申请号:US231836

    申请日:1988-06-15

    摘要: In order that either a disk cartridge 3 housing a disk memory medium 2, such as a flexible magnetic sheet, which is mechanically accessible or a semiconductor cartridge 15A (or 15B) housing a semiconductor memory medium which is statically accessible without any mechanical movement is made usable in a memory device, the memory device is provided with a switching circuit 18 for switching between the disk and semiconductor memory medium control circuits 14 and 16; a discrimination circuit 17 for identifying the type of a memory medium of an inserted disk cartridge; and a device for feeding an output of the discrimination circuit 17 to the switching circuit 18 for effecting automatic switching or a selecting device 29 for controlling the switching circuit 18 according to the memory medium to be used.

    摘要翻译: PCT No.PCT / JP87 / 00988 Sec。 371日期1988年6月15日第 102(e)日期1988年6月15日PCT提交1987年12月18日PCT公布。 出版物WO88 / 04803 日期:1988年6月30日。为了使容纳有可机械访问的盘式存储介质2(例如柔性磁性片)或容纳静电的半导体存储介质的半导体存储介质(或15B)的盘盒3 在存储装置中可以使用没有任何机械移动的存取装置,存储装置设置有用于在盘和半导体存储介质控制电路14和16之间切换的切换电路18; 识别电路17,用于识别插入的磁盘盒的存储介质的类型; 以及用于将鉴别电路17的输出馈送到用于实现自动切换的切换电路18的装置或用于根据要使用的存储介质控制切换电路18的选择装置29。

    Scroll type fluid displacement apparatus with centrifugal force
balanceweight
    59.
    发明授权
    Scroll type fluid displacement apparatus with centrifugal force balanceweight 失效
    带离心力平衡的涡旋式流体排量装置

    公开(公告)号:US4597724A

    公开(公告)日:1986-07-01

    申请号:US613418

    申请日:1984-05-24

    CPC分类号: F01C21/003 F01C1/0215

    摘要: A scroll type fluid displacement apparatus is disclosed. The scroll type fluid displacement apparatus includes a housing, a fixed scroll and an orbiting scroll both of which having an end plate from which wrap extends. Both wraps interfit to make a plurality of line contacts to define at least one sealed off fluid pocket. A drive shaft is rotatably supported by the housing, and has a drive pin which is radially offset from the axis of the drive shaft. The end plate of orbiting scroll has a boss, and a bushing is rotatably supported within the boss. The bushing has an eccentric hole disposed eccentrically with respect to the center of the bushing, and the drive pin is inserted in the eccentric hole. The bushing also has a balanceweight which causes a centrifugal force which is slightly larger than the centrifugal force which arises by orbital motion of the orbiting scroll and other orbital parts to improve the wearing of the wrap in the high speed operation of the apparatus.

    摘要翻译: 公开了一种涡旋式流体排量装置。 涡旋式流体排量装置包括壳体,固定涡旋件和绕动涡旋件,它们都具有一个从其延伸的端板。 两个包装互相配合以制造多个线接触件以限定至少一个密封的流体袋。 驱动轴由壳体可旋转地支撑,并且具有径向偏离驱动轴的轴线的驱动销。 绕动涡卷的端板具有凸台,并且衬套可旋转地支撑在凸台内。 衬套具有相对于衬套的中心偏心设置的偏心孔,并且驱动销插入偏心孔中。 衬套还具有平衡重,其引起离心力稍大于由绕动涡卷和其它轨道部分的轨道运动产生的离心力,以改善在装置的高速操作中包裹物的磨损。

    Pulley mechanism for fluid displacement apparatus
    60.
    发明授权
    Pulley mechanism for fluid displacement apparatus 失效
    流体置换装置的滑轮机构

    公开(公告)号:US4551081A

    公开(公告)日:1985-11-05

    申请号:US665087

    申请日:1984-10-26

    CPC分类号: F01C21/008

    摘要: A fluid displacement apparatus is disclosed. The apparatus includes a housing having a front end plate, a fixed member and an orbiting piston member. The fixed and orbiting piston members interfit to make a plurality of line contacts to define a sealed off fluid pocket. A driving mechanism, including a drive shaft, is disposed within the housing and is operatively connected to the orbiting piston member to effect the orbital motion of the orbital piston member by the rotation of the drive shaft. The drive shaft is rotatably supported by the front end plate through a bearing. An annular sleeve projecting axially from a front end surface of the front end plate surrounds the drive shaft. A pulley member is fixed on an axial end of the drive shaft which extends from the sleeve and is rotatably supported by the sleeve through a bearing on the outer surface of the sleeve. The drive shaft is thus rotatably supported by the front end plate through two bearings, one within the front end plate and the other on the outer surface of the sleeve.

    摘要翻译: 公开了一种流体位移设备。 该装置包括具有前端板,固定构件和旋转活塞构件的壳体。 固定和旋转的活塞构件互相配合以形成多个线接触件以限定密封的流体袋。 包括驱动轴的驱动机构设置在壳体内并且可操作地连接到绕动活塞构件,以通过驱动轴的旋转来实现轨道活塞构件的轨道运动。 驱动轴通过轴承由前端板可旋转地支撑。 从前端板的前端表面轴向突出的环形套筒围绕驱动轴。 滑轮构件固定在驱动轴的轴向端部上,该轴向端部从套筒延伸并且通过套筒的外表面上的轴承由套筒可旋转地支撑。 因此,驱动轴通过两个轴承由前端板可旋转地支撑,一个在前端板内,另一个位于套筒的外表面上。