METHOD AND SINGLE WAFER PROCESSING SYSTEM FOR PROCESSING OF SEMICONDUCTOR WAFERS

    公开(公告)号:US20230405642A1

    公开(公告)日:2023-12-21

    申请号:US18192279

    申请日:2023-03-29

    摘要: Improved processing systems and methods are provided for wet and dry processing of a semiconductor wafer. Provided is an enclosed chamber for processing a semiconductor wafer within a processing space and a drainage system for directing processing fluids out of the processing space. The enclosed chamber includes a top plate and a bottom plate, which physically confine the processing fluids within a relatively small, enclosed processing space. This forces the processing fluids to flow radially across the wafer surface(s) without the need to rotate the wafer. The drainage system contains a conduit that is downstream from the processing space and configured to retain a portion of a processing fluid dispensed within the processing space. The portion retained within the conduit provides a pressure resistance against the processing fluid(s) dispensed within the processing space to improve wet and dry processing of the wafer surfaces.

    Apparatus and method for cleaning filter cartridges

    公开(公告)号:US11845028B2

    公开(公告)日:2023-12-19

    申请号:US17557804

    申请日:2021-12-21

    发明人: Joseph P. Szczap

    摘要: A system for cleaning filter cartridges having a cylindrically configured filter media. The cleaning system includes a tank for containing a cleaning liquid, and an open-sided cage for removably receiving and containing one of the filter cartridges to be cleaned. The cage is supported on a drive shaft of a motorized drive that is positionable for disposing the open-sided cage and filter cartridge contained therein in cleaning liquid in the tank and is selectively operable for rotating the open-sided cage and filter cartridge contained therein during a cleaning cycle for cleaning the filter media of the contained filter cartridge.

    APPARATUS FOR CLEANING PRINTED 3D OBJECTS
    57.
    发明公开

    公开(公告)号:US20230382046A1

    公开(公告)日:2023-11-30

    申请号:US18010133

    申请日:2022-02-16

    发明人: Jens TRÄGER

    摘要: The invention relates to: an apparatus (1) for the post-cleaning of 3D objects (90), which are printed from a light-curing resin formulation and comprise uncured residues of the resin formulation which adhere to the surface and have non-translucent and insoluble particles; and the use of a corresponding apparatus. The apparatus (1) comprises a cleaning chamber (2), which can be filled with a liquid cleaning agent (20) and has an agitator (5), for receiving the 3D object (90) to be cleaned, wherein a contamination detector (8), which is connected to a control unit (11) and determines the optical density of the cleaning agent (20), is provided for checking the remaining cleaning capacity of the cleaning agent (20), wherein the contamination detector (8) is located in an area kept free of non-translucent and insoluble particles above a predefined size in the cleaning agent (20). The determined optical density is used to determine the cleaning capacity of the cleaning agent (20).

    GOLF TOWEL SYSTEMS AND METHODS
    59.
    发明公开

    公开(公告)号:US20230338798A1

    公开(公告)日:2023-10-26

    申请号:US17980768

    申请日:2022-11-04

    摘要: A towel system and method are provided that allow at least first and second towel portions of a main towel of the system to be quickly and easily distinguished from one another to enable the user to assign different purposes to the different towel portions. A differentiation mechanism of the system differentiates the towel portions from one another to allow a user of the system to readily differentiate the first towel portion from the second towel portion to facilitate different uses of the towel portions. At least a first quick attachment and detachment (attachment/detachment) feature of the system is secured to the main towel at a preselected location of the main towel. A towel system attachment mechanism is secured to the main towel and is configured to be removably attached to an external structure or device to allow the system to be removably attached to the external device or structure.