PIEZOELECTRIC THIN FILM RESONATOR, FILTER USING THE RESONATOR, DUPLEXER USING THE FILTER, AND COMMUNICATION EQUIPMENT USING THE FILTER OR THE DUPLEXER
    53.
    发明申请
    PIEZOELECTRIC THIN FILM RESONATOR, FILTER USING THE RESONATOR, DUPLEXER USING THE FILTER, AND COMMUNICATION EQUIPMENT USING THE FILTER OR THE DUPLEXER 有权
    压电薄膜谐振器,使用谐振器的滤波器,使用滤波器的双工器,以及使用滤波器或双工器的通信设备

    公开(公告)号:US20100141353A1

    公开(公告)日:2010-06-10

    申请号:US12707301

    申请日:2010-02-17

    IPC分类号: H01L41/08

    摘要: There is provided a piezoelectric thin film resonator that decreases only transverse mode waves selectively while maintaining resonance characteristics due to original thickness longitudinal vibration. The piezoelectric thin film resonator includes: a piezoelectric film (14); a first electrode (15a) formed on a first principal surface of the piezoelectric film (14); and a second electrode (13) formed on a second principal surface of the piezoelectric film (14) opposite to the first principal surface. The resonator has a resonance region (20) where the first electrode (15a) and the second electrode (13) are opposed to each other. An electrically discontinuous portion (18a) that is insulated from the first electrode (15a) is provided on the first principal surface of the piezoelectric film (14) in the resonance region (20), and the electrically discontinuous portion (18a) is surrounded by the first electrode (15a) on the first principal surface.

    摘要翻译: 提供了一种压电薄膜谐振器,其仅选择性地减小横模波,同时保持由于原始厚度纵向振动引起的共振特性。 压电薄膜谐振器包括:压电薄膜(14); 形成在压电膜(14)的第一主表面上的第一电极(15a); 以及形成在与第一主表面相对的压电膜(14)的第二主表面上的第二电极(13)。 谐振器具有第一电极(15a)和第二电极(13)彼此相对的共振区域(20)。 在谐振区域(20)中的压电膜(14)的第一主表面上设置与第一电极(15a)绝缘的不连续部分(18a),并且电不连续部分(18a)被 第一主表面上的第一电极(15a)。

    PIEZOELECTRIC THIN-FILM RESONATOR
    54.
    发明申请
    PIEZOELECTRIC THIN-FILM RESONATOR 有权
    压电薄膜谐振器

    公开(公告)号:US20090206706A1

    公开(公告)日:2009-08-20

    申请号:US12368801

    申请日:2009-02-10

    IPC分类号: H01L41/04

    CPC分类号: H03H9/174 H03H9/02118

    摘要: There is provided a piezoelectric thin-film resonator including a substrate, a lower electrode disposed on the substrate, a piezoelectric film disposed on the lower electrode, an upper electrode disposed on the piezoelectric film in such a manner that a portion of the upper electrode is opposed to the lower electrode, and a mass element disposed on the upper electrode in a portion of an edge of the region of the upper electrode in which the upper electrode and the lower electrode are opposed to each other.

    摘要翻译: 提供一种压电薄膜谐振器,其包括基板,设置在基板上的下电极,设置在下电极上的压电薄膜,设置在压电薄膜上的上电极,上电极的一部分为 与上电极相对的上电极区域的一部分边缘上设置的上电极上的质量元件,其中上电极和下电极相对。

    FILTER, DUPLEXER AND ELECTRONIC DEVICE
    57.
    发明申请
    FILTER, DUPLEXER AND ELECTRONIC DEVICE 有权
    过滤器,双面器和电子设备

    公开(公告)号:US20110227807A1

    公开(公告)日:2011-09-22

    申请号:US13131833

    申请日:2008-11-28

    IPC分类号: H03H9/54 H03H9/70 H01Q1/50

    摘要: A ladder type filter includes series resonators S1˜S4 connected in series between an input terminal In and an output terminal Out, parallel resonators P1˜P3 connected in parallel between the input terminal In and the output terminal Out, a resonator RP connected in series with the series resonators S1˜S4 between the input terminal and the output terminal, the resonator RP having a resonance frequency lower than resonance frequencies of the series resonators S1˜S4, and an inductor Lp connected in parallel with the resonator. According to the present ladder filter, signals having frequencies away from the pass band can be suppressed by an attenuation pole formed by the inductor. It is further possible to suppress the insertion loss in the pass band by the resonator.

    摘要翻译: 梯形滤波器包括串联连接在输入端子In和输出端子Out之间的串联谐振器S1〜S4,并联在输入端子In和输出端子Out之间的并联谐振器P1〜P3,与 输入端子和输出端子之间的串联谐振器S1〜S4,谐振器RP的谐振频率低于串联谐振器S1〜S4的谐振频率,以及与谐振器并联连接的电感器Lp。 根据本梯形滤波器,可以通过由电感器形成的衰减极来抑制具有远离通带的频率的信号。 还可以通过谐振器抑制通带中的插入损耗。

    Resonator, filter and fabrication of resonator
    59.
    发明授权
    Resonator, filter and fabrication of resonator 有权
    谐振器的谐振器,滤波器和制造

    公开(公告)号:US07498717B2

    公开(公告)日:2009-03-03

    申请号:US11092979

    申请日:2005-03-30

    IPC分类号: H01L41/09

    摘要: A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Δf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.

    摘要翻译: 谐振器包括设置在基板的主表面上的压电薄膜,设置在压电薄膜的第一表面上的第一电极膜,设置在压电薄膜的第二表面上的第二电极膜, 频率调节膜,其设置在所述第一和第二电极膜中的一个上,所述频率调节膜包括膜层叠体,所述膜层叠体包括设置在所述第一和第二电极膜中的所述一个上的第一调节膜,以及设置在所述第一调节膜上的第二调节膜 。 第一调节膜用于Deltaf调节,第二调节膜用于校正过滤器制造过程中产生的频率偏差。 因此,可以精确地控制多个谐振器连接的滤波器的中心频率。