Coating and developing system and coating and developing method
    61.
    发明申请
    Coating and developing system and coating and developing method 有权
    涂层开发系统及涂层开发方法

    公开(公告)号:US20060165409A1

    公开(公告)日:2006-07-27

    申请号:US11335635

    申请日:2006-01-20

    IPC分类号: G03D5/00

    摘要: A coating and developing system includes a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system is capable of coping with either of a case where antireflection films are formed and a case where any antireflection film is not formed and needs simple software. Film forming unit blocks, namely, a TCT layer B3, a COT layer B4 and a BCT layer B5, and developing unit blocks, namely, DEV layers B1 and B2, are stacked up in layers in a processing block S2. The TCT layer B3, the COT layer B4 and the BCT layer B5 are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a simple carrying program and simple software.

    摘要翻译: 涂覆显影系统包括:抗蚀剂膜形成单元块和层叠的抗反射膜形成单元块,以形成抗蚀剂膜和抗反射膜下面的抗反射膜以及在小空间中覆盖抗蚀剂膜的抗反射膜。 涂层显影系统能够应对形成防反射膜的情况和没有形成任何抗反射膜的情况,并且需要简单的软件。 成膜单位块,即TCT层B 3,COT层B 4和BCT层B 5以及显影单元块,即DEV层B 1和B 2,层叠在处理块S 在形成防反射膜的情况下选择性地使用TCT层B 3,COT层B 4和BCT层B 5以及未形成任何抗反射膜的情况。 涂层和显影系统由简单的携带程序和简单的软件控制。

    Liquid state detecting element and liquid state detecting sensor
    62.
    发明授权
    Liquid state detecting element and liquid state detecting sensor 失效
    液态检测元件和液体状态检测传感器

    公开(公告)号:US07064560B2

    公开(公告)日:2006-06-20

    申请号:US11029021

    申请日:2005-01-05

    IPC分类号: G01R27/26

    CPC分类号: G01N27/226 G01F23/268

    摘要: A liquid state detecting element comprising: a film portion made of a flexible insulating material and extending in a longitudinal direction; and a pair of detecting electrodes juxtaposed to each other on a layer of said film portion and extending in said longitudinal direction, in which said detecting electrodes are for being immersed at least partially in a liquid to be measured, so that a state of said measured liquid is detected on a basis of an electrostatic capacity between said pair of detecting electrodes, wherein: said liquid state detecting element further comprises reinforcing portions made of a conductive material and disposed on said layer of said film portion on an outer side of said detecting electrodes; and said reinforcing portions include: a grounding terminal for being connected with a ground line; and a pair of parallel reinforcing portions extending in said longitudinal direction along side edges of said film portion so as to sandwich said pair of detecting electrodes.

    摘要翻译: 一种液态检测元件,包括:由柔性绝缘材料制成并沿纵向方向延伸的膜部分; 以及一对检测电极,在所述膜部分的层上彼此并排并且在所述纵向方向上延伸,其中所述检测电极至少部分地浸入待测量的液体中,使得所述测量的状态 基于所述一对检测电极之间的静电电容来检测液体,其中:所述液体状态检测元件还包括由导电材料制成的加强部分,并且设置在所述膜部分的所述层上,在所述检测电极的外侧 ; 所述加强部包括:与接地线连接的接地端子; 以及沿所述纵向方向沿所述膜部分的侧边缘延伸以便夹着所述一对检测电极的一对平行加强部分。

    Coating unit and coating method
    64.
    发明授权

    公开(公告)号:US06982102B2

    公开(公告)日:2006-01-03

    申请号:US10801817

    申请日:2004-03-17

    IPC分类号: B05D3/00

    摘要: The present invention is a coating unit for applying a coating solution on a substrate, comprising: a container enclosing the substrate; a casing for accommodating the container therein; a supply device for supplying a predetermined gas into the casing; a first exhaust pipe for exhausting an atmosphere inside the container; a second exhaust pipe for exhausting an atmosphere inside the casing; a first adjusting device which is disposed in the first exhaust pipe, for adjusting a flow rate of an atmosphere passing through the first exhaust pipe; and a second adjusting device which is disposed in the second exhaust pipe, for adjusting a flow rate of an atmosphere passing through the second exhaust pipe. According to the present invention, the second exhaust pipe is usable for adjusting the exhaust flow rate to maintain a pressure inside the casing at a positive pressure. This makes it possible to divide, with the use of the first exhaust pipe and the second exhaust pipe, the work which satisfies the conditions of exhausting the atmosphere inside the casing to maintain the pressure inside the casing at the positive pressure relative to an amount of the supplied gas and exhausting the atmosphere inside the container at a predetermined flow rate or higher to prevent the atmosphere inside the container from flowing out of the container. Thereby, the atmospheres inside the casing and the container can be controlled more easily.

    Resin-bonded magnet
    67.
    发明授权
    Resin-bonded magnet 失效
    树脂粘结磁铁

    公开(公告)号:US06641919B1

    公开(公告)日:2003-11-04

    申请号:US09856665

    申请日:2001-07-16

    IPC分类号: B32B502

    摘要: A resin-bonded type magnet molded from a composition comprising a magnetic powder and a resin powder in which a resin binder comprises at least one unsaturated polyester resin cured product as the main ingredient. The resin binder contains a peroxide or a reaction product thereof capable of curing at a temperature of 150° C. or lower, and an anisotropic magnetic field of the magnetic powder is 50 kOe or more, and 50% by weight or more of the particles of magnetic powder has a grain size of 100 &mgr;m or less. The resin-bonded type magnet is obtained by molding by an injection molding process, an injection molding, a compression process, an injection compression molding process, an injection pressing molding process, or a transfer molding process.

    摘要翻译: 由包含磁性粉末和树脂粉末的组合物成型的树脂粘合型磁体,其中树脂粘合剂包含至少一种不饱和聚酯树脂固化产物作为主要成分。 树脂粘合剂含有能够在150℃以下的温度下固化的过氧化物或其反应产物,磁性粉末的各向异性磁场为50kOe以上,50质量%以上的粒子 的磁粉的粒径为100μm以下。 树脂粘合型磁体通过注射成型法,注塑法,压缩法,注射压缩成型法,注射成型法或传递成型法成型而得到。

    Method for measuring shape of object and apparatus for carrying out the
same
    69.
    发明授权
    Method for measuring shape of object and apparatus for carrying out the same 失效
    用于测量物体的形状的方法和用于执行其的装置

    公开(公告)号:US6061136A

    公开(公告)日:2000-05-09

    申请号:US967938

    申请日:1997-11-12

    申请人: Shinichi Hayashi

    发明人: Shinichi Hayashi

    IPC分类号: G01B9/02 G01B11/00 G01B11/24

    CPC分类号: G01B11/002 G01B11/24

    摘要: In a method of measuring or estimating the shape of an object under inspection in a very precise manner, an interference image is formed by composing an inspection light beam having information about the shape of the object under inspection and a reference light beam with an interferometer and an imaging optical means, phase singular points are detected from the interference image by processing an image signal produced by an image sensing element receiving the interference image, the position of a reference point of the object under inspection is measured, the relative positions of the detected phase singular points with respect to the position of the reference point are detected in a calculation unit, and the shape of the object is estimated by using the thus detected relative positions and a correlation between the relative positions and the shape of the object in the calculation unit. The correlation has been theoretically or experimentally derived and has been previously stored in the calculation unit.

    摘要翻译: 在以非常精确的方式测量或估计被检查物体的形状的方法中,通过组合具有关于被检查物体的形状和参考光束与干涉仪的信息的检查光束来形成干涉图像, 成像光学装置,通过处理由接收干涉图像的图像感测元件产生的图像信号,从干涉图像检测相位奇异点,测量被检查物体的参考点的位置,检测到的相对位置 在计算单元中检测相对于基准点的位置的相位奇点,并且通过使用这样检测的相对位置和计算中的对象的相对位置与形状之间的相关性来估计对象的形状 单元。 相关性已经在理论上或实验上导出,并且已经预先存储在计算单元中。