Engine cogeneration system
    53.
    发明授权
    Engine cogeneration system 有权
    发动机热电联产系统

    公开(公告)号:US06966185B2

    公开(公告)日:2005-11-22

    申请号:US10787245

    申请日:2004-02-27

    摘要: In an engine cogeneration system in which power generators 5 to 8 are driven by a plurality of engines 1 to 4 to thereby supply electric power to power load 22 of a general household, at the same time, heat produced by cooling each of the engines 1 to 4 and heat generated from the exhaust gas are recovered by heat exchangers 18 and 19 to be stored as hot water into a hot-water tank 20 to supply heat to heat load 21 of the general household, the amount of power to be supplied and of the amount of heat to be supplied are controlled by a number of the engines 1 to 4 and the combustion modes of these engines 1 to 4. This engine cogeneration system can follow both the head demand and power demand in a high efficiency.

    摘要翻译: 在发动机热电联产系统中,其中发电机5至8由多个发动机1至4驱动,从而向一般家庭的电力负载22提供电力,同时,通过冷却发动机1的每个发动机1 4,并且由热交换器18和19回收由排气产生的热量,作为热水储存在热水箱20中,以向一般家庭的热负荷21供应热量,供给的电力量和 通过发动机1〜4的数量和这些发动机1〜4的燃烧模式来控制供给的热量。 这种发动机热电联产系统可以高效率地满足头部需求和电力需求。

    Optical member of synthetic quartz glass for excimer lasers and method
for producing same
    57.
    发明授权
    Optical member of synthetic quartz glass for excimer lasers and method for producing same 失效
    用于准分子激光的合成石英玻璃的光学元件及其制造方法

    公开(公告)号:US5364433A

    公开(公告)日:1994-11-15

    申请号:US977397

    申请日:1993-05-15

    摘要: A synthetic quartz glass optical member for an ultraviolet laser, suitably applicable as a stepper lens of a lithographer using an excimer laser beam and other optical members, wherein the quartz glass has a hydroxyl content of 10 to 100 ppm, a chlorine content of 200 ppm or less, a hydrogen content of 1.times.10.sup.16 molecules/cm.sup.3 or less, a homogeneity of refractive index of 5.times.10.sup.-6 or less in terms of .DELTA.n, and a birefringence of 5 nm/cm or less. The optical member can be produced by subjecting a volatile silicon compound to flame hydrolysis with oxyhydrogen flame, depositing the formed particulate silica on a heat-resistant support to prepare a porous silica matrix, heating the matrix in a vacuum as high as 1.times.10.sup.-2 Torr or above to a temperature of 1,400 .degree. C. or above to effect dehydration and degassing, homogenizing the resultant transparent quartz glass into highly homogeneous quartz glass free from striae in at last one direction, molding the highly homogeneous quartz glass, and annealing the molded glass.

    摘要翻译: PCT No.PCT / JP92 / 00821 Sec。 371日期1993年3月15日 102(e)1993年3月15日PCT提交1992年6月29日PCT公布。 公开号WO93 / 00307 日期:1993年1月7日。一种用于紫外线激光的合成石英玻璃光学元件,适用于使用准分子激光束和其它光学部件的平版印刷机的步进透镜,其中石英玻璃的羟基含量为10〜100ppm ,氯含量为200ppm以下,氢含量为1×1016分/ cm 3以下,折射率均匀性为DELTA n为5×10 -6以下,双折射为5nm / cm以下。 光学构件可以通过使挥发性硅化合物用氢氧焰火焰水解,将形成的颗粒二氧化硅沉积在耐热载体上以制备多孔二氧化硅基质来制造,在高达1×10 -2乇的真空中加热基质 以上至1400℃以上的温度进行脱水脱气,将得到的透明石英玻璃均匀化成最后一个方向不含条纹的高度均匀的石英玻璃,成型高度均匀的石英玻璃,退火成型玻璃 。