公开(公告)号：US06507155B1

公开(公告)日：2003-01-14

申请号：US09544377

申请日：2000-04-06

申请人： Michael Barnes ,  John Holland ,  Valentin Todorov

发明人： Michael Barnes ,  John Holland ,  Valentin Todorov

IPC分类号： H01J724

CPC分类号： H01J37/32174 ,  H01J37/321

摘要： Method and apparatus for distributing power from a single power source to a plurality of coils disposed on a processing chamber which provides controllable plasma uniformity across a substrate disposed in the processing chamber. The apparatus for distributing power from a power source to two or more coils disposed on a process chamber comprises a connection between the power source and a first coil, a series capacitor connected between the power source and the second coil, and a shunt capacitor connected to a node between the second coil and the power source. The method for distributing power from one power source to a plurality of coils comprises connecting a first coil between the power source and a ground connection, connecting a first power distribution network to the power source, wherein each power distribution network comprises a series capacitor and a shunt capacitor, and connecting a second coil between the first power distribution network and a ground connection.

摘要翻译： 用于将功率从单个电源分配到设置在处理室上的多个线圈的方法和装置，其在布置在处理室中的衬底上提供可控的等离子体均匀性。 用于从电源将功率分配到设置在处理室上的两个或更多个线圈的装置包括电源和第一线圈之间的连接，连接在电源和第二线圈之间的串联电容器以及连接到 第二线圈和电源之间的节点。 用于从一个电源向多个线圈分配电力的方法包括将电源和接地连接之间的第一线圈连接，将第一配电网络连接到电源，其中每个配电网络包括串联电容器和 并联电容器，并且在第一配电网络和接地连接之间连接第二线圈。

公开(公告)号：US06414648B1

公开(公告)日：2002-07-02

申请号：US09611168

申请日：2000-07-06

申请人： John Holland ,  Valentin N. Todorow ,  Michael Barnes

发明人： John Holland ,  Valentin N. Todorow ,  Michael Barnes

IPC分类号： C23C1600

CPC分类号： H01J37/321

摘要： The invention in one embodiment is realized in a plasma reactor for processing a semiconductor workpiece. The reactor includes a vacuum chamber having a side wall and a ceiling, a workpiece support pedestal within the chamber and generally facing the ceiling, a gas inlet capable of supplying a process gas into the chamber and a solenoidal interleaved parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric helical solenoids of at least nearly uniform lateral displacements from the axis of symmetry, each helical solenoid being offset from the other helical solenoids in a direction parallel to the axis of symmetry. A RF plasma source power supply is connected across each of the plural conductors. In another embodiment, the antenna is a solenoidal segmented parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric side-by-side helical solenoids, each helical solenoid being offset by a distance on the order of a conductor width of the plurality of conductors from the nearest other helical solenoids in a direction perpendicular to the axis of symmetry, whereby each helical solenoid has slightly different diameter.

摘要翻译： 在一个实施例中的本发明在用于处理半导体工件的等离子体反应器中实现。 反应器包括具有侧壁和天花板的真空室，腔室内的工件支撑基座，并且大致面对天花板，能够将工艺气体供应到室中的气体入口和覆盖在天花板上的螺线管交错的并行导体线圈天线 并且包括缠绕在大致垂直于天花板的相应同心螺旋螺线管中的对称轴线的第一多个导体，其具有来自对称轴线的至少几乎均匀的横向位移，每个螺旋螺线管在与另一个螺旋螺线管平行的方向上偏离 对称轴。 RF等离子体源电源连接在多个导体中的每一个上。 在另一个实施例中，天线是覆盖天花板的螺线管分段并行导体线圈天线，并且包括缠绕在大致垂直于天花板的对称轴对称的第一多个导体，每个螺旋螺线管被偏置 在垂直于对称轴的方向上距离最近的其他螺旋螺线管的多根导体的导体宽度的数量级的距离，由此每个螺旋螺线管具有略微不同的直径。

公开(公告)号：US06409933B1

公开(公告)日：2002-06-25

申请号：US09610800

申请日：2000-07-06

申请人： John Holland ,  Valentin N. Todorow ,  Michael Barnes

发明人： John Holland ,  Valentin N. Todorow ,  Michael Barnes

IPC分类号： H01L2100

CPC分类号： H01J37/321

摘要： The invention is realized in a plasma reactor for processing a semiconductor workpiece. The reactor includes a vacuum chamber having a side wall and a ceiling, a workpiece support pedestal within the chamber and generally facing the ceiling, a gas inlet capable of supplying a process gas into the chamber and a solenoidal interleaved parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric helical solenoids of at least nearly uniform lateral displacements from the axis of symmetry, each helical solenoid being offset from the other helical solenoids in a direction parallel to the axis of symmetry. An RF plasma source power supply is connected across each of the plural conductors.

摘要翻译： 本发明在用于处理半导体工件的等离子体反应器中实现。 反应器包括具有侧壁和天花板的真空室，腔室内的工件支撑基座，并且大致面对天花板，能够将工艺气体供应到室中的气体入口和覆盖在天花板上的螺线管交错的并行导体线圈天线 并且包括缠绕在大致垂直于天花板的相应同心螺旋螺线管中的对称轴线的第一多个导体，其具有来自对称轴线的至少几乎均匀的横向位移，每个螺旋螺线管在与另一个螺旋螺线管平行的方向上偏离 对称轴。 RF等离子体源电源连接在多个导体中的每一个上。

公开(公告)号：US06170429B2

公开(公告)日：2001-01-09

申请号：US09163722

申请日：1998-09-30

申请人： Alan M. Schoepp ,  William M. Denty, Jr. ,  Michael Barnes

发明人： Alan M. Schoepp ,  William M. Denty, Jr. ,  Michael Barnes

IPC分类号： C23C1600

CPC分类号： H01J37/32495 ,  Y10S156/916

摘要： A chamber liner for use in a semiconductor process chamber and a semiconductor process chamber containing the chamber liner are disclosed. The process chamber includes a housing having an inner surface defining a chamber in which a vacuum is drawn during processing of a semiconductor wafer. The chamber liner has a plasma confinement shield with a plurality of apertures. An outer sidewall extends upwardly from the plasma confinement shield. An outer flange extends outwardly from the outer sidewall such that the outer flange extends beyond the chamber and into a space at atmospheric pressure. The chamber liner preferably further includes an inner sidewall that extends upwardly from the plasma confinement shield. The plasma confinement shield, the inner and outer sidewalls, and the outer flange are preferably integral with one another.

摘要翻译： 公开了一种用于半导体处理室的腔室衬垫和包含室内衬的半导体处理室。 处理室包括具有内表面的壳体，该内表面限定了在半导体晶片的处理期间抽出真空的腔室。 室衬里具有具有多个孔的等离子体限制屏蔽。 外侧壁从等离子体限制屏蔽向上延伸。 外凸缘从外侧壁向外延伸，使得外凸缘延伸超出室并进入大气压力的空间。 室衬里优选还包括从等离子体限制屏蔽向上延伸的内侧壁。 等离子体限制屏蔽体，内侧壁和外侧壁以及外部凸缘优选彼此成为一体。

公开(公告)号：US20140211662A1

公开(公告)日：2014-07-31

申请号：US14243510

申请日：2014-04-02

申请人： Alvaro E. Retana ,  Michael Barnes ,  Russell I. White ,  Alan Patrick Sheridan ,  Stanley M. Ratliff

发明人： Alvaro E. Retana ,  Michael Barnes ,  Russell I. White ,  Alan Patrick Sheridan ,  Stanley M. Ratliff

IPC分类号： H04L12/24

CPC分类号： H04L45/123 ,  H04L41/12 ,  H04L45/125 ,  H04W40/08 ,  H04W40/246 ,  Y02D70/122 ,  Y02D70/142 ,  Y02D70/144 ,  Y02D70/146 ,  Y02D70/22 ,  Y02D70/324

摘要： One embodiment identifies all one-hop neighbor nodes and two-hop neighbor nodes of a node; determines an active set of one-hop neighbor nodes for the node, comprising: includes in the active set each one-hop neighbor node that is either an edge node or connected with at least one two-hop neighbor node with which no other one-hop neighbor nodes are connected; and if the active set is not yet complete, then: determine all combinations of one-hop neighbor nodes that are not already in the active set; and tests each combination in order of each combination's total-energy value to determine whether a specific combination is able to complete the active set; if no combination is able to complete the active set, then including all one-hop neighbor nodes in the active set; and communicates a message to each one-hop neighbor node in the active set indicating that it is in the active set.

摘要翻译： 一个实施例标识节点的所有一跳邻居节点和两跳邻居节点; 确定所述节点的一跳邻居节点的活动集，包括：在所述活动集中包括作为边缘节点或与至少一个两跳相邻节点连接的每个一跳邻居节点， 跳邻居节点连接; 并且如果活动集尚未完成，则：确定尚未在活动集中的所有组合的一跳邻居节点; 并按照每个组合的总能量值的顺序测试每个组合，以确定特定组合是否能够完成活动集合; 如果没有组合能够完成活动集，则包括活动集中的所有一跳邻居节点; 并将消息传送到活动集中的每个一跳邻居节点，指示其在活动集中。

公开(公告)号：US20130137961A1

公开(公告)日：2013-05-30

申请号：US13749576

申请日：2013-01-24

申请人： Michael Barnes ,  Zhihong Pan ,  Sizhong Zhang

发明人： Michael Barnes ,  Zhihong Pan ,  Sizhong Zhang

IPC分类号： A61B5/00

CPC分类号： A61B5/1077 ,  A61B5/0059 ,  A61B5/0062 ,  A61B5/0064 ,  A61B5/0075 ,  A61B5/0077 ,  A61B5/0079 ,  A61B5/417 ,  A61B5/444 ,  A61B5/445 ,  A61B5/726 ,  A61B5/7267 ,  A61B5/742 ,  A61B2560/0223 ,  A61B2562/0233 ,  A61B2562/046 ,  G06K9/2018 ,  G06K2209/05

摘要： Under one aspect, an apparatus for analyzing the skin of a subject includes a hyperspectral sensor for obtaining a hyperspectral image of the subject. The apparatus further includes a control computer that is in electronic communication with the hyperspectral sensor and which controls at least one operating parameter of the hyperspectral sensor. The control computer includes a processor unit and a computer readable memory. The memory includes executable instructions for controlling the at least one operating parameter of the hyperspectral sensor. The memory includes executable instructions for applying a wavelength dependent spectral calibration standard constructed for the hyperspectral sensor to a hyperspectral image collected by the hyperspectral sensor. The apparatus further includes a light source that illuminates the skin of the subject for the hyperspectral sensor.

摘要翻译： 在一个方面，用于分析对象的皮肤的装置包括用于获得对象的高光谱图像的高光谱传感器。 该装置还包括与高光谱传感器电子通信并控制高光谱传感器的至少一个操作参数的控制计算机。 控制计算机包括处理器单元和计算机可读存储器。 存储器包括用于控制高光谱传感器的至少一个操作参数的可执行指令。 存储器包括用于将针对高光谱传感器构建的波长相关光谱校准标准应用于由高光谱传感器收集的高光谱图像的可执行指令。 该装置还包括照亮高光谱传感器的被摄体的皮肤的光源。

公开(公告)号：US07915139B1

公开(公告)日：2011-03-29

申请号：US12508461

申请日：2009-07-23

申请人： Chi-I Lang ,  Judy H. Huang ,  Michael Barnes ,  Sunil Shanker

发明人： Chi-I Lang ,  Judy H. Huang ,  Michael Barnes ,  Sunil Shanker

IPC分类号： H01L21/00

CPC分类号： H01L21/76837 ,  H01L21/02164 ,  H01L21/02216 ,  H01L21/02271 ,  H01L21/0234 ,  H01L21/31612 ,  H01L21/76826

摘要： The present invention meets these needs by providing improved methods of filling gaps. In certain embodiments, the methods involve placing a substrate into a reaction chamber and introducing a vapor phase silicon-containing compound and oxidant into the chamber. Reactor conditions are controlled so that the silicon-containing compound and the oxidant are made to react and condense onto the substrate. The chemical reaction causes the formation of a flowable film, in some instances containing Si—OH, Si—H and Si—O bonds. The flowable film fills gaps on the substrates. The flowable film is then converted into a silicon oxide film, for example by plasma or thermal annealing. The methods of this invention may be used to fill high aspect ratio gaps, including gaps having aspect ratios ranging from 3:1 to 10:1.

摘要翻译： 本发明通过提供填充间隙的改进方法来满足这些需要。 在某些实施方案中，所述方法包括将基材置于反应室中并将气相含硅化合物和氧化剂引入所述​​室中。 控制反应器条件使得含硅化合物和氧化剂反应并冷凝到基底上。 化学反应导致形成可流动的膜，在某些情况下，含有Si-OH，Si-H和Si-O键。 可流动膜填充基板上的间隙。 然后将可流动膜转化成氧化硅膜，例如通过等离子体或热退火。 本发明的方法可用于填充高纵横比间隙，包括具有3:1至10:1的纵横比的间隙。

公开(公告)号：US20100069758A1

公开(公告)日：2010-03-18

申请号：US12465150

申请日：2009-05-13

申请人： Michael Barnes ,  Zhihong Pan ,  Sizhong Zhang

发明人： Michael Barnes ,  Zhihong Pan ,  Sizhong Zhang

IPC分类号： A61B6/00

CPC分类号： A61B5/445 ,  A61B5/0059 ,  A61B5/015 ,  A61B5/0507 ,  A61B5/444 ,  A61B5/726

摘要： Under one aspect, a method of displaying medical information about a subject having a plurality of regions includes: resolving light obtained from each region of the plurality of regions into a corresponding spectrum; selecting a portion of each spectrum, the selected portion including medical information about the corresponding region; constructing an image based on the selected portion of each spectrum; and projecting the image onto the subject. Under another aspect, a method of displaying medical information about a subject that has a plurality of regions includes: resolving light obtained from each region of the plurality of regions into a corresponding spectrum; selecting a portion of each spectrum, the selected portion including medical information about the corresponding region; constructing a spectral image based on the selected portion of each spectrum; displaying an image of the plurality of regions; and displaying the spectral image overlying the image of the plurality of regions.

摘要翻译： 在一个方面，一种显示关于具有多个区域的对象的医学信息的方法包括：将从多个区域的每个区域获得的光分解成相应的光谱; 选择每个频谱的一部分，所选择的部分包括关于相应区域的医学信息; 基于每个频谱的所选部分构建图像; 并将图像投影到被摄体上。 在另一方面，一种显示关于具有多个区域的对象的医学信息的方法包括：将从所述多个区域中的每个区域获得的光分解成相应的光谱; 选择每个频谱的一部分，所选择的部分包括关于相应区域的医学信息; 基于每个频谱的所选部分构建光谱图像; 显示所述多个区域的图像; 以及显示覆盖所述多个区域的图像的光谱图像。

公开(公告)号：US20100061246A1

公开(公告)日：2010-03-11

申请号：US12207624

申请日：2008-09-10

申请人： Michael Barnes ,  Alvaro E. Retana ,  Paul Wells

发明人： Michael Barnes ,  Alvaro E. Retana ,  Paul Wells

IPC分类号： H04L12/56

CPC分类号： H04L45/123 ,  H04L45/12 ,  H04L45/48

摘要： In one embodiment, a method and apparatus of controlling transmission of data packets in a communications network includes designating all networking devices in a portion of the communications network as either hubs or spokes, communicating a link-state advertisement to each connected hub and spoke in the portion of the communications network, computing a shortest path tree at all the hubs and the spokes based on the link-state advertisement, the computing including truncating the shortest path tree at the hubs only for links leading from the spoke to the hub, creating a routing table at each of the hub and the spoke based on the truncated shortest path tree, and transmitting the data packets in the communications network based on the link-state advertisement. The shortest path tree includes all data transmission routes in the tree except links leading from a spoke to a hub.

摘要翻译： 在一个实施例中，控制通信网络中的数据分组传输的方法和装置包括将通信网络的一部分中的所有网络设备指定为集线器或辐条，将链路状态广告传送到每个连接的集线器并在 通信网络的一部分，基于链路状态广告在所有集线器和轮辐处计算最短路径树，所述计算包括仅在从轮辐到集线器的链路上截断中心处的最短路径树，从而创建 基于截短的最短路径树在集线器和辐条的每一个处的路由表，以及基于链路状态广告在通信网络中发送数据分组。 最短路径树包括树中的所有数据传输路由，除了从辐条引导到集线器的链路。

公开(公告)号：US20090306906A1

公开(公告)日：2009-12-10

申请号：US12368176

申请日：2009-02-09

申请人： Paul Gottlieb ,  Michael Barnes ,  Brian William Bourke

发明人： Paul Gottlieb ,  Michael Barnes ,  Brian William Bourke

IPC分类号： G01N31/00 ,  G01N23/00

CPC分类号： G01N23/2206 ,  G01N23/2252 ,  H01J2237/2561

摘要： A method of analyzing spectroscopic data, the method comprising collecting spatially resolved measurement spectroscopic data of a sample for a series of measurements spots, assigning the measurement spots into a predefined set of spectral categories, based on characteristics of the spectroscopic data of the respective measurement spots, identifying groupings of the measurement spots based on their respective spectral categories and their spatial relationships, and assigning each grouping of measurement spots to a fundamental sample unit data object.

摘要翻译： 一种分析光谱数据的方法，所述方法包括：基于各个测量点的光谱数据的特性，将用于一系列测量点的样本的空间分辨的测量光谱数据收集到预定义的光谱类别组中 基于它们各自的光谱类别及其空间关系来识别测量点的分组，以及将每个测量点分组分配给基本采样单元数据对象。