公开(公告)号：US06250156B1

公开(公告)日：2001-06-26

申请号：US09298631

申请日：1999-04-23

Applicant: Ashwin A. Seshia ,  Roger T. Howe

Inventor： Ashwin A. Seshia ,  Roger T. Howe

IPC: G01C1900

CPC classification number: G01C19/5719

Abstract: A microfabricated gyroscopic sensor for measuring rotation about a Z-axis. The sensor includes a substrate, a first mass, a second mass, a coupling system connecting the first mass and the second mass, and a suspension system connecting the first mass and the second mass to the substrate. The sensor further includes a drive system to cause the first mass and the second mass to vibrate in an antiphase mode along a drive axis, and a position sensor to measure a displacement of the first mass and the second mass along a sense axis perpendicular to the drive axis and generally parallel to the surface of the substrate, wherein rotation of the first mass and the second mass about the Z-axis perpendicular to the surface of the substrate and vibration of the first mass and the second mass along the drive axis generates a Coriolis force to vibrate the first mass and the second mass along the sense axis in antiphase to each other.

Abstract translation: 用于测量围绕Z轴的旋转的微制造陀螺仪传感器。 传感器包括基板，第一质量块，第二质量块，连接第一质量块和第二质量块的联接系统，以及将第一质量块和第二质量块连接到衬底的悬架系统。 传感器还包括驱动系统，其使第一质量块和第二质量块沿着驱动轴以反相模式振动;以及位置传感器，用于测量第一质量块和第二质量块沿垂直于 驱动轴线并且大致平行于基板的表面，其中第一质量块和第二质量块围绕垂直于衬底表面的Z轴的旋转和沿着驱动轴线的第一质量块和第二质量块的振动产生一个 科里奥利力使第一质量和第二质量沿着感测轴彼此反相振动。

公开(公告)号：US5969249A

公开(公告)日：1999-10-19

申请号：US073747

申请日：1998-05-06

Applicant: Trey Roessig ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Trey Roessig ,  Roger T. Howe ,  Albert P. Pisano

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/09

CPC classification number: G01P15/097 ,  G01P15/0802 ,  G01P2015/0814

Abstract: An accelerometer comprises a proof mass, a first resonant tuning fork connected to the proof mass, a second resonant tuning fork connected to the proof mass, and a flexural lever leverage system supporting the proof mass above a substrate. The flexural lever leverage system enhances an acceleration force applied to the proof mass to cause a tensile force in the first resonant tuning fork which raises its resonant frequency, and a compressive force in the second resonant tuning fork which lowers its resonant frequency. The device may be fabricated using semiconductor-based surface-micromachining technology.

Abstract translation: 加速度计包括检测质量块，连接到检验质量块的第一谐振音叉，连接到校验块的第二谐振音叉，以及支撑在衬底上方的校准块的弯曲杆杠杆系统。 弯曲杆杠杆系统增强了施加到检验质量块上的加速力，从而在第一共振音叉中引起拉力，从而提高其共振频率，并使第二共振音叉中的压缩力降低其谐振频率。 该器件可以使用基于半导体的表面微加工技术来制造。

公开(公告)号：US5919364A

公开(公告)日：1999-07-06

申请号：US669149

申请日：1996-06-24

Applicant: Kyle S. Lebouitz ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Kyle S. Lebouitz ,  Roger T. Howe ,  Albert P. Pisano

IPC: B01D71/02 ,  B01L3/00 ,  B81B1/00 ,  B81B7/00 ,  B81C1/00 ,  G01N33/49 ,  G03F7/00 ,  B01D63/00

CPC classification number: B81C1/00333 ,  B01D67/0072 ,  B01D67/0093 ,  B01D71/02 ,  B01L3/502707 ,  B01L3/502753 ,  B81C1/00158 ,  G01N33/491 ,  G03F7/00 ,  B01D2323/225 ,  B01D2325/04 ,  B01L2200/12 ,  B01L2300/0681

Abstract: Microfabricated filters constructed with permeable polysilicon membranes and methods for fabricating such filters. The filters include a frame structure having a plurality of openings therethrough and a permeable polysilicon membrane disposed over the openings in the frame structure. The frame structure provides support for the permeable polysilicon membrane. The pores of the filter may be smaller than the resolution limit of photolithography. The width of the pores may be as small as about 0.01 .mu.m, while the length of the pores may be as small as about 0.05 .mu.m. The filters feature a relatively high throughput due to the extremely short pore length. The filters may be fabricated utilizing standard microfabrication processes. Also, microfabricated shells constructed with permeable membranes for encapsulating microfabricated devices such as microelectromechanical structures (MEMS) and methods for fabricating such shells. The shells include a frame structure having a plurality of openings therethrough, a permeable membrane disposed on the openings through the frame structure, an optional sealing structure disposed on the permeable membrane, and a cavity bounded by the frame structure. The frame structure provides support for the permeable membrane. The permeable membrane may be a thin film layer of polysilicon having a thickness of less than about 0.3 .mu.m. The shells and methods for fabricating the shells minimize the damage incurred by the encapsulated microfabricated device during the fabrication of the shell without restricting the width of the shell. The shells may be fabricated utilizing standard microfabrication processes.

Abstract translation: 用可渗透多晶硅膜构造的微型过滤器和制造这种过滤器的方法。 过滤器包括具有穿过其中的多个开口的框架结构和设置在框架结构中的开口上方的可渗透多晶硅膜。 框架结构为可渗透多晶硅膜提供支撑。 滤光器的孔可以小于光刻的分辨率极限。 孔的宽度可以小至约0.01μm，而孔的长度可以小至约0.05μm。 由于孔长度非常短，过滤器的生产量相对较高。 可以使用标准微加工工艺来制造过滤器。 而且，用可封装微结构器件（例如微机电结构（MEMS））和用于制造这种壳的方法的可渗透膜构成的微制造壳体。 壳体包括具有穿过其中的多个开口的框架结构，通过框架结构设置在开口上的可渗透膜，设置在可渗透膜上的可选密封结构以及由框架结构限定的空腔。 框架结构为渗透膜提供了支撑。 渗透膜可以是厚度小于约0.3μm的多晶硅薄膜层。 用于制造壳体的壳体和方法最小化在壳体制造期间由包封的微制造装置引起的损坏而不限制壳体的宽度。 壳可以使用标准的微细加工工艺制造。

公开(公告)号：US5403665A

公开(公告)日：1995-04-04

申请号：US79611

申请日：1993-06-18

Applicant: Rodney L. Alley ,  Roger T. Howe ,  Kyriakos Komyopoulos

Inventor： Rodney L. Alley ,  Roger T. Howe ,  Kyriakos Komyopoulos

IPC: B05D1/18 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  C09D4/00 ,  H02N1/00 ,  B31B9/04

CPC classification number: H02N1/002 ,  B05D1/185 ,  B81C1/00674 ,  B82Y30/00 ,  B82Y40/00 ,  C09D4/00 ,  Y10T428/31663

Abstract: A micromachine is lubricated in a fluid-based process. The known fluid-based process of releasing a sacrificial layer from a micromachine is followed by a fluid-based hydrophilic processing of the micromachine surfaces. A lubricating monolayer surface is then formed on the resultant hydrophilic micromachine surfaces. Afterwards, the surfaces are dried through conventional means.

Abstract translation: 微机械在基于流体的工艺中润滑。 从微机械释放牺牲层的已知的基于流体的方法之后是微机械表面的基于流体的亲水处理。 然后在所得的亲水微机械表面上形成润滑单层表面。 之后，通过常规方法干燥表面。

公开(公告)号：US4851080A

公开(公告)日：1989-07-25

申请号：US285347

申请日：1988-12-14

Applicant: Roger T. Howe ,  Shih-Chia Chang

Inventor： Roger T. Howe ,  Shih-Chia Chang

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18

CPC classification number: G01P15/18 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/084 ,  Y10S438/977

Abstract: An accelerometer is provided by a sample mass suspended in a central area of a support by pairs of resonating arms. One pair of arms lies on one axis through the sample mass. Another pair of arms lies on a second axis through the sample mass perpendicular to the one axis. Acceleration of the mass and support is detected by a measured change in resonant frequency of the arms of a pair. The measured change in resonant frequency is the magnitude of the acceleration and the axis along which the pair of arms lies provides the direction of the acceleration. Orthogonal components of acceleration are simultaneously measured by the pairs of arms lying on perpendicular axes. Electrostatic force-rebalance techniques and other known techniques for measuring acceleration in a direction perpendicular to the axes of the pairs of arms are readily incorporated to provide a third direction measurement of acceleration. The accelerometer is fabricated in a monolithic process which employs micromachining techniques.