METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

    公开(公告)号:US20220223721A1

    公开(公告)日:2022-07-14

    申请号:US17609629

    申请日:2020-05-18

    Abstract: A method for manufacturing a semiconductor device with high productivity is provided. The method includes a step of forming a first insulator, a second insulator, and a third insulator in this order using a multi-chamber apparatus; a step of forming a fourth insulator, a fifth insulator, a first oxide film, a second oxide film, and a third oxide film in this order using a multi-chamber apparatus; a step of forming a conductive film; a step of processing the first oxide film, the second oxide film, the third oxide film, and the conductive film, thereby forming a first oxide, a second oxide, an oxide layer, and a conductive layer each having an island shape; a step of forming a sixth insulator and an insulating film in this order using a multi-chamber apparatus; a step of planarizing the insulating film; a step of forming, in the insulating film and the sixth insulator, an opening where the second oxide is exposed; a step of forming a seventh insulator and a first conductor; and a step of forming an eighth insulator and a ninth insulator in this order using a multi-chamber apparatus.

    FUNCTIONAL PANEL, DEVICE, AND DATA PROCESSOR
    58.
    发明申请
    FUNCTIONAL PANEL, DEVICE, AND DATA PROCESSOR 审中-公开
    功能面板,设备和数据处理器

    公开(公告)号:US20160103539A1

    公开(公告)日:2016-04-14

    申请号:US14877436

    申请日:2015-10-07

    Abstract: A novel functional panel, a novel device, or a novel data processor is provided. A structure in which a first plane, a second plane that is opposite the first plane, and a neutral plane between the first plane and the second plane are provided and a portion of a functional layer having a thickness greater than or equal to half of the thickness of the functional layer is in a region between the first plane and the neutral plane was conceived.

    Abstract translation: 提供了一种新颖的功能面板,新颖的设备或新颖的数据处理器。 设置有第一平面,与第一平面相对的第二平面和第一平面与第二平面之间的中性平面的结构,并且功能层的一部分具有大于或等于 功能层的厚度在第一平面和中性平面之间的区域中。

    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    59.
    发明申请
    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 审中-公开
    制造半导体器件的方法

    公开(公告)号:US20150293404A1

    公开(公告)日:2015-10-15

    申请号:US14749962

    申请日:2015-06-25

    Abstract: The present invention provides a manufacturing technique of a semiconductor device and a display device using a peeling process, in which a transfer process can be conducted with a good state in which a shape and property of an element before peeling are kept. Further, the present invention provides a manufacturing technique of more highly reliable semiconductor devices and display devices with high yield without complicating the apparatus and the process for manufacturing. According to the present invention, an organic compound layer including a photocatalyst substance is formed over a first substrate having a light-transmitting property, an element layer is formed over the organic compound layer including a photocatalyst substance, the organic compound layer including a photocatalyst substance is irradiated with light which has passed through the first substrate, and the element layer is peeled from the first substrate.

    Abstract translation: 本发明提供一种使用剥离工艺的半导体器件和显示装置的制造技术,其中可以以保持剥离之前元件的形状和特性的良好状态进行转印处理。 此外,本发明提供了一种更高可靠性的高可靠性的半导体器件和显示器件的制造技术,而不会使器件和制造过程复杂化。 根据本发明,在具有透光性的第一基板上形成包含光催化剂物质的有机化合物层,在包含光催化剂物质的有机化合物层上形成元素层,所述有机化合物层包含光催化剂物质 被穿过第一衬底的光照射,并且元件层从第一衬底剥离。

    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    60.
    发明申请
    METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号:US20140339578A1

    公开(公告)日:2014-11-20

    申请号:US14450967

    申请日:2014-08-04

    Abstract: The present invention provides a manufacturing technique of a semiconductor device and a display device using a peeling process, in which a transfer process can be conducted with a good state in which a shape and property of an element before peeling are kept. Further, the present invention provides a manufacturing technique of more highly reliable semiconductor devices and display devices with high yield without complicating the apparatus and the process for manufacturing. According to the present invention, an organic compound layer including a photocatalyst substance is formed over a first substrate having a light-transmitting property, an element layer is formed over the organic compound layer including a photocatalyst substance, the organic compound layer including a photocatalyst substance is irradiated with light which has passed through the first substrate, and the element layer is peeled from the first substrate.

    Abstract translation: 本发明提供一种使用剥离工艺的半导体器件和显示装置的制造技术,其中可以以保持剥离之前元件的形状和特性的良好状态进行转印处理。 此外,本发明提供了一种更高可靠性的高可靠性的半导体器件和显示器件的制造技术,而不会使器件和制造过程复杂化。 根据本发明,在具有透光性的第一基板上形成包含光催化剂物质的有机化合物层,在包含光催化剂物质的有机化合物层上形成元素层,所述有机化合物层包含光催化剂物质 被穿过第一衬底的光照射,并且元件层从第一衬底剥离。

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