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公开(公告)号：US20060013115A1
公开(公告)日：2006-01-19
申请号：US10526181
申请日：2003-08-04
IPC分类号： G11B7/24
CPC分类号： G11B7/24 , G11B7/245 , G11B7/246 , G11B7/2472 , G11B7/248 , G11B7/2534 , G11B7/254 , G11B2007/24624
摘要： The present invention relates to a multi-stack optical information carrier for recording information by means of an optical beam, said optical information carrier comprising—a substrate layer (S),—at least two recording stacks each comprising a recording layer (P1-P7),—at least one spacer layer (R) separating the at least two recording stacks, and—a cover layer (C). In order to improve the sensitivity during writing it is proposed according to the present invention that the recording layers (P1-P7) include a thermochromic material having temperature-dependent optical characteristics for selectively improving the sensitivity of the addressed recording layer (P1-P7) during recording and/or read-out.
摘要翻译： 本发明涉及一种用于通过光束记录信息的多层光信息载体，所述光信息载体包括：基底层（S）， - 至少两个记录层，每个记录层包括记录层（P1- P 7）， - 分隔至少两个记录叠层的至少一个隔离层（R）和覆盖层（C）。 为了提高写入时的灵敏度，根据本发明提出了记录层（P 1 -P 7）包括具有温度依赖性光学特性的热变色材料，用于选择性地提高寻址记录层（P 1 -P 7）在记录和/或读取期间。
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公开(公告)号：US10538859B2
公开(公告)日：2020-01-21
申请号：US13994426
申请日：2011-12-09
申请人： Emiel Peeters , Wilhelmus Sebastianus Marcus Maria Ketelaars , Johan Frederik Dijksman , Sander Frederik Wuister , Roelof Koole , Christianus Martinus Van Heesch
发明人： Emiel Peeters , Wilhelmus Sebastianus Marcus Maria Ketelaars , Johan Frederik Dijksman , Sander Frederik Wuister , Roelof Koole , Christianus Martinus Van Heesch
IPC分类号： C30B19/12
摘要： A method is disclosed involving depositing a neutral orientation template layer onto a substrate after formation of chemical epitaxy or graphoepitaxy features on the substrate, but before deposition and orientation of a self-assemblable polymer. The orientation layer is arranged to bond with the substrate but not with certain features, so that it may be easily removed by vacuum or rinsing with organic solvent. The neutral orientation layer has a chemical affinity to match that of blocks in the self-assemblable polymer so that blocks of differing types wet the neutral orientation layer so that domains in the self-assembled polymer may lie side by side along the substrate surface, with interfaces normal to the substrate surface. The resulting aligned and oriented self-assembled polymer may itself be used as a resist for device lithography of the substrate.
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公开(公告)号：US09470609B2
公开(公告)日：2016-10-18
申请号：US13263446
申请日：2010-04-09
申请人： Reinhold Wimberger-Friedl , Nicolaas Petrus Willard , Ivo Godfried Jozef Camps , Markus Laubscher , Emiel Peeters , Oana Mihaela Piciu
发明人： Reinhold Wimberger-Friedl , Nicolaas Petrus Willard , Ivo Godfried Jozef Camps , Markus Laubscher , Emiel Peeters , Oana Mihaela Piciu
CPC分类号： G01N1/2813 , B01L3/5025 , B01L2200/026 , B01L2200/0642 , B01L2300/0816 , B01L2300/0829 , B01L2300/0864 , B01L2400/0688 , G01N21/03 , G01N2021/0346 , Y10T29/49
摘要： Apparatus for producing thin layers of a fluid sample for analysis, has a two dimensional array of analysis chambers (45), and a branching pattern of entry channels (25) coupled to the array to enable the analysis chambers to be filled in parallel. The analysis chambers are planar with a height less than that of the entry channels so as to produce the thin layers when filled with the fluid sample. The array enables more spacers between chambers in a given area, so that variations in height of the chambers can be reduced, while still enabling fast filling of the chambers. The analysis chambers can be suitable for capillary filling by a specified fluid sample such as blood. A pattern of exit channels (35) can be coupled to the array. The entry and exit channels can form comb patterns, fingers of the comb patterns being interdigitated, and the analysis chambers being arranged between the interdigitated fingers of the comb patterns.
摘要翻译： 用于制造用于分析的流体样品的薄层的装置具有分析室（45）的二维阵列，以及耦合到阵列的入口通道（25）的分支图案，以使分析室能够被平行地填充。 分析室是平面的，其高度低于入口通道的高度，以便在填充流体样品时产生薄层。 该阵列使得在给定区域中的腔室之间具有更多的间隔物，使得可以减小腔室的高度变化，同时仍然能够快速填充腔室。 分析室可以适用于通过特定流体样品如血液进行毛细管填充。 出口通道（35）的图案可以耦合到阵列。 入口和出口通道可以形成梳状图案，梳状图案的指状物被指叉，并且分析室被布置在梳形图案的交叉指状物之间。
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公开(公告)号：US09285676B2
公开(公告)日：2016-03-15
申请号：US14124213
申请日：2012-06-07
申请人： Aurelie Marie Andree Brizard , Wilhelmus Sebastianus Marcus Maria Ketelaars , Sander Frederik Wuister , Roelof Koole , Emiel Peeters , Christianus Martinus Van Heesch , Henri Marie Joseph Boots , Thanh Trung Nguyen
发明人： Aurelie Marie Andree Brizard , Wilhelmus Sebastianus Marcus Maria Ketelaars , Sander Frederik Wuister , Roelof Koole , Emiel Peeters , Christianus Martinus Van Heesch , Henri Marie Joseph Boots , Thanh Trung Nguyen
IPC分类号： G03F7/11 , G03F7/00 , H01L51/00 , C08F299/02 , C08F299/04 , B82Y10/00 , B82Y40/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C08F299/02 , C08F299/04 , H01L51/0043
摘要： A BCP having first block of first monomer and second block of second monomer, adapted to undergo a transition from disordered state to ordered state at a temperature less than TOD, further including a bridging moiety having a functional group to provide hydrogen bonding between bridging moieties of adjacent first and second BCP molecules when in the ordered state and at a temperature in excess of a glass transition temperature Tg for the BCP. Composition including BCP comprising first block of first monomer and second block of second monomer, and a crosslinking compound having first and second terminal groups joined by a central moiety and arranged to crosslink second blocks of adjacent first and second BCP molecules by providing non-covalent bonding between the terminal groups and a functional group of the second monomer of the second blocks when the BCP is in the ordered state.
摘要翻译： BCP具有第一单体的第一嵌段和第二单体的第二嵌段，适于在低于TOD的温度下经历从无序状态转化为有序状态，还包括具有官能团的桥连部分以在桥连部分之间提供氢键 相邻的第一和第二BCP分子处于有序状态并且在超过BCP的玻璃化转变温度Tg的温度下。 包含BCP的组合物包含第一单体的第一嵌段和第二单体的第二嵌段，以及具有通过中心部分连接的第一和第二端基的交联化合物，并且被布置成通过提供非共价键来交联相邻的第一和第二BCP分子的第二嵌段 当BCP处于有序状态时，端子组与第二块的第二单体的官能团之间。
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55.发明授权Method and apparatus for treatment of self-assemblable polymer layers for use in lithography 有权用于光刻的自组装聚合物层的处理方法和装置公开(公告)号：US09011978B2
公开(公告)日：2015-04-21
申请号：US13580356
申请日：2011-01-06
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： Treatment of a layer comprising self-assemblable polymer at a surface of a substrate is disclosed. In an embodiment, the treatment includes arranging a zone of temperature change to sweep across the layer, wherein a temperature of the layer within the zone differs from an initial temperature of the layer prior to passage of the zone.
摘要翻译： 公开了在衬底表面处理包含可自组装聚合物的层。 在一个实施方案中，处理包括布置温度变化区域以扫过层，其中该区域内的层的温度与该区域通过之前该层的初始温度不同。
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公开(公告)号：US08956804B2
公开(公告)日：2015-02-17
申请号：US14123943
申请日：2012-06-07
CPC分类号： G03F7/004 , B82Y10/00 , B82Y40/00 , C30B19/00 , G03F7/0002
摘要： A block copolymer, adapted to self-assemble to form an ordered pattern on a substrate, has first and second blocks with a terminal moiety covalently bonded to the end of the first block. The molecular weight of the terminal moiety is 20% or less than that of the block copolymer and the terminal moiety has a low chemical affinity for the first block. The terminal moiety can assist the accurate positional placement of the domains of the ordered array and lead to improved critical dimension uniformity and/or reduced line edge roughness. The polymer may be useful in combination with a graphoepitaxy template, where the terminal moiety is chosen to associate with a sidewall of the template. This may reduce undesired aggregation of polymer domains at a sidewall and/or assist in domain placement accuracy.
摘要翻译： 适于自组装以在基底上形成有序图案的嵌段共聚物具有第一和第二嵌段，其末端部分共价键合到第一嵌段的末端。 末端部分的分子量为嵌段共聚物的分子量的20％以下，末端部分对第一嵌段具有低的化学亲和力。 末端部分可以帮助有序阵列的域的精确位置放置并且导致改进的临界尺寸均匀性和/或减少的线边缘粗糙度。 所述聚合物可以与骨架外延模板组合使用，其中末端部分被选择为与模板的侧壁缔合。 这可以减少侧壁处的聚合物域的不希望的聚集和/或有助于域放置精度。
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57.发明授权Method for providing an ordered layer of self-assemblable polymer for use in lithography 有权提供用于光刻的自组装聚合物的有序层的方法公开(公告)号：US08822139B2
公开(公告)日：2014-09-02
申请号：US13640293
申请日：2011-01-19
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A method for providing an ordered polymer layer at a surface of a substrate includes depositing a self-assemblable polymer layer directly onto a primer layer on a substrate to provide an interface between the self-assemblable polymer layer and the primer layer, and treating the self-assemblable polymer layer to provide self-assembly into an ordered polymer layer, such as a block copolymer, having first and second domain types at the interface. The primer layer is adapted to improve its chemical affinity to each domain type at the interface, in response to the presence of the respective domain type in the self-assembled polymer at the interface during the self-assembly of the self-assemblable polymer layer into the ordered polymer layer. This may lead to reduction in defect levels and/or improved persistence length for the ordered polymer layer. The method may be useful for forming resist layers for use in device lithography.
摘要翻译： 在衬底的表面提供有序聚合物层的方法包括将可自组装的聚合物层直接沉积在基底上的底漆层上，以提供可自组装的聚合物层和底漆层之间的界面，以及处理自身 可以将聚合物层自组装成有序聚合物层，例如在界面处具有第一和第二域类型的嵌段共聚物。 响应于在自组装聚合物层的自组装期间在界面处的自组装聚合物中存在相应的畴型，引物层适于改善其在界面处对每种畴型的化学亲和力 有序聚合物层。 这可能导致有序聚合物层的缺陷水平和/或改善的持续长度的降低。 该方法可用于形成用于器件光刻的抗蚀剂层。
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58.发明申请METHOD AND APPARATUS FOR TREATMENT OF SELF-ASSEMBLABLE POLYMER LAYERS FOR USE IN LITHOGRAPHY 有权用于处理自组装聚合物层的方法和装置，用于在LITHOGRAPHY中使用公开(公告)号：US20120312501A1
公开(公告)日：2012-12-13
申请号：US13580356
申请日：2011-01-06
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： Treatment of a layer comprising self-assemblable polymer at a surface of a substrate is disclosed. In an embodiment, the treatment includes arranging a zone of temperature change to sweep across the layer, wherein a temperature of the layer within the zone differs from an initial temperature of the layer prior to passage of the zone.
摘要翻译： 公开了在衬底表面处理包含可自组装聚合物的层。 在一个实施方案中，处理包括布置温度变化区域以扫过层，其中该区域内的层的温度与该区域通过之前该层的初始温度不同。
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公开(公告)号：US20120225446A1
公开(公告)日：2012-09-06
申请号：US13263446
申请日：2010-04-09
申请人： Reinhold Wimberger-Friedl , Nicolaas Petrus Willard , Ivo Godfried Jozef Camps , Markus Laubscher , Emiel Peeters , Oana Mihaela Piciu
发明人： Reinhold Wimberger-Friedl , Nicolaas Petrus Willard , Ivo Godfried Jozef Camps , Markus Laubscher , Emiel Peeters , Oana Mihaela Piciu
CPC分类号： G01N1/2813 , B01L3/5025 , B01L2200/026 , B01L2200/0642 , B01L2300/0816 , B01L2300/0829 , B01L2300/0864 , B01L2400/0688 , G01N21/03 , G01N2021/0346 , Y10T29/49
摘要： Apparatus for producing thin layers of a fluid sample for analysis, has a two dimensional array of analysis chambers (45), and a branching pattern of entry channels (25) coupled to the array to enable the analysis chambers to be filled in parallel. The analysis chambers are planar with a height less than that of the entry channels so as to produce the thin layers when filled with the fluid sample. The array enables more spacers between chambers in a given area, so that variations in height of the chambers can be reduced, while still enabling fast filling of the chambers. The analysis chambers can be suitable for capillary filling by a specified fluid sample such as blood. A pattern of exit channels (35) can be coupled to the array. The entry and exit channels can form comb patterns, fingers of the comb patterns being interdigitated, and the analysis chambers being arranged between the interdigitated fingers of the comb patterns.
摘要翻译： 用于生产用于分析的流体样品的薄层的装置具有分析室（45）的二维阵列，以及耦合到阵列的入口通道（25）的分支图案，以使分析室能够被平行地填充。 分析室是平面的，其高度低于入口通道的高度，以便在填充流体样品时产生薄层。 该阵列使得在给定区域中的腔室之间具有更多的间隔物，使得可以减小腔室的高度变化，同时仍然能够快速填充腔室。 分析室可以适用于通过特定流体样品如血液进行毛细管填充。 出口通道（35）的图案可以耦合到阵列。 入口和出口通道可以形成梳状图案，梳状图案的指状物被指叉，并且分析室被布置在梳形图案的交叉指状物之间。
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60.发明授权Biosensor with one-dimensional sub-diffraction-limited apertures composed of a grid and a polarizer 有权具有由栅格和偏振器组成的一维亚衍射限制孔的生物传感器公开(公告)号：US08075841B2
公开(公告)日：2011-12-13
申请号：US12158347
申请日：2006-12-11
CPC分类号： G01N21/648 , Y10T436/11
摘要： A method and sensor for the detection of luminescence radiation generated by at least one luminophore is disclosed. In the context of the present invention the biosensor comprises a grid (120) defined as arrays of apertures with the apertures having a first dimension below and a second dimension above the diffraction limit of the excitation light (102) in a medium, a polarizer (115), and luminophores (117) positioned in a volume selected from the group consisting of: the volume inside the apertures of the grid (120), the volume in between the array of slits (120) and the polarizer (115) and a volume that extends into the polarizer (115), wherein the grid (120) providing a transmission axis extending in a first direction and the polarizer (115) providing a transmission axis extending in a second direction, the first direction and the second direction being substantially perpendicular with respect to each other, wherein the excitation radiation (102) is polarized such that it is substantially suppressed by one of the at least one grid (120) and polarizer (115) and substantially not suppressed by the other of the at least one grid (120) and polarizer (115).
摘要翻译： 公开了一种用于检测由至少一个发光体产生的发光辐射的方法和传感器。 在本发明的上下文中，生物传感器包括定义为孔阵列的格栅（120），孔格具有第一尺寸，第二维度高于介质中的激发光（102）的衍射极限，偏振器（ 115）和位于选自以下的体积中的发光体（117）：栅格（120）的孔内的体积，狭缝阵列（120）和偏振器（115）之间的体积和 延伸到偏振器（115）的体积，其中提供沿第一方向延伸的透射轴的格栅（120）和提供沿第二方向延伸的透射轴的偏振器（115），第一方向和第二方向基本上 垂直于彼此垂直，其中所述激发辐射（102）被极化，使得其基本上被所述至少一个格栅（120）和偏振器（115）中的一个所抑制，并且基本上不被所述o 该至少一个格栅（120）和偏振器（115）。
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