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公开(公告)号:US20210033396A1
公开(公告)日:2021-02-04
申请号:US16845559
申请日:2020-04-10
申请人: INVENSENSE, INC.
发明人: Pietro Scafidi , Luca Coronato
IPC分类号: G01C19/5712 , G01C25/00
摘要: An optimal demodulation phase for extracting an in-phase component of a MEMS gyroscope output signal is determined through a test procedure. During the test procedure, multiple different rotation rate patterns such as different directions of rotation and different rotation rates are applied to the MEMS gyroscope while the MEMS gyroscope output signal is demodulated based on demodulation phases near a predicted quadrature phase for the MEMS gyroscope. The measured gyroscope outputs are used to calculate an optimal demodulation phase for the MEM gyroscope.
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公开(公告)号:US10911850B2
公开(公告)日:2021-02-02
申请号:US16164922
申请日:2018-10-19
申请人: INVENSENSE, INC.
摘要: Various embodiments provide for an integrated temperature sensor and microphone package where the temperature sensor is located in, over, or near an acoustic port associated with the microphone. This placement of the temperature sensor near the acoustic port enables the temperature sensor to more accurately determine the ambient air temperature and reduces heat island interference cause by heat associated with the integrated circuit. In an embodiment, the temperature sensor can be a thermocouple formed over a substrate, with the temperature sensing portion of the thermocouple formed over the acoustic port. In another embodiment, the temperature sensor can be formed on an application specific integrated circuit that extends into or over the acoustic port. In another embodiment, a thermally conductive channel in a substrate can be placed near the acoustic port to enable the temperature sensor to determine the ambient temperature via the channel.
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公开(公告)号:US10816422B2
公开(公告)日:2020-10-27
申请号:US15442468
申请日:2017-02-24
申请人: InvenSense, Inc.
发明人: Chung-Hsien Lin , Rene Hummel , Ulrich Bartsch , Marion Hermersdorf , Tsung Lin Tang , Wang Shen Su , Chia Min Lin
摘要: A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.
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公开(公告)号:US10794702B2
公开(公告)日:2020-10-06
申请号:US16130695
申请日:2018-09-13
申请人: INVENSENSE, INC.
发明人: Doruk Senkal , Houri Johari-Galle , Joseph Seeger
IPC分类号: G01C19/5712 , G01C19/5776 , G01C19/5726 , G01C25/00
摘要: A MEMS gyroscope includes a proof mass of a suspended spring mass system that is driven at a drive frequency. The proof mass moves relative to a sense electrode such that an overlap of the proof mass and sense electrode changes during the drive motion. A Coriolis force causes the proof mass to move relative to the sense electrode. The overlap and the movement due to the Coriolis force are sensed, and angular velocity is determined based on the magnitude of a signal generated due to a change in overlap and the Coriolis force.
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公开(公告)号:US20200304953A1
公开(公告)日:2020-09-24
申请号:US16735765
申请日:2020-01-07
申请人: InvenSense, Inc.
发明人: Jacques GEORGY , Chris GOODALL , Gennadii BERKOVICH , Abdelrahman ALI , Zhengrong CHENG , Salah ABDELNABY
摘要: In a method of maintenance of a location fingerprint database for an area, signal measurement data is collected together with motion sensor data from each of a plurality of portable devices transiting a portion of the area of the location fingerprint database. The motion sensor data is collected by a sensor assembly in each of the plurality of portable devices. Offline non-causal processing is used to process the collected motion sensor data into reference positions associated with the portion of the area. The collected signal measurement data is employed together with the reference positions to update the location fingerprint database.
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公开(公告)号:US10773947B2
公开(公告)日:2020-09-15
申请号:US16382102
申请日:2019-04-11
申请人: InvenSense, Inc.
发明人: Daesung Lee
IPC分类号: B81B3/00
摘要: An apparatus includes a MEMS wafer with a device layer and a handle substrate bonded to the device layer. A complementary metal-oxide semiconductor (“CMOS”) wafer includes an oxide layer, and a passivation layer overlying the oxide layer. A bonding electrode overlies the passivation layer. A eutectic bond is between a first bonding metal on the bonding electrode and a second bonding metal on the MEMS wafer. A sensing electrode overlies the passivation layer. A shield electrode is adjacent to the sensing electrode. A sensing gap is positioned between the sensing electrode and the device layer, wherein the sensing gap is smaller than a shield gap positioned between the shield electrode and the device layer.
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公开(公告)号:US10732196B2
公开(公告)日:2020-08-04
申请号:US15828304
申请日:2017-11-30
申请人: InvenSense, Inc.
IPC分类号: G01P15/08 , B81B7/02 , G01P15/125 , B81B5/00
摘要: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.
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公开(公告)号:US10726231B2
公开(公告)日:2020-07-28
申请号:US15853396
申请日:2017-12-22
申请人: INVENSENSE, INC.
摘要: Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.
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公开(公告)号:US10725916B2
公开(公告)日:2020-07-28
申请号:US15612949
申请日:2017-06-02
申请人: InvenSense, Inc.
发明人: Vinod Bhat , Amr Zaky , Jatin Gangani
IPC分类号: G06F12/0815 , G01D9/00
摘要: A system includes sensors, a first memory component, a second memory component, and an interface. The sensors are configured to generate data responsive to stimuli. Each sensor may transmit its associated data as it becomes available. The first memory component may receive and store sensor data. The second memory component may receive data from the first memory component. The interface may receive data from the second memory component. The sensor data generated during a time which the interface is receiving data from the second memory component is transmitted to the first memory component and stored thereto. No data is transmitted from the first memory component or from the sensors to the second memory component during the time which the interface is receiving data from the second memory component. Subsequently, a subset of data stored on the first memory component is advanced to the second memory component.
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公开(公告)号:US20200186715A1
公开(公告)日:2020-06-11
申请号:US16679046
申请日:2019-11-08
申请人: InvenSense, Inc.
发明人: William Kerry KEAL
IPC分类号: H04N5/232
摘要: In a method of electronic image stabilization, a processor buffers image data into a memory buffer, the image data being obtained by the processor from an image sensor disposed in an electronic device. The processor obtains motion data from a motion sensor disposed in the electronic device, wherein the motion data corresponds with a time of capture of the image data. The processor analyzes the motion data to determine a stabilization correction to apply to the image data. The processor applies the determined stabilization correction to the image data to achieve stabilized image data. The determined stabilization correction is applied, and the stabilized image data is achieved, by the processor without requiring a transfer of the image data from the memory buffer to a graphics processing unit. The stabilized image data is output.
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