Run-to-run control of backside pressure for CMP radial uniformity optimization based on center-to-edge model
    51.
    发明申请
    Run-to-run control of backside pressure for CMP radial uniformity optimization based on center-to-edge model 失效
    基于中心到边缘模型的用于CMP径向均匀性优化的背侧压力的运行控制控制

    公开(公告)号:US20050239222A1

    公开(公告)日:2005-10-27

    申请号:US10831592

    申请日:2004-04-23

    CPC分类号: B24B49/03 B24B37/042

    摘要: During planarization of wafers, the thickness of a layer of a wafer is measured at a number of locations, after the wafer has been planarized by chemical mechanical polishing. The thickness measurements are used to automatically determine, from a center to edge profile model to which the measurements are fit, a parameter that controls chemical mechanical polishing, called “backside pressure.” Backside pressure is determined in some embodiments by a logic test based on the center-to-edge profile model, coefficient of determination R-square of the model, and current value of backside pressure. Note that a “backside pressure” set point is adjusted only if the fit of the measurements to the model is good, e.g. as indicated by R-square being greater than a predetermined limit. Next, the backside pressure that has been determined from the model is used in planarizing a subsequent wafer.

    摘要翻译: 在晶片的平坦化期间,在通过化学机械抛光对晶片进行平面化之后,在多个位置测量晶片层的厚度。 厚度测量用于自动确定从测量结合到的中心到边缘轮廓模型,控制称为“背侧压力”的化学机械抛光的参数。 在一些实施例中,通过基于中心到边缘轮廓模型的逻辑测试,模型的确定系数R平方和背侧压力的当前值来确定背侧压力。 注意,仅当对模型的测量的拟合良好时才调整“背侧压力”设定点。 如R平方所示大于预定极限。 接下来,将从模型确定的背面压力用于平面化后续晶片。

    Hydroxyfluoroalkyl-substituted styrenes and polymeric compositions
containing same
    53.
    发明授权
    Hydroxyfluoroalkyl-substituted styrenes and polymeric compositions containing same 失效
    羟基氟烷基取代的苯乙烯和含有它们的聚合物组合物

    公开(公告)号:US5241007A

    公开(公告)日:1993-08-31

    申请号:US822280

    申请日:1992-01-21

    IPC分类号: C08L25/18

    CPC分类号: C08L25/18

    摘要: Fluorinated styrenes of the formula I; ##STR1## where R.sub.1 is a C.sub.1 -C.sub.6 alkyl and R.sub.2 is the repeating unit ##STR2## where x is zero or any positive integer, which are useful as compatibilizing and toughening agents for various polymers such as styrene, dienes (butadiene, isoprene, etc.) acrylates, polymethacrylates, polycarbonates, polyesters, polyamides, etc. Particularly preferred are p-(1,1,1,3,3,3-hexafluoro-2-hydroxy isopropyl)-.alpha.-methylstyrene, polymers thereof, block and random copolymers thereof and polymer blends incorporating the same.

    摘要翻译: 式I的氟化苯乙烯; (I)其中R1是C1-C6烷基,R2是重复单元,其中x是零或任何正整数,其可用作各种聚合物如苯乙烯,二烯(丁二烯)的相容化和增韧剂 ,异戊二烯等)丙烯酸酯,聚甲基丙烯酸酯,聚碳酸酯,聚酯,聚酰胺等。特别优选的是对 - (1,1,1,3,3,3-六氟-2-羟基异丙基)-α-甲基苯乙烯,其聚合物 ,其嵌段和无规共聚物和掺入其的聚合物共混物。

    Dual damascene process for producing a PMR write pole
    54.
    发明授权
    Dual damascene process for producing a PMR write pole 有权
    用于生产PMR写极的双镶嵌工艺

    公开(公告)号:US09099118B1

    公开(公告)日:2015-08-04

    申请号:US12472341

    申请日:2009-05-26

    IPC分类号: G11B5/127 H04R31/00 G11B5/31

    摘要: Methods of forming a write pole are disclosed. A structure comprising a bottom insulating layer and a top insulating layer is provided. A top damascene trench is formed in the top insulating layer, and a bottom damascene trench is formed in the bottom insulating layer. The bottom damascene trench and a portion of the top damascene trench are filled with a pole material. The top insulating layer and a portion of the pole material located above the bottom damascene trench are removed.

    摘要翻译: 公开了形成写极的方法。 提供了包括底部绝缘层和顶部绝缘层的结构。 在顶部绝缘层中形成顶部镶嵌沟槽,并且在底部绝缘层中形成底部镶嵌沟槽。 底部镶嵌沟槽和顶部镶嵌沟槽的一部分填充有极材料。 去除顶部绝缘层和位于底部镶嵌沟槽上方的极材料的一部分。

    Apparatus and method for adaptive camera control method based on predicted trajectory
    55.
    发明授权
    Apparatus and method for adaptive camera control method based on predicted trajectory 有权
    基于预测轨迹的自适应摄像机控制方法的装置和方法

    公开(公告)号:US08773542B2

    公开(公告)日:2014-07-08

    申请号:US13473865

    申请日:2012-05-17

    IPC分类号: H04N5/228

    摘要: An apparatus and method for adaptive camera control are provided. The method includes detecting motion information of a camera, predicting a motion of the camera based on the motion information, generating camera settings for controlling the camera, based on the predicted motion, controlling the camera to capture a frame according to the camera settings, performing digital image stabilizing on the captured frame, and outputting the stabilized frame.

    摘要翻译: 提供了一种用于自适应相机控制的装置和方法。 该方法包括检测相机的运动信息,基于运动信息预测相机的运动,基于预测的运动生成用于控制相机的相机设置,根据相机设置控制相机拍摄帧,执行 在拍摄的帧上稳定数字图像,并输出稳定的帧。

    Protecting hard bias magnets during a CMP process using a sacrificial layer
    56.
    发明授权
    Protecting hard bias magnets during a CMP process using a sacrificial layer 有权
    在使用牺牲层的CMP工艺期间保护硬偏磁体

    公开(公告)号:US08749925B2

    公开(公告)日:2014-06-10

    申请号:US11965648

    申请日:2007-12-27

    IPC分类号: G11B5/33

    摘要: Read elements and associated methods of fabrication are disclosed. During fabrication of the read element, and more particularly, the fabrication of the hard bias magnets, a non-magnetic sacrificial layer is deposited on top of the hard bias material. When a CMP process is subsequently performed, the sacrificial layer is polished instead of the hard bias material. The thicknesses of the hard bias magnets are not affected by the CMP process, but are rather defined by the deposition process of the hard bias material. As a result, the variations in the CMP process will not negatively affect the magnetic properties of the hard bias magnets so that they are able to provide substantially uniform effective magnetic fields to bias the free layer of the magnetoresistance (MR) sensor of the read element.

    摘要翻译: 公开了读取元件和相关联的制造方法。 在读取元件的制造期间,更具体地说,硬质偏置磁体的制造中,非磁性牺牲层沉积在硬偏置材料的顶部上。 当随后执行CMP处理时,牺牲层被抛光而不是硬偏置材料。 硬偏置磁体的厚度不受CMP工艺的影响,而是由硬偏压材料的沉积过程限定。 结果,CMP工艺的变化不会对硬偏磁体的磁性能产生负面影响,使得它们能够提供基本上均匀的有效磁场,以偏置读取元件的磁阻(MR)传感器的自由层 。

    METHODS AND APPARATUS TO POWER AN EXERCISE MACHINE
    57.
    发明申请
    METHODS AND APPARATUS TO POWER AN EXERCISE MACHINE 有权
    动力机械的方法和装置

    公开(公告)号:US20140077494A1

    公开(公告)日:2014-03-20

    申请号:US14026928

    申请日:2013-09-13

    IPC分类号: A63B21/005 F03G5/00 H02P9/48

    摘要: Methods and apparatus to power an exercise machine are disclosed herein. An example method includes measuring a power supply current produced by a user of the exercise machine. A rotations per minute of the exercise machine is measured. A power supply reference current is determined, the power supply reference current based on a user selected wattage and the rotations per minute. A differential power supply current is calculated based on the power supply reference current and a measured current of a power supply of the exercise machine. A power supply duty cycle is calculated based on a previous power supply duty cycle, a time constant, the differential power supply current, and a previous differential power supply current, the power supply duty cycle to control power supplied to a console of the exercise machine. The power supply duty cycle is output to a power output controller.

    摘要翻译: 本文公开了为锻炼机提供动力的方法和装置。 示例性方法包括测量由锻炼机器的用户产生的电源电流。 测量运动机器每分钟的转数。 确定电源参考电流,电源参考电流基于用户选择的瓦数和每分钟的转数。 基于电源参考电流和运动机器的电源的测量电流来计算差分电源电流。 基于先前的电源占空比,时间常数,差分电源电流和先前的差分电源电流来计算电源占空比,用于控制供应到运动机的控制台的电力的电源占空比 。 电源占空比输出到电源输出控制器。

    Systems and methods for multi-spectral bioluminescence tomography
    58.
    发明授权
    Systems and methods for multi-spectral bioluminescence tomography 有权
    多光谱生物发光断层扫描的系统和方法

    公开(公告)号:US08676302B2

    公开(公告)日:2014-03-18

    申请号:US11619495

    申请日:2007-01-03

    IPC分类号: A61B6/00

    摘要: Bioluminescent imaging has proven to be a valuable tool for monitoring physiological and pathological activities at cellular and molecular levels in living small animals. Using biological techniques, target cells can be tagged with reporters which generate characteristic photons in a wide spectrum covering the infra-red range. Part of the diffused light can reach the body surface of a subject/specimen (e.g., a small animal), be separated into several spectral bands using optical means, and collected by a sensitive camera. Systems and methods are disclosed herein for multi-spectral bioluminescence tomography (MBLT), in which an image of an underlying 3D bioluminescent source distribution is synergistically reconstructed from spectrally resolved datasets externally measured. This MBLT process involves two or multiple imaging modalities that produce structural information of the object and optical properties of the object as well to enable and improve the quality of MBLT.

    摘要翻译: 已经证明生物发光成像是监测活的小动物细胞和分子水平的生理和病理活动的有价值的工具。 使用生物学技术,靶细胞可以用记录器进行标记,记者在覆盖红外范围的广谱中产生特征光子。 扩散光的一部分可以到达对象/标本(例如,小动物)的身体表面,使用光学装置分离成若干光谱带,并由敏感摄像机收集。 本文公开了用于多光谱生物发光断层摄影(MBLT)的系统和方法,其中底层3D生物发光源分布的图像从外部测量的光谱解析数据集协同地重建。 该MBLT过程涉及产生物体的结构信息和对象的光学性质的两个或多个成像模态,以及实现和提高MBLT的质量。

    Methods for fabricating a magnetic head reader using a chemical mechanical polishing (CMP) process for sensor stripe height patterning
    59.
    发明授权
    Methods for fabricating a magnetic head reader using a chemical mechanical polishing (CMP) process for sensor stripe height patterning 有权
    使用用于传感器条纹高度图案化的化学机械抛光(CMP)工艺来制造磁头阅读器的方法

    公开(公告)号:US08557708B2

    公开(公告)日:2013-10-15

    申请号:US11743404

    申请日:2007-05-02

    IPC分类号: H01L21/302 H01L21/461

    CPC分类号: G11B5/3163 G11B5/3169

    摘要: Methods for fabricating TMR and CPP GMR magnetic heads using a chemical mechanical polishing (CMP) process with a patterned CMP conductive protective layer for sensor stripe height patterning. The method comprises defining a stripe height of a read sensor of a magnetic head reader. The method further comprises refill depositing an insulator layer on the read sensor. The method further comprises performing a CMP process down to the conductive protective layer on the read sensor deposited while defining the read sensor to remove an overfill portion of the insulator layer above the conductive protective layer and to remove a sensor pattern masking structure on the conductive protective layer. As a result, the insulator layer is planarized and smooth with the read sensor, eliminating fencing and alumina bumps typically encountered in the insulator layer at the edge of the patterned sensor.

    摘要翻译: 使用化学机械抛光(CMP)工艺制造TMR和CPP GMR磁头的方法,具有用于传感器条纹高度图案化的图案化CMP导电保护层。 该方法包括定义磁头读取器的读取传感器的条带高度。 该方法还包括在读取的传感器上填充沉积绝缘体层。 该方法还包括在限定读取传感器的同时,在读取的传感器上执行CMP处理,以去除所述导电保护层上方的绝缘体层的过度填充部分,并且去除导电保护层上的传感器图案掩模结构 层。 结果,绝缘体层与读取传感器平坦化并且平滑,消除了在图案化传感器的边缘处的绝缘体层中通常遇到的栅栏和氧化铝凸块。

    Method for providing a pole in a magnetic recording transducer using a cathodic etch
    60.
    发明授权
    Method for providing a pole in a magnetic recording transducer using a cathodic etch 有权
    使用阴极蚀刻在磁记录传感器中提供极点的方法

    公开(公告)号:US08555486B1

    公开(公告)日:2013-10-15

    申请号:US13312932

    申请日:2011-12-06

    IPC分类号: G11B5/127 H04R31/00

    摘要: A method for fabricating a magnetic recording transducer is described. The transducer has an ABS location and a nonmagnetic intermediate layer having a pole trench. The method includes depositing at least one magnetic pole layer having a top surface and a pole tip portion proximate to the ABS location. A first portion of the magnetic pole layer(s) resides in the pole trench. The magnetic pole layer(s) have a seam in the pole tip portion that extends to the top surface. The method also includes cathodically etching a second portion of the magnetic pole layer(s) from the seam at a rate of not more than 0.1 nanometers/second, thereby forming a seam trench in the magnetic pole layer(s). The method also includes refilling the seam trench with at least one magnetic refill layer. At least an additional magnetic pole layer is deposited on the top surface and the magnetic refill layer(s).

    摘要翻译: 描述了制造磁记录换能器的方法。 换能器具有ABS位置和具有极沟槽的非磁性中间层。 该方法包括沉积至少一个磁极层,其具有靠近ABS位置的顶表面和极尖部分。 磁极层的第一部分位于极沟槽中。 磁极层在极尖部分中具有延伸到顶表面的接缝。 该方法还包括以不大于0.1纳米/秒的速率从接缝阴极蚀刻磁极层的第二部分,从而在磁极层中形成接缝沟槽。 该方法还包括用至少一个磁性填充层重新填充接缝沟槽。 至少另外的磁极层沉积在顶表面和磁性填充层上。