Abstract:
Provided is a gas separation type showerhead for effective energy supply. The gas separation type showerhead includes: a gas supply module to which a first gas and a second gas are separately supplied; a gas separation module in which the supplied first and second gases are separately dispersed; and a gas injection module which is a multi-hollow cathode having a plurality of holes and in which the first and second gases separately dispersed are ionized in the holes to be commonly dispersed.
Abstract:
A radio frequency identification (RFID) tag authentication apparatus and method for accomplishing quick authentication and solving privacy problems using a hash algorithm are provided. An RFID tag includes a memory unit storing a tag's secret information and a group's secret information and a hash chain computation unit encrypting secret information based on a hash algorithm. The tag authentication apparatus includes a DB storing information about RFID tags, which is classified into groups and includes each group's secret information and each tag's secret information; a group's secret information search unit finding a group to which a tag to be authenticated belongs; and a tag's secret information search unit searching tags' secret information included in the found group.
Abstract:
The emulsion fuel according to the present invention is prepared by emulsifying about 55 to 90% by weight of a mixture of heavy oil, 45 to 10% by weight of water, and 0.3 to 0.8% by weight of a catalyst. The catalyst comprises caustic soda (sodium hydroxide) and calcium dichloride in half and half. The calcium chloride can be partly substituted with calcium sulfate.
Abstract:
A an air conditioning system and a method for controlling the same are disclosed which are capable of achieving linked operations of a plurality of cooling/heating devices and a plurality of ventilation systems. The air conditioning system includes a plurality of cooling/heating devices each including at least one indoor unit, and an outdoor unit connected to the indoor unit such that they communicate with each other, to enable the outdoor unit to control the indoor unit, a plurality of ventilation systems each including at least one ventilation unit, and a controller connected to the ventilation unit such that they communicate with each other, to enable the controller to control the ventilation unit, and a central control unit connected to the cooling/heating devices and the ventilation systems such that they communicate with each other, to control linked operations of the cooling/heating devices and ventilation systems. The air conditioning system can achieve central control of the linked operations of the cooling/heating devices and ventilation systems, to enhance the quality of indoor air, and thus, to maximize the air conditioning efficiency of the air conditioning system.
Abstract:
Provided is a wafer-scale microcolumn array using a low temperature co-fired ceramic (LTCC) substrate. The microcolumn array includes a LTCC substrate having wirings and wafer-scale beam deflector arrays, which are attached to at least one side of the LTCC substrate and has an array of deflection devices deflecting electron beams. The wafer-scale microcolumn array using the LTCC substrate makes it possible to significantly increase the throughput of semiconductor wafers, simplify its manufacturing process, and lower its production cost.
Abstract:
Disclosed is an apparatus and method for controlling an air cleaning. The apparatus includes an air cleaning element, an AC high-voltage generator and a control unit. The air cleaning element generates negative ions and ozone using plasma discharge, and cleans indoor air using the negative ions and ozone. The AC high-voltage generator generates an AC high-voltage, and applies the AC high-voltage to the air cleaning element. The control unit varies at least one of the AC voltage and AC frequency applied to the air cleaning element by the AC high-voltage generator depending on a state of indoor air being cleaned using the air cleaning element. Therefore, it is possible to effectively generate negative ions while minimizing ozone generation to an acceptable level depending on a state of indoor air, thereby increasing air cleaning performance so as to sterilize and clean contaminants more efficiently.
Abstract:
Sealing structure for use in creating a seal between an elevator drive shaft and a loadlock chamber includes a base fastened over a hole in the bottom wall of the loadlock chamber, a fixed member fastened to an upper part of the base, a seal housing spaced above the fixed member, a cap in the form of a flexible bellows having a first end adhered to an upper surface of the fixed member and a second end adhered to a lower surface of the seal housing, one or more support shafts having upper and lower ends pivotally connected to the seal housing and the fixed member outside the cap, a seal seated in the seal housing and having an inner circumferential surface contacting the outer circumferential surface of the elevator drive shaft, and a seal cover fixed to an upper part of the seal housing. According to the present invention, uniform pressure is maintained between the shaft and the seal during assembly and operation of the apparatus. Thus, a seal is always maintained between the elevator drive shaft and the bottom wall of the loadlock chamber.
Abstract:
Disclosed herein is a method of manufacturing a semiconductor device having a recess channel structure, which prevents misalignment of a source/drain, thereby being capable of achieving an improvement in the drive-ability of a gate and preventing a degradation in characteristics of the semiconductor device due to a hot carrier effect. The method comprises the steps of forming a threshold voltage adjustment ion layer having a predetermined depth in an active region of a silicon substrate, implanting source/drain forming ions into the silicon substrate on the threshold voltage adjustment ion layer formed in the silicon substrate, forming a mask, which defines a recess trench forming region, on the silicon substrate, after completing the implantation of the source/drain forming ions, forming recess trenches by etching the silicon substrate to a predetermined depth using the mask as an etching mask, depositing polysilicon on the silicon substrate to a thickness sufficient to bury the recess trenches, and forming a gate electrode through planarization of the deposited polysilicon.
Abstract:
A system and method for calculating a real time voltage stability risk index in a power system are disclosed. The disclosed system comprises a real time phasor measurement device for calculating a voltage stability risk index using RMS voltage and an upper voltage stability monitoring system for collecting and sequencing the voltage stability risk index transferred from the real time phasor measurement device. The disclosed method comprises calculating RMS voltage by using bus voltage measured; calculating an N moving average voltage for the RMS voltages; calculating a % diversity between the bus voltage measured and the N moving average voltage; calculating a voltage stability risk index by dividing the area constructed by the % diversity by the number of sections; transferring the voltage stability risk index from a real time phasor measurement device to an upper voltage stability monitoring system; acquiring and sequencing the voltage stability risk indexes transferred.