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74 条记录 (耗时 0.025 秒)

    Method of and platen for controlling removal rate characteristics in chemical mechanical planarization
    62.
    发明授权
    Method of and platen for controlling removal rate characteristics in chemical mechanical planarization 失效
    用于控制化学机械平面化中去除率特性的方法和压板

    公开(公告)号：US06955588B1

    公开(公告)日：2005-10-18

    申请号：US10816431

    申请日：2004-03-31

    申请人： Robert L. Anderson, II ,  Robert Charatan

    发明人： Robert L. Anderson, II ,  Robert Charatan

    IPC分类号： B24B1/00 ,  B24B37/04

    CPC分类号： B24B37/12

    摘要： Methods and a platen control parameters of a removal rate characteristic in chemical mechanical planarization, while allowing a low-cost polishing pad to be used especially in fast edge operations, and while reducing the amount of fluid used to support the polishing pad. Platen configuration provides fluid pressure control to reduce leakage of fluid from beneath the polishing pad, and contributes to control of a location of an inflection point of the removal rate characteristic. Another configuration controls a shape of a section of the removal rate characteristic between the inflection point and a leading wafer edge.

    摘要翻译： 方法和化学机械平面化中去除速率特性的压板控制参数，同时允许低成本抛光垫特别用于快速边缘操作，并且同时减少用于支撑抛光垫的流体的量。 压板配置提供流体压力控制以减少来自抛光垫下方的流体的泄漏，并且有助于控制去除速率特性的拐点的位置。 另一种配置控制拐点和前缘晶片边缘之间的去除速率特性的一部分的形状。

    Systems and methods for overcoming stiction
    64.
    发明授权
    Systems and methods for overcoming stiction 失效
    用于克服静止的系统和方法

    公开(公告)号：US06791235B2

    公开(公告)日：2004-09-14

    申请号：US10719857

    申请日：2003-11-20

    申请人： David Miller ,  Lilac Muller ,  Robert L. Anderson

    发明人： David Miller ,  Lilac Muller ,  Robert L. Anderson

    IPC分类号： H02N200

    CPC分类号： G02B6/352 ,  B81B2201/042 ,  B81C1/00968 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3564 ,  G02B6/3568 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841 ,  H02N1/002 ,  H02N1/006

    摘要： A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.

    摘要翻译： 提供了一些用于克服静摩擦的方法和系统。 这些系统包括能够在容易产生静电的区域上施加各种力的机电系统。 这些系统可以是MEMS阵列或其他类型的器件，其中发生静摩擦力。 这些方法包括在容易产生粘连力的地区引起运动的各种方法。 这种运动本质上可以是振动的，并且足以克服静摩擦，允许被困元件移动到期望的位置。

    Queued port data controller for microprocessor-based engine control applications
    65.
    发明授权
    Queued port data controller for microprocessor-based engine control applications 失效
    排队端口数据控制器，用于基于微处理器的发动机控制应用

    公开(公告)号：US06381532B1

    公开(公告)日：2002-04-30

    申请号：US09665094

    申请日：2000-09-20

    申请人： Gary T. Bastian ,  Kevin M. Rishavy ,  Martin G. Gravenstein ,  Robert L. Anderson ,  Rollie M. Fisher ,  Raymond A. Stevens ,  Samuel J. Guido

    发明人： Gary T. Bastian ,  Kevin M. Rishavy ,  Martin G. Gravenstein ,  Robert L. Anderson ,  Rollie M. Fisher ,  Raymond A. Stevens ,  Samuel J. Guido

    IPC分类号： G06F1310

    CPC分类号： G06F13/4059

    摘要： An engine control system comprising a host processor in operative communication with a data bus and a plurality of peripheral devices for communicating engine operating parameters. Each of the peripheral devices include a first and second transaction register for storing communication parameters for each of the corresponding plurality of peripheral devices. The control system also includes a queued port rate register (QRR) including a memory unit in operative communication with the plurality of peripheral devices for storing data for transmission to the plurality of peripheral devices in accordance with the first and second transaction registers. The system further includes a peripheral counter in operative communication with each of the plurality of peripheral devices. The peripheral counter is adapted to interrogate each of the plurality of peripheral devices and, when data has been written to one of the peripheral devices, update the peripheral device according to the memory unit data.

    摘要翻译： 一种发动机控制系统，包括与数据总线可操作地通信的主处理器和用于通信发动机操作参数的多个外围设备。 每个外围设备包括用于存储对应的多个外围设备中的每一个的通信参数的第一和第二事务寄存器。 控制系统还包括排队端口速率寄存器（QRR），其包括与多个外围设备进行操作通信的存储器单元，用于根据第一和第二事务寄存器存储用于传输到多个外围设备的数据。 该系统还包括与多个外围设备中的每一个操作通信的外围计数器。 周边计数器适于询问多个外围设备中的每一个，并且当数据已被写入外围设备之一时，根据存储器单元数据来更新外围设备。

    Physical vapor deposition employing ion extraction from a plasma
    66.
    发明授权
    Physical vapor deposition employing ion extraction from a plasma 失效
    使用从等离子体离子提取的物理气相沉积

    公开(公告)号：US5482611A

    公开(公告)日：1996-01-09

    申请号：US133595

    申请日：1993-10-08

    申请人： John C. Helmer ,  Kwok F. Lai ,  Robert L. Anderson

    发明人： John C. Helmer ,  Kwok F. Lai ,  Robert L. Anderson

    IPC分类号： C23C14/35 ,  H01J23/10 ,  H01J37/34 ,  H01L21/203 ,  H01L21/285

    CPC分类号： H01J37/32192 ,  H01J37/3405 ,  H01J37/342 ,  H01J37/3497

    摘要： A sputter magnetron ion source for producing an intense plasma in a cathode container which ionizes a high and substantial percentage of the sputter cathode material and means for extracting the ions of the cathode material in a beam. The ion extraction means is implemented by a magnetic field cusp configuration with a null region adjacent to the open end of the cathode container. Ions so produced are able to be directed at right angles to a substrate being coated for efficient via filling.

    摘要翻译： 一种用于在阴极容器中产生强等离子体的溅射磁控管离子源，该离子源电离了高比例的溅射阴极材料，以及用于提取光束中阴极材料的离子的装置。 离子提取装置通过具有与阴极容器的开口端相邻的零点区域的磁场尖点构造来实现。 如此生产的离子能够与正被涂覆的基底成直角，有效地通过填充。

    Snap-in nut for frame attachment to body
    67.
    发明授权
    Snap-in nut for frame attachment to body 失效
    用于框架连接到身体的卡入螺母

    公开(公告)号：US4828440A

    公开(公告)日：1989-05-09

    申请号：US222698

    申请日：1988-07-22

    申请人： Robert L. Anderson ,  John E. Parks

    发明人： Robert L. Anderson ,  John E. Parks

    IPC分类号： F16B37/02 ,  F16B37/04

    CPC分类号： F16B37/043 ,  F16B37/02 ,  Y10S411/97

    摘要： A nut is comprised of a one piece stamping having a base wall with an integrally formed conical nut. A frame member has a bolt receiving first aperture in a first planar wall and a nut receiving second aperture in a second planar wall extending at a generally perpendicular angle with respect to the first planar wall. The stamping has integral stop tabs which engage with the frame member to limit the insertion of the stamping into the second aperture so that the conical nut is registered with the bolt receiving first aperture. First and second integral flexure arms flex inwardly upon insertion of the stamping through the second aperture and then engage with the inner surface of the frame member to retain the stamping against removal from the frame member. Integral flanges engage with the walls of the frame member defining the second aperture to cooperate with the stop tabs and the flexure arms to maintain the base wall in position registering the conical nut with the bolt receiving first aperture and to restrain the stamping against rotation relative to the frame member upon the threaded installation of a bolt into the conical nut.

    摘要翻译： 螺母由单件冲压件构成，其具有带有整体形成的锥形螺母的底壁。 框架构件具有在第一平面壁中接收第一孔的螺栓和在相对于第一平面壁以大致垂直的角度延伸的第二平面壁中的第二孔的螺母。 冲压具有与框架构件接合以限制将冲压件插入第二孔中的整体止动片，使得锥形螺母与接收第一孔的螺栓对准。 第一和第二整体弯曲臂在冲压穿过第二孔插入时向内弯曲，然后与框架构件的内表面接合，以保持冲压而不从框架构件移除。 整体法兰与限定第二孔的框架构件的壁接合，以与止动接头和挠曲臂配合，以使基壁保持与螺栓接收第一孔对准的锥形螺母的位置，并且限制冲压相对于 框架构件在将螺栓螺纹安装到锥形螺母中时。

    Output transistor driver diagnostic system
    68.
    发明授权
    Output transistor driver diagnostic system 失效
    输出晶体管驱动诊断系统

    公开(公告)号：US4538106A

    公开(公告)日：1985-08-27

    申请号：US503924

    申请日：1983-06-13

    申请人： Robert L. Anderson

    发明人： Robert L. Anderson

    IPC分类号： G01R31/26 ,  G08B21/00

    CPC分类号： G01R31/2608

    摘要： An apparatus for diagnosing the operation of a plurality of output transistor drivers includes a plurality of detection transistors, a reference resistor and a voltage detector. Each detection resistor is coupled from a collector of one output transistor driver to a common node. The reference resistor is coupled between the common node and a ground potential. The voltage detector measures voltage across the reference resistor to determine the existence of an improperly functioning transistor. The test method includes turning off all the transistor drivers, detecting the voltage, and comparing the voltage to a reference voltage to determine if any transistors are shorted. If there are no shorts, the transistors are sequentially turned on to determine if any transistors are open.

    摘要翻译： 用于诊断多个输出晶体管驱动器的操作的装置包括多个检测晶体管，参考电阻器和电压检测器。 每个检测电阻器从一个输出晶体管驱动器的集电极耦合到公共节点。 参考电阻耦合在公共节点和地电位之间。 电压检测器测量参考电阻两端的电压，以确定晶体管功能不正常的存在。 测试方法包括关闭所有晶体管驱动器，检测电压，并将电压与参考电压进行比较，以确定是否有任何晶体管短路。 如果没有短路，则晶体管依次导通，以确定是否有任何晶体管断开。

    Temperature probe
    70.
    发明授权
    Temperature probe 失效
    温度探头

    公开(公告)号：US4237091A

    公开(公告)日：1980-12-02

    申请号：US917469

    申请日：1978-06-21

    申请人： Donn D. Lobdell ,  Stephen J. Herman ,  Robert L. Anderson

    发明人： Donn D. Lobdell ,  Stephen J. Herman ,  Robert L. Anderson

    IPC分类号： A61M5/44 ,  G01K1/14 ,  G01K13/00 ,  A61M1/03

    CPC分类号： G01K1/14 ,  A61M5/445 ,  G01K13/002 ,  Y10T403/7007

    摘要： Making temperature measurements of blood inside a disposable, sterilized medical device by providing receptacles in the walls of the device for receiving temperature-sensitive probes, the receptacles including a tubular heat-conductive member, extending through a wall of the device and being sealed to the wall, and a cylindrical body having protuberances extending radially for cooperating with slots in a temperature-sensitive probe.

    摘要翻译： 通过在用于接收温度敏感探针的装置的壁中提供容器来对一次性消毒的医疗装置内的血液进行温度测量，所述容器包括管状导热构件，其延伸穿过所述装置的壁并被密封到 壁和圆柱体，其具有径向延伸的突起，以与温度敏感探针中的槽配合。