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公开(公告)号：US20220223721A1
公开(公告)日：2022-07-14
申请号：US17609629
申请日：2020-05-18
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor： Shunpei YAMAZAKI , Takashi HIROSE , Atsushi SHIBAZAKI , Yasuhiro JINBO
Abstract: A method for manufacturing a semiconductor device with high productivity is provided. The method includes a step of forming a first insulator, a second insulator, and a third insulator in this order using a multi-chamber apparatus; a step of forming a fourth insulator, a fifth insulator, a first oxide film, a second oxide film, and a third oxide film in this order using a multi-chamber apparatus; a step of forming a conductive film; a step of processing the first oxide film, the second oxide film, the third oxide film, and the conductive film, thereby forming a first oxide, a second oxide, an oxide layer, and a conductive layer each having an island shape; a step of forming a sixth insulator and an insulating film in this order using a multi-chamber apparatus; a step of planarizing the insulating film; a step of forming, in the insulating film and the sixth insulator, an opening where the second oxide is exposed; a step of forming a seventh insulator and a first conductor; and a step of forming an eighth insulator and a ninth insulator in this order using a multi-chamber apparatus.
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公开(公告)号：US20210257394A1
公开(公告)日：2021-08-19
申请号：US17246788
申请日：2021-05-03
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor： Shunpei YAMAZAKI , Yoshiharu HIRAKATA , Takashi HAMADA , Kohei YOKOYAMA , Yasuhiro JINBO , Tetsuji ISHITANI , Daisuke KUBOTA
IPC: H01L27/12 , H01L51/52 , G02F1/1368 , G02F1/1362 , G02F1/1333 , G02F1/1335 , G02F1/1339 , H01L29/786
Abstract: A display device in which a peripheral circuit portion has high operation stability is provided. The display device includes a first substrate and a second substrate. A first insulating layer is provided over a first surface of the first substrate. A second insulating layer is provided over a first surface of the second substrate. The first surface of the first substrate and the first surface of the second substrate face each other. An adhesive layer is provided between the first insulating layer and the second insulating layer. A protective film in contact with the first substrate, the first insulating layer, the adhesive layer, the second insulating layer, and the second substrate is formed in the vicinity of a peripheral portion of the first substrate and the second substrate.
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公开(公告)号：US20210076512A1
公开(公告)日：2021-03-11
申请号：US17084810
申请日：2020-10-30
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor： Yoshiharu HIRAKATA , Yasuhiro JINBO , Shunpei YAMAZAKI
Abstract: A light-emitting device can be folded in such a manner that a flexible light-emitting panel is supported by a plurality of housings which are provided spaced from each other and the light-emitting panel is bent so that surfaces of adjacent housings are in contact with each other. Furthermore, in the light-emitting device, in which part or the whole of the housings have magnetism, the two adjacent housings can be fixed to each other by a magnetic force when the light-emitting device is used in a folded state.
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54.发明申请公开(公告)号：US20190339800A1
公开(公告)日：2019-11-07
申请号：US16517806
申请日：2019-07-22
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor： Yasuhiro JINBO , Shingo EGUCHI , Hisao IKEDA , Tetsuji ISHITANI , Taisuke KAMADA
Abstract: To provide a novel display panel that is highly convenient or reliable. To provide a novel input and output device that is highly convenient or reliable. To provide a novel data processing device that is highly convenient or reliable. To provide a method for manufacturing a novel display panel that is highly convenient or reliable. The display panel includes a pixel, a third conductive film electrically connected to the pixel, an insulating film including an opening portion overlapping with the third conductive film, and an electrode including a first region in contact with the third conductive film and a second region functioning as a contact point.
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公开(公告)号：US20170213872A1
公开(公告)日：2017-07-27
申请号：US15404459
申请日：2017-01-12
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor： Yasuhiro JINBO , Kohei YOKOYAMA , Yuji IWAKI , Minato ITO , Taisuke KAMADA
CPC classification number: H01L27/322 , H01L27/323 , H01L51/0097 , H01L51/5246 , H01L51/5253 , H01L51/5284 , H01L2227/323 , H01L2251/5338 , Y02E10/549
Abstract: To provide a display device with high reliability. To provide a repeatedly bendable flexible display. A first substrate, a second substrate, a display element, a light-blocking layer, a first barrier layer, and an adhesive layer are included. The first substrate and the second substrate face each other. The display element, the light-blocking layer, the first barrier layer, and the adhesive layer are between the first substrate and the second substrate. The display element is between the first substrate and the adhesive layer. The light-blocking layer is between the second substrate and the adhesive layer. The first barrier layer includes a region between the light-blocking layer and the adhesive layer. The first barrier layer includes a material having a higher Young's modulus than the light-blocking layer or the adhesive layer.
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Patent Agency Ranking
公开(公告)号：US20170006716A1
公开(公告)日：2017-01-05
申请号：US15264771
申请日：2016-09-14
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor： Yoshiharu HIRAKATA , Yasuhiro JINBO , Shunpei YAMAZAKI
CPC classification number: H05K5/0017 , G06F1/1616 , G09F9/301 , H01F1/14708 , H01F1/14791 , H01L27/3227 , H01L27/323 , H01L27/3262 , H01L51/0097 , H01L51/5237 , H01L51/5246 , H01L51/5253 , H01L51/5259 , H01L2227/326 , H01L2251/5338 , H05K5/0086 , Y02E10/549
Abstract: A light-emitting device can be folded in such a manner that a flexible light-emitting panel is supported by a plurality of housings which are provided spaced from each other and the light-emitting panel is bent so that surfaces of adjacent housings are in contact with each other. Furthermore, in the light-emitting device, in which part or the whole of the housings have magnetism, the two adjacent housings can be fixed to each other by a magnetic force when the light-emitting device is used in a folded state.
Abstract translation: 发光装置可以以柔性发光面板由彼此间隔开设置的多个壳体支撑并且发光面板弯曲使得相邻壳体的表面接触的方式折叠 与彼此。 此外，在发光装置中，部分或整体的壳体具有磁性，当发光装置处于折叠状态时，两个相邻的壳体可以通过磁力彼此固定。
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公开(公告)号：US20160103539A1
公开(公告)日：2016-04-14
申请号：US14877436
申请日：2015-10-07
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD
Inventor： Yasuhiro JINBO , Akio ENDO
CPC classification number: G06F3/0412 , G06F1/1616 , G06F1/1626 , G06F1/163 , G06F1/1641 , G06F1/1652 , G06F1/1681 , G06F3/044 , G06F2203/04102 , G06F2203/04103
Abstract: A novel functional panel, a novel device, or a novel data processor is provided. A structure in which a first plane, a second plane that is opposite the first plane, and a neutral plane between the first plane and the second plane are provided and a portion of a functional layer having a thickness greater than or equal to half of the thickness of the functional layer is in a region between the first plane and the neutral plane was conceived.
Abstract translation: 提供了一种新颖的功能面板，新颖的设备或新颖的数据处理器。 设置有第一平面，与第一平面相对的第二平面和第一平面与第二平面之间的中性平面的结构，并且功能层的一部分具有大于或等于 功能层的厚度在第一平面和中性平面之间的区域中。
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公开(公告)号：US20150293404A1
公开(公告)日：2015-10-15
申请号：US14749962
申请日：2015-06-25
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor： Yasuhiro JINBO , Masafumi MORISUE , Hajime KIMURA , Shunpei YAMAZAKI
IPC: G02F1/1335 , G02F1/1333
CPC classification number: H01L27/1266 , G02F1/133305 , G02F1/133603 , H01L21/6835 , H01L27/1214 , H01L27/153 , H01L33/0079 , H01L33/62 , H01L51/003 , H01L2221/68318 , H01L2221/68386
Abstract: The present invention provides a manufacturing technique of a semiconductor device and a display device using a peeling process, in which a transfer process can be conducted with a good state in which a shape and property of an element before peeling are kept. Further, the present invention provides a manufacturing technique of more highly reliable semiconductor devices and display devices with high yield without complicating the apparatus and the process for manufacturing. According to the present invention, an organic compound layer including a photocatalyst substance is formed over a first substrate having a light-transmitting property, an element layer is formed over the organic compound layer including a photocatalyst substance, the organic compound layer including a photocatalyst substance is irradiated with light which has passed through the first substrate, and the element layer is peeled from the first substrate.
Abstract translation: 本发明提供一种使用剥离工艺的半导体器件和显示装置的制造技术，其中可以以保持剥离之前元件的形状和特性的良好状态进行转印处理。 此外，本发明提供了一种更高可靠性的高可靠性的半导体器件和显示器件的制造技术，而不会使器件和制造过程复杂化。 根据本发明，在具有透光性的第一基板上形成包含光催化剂物质的有机化合物层，在包含光催化剂物质的有机化合物层上形成元素层，所述有机化合物层包含光催化剂物质 被穿过第一衬底的光照射，并且元件层从第一衬底剥离。
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公开(公告)号：US20140339578A1
公开(公告)日：2014-11-20
申请号：US14450967
申请日：2014-08-04
Applicant: Semiconductor Energy Laboratory Co., Ltd.
Inventor： Yasuhiro JINBO , Masafumi MORISUE , Hajime KIMURA , Shunpei YAMAZAKI
CPC classification number: H01L27/1266 , G02F1/133305 , G02F1/133603 , H01L21/6835 , H01L27/1214 , H01L27/153 , H01L33/0079 , H01L33/62 , H01L51/003 , H01L2221/68318 , H01L2221/68386
Abstract: The present invention provides a manufacturing technique of a semiconductor device and a display device using a peeling process, in which a transfer process can be conducted with a good state in which a shape and property of an element before peeling are kept. Further, the present invention provides a manufacturing technique of more highly reliable semiconductor devices and display devices with high yield without complicating the apparatus and the process for manufacturing. According to the present invention, an organic compound layer including a photocatalyst substance is formed over a first substrate having a light-transmitting property, an element layer is formed over the organic compound layer including a photocatalyst substance, the organic compound layer including a photocatalyst substance is irradiated with light which has passed through the first substrate, and the element layer is peeled from the first substrate.
Abstract translation: 本发明提供一种使用剥离工艺的半导体器件和显示装置的制造技术，其中可以以保持剥离之前元件的形状和特性的良好状态进行转印处理。 此外，本发明提供了一种更高可靠性的高可靠性的半导体器件和显示器件的制造技术，而不会使器件和制造过程复杂化。 根据本发明，在具有透光性的第一基板上形成包含光催化剂物质的有机化合物层，在包含光催化剂物质的有机化合物层上形成元素层，所述有机化合物层包含光催化剂物质 被穿过第一衬底的光照射，并且元件层从第一衬底剥离。
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公开(公告)号：US20130149840A1
公开(公告)日：2013-06-13
申请号：US13759264
申请日：2013-02-05
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor： Yasuhiro JINBO , Hironobu SHOJI , Hideto OHNUMA , Shunpei YAMAZAKI
IPC: H01L21/762
CPC classification number: H01L21/84 , H01L21/26506 , H01L21/76254
Abstract: It is an object of the present invention to provide a method for manufacturing an SOI substrate having an SOI layer that can be used in practical applications with high yield even when a flexible substrate such as a glass substrate or a plastic substrate is used. Further, it is another object of the present invention to provide a method for manufacturing a thin semiconductor device using such an SOI substrate with high yield. When a single-crystal semiconductor substrate is bonded to a flexible substrate having an insulating surface and the single-crystal semiconductor substrate is separated to manufacture an SOI substrate, one or both of bonding surfaces are activated, and then the flexible substrate having an insulating surface and the single-crystal semiconductor substrate are attached to each other.
Abstract translation: 本发明的目的是提供一种制造具有SOI层的SOI衬底的方法，该SOI衬底即使在使用诸如玻璃衬底或塑料衬底的柔性衬底时，也可以在实际应用中以高产率使用。 此外，本发明的另一个目的是提供一种以高产率制造使用这种SOI衬底的薄半导体器件的方法。 当将单晶半导体衬底接合到具有绝缘表面的柔性衬底并且分离单晶半导体衬底以制造SOI衬底时，一个或两个键合表面被激活，然后柔性衬底具有绝缘表面 并且单晶半导体衬底彼此附接。
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