公开(公告)号：US09550296B2

公开(公告)日：2017-01-24

申请号：US14670741

申请日：2015-03-27

申请人： DAIHEN Corporation

发明人： Hideki Matsuo

IPC分类号： H01L21/677 ,  B25J11/00 ,  B25J15/00 ,  B25J5/02

CPC分类号： B25J11/0095 ,  B25J5/02 ,  B25J15/0014 ,  H01L21/67167 ,  H01L21/67201 ,  H01L21/67706 ,  H01L21/67742 ,  H01L21/67748

摘要： A conveying apparatus includes a guide mechanism and a moving body guided by the guide mechanism. The moving body includes a first support, a second support and a holding portion. The first support has a first engagement portion engaged with the guide mechanism. The first support, supported by the guide mechanism, is movable in a first direction. The second support has a second engagement portion engaged with the guide mechanism. The second support, supported by the guide mechanism, is movable in the first direction. The holding portion, supported by the first and the second supports, holds a workpiece. The first engagement portion receives a moment applied thereto by deformation of the moving body, where the moment is opposite in direction to a moment applied to the first engagement portion by a load of the workpiece held by the holding portion.

摘要翻译： 输送装置包括引导机构和由引导机构引导的移动体。 移动体包括第一支撑件，第二支撑件和保持部件。 第一支撑件具有与引导机构接合的第一接合部。 由引导机构支撑的第一支撑件可沿第一方向移动。 第二支撑件具有与引导机构接合的第二接合部。 由引导机构支撑的第二支撑件可沿第一方向移动。 由第一和第二支撑件支撑的保持部分保持工件。 第一接合部通过由保持部保持的工件的载荷，通过移动体的变形接收施加到其上的力矩，其中力矩相对于施加到第一接合部的力矩。

公开(公告)号：US20160332247A1

公开(公告)日：2016-11-17

申请号：US15110855

申请日：2015-02-09

申请人： DAIHEN CORPORATION

发明人： Daisuke MORI ,  Zhongjie LIU ,  Toshiro UEZONO

IPC分类号： B23K9/09 ,  B23K9/173

CPC分类号： B23K9/092 ,  B23K9/0956 ,  B23K9/1062 ,  B23K9/173

摘要： There is provided an arc welding method. In the method, welding is performed in a spray transfer mode by feeding a welding wire. A first welding current Iw1 is flown during a first period. A second welding current Iw2 is flown during a second period. A third welding current Iw3 is flown during a third period, where 0

摘要翻译： 提供电弧焊接方法。 在该方法中，通过馈送焊丝以喷射转印模式进行焊接。 第一焊接电流Iw1在第一周期期间飞行。 第二焊接电流Iw2在第二时段期间流动。 第三焊接电流Iw3在第三时段内流动，其中0

公开(公告)号：US09461353B2

公开(公告)日：2016-10-04

申请号：US14217790

申请日：2014-03-18

申请人： DAIHEN CORPORATION

发明人： Hirotaka Takei

IPC分类号： H01P5/12 ,  H01P5/16 ,  H03H7/48

CPC分类号： H01P5/16 ,  H01P5/12 ,  H03H7/48

摘要： There is provided a power combiner configured to combine high-frequency powers such that the high-frequency powers respectively input to a plurality of input terminals are output from one output terminal via transmission circuits respectively connected to the input terminals. The respective input terminals are connected to one ends of resistances in parallel with the respective transmission circuits and the other ends of the resistances are connected to each other, so that the input terminals are connected to each other through the resistances connected to the respective input terminals. Each of the transmission circuits is comprised of a circuit in which a first inductor, a transmission section having a constant characteristic impedance and a second inductor are connected to each other in series.

摘要翻译： 提供一种功率组合器，其被配置为组合高频功率，使得分别输入到多个输入端子的高频功率通过分别连接到输入端子的传输电路从一个输出端子输出。 各个输入端子与各个传输电路并联连接到电阻的一端，并且电阻的另一端彼此连接，使得输入端子通过连接到各个输入端子的电阻彼此连接 。 每个发送电路包括其中第一电感器，具有恒定特性阻抗的发送部分和第二电感器彼此串联连接的电路。

公开(公告)号：US20150254827A1

公开(公告)日：2015-09-10

申请号：US14637938

申请日：2015-03-04

申请人： DAIHEN Corporation

发明人： Takumi KOBAYASHI

IPC分类号： G06T7/00

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G01N2021/9513 ,  G01N2021/95638 ,  G06T5/30 ,  G06T7/254 ,  G06T2207/30148

摘要： An image inspection apparatus is provided with an image sensing unit, a determination unit, and a reference image generation unit. The image sensing unit captures an inspection target. The determination unit takes a difference between a reference image that includes a solid image of the inspection target and a captured image that is captured of the inspection target. The determination unit thereby extracts an image that is not included in an image of the inspection target in the reference image, and determines the quality of the inspection target based on the extracted image. The reference image generation unit generates the reference image that is used by the determination unit by performing predetermined image processing to change to an image showing the inspection target that is included in the captured image into a solid image.

摘要翻译： 图像检查装置设置有图像感测单元，确定单元和参考图像生成单元。 图像感测单元捕获检查目标。 确定单元取得包括检查对象的实心图像的参考图像与被检查对象的拍摄图像之间的差。 确定单元从而提取参考图像中不包括在检查对象的图像中的图像，并且基于提取的图像来确定检查对象的质量。 参考图像生成单元通过执行预定图像处理来生成由确定单元使用的参考图像，以将表示包括在拍摄图像中的检查对象的图像变为实心图像。

公开(公告)号：US20150244342A1

公开(公告)日：2015-08-27

申请号：US14707293

申请日：2015-05-08

申请人： DAIHEN Corporation

发明人： Takashi SHIMOMOTO ,  Koji ITADANI ,  Masakatsu MITO

IPC分类号： H03H7/40

CPC分类号： H03H7/40

摘要： An impedance adjustment apparatus of the invention performs impedance matching using characteristic parameters, even where a high frequency power source of variable frequencies is used. The apparatus is applicable to a power supply system using a high frequency power source of variable frequencies. Characteristic parameters obtained by targeting a portion of combinations of position information (C) of a variable capacitor and output frequency information (F) of the power source are stored in a memory. A T-parameter acquisition unit acquires characteristic parameters corresponding to (Cnow, Fnow) at the current time. An output reflection coefficient calculation unit calculates a reflection coefficient of an output end. A target information specifying unit, based on the above information and a target input reflection coefficient, specifies target combination information in which a reflection coefficient of an output end approaches the target input reflection coefficient. Impedance matching is performed based on this information.

摘要翻译： 本发明的阻抗调整装置即使在使用可变频率的高频电源的情况下，也使用特性参数进行阻抗匹配。 该装置适用于使用可变频率的高频电源的电源系统。 通过将可变电容器的位置信息（C）和电源的输出频率信息（F）的组合的一部分定位获得的特征参数存储在存储器中。 T参数获取单元在当前时间获取对应于（Cnow，Fnow）的特征参数。 输出反射系数计算单元计算输出端的反射系数。 目标信息指定单元基于上述信息和目标输入反射系数，指定输出端的反射系数接近目标输入反射系数的目标组合信息。 基于该信息执行阻抗匹配。

公开(公告)号：US09110106B2

公开(公告)日：2015-08-18

申请号：US13904514

申请日：2013-05-29

申请人： DAIHEN Corporation

发明人： Toyokazu Kitano ,  Yoshinobu Kasai ,  Yuji Yoshizako

IPC分类号： H01J7/24 ,  H05B31/26 ,  G01R25/00 ,  H05H1/46 ,  H01J37/32

CPC分类号： G01R25/00 ,  H01J37/32917 ,  H01J37/32926 ,  H01J37/32935 ,  H05H1/46 ,  H05H2001/4682

摘要： A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference φr(=φ2−φ1) between two detected voltages v1 (phase angle: φ1) and v2 (phase angle: φ2). The phase difference computation unit uses a sine wave vs and a cosine wave vc generated separately and having the same frequency as the fundamental frequency of the voltages v1 and v2, to perform computation of v2s=v2×vs, v2c=v2×vc, v1s=v1×vs, v1c=v1×vc, and then extracts DC components I2=(−A2/2)·sin(φ2), R2=(A2/2)·cos(φ2), I1=(−A1/2)·sin(φ1), R1=(A1/2)·cos(φ1) at low-pass filters. The phase difference computation unit computes R3=R1×R2+I1×I2 at a complex multiplying unit to obtain R3=(A1·A2/4)·cos(φr), computes I3=R2×I1−R1×I2 to obtain I3=(A1·A2/4)·sin(φr), and computes φr=tan−1(I3/R3) at the arctangent calculation unit, thereby obtaining the phase difference φr.

摘要翻译： 相位差检测器以高速和高精度检测两个AC信号之间的相位差。 相位差计算单元计算两个检测电压v1（相位角：＆phgr。1）和v2（相位角：＆phgr。2）之间的相位差＆phgr r（=＆phgr; 2＆phgr; 1）。 相位差计算单元使用分别产生的与电压v1和v2的基频具有相同频率的正弦波vs余弦波vc来执行v2s = v2×vs，v2c = v2×vc，v1s的计算 = v1×vs，v1c = v1×vc，然后提取DC分量I2 =（ - A2 / 2）·sin（＆phgr.2），R2 =（A2 / 2）·cos（＆phgr.2） -A1 / 2）·sin（＆phgr。1），R1 =（A1 / 2）·cos（＆phgr。1）在低通滤波器。 相位差计算单元以复乘法计算R3 = R1×R2 + I1×I2，得到R3 =（A1·A2 / 4）·cos（＆phgr; r），计算I3 = R2×I1-R1×I2〜 获得I3 =（A1·A2 / 4）·sin（＆phgr r），并计算反正切计算单位的r = tan-1（I3 / R3），从而获得相位差。

公开(公告)号：US20150209890A1

公开(公告)日：2015-07-30

申请号：US14602810

申请日：2015-01-22

申请人： DAIHEN Corporation

发明人： Gen TSUJII ,  Ryoji TAMAKI

IPC分类号： B23K9/133

CPC分类号： B23K9/1333 ,  B23K9/1336

摘要： A wire feeding mechanism includes feeding rollers and a cushioning mechanism. The feeding rollers feed a wire, which is drawn from a wire supply source, along a predetermined feed path. The cushioning mechanism is arranged between the wire supply source and the feeding rollers. The wire has an intermediate portion that extends from the wire supply source to the feeding rollers. The cushioning mechanism applies tension to the intermediate portion while the length of the intermediate portion is changing.

摘要翻译： 送丝机构包括进给辊和缓冲机构。 馈送辊沿着预定的馈送路径馈送从电线供应源拉出的电线。 缓冲机构设置在电线供给源和进给辊之间。 电线具有从电线供应源延伸到馈送辊的中间部分。 缓冲机构在中间部分的长度改变时向中间部分施加张力。

公开(公告)号：US20150122420A1

公开(公告)日：2015-05-07

申请号：US14526900

申请日：2014-10-29

申请人： Tokyo Electron Limited ,  Daihen Corporation

发明人： Hiroo Konno ,  Takashi Shimomoto

IPC分类号： H01J37/32

CPC分类号： H01J37/32146 ,  H01J37/32155 ,  H01J37/32165 ,  H01J37/32926 ,  H01J37/32935 ,  H01J2237/327 ,  H01J2237/3321 ,  H01J2237/334

摘要： A plasma processing apparatus can control a ratio between an input power during a pulse-on period and an input power during a pulse-off period by a matching operation of a matching device provided on a high frequency transmission line for supplying the high frequency power as a continuous wave without a power modulation. An impedance sensor 96A provided in a matching device of a plasma generation system includes a RF voltage detector 100; a voltage-detection-signal generating circuit 102; an arithmetic-average-value calculating circuit 104; a weighted-average-value calculating circuit 106; and a moving-average-value calculating unit 108 of a voltage sensor system, and also includes a RF electric current detector 110; an electric current-detection-signal generating circuit 112; an arithmetic-average-value calculating circuit 114; a weighted-average-value calculating circuit 116; a moving-average-value calculating unit 118; and an impedance calculating circuit 120 of an electric current sensor system.

摘要翻译： 等离子体处理装置可以通过设置在用于提供高频功率的高频传输线上的匹配装置的匹配操作来控制脉冲打开期间的输入功率与脉冲关闭期间的输入功率之间的比例， 没有功率调制的连续波。 设置在等离子体发生系统的匹配装置中的阻抗传感器96A包括RF电压检测器100; 电压检测信号发生电路102; 算术平均值计算电路104; 加权平均值计算电路106; 和电压传感器系统的移动平均值计算单元108，并且还包括RF电流检测器110; 电流检测信号发生电路112; 算术平均值计算电路114; 加权平均值计算电路116; 移动平均值计算单元118; 以及电流传感器系统的阻抗计算电路120。

公开(公告)号：US20150092462A1

公开(公告)日：2015-04-02

申请号：US14495394

申请日：2014-09-24

申请人： DAIHEN Corporation

发明人： Akihiro OHORI ,  Nobuyuki HATTORI

IPC分类号： H02M7/44

CPC分类号： H02M7/44 ,  H02J3/385 ,  H02M1/42 ,  H02M3/04 ,  H02M7/493 ,  H02M7/53873 ,  H02M7/5395 ,  H02M2001/0003 ,  H02M2001/0022 ,  H02M2001/0025 ,  H02M2001/007 ,  H02M2007/4822 ,  Y02B70/12 ,  Y02E10/58

摘要： A control circuit controls the inverter circuit in one of the non-master-slave inverters connected in parallel in a power system. The control circuit includes: a target parameter controller for generating a compensation value for adjusting a target parameter to the target value; a cooperative correction value generator for generating a correction value for cooperating with another of the inverters; a PWM signal generator for generating a PWM signal based on a correction compensation value obtained by adding the correction value to the compensation value; a weighting unit for weighting the correction compensation value; and a communication unit for communicating with other inverters. The communication unit transmits the weighted correction compensation value to the other inverters. The cooperative correction value generator generates the correction value using an operation result based on the weighted correction compensation value and a reception compensation value received by the communication unit from the other inverters.

摘要翻译： 控制电路控制在电力系统中并联连接的非主从逆变器之一的逆变器电路。 控制电路包括：目标参数控制器，用于产生用于将目标参数调整为目标值的补偿值; 合作校正值发生器，用于产生与另一个逆变器协作的校正值; PWM信号发生器，用于基于通过将所述校正值与所述补偿值相加而获得的校正补偿值来产生PWM信号; 用于对所述校正补偿值进行加权的加权单元; 以及与其他逆变器通信的通信单元。 通信单元将加权校正补偿值发送到其他逆变器。 协作校正值发生器使用基于加权校正补偿值的运算结果和由通信单元从其他逆变器接收的接收补偿值来生成校正值。

公开(公告)号：US20130082636A1

公开(公告)日：2013-04-04

申请号：US13630381

申请日：2012-09-28

申请人： DAIHEN CORPORATION

发明人： Akihiro OHORI ,  Nobuyuki HATTORI

IPC分类号： H02P4/00 ,  G06F17/14 ,  H03H17/06 ,  H02M1/12

CPC分类号： H02M1/12 ,  G06F17/147 ,  H02M7/44 ,  H02P4/00 ,  H02P21/00 ,  H02P21/22 ,  H03H17/06

摘要： A signal processor is configured to perform a process equivalent to performing a series of fixed-to-rotating coordinate conversion, a predetermined process and then rotating-to-fixed coordinate conversion, while maintaining linearity and time-invariance. The signal processor performs a process given by the following matrix G: G = [ F  ( s + jω 0 ) + F  ( s - jω 0 ) 2 F  ( s + jω 0 ) - F  ( s - jω 0 ) 2  j - F  ( s + jω 0 ) - F  ( s - jω 0 ) 2  j F  ( s + jω 0 ) + F  ( s - jω 0 ) 2 ] where F(s) is a transfer function representing the predetermined process, ω0 is a predetermined angular frequency and j is the imaginary unit.

摘要翻译： 信号处理器被配置为执行等同于执行一系列固定到旋转坐标转换，预定处理，然后旋转到固定坐标转换的处理，同时保持线性度和时间不变性。 信号处理器执行由以下矩阵G给出的处理：G = [F（s +jω0）+ F（s-jω0）2 F（s +jω0）-F（s-jω0 ）s（s +jω0）+ F（s-jω0）2]其中F（s）是 表示预定处理的传递函数ω0是预定角频率，j是虚数单位。