公开(公告)号：US2501702A

公开(公告)日：1950-03-28

申请号：US58600645

申请日：1945-03-31

Applicant: SPERRY CORP

Inventor： VARIAN RUSSELL H

IPC: H01J41/04

CPC classification number: H01J41/04

公开(公告)号：US2245168A

公开(公告)日：1941-06-10

申请号：US30392139

申请日：1939-11-10

Applicant: GEN ELECTRIC

Inventor： SUITS CHAUNCEY G

IPC: G01N27/68 ,  H01H33/26 ,  H01J41/04

CPC classification number: H01H33/26 ,  G01N27/68 ,  H01J41/04

公开(公告)号：US1334143A

公开(公告)日：1920-03-16

申请号：US25588318

申请日：1918-09-27

Applicant: GEN ELECTRIC

Inventor： SAUL DUSHMAN

IPC: H01J41/04

CPC classification number: H01J41/04

公开(公告)号：US11101120B2

公开(公告)日：2021-08-24

申请号：US16664389

申请日：2019-10-25

Applicant: SRI International

Inventor： Ashish Chaudhary ,  Robert Timothy Short

IPC: G01L21/30 ,  H01J41/02 ,  G01N27/64 ,  G01L21/34 ,  G01L21/32 ,  G01L21/12 ,  G01L9/00 ,  G01L19/00 ,  H01J41/06 ,  H01J41/04

Abstract: The disclosure includes an ionization chamber, a first electron multiplier, and a second electron multiplier. The ionization chamber is configured to receive gas molecules from an environment at a pressure. The first electron multiplier is configured to receive a plurality of photons from a photon source, generate a first plurality of electrons from the plurality of photons, and discharge the first plurality of electrons into the ionization chamber to generate a plurality of gas ions from at least a portion of the gas molecules. The second electron multiplier is configured to receive the plurality of gas ions from the ionization chamber and generate a second plurality of electrons from the plurality of gas ions that is proportional to a quantity of the plurality of gas ions. A quantity of electrons of the second plurality of electrons is indicative of the pressure.

公开(公告)号：US09593996B2

公开(公告)日：2017-03-14

申请号：US14377449

申请日：2013-02-07

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker

IPC: H01J27/02 ,  B01D59/44 ,  G01L19/06 ,  G01L21/32 ,  H01J41/04 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

公开(公告)号：US09316555B2

公开(公告)日：2016-04-19

申请号：US14260545

申请日：2014-04-24

Applicant: CANON ANELVA CORPORATION

Inventor： Itaru Enomoto ,  Hideo Mano

IPC: G01L21/34 ,  G01L21/32 ,  G01L21/30 ,  H01J41/04 ,  H01J41/06

CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J41/04 ,  H01J41/06

Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.

Abstract translation: 一种冷阴极电离真空计，包括：两个电极，其设置成使得一个电极被另一个电极包围，从而在它们之间形成放电空间; 以及电极保护部件，其设置在所述放电空间中并且被配置为保护所述另一电极的内壁表面，其中所述电极保护部件具有导电性并且沿着所述内壁表面的形状弹性变形以与其他电极电连接 电极。

公开(公告)号：US6025723A

公开(公告)日：2000-02-15

申请号：US917932

申请日：1997-08-27

Applicant: Daniel Granville Bills

Inventor： Daniel Granville Bills

IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04 ,  G01L21/32 ,  H05B31/26 ,  H05H15/00

CPC classification number: H01J41/04

Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

Abstract translation: 包括电子源的电离计; 限定阳极体积的开放阳极，其中电子源设置在阳极体积的外部; 设置在阳极容积内的多个离子收集电极; 多个轴向延伸的阳极支撑柱，用于支撑开放的阳极，阳极支撑柱电连接到开放的阳极; 并且所述多个离子集电极分别位于与所述多个轴向延伸的阳极支撑柱足够接近的位置，以便基本上排斥所述阳极支撑柱的电子。

公开(公告)号：US5644220A

公开(公告)日：1997-07-01

申请号：US388232

申请日：1995-02-13

Applicant: Waelchli Urs ,  Stoeckli Armin Leo ,  Boesch Martin

Inventor： Waelchli Urs ,  Stoeckli Armin Leo ,  Boesch Martin

IPC: G01R19/00 ,  G01R29/24 ,  G01T1/29 ,  H01J37/244 ,  H01J41/04 ,  H01J49/02 ,  G01R27/26

CPC classification number: G01R29/24 ,  G01R19/0061 ,  H01J37/244 ,  H01J41/04 ,  H01J49/025

Abstract: For measuring the charge transported in an ion or electron beam, collecting grids are provided in a cascaded manner and the galvanic currents occurring there are measured. The same surface range is measured on the collecting cascade with respect to the particle current in the vacuum. The process and apparatus have particular applicability in partial-pressure and total-pressure measuring apparatuses, e.g. mass spectrometers and Bayard-d'Alpert tubes.

Abstract translation: 为了测量以离子或电子束传输的电荷，以级联的方式提供收集栅格，并测量在那里发生的电流。 在真空中相对于颗粒电流在集电级联上测量相同的表面范围。 该方法和装置在分压和全压测量装置中具有特别的适用性。 质谱仪和Bayard-d'Alpert管。

公开(公告)号：US5422573A

公开(公告)日：1995-06-06

申请号：US164953

申请日：1993-12-10

Applicant: Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

Inventor： Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

IPC: G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25% of the radius of the anode but not more than 75% of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.; (c) the ion collector extends at its free end at least through one of the partial end caps of the anode; (d) the electron source is not substantially longer axially than the region within the anode volume in which the electric field is predominantly directed radially inward and where the electron source is located substantially only adjacent to the foregoing region; (e) the anode is provided with a substantially uniformly transparent grid structure in the regions where the electrons enter the anode volume and where they exit from the anode volume. Moreover, the above features may be utilized in other hot cathode ionization gauges where, for example, the above features (a) and (d) may be utilized in triode gauges.

Abstract translation: 电离计及其操作方法，其中量规可以是Bayard-Alpert型，并且包括完全包围电子源，阳极和集电极的屏蔽，使得屏蔽外部的电位不会扰乱电荷分布 在屏蔽体积内，从而稳定仪表的灵敏度。 电离计进一步的特征在于以下特征，其可以单独存在或组合存在，包括：（a）阳极设置有端盖，其径向向内延伸至阳极半径的至少25％但不大于75 半径的百分比; （b）离子收集器的直径不小于0.015英寸，不大于0.080英寸。 （c）离子收集器至少通过阳极的部分端盖之一在其自由端处延伸; （d）电子源基本上不比阳极体积内的区域基本上更长，其中电场主要指向径向向内并且电子源基本上仅与前述区域相邻; （e）阳极在其中电子进入阳极体积并且它们从阳极体积排出的区域中具有基本均匀的透明网格结构。 此外，上述特征可以用于其他热阴极电离计，其中例如上述特征（a）和（d）可用于三极管计。

公开(公告)号：US5373156A

公开(公告)日：1994-12-13

申请号：US9794

申请日：1993-01-27

Applicant: Jochen Franzen

Inventor： Jochen Franzen

IPC: H01J41/04 ,  H01J49/16 ,  H01J49/38 ,  G01N27/62

CPC classification number: H01J49/062 ,  H01J49/04

Abstract: Heavy-weight, fast-moving molecular ions are slowed down in a light-weight collision gas to very low velocities and small distributions of velocity before their mass-spectrometric analysis. The velocity reduction of the ions which occurs in the collision gas reduces both ion energy and phase space. In accordance with one embodiment, in order to minimize fragmentation of large molecular ions, an ultrasonic gas jet traveling in the same direction as the ions is used for slowing down the ions. In accordance with another embodiment, the ions are examined in storage mass spectrometers such as ICR spectrometers or ion traps.

Abstract translation: 重质，快速移动的分子离子在轻质碰撞气体中以非常低的速度和速度分布在其质谱分析之前被放慢。 在碰撞气体中发生的离子的速度降低降低了离子能量和相位空间。 根据一个实施例，为了使大分子离子的碎裂最小化，以与离子相同的方向行进的超声波气体射流用于减慢离子。 根据另一个实施方案，在存储质谱仪如ICR光谱仪或离子阱中检查离子。