利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

121 条记录 (耗时 0.03 秒)

    Optical apparatus
    51.
    发明授权
    Optical apparatus 失效

    公开(公告)号：US06999172B2

    公开(公告)日：2006-02-14

    申请号：US10280806

    申请日：2002-10-25

    申请人： Fumitaro Masaki ,  Akira Miyake

    发明人： Fumitaro Masaki ,  Akira Miyake

    IPC分类号： G01J4/00 ,  G02F1/07 ,  G02B5/30

    CPC分类号： G03F7/70566 ,  G01N21/21 ,  G01N23/20

    摘要： An optical apparatus that measures a polarization dependent characteristic of a measured object includes a light source for emitting non-linearly polarized light in an extreme ultraviolet region or an X-ray region, and a rotary polarizer for reflecting the light emitted from the light source, the polarizer including a set of mirrors repeating three or more reflections and being arranged such that an optical axis of incident light and that of outgoing light are aligned with the same straight line.

    Assembly and adjusting method of optical system, exposure apparatus having the optical system
    54.
    发明申请
    Assembly and adjusting method of optical system, exposure apparatus having the optical system 失效
    光学系统的装配和调整方法，具有光学系统的曝光装置

    公开(公告)号：US20050264779A1

    公开(公告)日：2005-12-01

    申请号：US11123975

    申请日：2005-05-06

    申请人： Takayuki Hasegawa ,  Akira Miyake

    发明人： Takayuki Hasegawa ,  Akira Miyake

    IPC分类号： G01M11/02 ,  G02B7/00 ,  G02B7/198 ,  G03F7/20 ,  H01L21/027 ,  G03B27/42

    CPC分类号： G03F7/706 ,  G03F7/70258

    摘要： An adjusting method of an optical system composed plural optical elements each having a multilayer film, said adjusting method that includes a first measuring step that obtains, for each optical element, a difference between a phase distribution of which an EUV light (Extreme Ultraviolet light) is reflected from the optical element and a phase distribution of which a light with a wavelength that is longer than the EUV light is reflected from the optical element, a second measuring step that measures a phase distribution of which the light passes the optical system, a deciding step that decides a phase distribution of which the EUV light passes through the optical system based on the phase distribution difference obtained by the first measuring step and the phase distribution measured by the second measuring step, and an adjusting step that adjusts at least one of a position and a posture of the optical element based on the phase distribution decided by the deciding step.

    摘要翻译： 一种由多个光学元件组成的光学系统的调整方法，所述多个光学元件具有多层膜，所述调整方法包括对于每个光学元件获得EUV光（极紫外光）的相位分布之间的差异的第一测量步骤， 从所述光学元件反射并且从所述光学元件反射具有比所述EUV光更长的波长的光的相位分布，测量所述光通过所述光学系统的相位分布的第二测量步骤， 决定步骤，其基于由所述第一测量步骤获得的相位分布差和由所述第二测量步骤测量的相位分布，决定所述EUV光通过所述光学系统的相位分布;以及调整步骤， 基于由判定步骤决定的相位分布的光学元件的位置和姿势。

    Light generator and exposure apparatus
    55.
    发明申请
    Light generator and exposure apparatus 有权
    光发生器和曝光装置

    公开(公告)号：US20050178979A1

    公开(公告)日：2005-08-18

    申请号：US11060198

    申请日：2005-02-17

    申请人： Fumitaro Masaki ,  Akira Miyake

    发明人： Fumitaro Masaki ,  Akira Miyake

    IPC分类号： G21K5/00 ,  A61N5/00 ,  G03F7/20 ,  G21G4/00 ,  G21G5/00 ,  G21K5/02 ,  G21K5/08 ,  H01J35/00 ,  H01L21/027 ,  H05G2/00 ,  H05H1/00 ,  H05H1/24

    CPC分类号： H05G2/001 ,  G03F7/70916 ,  G03F7/70925

    摘要： A light generator for irradiating a laser onto a target, for generating plasma, and for producing light from the plasma, includes a first optical system for introducing the light to the target, a second optical system for introducing the light, and a unit for irradiating the laser onto debris that attaches to at least one of the first and second optical systems by changing an irradiation condition of the laser differently from that used to generate the plasma.

    摘要翻译： 一种用于将激光照射到靶上用于产生等离子体并用于从等离子体产生光的光发生器包括：用于将光引入靶的第一光学系统，用于引入光的第二光学系统和用于照射的单元 通过改变激光的照射条件与用于产生等离子体的照射条件不同，将激光附着到第一和第二光学系统中的至少一个的碎片上。

    Debris removing system for use in X-ray light source
    57.
    发明授权
    Debris removing system for use in X-ray light source 失效
    用于X射线光源的碎屑去除系统

    公开(公告)号：US06867843B2

    公开(公告)日：2005-03-15

    申请号：US10187852

    申请日：2002-07-03

    申请人： Nobuaki Ogushi ,  Yutaka Watanabe ,  Akira Miyake

    发明人： Nobuaki Ogushi ,  Yutaka Watanabe ,  Akira Miyake

    IPC分类号： A61B5/117 ,  G03F1/22 ,  G03F1/24 ,  G03F7/20 ,  H01L21/027 ,  H05G2/00 ,  G03B27/52 ,  G03B27/72 ,  G21K1/04 ,  G21K5/00

    CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916 ,  G21K1/04 ,  G21K1/043

    摘要： A debris removing system prevents debris from being scattered from an X-ray source. The debris removing system includes an attracting unit, disposed between a light emission point of the X-ray source and the optical system, for attracting debris. The attracting unit has an attracting surface parallel or approximately parallel to an axis passing through the light emission point. The debris removing system further includes a rotation unit for rotating the attracting unit about the axis. This debris removing system assures a superior debris removing effect and a good EUV light utilization efficiency, being compatible with each other.

    摘要翻译： 碎片清除系统可防止碎片从X射线源散射。 垃圾清除系统包括设置在X射线源的发光点和光学系统之间的吸引单元，用于吸引碎屑。 吸引单元具有平行于或大致平行于穿过发光点的轴线的吸引表面。 碎片去除系统还包括用于围绕轴线旋转吸引单元的旋转单元。 这种碎屑去除系统确保了优异的除尘效果和良好的EUV光利用效率，彼此兼容。

    Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method
    58.
    发明授权
    Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method 失效
    同步辐射测量装置，X射线曝光装置和装置制造方法

    公开(公告)号：US06847696B2

    公开(公告)日：2005-01-25

    申请号：US10689031

    申请日：2003-10-21

    申请人： Hideyuki Chinju ,  Yutaka Watanabe ,  Akira Miyake ,  Nobuaki Oqushi

    发明人： Hideyuki Chinju ,  Yutaka Watanabe ,  Akira Miyake ,  Nobuaki Oqushi

    IPC分类号： H05H1/00 ,  G21K5/00

    CPC分类号： H05H1/0025

    摘要： A measurement apparatus has a first detector for measuring an intensity such that a sheet-shaped beam of synchrotron radiation is integrated over the entire range of the beam in the thickness direction thereof; a second detector for measuring the intensity of the beam at two points where positions along the direction are different; and a calculating device for calculating the magnitude of the beam in the direction on the basis of the detections by the first and second detectors.

    摘要翻译： 测量装置具有用于测量强度的第一检测器，使得在波束的厚度方向的整个范围上整合同步加速器辐射的片状波束; 第二检测器，用于在沿着所述方向的位置不同的两个点处测量所述光束的强度; 以及计算装置，用于基于第一和第二检测器的检测来计算沿该方向的光束的幅度。

    Laser oscillator
    59.
    发明授权
    Laser oscillator 有权
    激光振荡器

    公开(公告)号：US06826221B2

    公开(公告)日：2004-11-30

    申请号：US10385529

    申请日：2003-03-12

    申请人： Akira Egawa ,  Michinori Maeda ,  Kazuya Ohta ,  Akira Miyake

    发明人： Akira Egawa ,  Michinori Maeda ,  Kazuya Ohta ,  Akira Miyake

    IPC分类号： H01S322

    CPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/073

    摘要： A laser oscillator capable of effectively collecting and removing particulate foreign matter contained in gas laser medium flowing in a circulating path. An electric discharge section arranged in an optical resonator is incorporated into a circulating path of the gas medium including a heat exchanger and a blower. The gas laser medium flows at a high speed in the circulating path. At least one spiral-flow dust collecting mechanism is provided in the circular path downstream of the heat exchanger, and the gas laser medium discharged from the blower is supplied to the electric discharge section through the spiral-flow dust collecting mechanism. The gas laser medium containing the particulate foreign matter spirally flows around an inner pipe in a cylindrical body of the spiral-flow dust collecting mechanism. While spirally flowing in the cylindrical body, the foreign matter having a relative density larger than that of the gas medium is separated from the gas medium by centrifugal force, to introduced into a dust collecting section through a slit to be deposited. Pressure of the gas laser medium flowing in the circulating path may be adjusted in accordance with diameter and/or mass of the particulate foreign matter to be removed.

    摘要翻译： 一种激光振荡器，其能够有效地收集和除去在循环路径中流动的气体激光介质中所含的微粒异物。 布置在光学谐振器中的放电部分结合到包括热交换器和鼓风机的气体介质的循环路径中。 气体激光介质在循环路径中高速流动。 在热交换器下游的圆形路径中设置有至少一个螺旋流集尘机构，从鼓风机排出的气体激光介质通过螺旋流集尘机构供给到放电部。 含有颗粒异物的气体激光介质在螺旋流集尘机构的圆筒体内螺旋地流过内管。 在圆柱体中螺旋状地流动时，通过离心力将相对密度大于气体介质的异物与气体介质分离，通过待沉积的狭缝引入集尘部。 可以根据待除去的颗粒异物的直径和/或质量来调节在循环路径中流动的气体激光介质的压力。

    Brain specific potassium channel protein
    60.
    发明授权
    Brain specific potassium channel protein 有权
    脑特异性钾通道蛋白

    公开(公告)号：US06326168B1

    公开(公告)日：2001-12-04

    申请号：US09600776

    申请日：2000-07-21

    申请人： Akira Miyake ,  Shinobu Mochizuki ,  Hiromichi Yokoi

    发明人： Akira Miyake ,  Shinobu Mochizuki ,  Hiromichi Yokoi

    IPC分类号： C12P2106

    CPC分类号： C07K14/705

    摘要： The present invention relates to a novel potassium channel protein expressed exclusively in the brain, a DNA molecule having a sequence encoding this protein, a vector containing the DNA molecule, a host cell containing this vector, and a method for obtaining the potassium channel protein, wherein mRNA is extracted from human cells or tissue capable of producing the potassium channel protein of the present invention. Then, use is made of two primers between which the channel protein mRNA or a part of the mRNA region is located by using the thus extracted mRNA as a template. By carrying out a reverse transcriptase-polymerase chain reaction, the channel protein cDNA or a part thereof can be obtained. Thereafter, the channel protein can be produced by integrating the thus obtained novel potassium channel cDNA or a part of the same into an appropriate expression vector and then effecting its expression in a host cell. The proteins are useful (1) as targets for identifying therapeutic agents for central nervous system disorders such as dementia, cerebral ischemic disorder, epilepsy and the like; (2) for use in a method of screening compounds and peptides capable of acting on the claimed protein; and (3) as agents for the treatment of central nervous system disorders.

    摘要翻译： 本发明涉及专门在脑中表达的新型钾通道蛋白，具有编码该蛋白质的序列的DNA分子，含有该DNA分子的载体，含该载体的宿主细胞，以及获得该钾通道蛋白的方法， 其中从能够产生本发明的钾通道蛋白的人细胞或组织中提取mRNA。 然后，通过使用由此提取的mRNA作为模板，使用两个引物之间的通道蛋白质mRNA或mRNA区域的一部分。 通过进行逆转录酶聚合酶链反应，可以获得通道蛋白cDNA或其一部分。 此后，通过将由此获得的新型钾通道cDNA或其一部分的cDNA整合到合适的表达载体中，然后在宿主细胞中表达，可以产生通道蛋白。 该蛋白质可用于鉴定中枢神经系统疾病如痴呆，脑缺血障碍，癫痫等的治疗剂的靶标; （2）用于筛选能够作用于要求保护的蛋白质的化合物和肽的方法; 和（3）作为治疗中枢神经系统疾病的药剂。