摘要:
A coating and developing system includes a resist film forming unit block and antireflection film forming unit blocks stacked up in layers to form a resist film and an antireflection film underlying the resist film and an antireflection film overlying the resist film in a small space. The coating and developing system is capable of coping with either of a case where antireflection films are formed and a case where any antireflection film is not formed and needs simple software. Film forming unit blocks, namely, a TCT layer B3, a COT layer B4 and a BCT layer B5, and developing unit blocks, namely, DEV layers B1 and B2, are stacked up in layers in a processing block S2. The TCT layer B3, the COT layer B4 and the BCT layer B5 are used selectively in the case where antireflection films are formed and the case where any antireflection film is not formed. The coating and developing system is controlled by a simple carrying program and simple software.
摘要:
A liquid state detecting element comprising: a film portion made of a flexible insulating material and extending in a longitudinal direction; and a pair of detecting electrodes juxtaposed to each other on a layer of said film portion and extending in said longitudinal direction, in which said detecting electrodes are for being immersed at least partially in a liquid to be measured, so that a state of said measured liquid is detected on a basis of an electrostatic capacity between said pair of detecting electrodes, wherein: said liquid state detecting element further comprises reinforcing portions made of a conductive material and disposed on said layer of said film portion on an outer side of said detecting electrodes; and said reinforcing portions include: a grounding terminal for being connected with a ground line; and a pair of parallel reinforcing portions extending in said longitudinal direction along side edges of said film portion so as to sandwich said pair of detecting electrodes.
摘要:
In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.
摘要:
The present invention is a coating unit for applying a coating solution on a substrate, comprising: a container enclosing the substrate; a casing for accommodating the container therein; a supply device for supplying a predetermined gas into the casing; a first exhaust pipe for exhausting an atmosphere inside the container; a second exhaust pipe for exhausting an atmosphere inside the casing; a first adjusting device which is disposed in the first exhaust pipe, for adjusting a flow rate of an atmosphere passing through the first exhaust pipe; and a second adjusting device which is disposed in the second exhaust pipe, for adjusting a flow rate of an atmosphere passing through the second exhaust pipe. According to the present invention, the second exhaust pipe is usable for adjusting the exhaust flow rate to maintain a pressure inside the casing at a positive pressure. This makes it possible to divide, with the use of the first exhaust pipe and the second exhaust pipe, the work which satisfies the conditions of exhausting the atmosphere inside the casing to maintain the pressure inside the casing at the positive pressure relative to an amount of the supplied gas and exhausting the atmosphere inside the container at a predetermined flow rate or higher to prevent the atmosphere inside the container from flowing out of the container. Thereby, the atmospheres inside the casing and the container can be controlled more easily.
摘要:
In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.
摘要:
Thermal processing unit sections each with ten tiers and coating processing unit sections each with five tiers are disposed around a first main wafer transfer section and a second main wafer transfer section, and in the thermal processing unit section, the influence of the time required for substrate temperature regulation processing on a drop in throughput can be reduced greatly by transferring the wafer W while the temperature of the wafer W is being regulated by a temperature regulation and transfer device.
摘要:
A resin-bonded type magnet molded from a composition comprising a magnetic powder and a resin powder in which a resin binder comprises at least one unsaturated polyester resin cured product as the main ingredient. The resin binder contains a peroxide or a reaction product thereof capable of curing at a temperature of 150° C. or lower, and an anisotropic magnetic field of the magnetic powder is 50 kOe or more, and 50% by weight or more of the particles of magnetic powder has a grain size of 100 &mgr;m or less. The resin-bonded type magnet is obtained by molding by an injection molding process, an injection molding, a compression process, an injection compression molding process, an injection pressing molding process, or a transfer molding process.
摘要:
In a communication system for downloading programs from a center to in-vehicle terminals, a center can check whether downloading has been completed normally or a program is operating normally in an in-vehicle terminal. According to the timing of activating a downloaded program, an in-vehicle terminal checks whether the program is activated to operate normally. The information is transmitted to the center. Based on the information, the center becomes aware of the fact that downloading has been completed without any problem and that the program is operating normally in the in-vehicle terminal.
摘要:
In a method of measuring or estimating the shape of an object under inspection in a very precise manner, an interference image is formed by composing an inspection light beam having information about the shape of the object under inspection and a reference light beam with an interferometer and an imaging optical means, phase singular points are detected from the interference image by processing an image signal produced by an image sensing element receiving the interference image, the position of a reference point of the object under inspection is measured, the relative positions of the detected phase singular points with respect to the position of the reference point are detected in a calculation unit, and the shape of the object is estimated by using the thus detected relative positions and a correlation between the relative positions and the shape of the object in the calculation unit. The correlation has been theoretically or experimentally derived and has been previously stored in the calculation unit.
摘要:
A method for treating or preventing periodontal disease which comprises administering ofloxacin or salts thereof locally to periodontal tissue are disclosed. The method is excellent on the treatment of periodontal disease in small dose without disturbance of bacterial flora.