公开(公告)号：US20050037628A1

公开(公告)日：2005-02-17

申请号：US10752571

申请日：2004-01-08

申请人： Toshiyuki Ohsawa ,  Yoichi Takahara ,  Toshiki Kaneko ,  Daisuke Sonoda

发明人： Toshiyuki Ohsawa ,  Yoichi Takahara ,  Toshiki Kaneko ,  Daisuke Sonoda

IPC分类号： G02F1/13 ,  B08B3/02 ,  B08B3/08 ,  G02F1/1333 ,  G09F9/00 ,  H01L21/00 ,  H01L21/306 ,  H01L21/311 ,  H01L21/336 ,  H01L51/00 ,  H01L51/40 ,  H01L51/50 ,  H05B33/02 ,  H05B33/10 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/67028 ,  H01L21/31111 ,  H01L29/66757 ,  H01L29/66765 ,  H01L51/0019

摘要： Where a thin film formed on a glass substrate is etched with a solution containing a fluoride, insoluble residues formed by the reaction of the solution with glass substrate components adhere to the back of the substrate to cause etching non-uniformity called roller marks. So, a solution is supplied directly to supporting member for supporting the glass substrate, or concentratedly to region where the substrate and the supporting member come into contact and from a position opposite to the transporting direction of the substrate, or to both the supporting members and regions where the substrate and the supporting members come into contact. This enables the roller marks to be kept from forming, consequently making it possible to improve display quality of display devices.

摘要翻译： 在玻璃基板上形成的薄膜用含有氟化物的溶液进行蚀刻的情况下，溶液与玻璃基板成分的反应形成的不溶性残留物粘附到基板的背面，引起称为辊痕的蚀刻不均匀性。 因此，将溶液直接供给到用于支撑玻璃基板的支撑构件，或者集中到基板和支撑构件接触的区域以及与基板的输送方向相反的位置，或者支撑构件和 基板和支撑构件接触的区域。 由此，可以防止辊痕形成，从而能够提高显示装置的显示质量。

公开(公告)号：US20050007507A1

公开(公告)日：2005-01-13

申请号：US10879635

申请日：2004-06-30

申请人： Kikuo Ono ,  Yoshiaki Nakayoshi ,  Ryutaro Oke ,  Toshiki Kaneko

发明人： Kikuo Ono ,  Yoshiaki Nakayoshi ,  Ryutaro Oke ,  Toshiki Kaneko

IPC分类号： G02F1/136 ,  G02F1/1343 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/30 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/336 ,  H01L29/786 ,  G02F1/1345

CPC分类号： G02F1/13458 ,  G02F1/134363 ,  G02F1/136213 ,  G02F1/136227 ,  G02F2001/136236 ,  G02F2001/13629 ,  H01L27/1248 ,  H01L27/1255 ,  H01L27/1288

摘要： The present invention provides a novel photolithography processes using photoresist pattern having at least two areas which has different thickness from each other for a fabrication method for a liquid crystal display device having reversed staggered and channel-etched type thin film transistors, reduce a number of photolithography processes required for whole of the fabrication process of the liquid crystal display device, and improve brightness of the liquid crystal display device.

摘要翻译： 本发明提供了一种使用具有至少两个区域的光致抗蚀剂图案的新型光刻工艺，所述至少两个区域具有彼此不同的厚度，用于具有反向交错和沟道蚀刻型薄膜晶体管的液晶显示装置的制造方法，减少了许多光刻 液晶显示装置整体制造工序所需的工序，提高液晶显示装置的亮度。

公开(公告)号：US06731364B2

公开(公告)日：2004-05-04

申请号：US10101166

申请日：2002-03-20

申请人： Takuya Takahashi ,  Toshiki Kaneko ,  Katsumi Tamura ,  Kenichi Onisawa

发明人： Takuya Takahashi ,  Toshiki Kaneko ,  Katsumi Tamura ,  Kenichi Onisawa

IPC分类号： G02F11343

CPC分类号： G02F1/136286 ,  G02F1/134363 ,  G02F2001/13629

摘要： A liquid crystal display device has image signal lines of a bottom gate type TFT, in which the image signal lines comprise a laminated film formed of a first conductive film disposed as a lower layer and a second conductive film disposed as an upper layer. The first conductive film is made of an alloy comprising Mo as a main ingredient and W, and the second conductive film is made of an alloy comprising Mo as a main ingredient and Zr. The device is capable of satisfying requirements of reduced resistance, improved dry etching resistance, selective wet etching with respect to the gate insulative film, the number of laminated layer of two or less, and tapered fabrication for the cross section.

摘要翻译： 液晶显示装置具有底栅型TFT的图像信号线，其中图像信号线包括由布置为下层的第一导电膜和作为上层布置的第二导电膜形成的层叠膜。 第一导电膜由以Mo为主成分的合金和W构成，第二导电膜由以Mo为主成分的合金和Zr构成。 该装置能够满足降低电阻，改善的耐干蚀刻性，相对于栅极绝缘膜的选择性湿蚀刻，层叠层数为2以下的截面以及截面的锥形制造的要求。

公开(公告)号：US06567145B1

公开(公告)日：2003-05-20

申请号：US09535751

申请日：2000-03-27

申请人： Toshiki Kaneko ,  Kikuo Ono ,  Hajime Ikeda ,  Masatomo Terakado

发明人： Toshiki Kaneko ,  Kikuo Ono ,  Hajime Ikeda ,  Masatomo Terakado

IPC分类号： G02F11343

CPC分类号： G02F1/13458 ,  G02F1/134363 ,  G02F1/13439 ,  G02F1/1362

摘要： The present invention provides a liquid crystal display device which can simplify patterning steps of signal wirings and electrodes during manufacture and can enhance the reliability by preventing the electrolytic corrosion of terminal portions or the like. At the time of forming electrodes and/or signal wirings on a substrate 1, an amorphous oxide conductive film 3 having a large etching rate is laminated onto a metal film 2 which is made of chromium or the like and is formed on the substrate 1, and these films arc etched simultaneously in only one photolithography treatment.

摘要翻译： 本发明提供一种液晶显示装置，其可以简化制造期间的信号布线和电极的图案化步骤，并且可以通过防止端子部分等的电解腐蚀来提高可靠性。 在基板1上形成电极和/或信号布线时，将蚀刻速率大的非晶氧化物导电膜3层叠在由铬等制成并形成在基板1上的金属膜2上， 并且这些膜仅在一个光刻处理中同时蚀刻。

公开(公告)号：US06479867B2

公开(公告)日：2002-11-12

申请号：US09940538

申请日：2001-08-29

申请人： Toshihiko Itoga ,  Takeo Shiba ,  Makoto Ohkura ,  Toshiki Kaneko

发明人： Toshihiko Itoga ,  Takeo Shiba ,  Makoto Ohkura ,  Toshiki Kaneko

IPC分类号： H01L2701

CPC分类号： H01L29/66757 ,  H01L29/78621

摘要： A thin film transistor of high reliability mounted on an insulator substrate, the transistor having a semiconductor thin film, a gate insulation film and a gate electrode in which the concentration profile of impurities in the semiconductor thin film is controlled so as to have a peak in a region other than the center of the depth for the semiconductor thin film to attain a long life for LCD.

公开(公告)号：US06226060B1

公开(公告)日：2001-05-01

申请号：US08958672

申请日：1997-10-27

申请人： Kenichi Onisawa ,  Kikuo Ono ,  Toshiki Kaneko ,  Kenichi Chahara ,  Katsunori Nakajima ,  Etsuko Nishimura ,  Takeshi Satou ,  Tetsuro Minemura

发明人： Kenichi Onisawa ,  Kikuo Ono ,  Toshiki Kaneko ,  Kenichi Chahara ,  Katsunori Nakajima ,  Etsuko Nishimura ,  Takeshi Satou ,  Tetsuro Minemura

IPC分类号： G02F1136

CPC分类号： G02F1/13458 ,  G02F1/1345 ,  G02F1/13452 ,  G02F1/136286 ,  G02F2001/13629 ,  H05K1/09

摘要： In an active matrix type liquid crystal display device, at least material of one element, forming the connecting portion between signal transfer lines related to the scan lines and the data signal lines of the device, is an alloy of at least a chemical element selected from the group consisting of Nb, Mo, Ta, and W, with Cr, the scan lines and means for generating scan pulses are connected to each other via a first opening formed in an insulating film, the data signal lines and the means for generating image data are connected to each other via a second opening formed in an insulating film, a polycrystalline thin film, which is connected to the means for generating scan pulses, is inserted into the first opening, and a polycrystalline thin film, which is connected to the means for generating image data, is inserted into the second opening, and the polycrystalline thin film is composed of indium tin oxide, which is made of mainly indium oxide and added tin oxide, having a specific resistance of, at the utmost, 6×10−4 &OHgr;cm.

摘要翻译： 在有源矩阵型液晶显示装置中，形成与扫描线相关的信号传送线与该装置的数据信号线之间的连接部分的至少一个元件的材料是至少选自以下的化学元素的合金： 由Nb，Mo，Ta和W组成的组与Cr，扫描线和用于产生扫描脉冲的装置通过形成在绝缘膜中的第一开口彼此连接，数据信号线和用于产生图像的装置 数据通过形成在绝缘膜中的第二开口彼此连接，连接到产生扫描脉冲的装置的多晶薄膜被插入到第一开口中，并且多晶薄膜连接到第一开口 用于生成图像数据的装置插入到第二开口中，并且多晶薄膜由主要由氧化铟制成的氧化铟锡和添加有氧化锡的氧化铟锡组成，具有特定的电阻 最大的是6x10-4欧米伽。

公开(公告)号：US5831694A

公开(公告)日：1998-11-03

申请号：US663523

申请日：1996-06-13

申请人： Kenichi Onisawa ,  Toshiki Kaneko ,  Kenichi Hashimoto ,  Tetsuroh Minemura

发明人： Kenichi Onisawa ,  Toshiki Kaneko ,  Kenichi Hashimoto ,  Tetsuroh Minemura

IPC分类号： G02F1/1362 ,  H01L21/28 ,  H01L21/336 ,  H01L29/45 ,  H01L29/49 ,  G02F1/136 ,  G02F1/1343

CPC分类号： H01L29/66757 ,  G02F1/136286 ,  H01L21/28008 ,  H01L21/28088 ,  H01L29/458 ,  H01L29/4908 ,  H01L29/66765 ,  G02F2001/136295

摘要： A liquid crystal display unit in which at least one of a gate electrode line, a drain electrode line, and a gate electrode and a source/drain electrode of a TFT formed on a substrate is composed of a metal Nb or an alloy material of Nb. Glass is used as the substrate, and the size thereof is preferably 300 mm or longer on one side and 1 mm or less in thickness. In order to provide a low wiring resistance to produce a high resolution and large size TFT panel, the resistivity of the metal Nb or the alloy material thereof is preferably 25 .mu..OMEGA.cm or less, and the film stress of Nb or the alloy material thereof on the glass substrate is 400 MPa or less.

摘要翻译： 一种液晶显示单元，其中形成在基板上的TFT的栅电极线，漏电极线，栅极电极和源极/漏极电极中的至少一个由Nb或Nb的合金材料构成 。 玻璃用作基板，其尺寸优选为一侧为300mm以上，厚度为1mm以下。 为了提供低布线电阻以产生高分辨率和大尺寸TFT面板，金属Nb或其合金材料的电阻率优选为25μm欧米伽厘米或更小，并且Nb或其合金材料的膜应力 在玻璃基板上为400MPa以下。

公开(公告)号：US08692970B2

公开(公告)日：2014-04-08

申请号：US12943190

申请日：2010-11-10

申请人： Shoichi Uchino ,  Noboru Kunimatsu ,  Hidehiro Sonoda ,  Chikae Matsui ,  Yuko Matsumoto ,  Tomio Yaguchi ,  Toshiki Kaneko ,  Jun Tanaka

发明人： Shoichi Uchino ,  Noboru Kunimatsu ,  Hidehiro Sonoda ,  Chikae Matsui ,  Yuko Matsumoto ,  Tomio Yaguchi ,  Toshiki Kaneko ,  Jun Tanaka

IPC分类号： G02F1/13 ,  G02F1/1337 ,  G02F1/141 ,  C09K19/00

CPC分类号： G02F1/133788 ,  G02F2001/1316 ,  G02F2001/133354

摘要： Disclosed is a manufacturing method of a liquid crystal display device which is a manufacturing method of a liquid crystal display device including a liquid crystal alignment film to which an alignment regulating force is imparted by a photo-alignment treatment, including: a film forming step of forming a film containing a polymer whose main chain is cleaved by irradiation with light; a photo-alignment step of imparting an alignment regulating force to the film formed in the film forming step by irradiation of the film with light in an atmosphere of a temperature lower than 100° C.; and a removing step of removing a low-molecular weight component generated by cleaving the main chain of the polymer through the light irradiation after the light irradiation. Also disclosed is a liquid crystal display device manufactured by the manufacturing method.

摘要翻译： 公开了一种液晶显示装置的制造方法，该液晶显示装置是包括通过光取向处理赋予取向调节力的液晶取向膜的液晶显示装置的制造方法，包括：成膜步骤 形成含有主链通过光照射而被切割的聚合物的膜; 光学对准步骤，通过在低于100℃的气氛中用光照射膜，在成膜步骤中形成的膜施加取向调节力; 以及去除在光照射后通过光照射分解聚合物主链而产生的低分子量成分的除去步骤。 还公开了通过该制造方法制造的液晶显示装置。

公开(公告)号：US20130057820A1

公开(公告)日：2013-03-07

申请号：US13596092

申请日：2012-08-28

申请人： Yosuke HYODO ,  Yasushi Tomioka ,  Masahiko Suzuki ,  Toshiki Kaneko ,  Noboru Kunimatsu

发明人： Yosuke HYODO ,  Yasushi Tomioka ,  Masahiko Suzuki ,  Toshiki Kaneko ,  Noboru Kunimatsu

IPC分类号： G02F1/1339

CPC分类号： G02F1/13394 ,  G02F1/1337 ,  G02F2001/133519

摘要： In a liquid crystal display device using a cylindrical spacer to define the gap between a TFT substrate and a counter substrate, the TFT substrate does not include an organic passivation film, in which the cylindrical spacer is formed on an inorganic passivation film. An overcoat film is formed to cover a black matrix and color filters in the counter substrate. A concavo-convex mount is formed in the overcoat film. The top of the cylindrical spacer is brought into contact with the concavo-convex mount. The oriented film is not attached to the top of the cylindrical spacer and the convex portion of the concavo-convex mount. Thus, even if horizontal displacement occurs in the TFT substrate or the counter substrate, it is possible to prevent the occurrence of bright spots due to the scraping of the oriented film caused by the friction between the TFT substrate and the counter substrate.

摘要翻译： 在使用圆筒形间隔物来限定TFT基板和对置基板之间的间隙的液晶显示装置中，TFT基板不包括其中在无机钝化膜上形成圆柱形间隔物的有机钝化膜。 形成覆盖膜以覆盖相对基板中的黑矩阵和滤色器。 在外涂膜中形成凹凸安装。 圆柱形间隔件的顶部与凹凸座接触。 取向膜不附着在圆柱形间隔物的顶部和凹凸座的凸部上。 因此，即使在TFT基板或对置基板中发生水平位移，也可以防止由TFT基板和对置基板之间的摩擦引起的取向膜刮擦引起的亮点的发生。

公开(公告)号：US20120224114A1

公开(公告)日：2012-09-06

申请号：US13407137

申请日：2012-02-28

申请人： Noboru Kunimatsu ,  Masaki Matsumori ,  Hidehiro Sonoda ,  Yasushi Tomioka ,  Toshiki Kaneko

发明人： Noboru Kunimatsu ,  Masaki Matsumori ,  Hidehiro Sonoda ,  Yasushi Tomioka ,  Toshiki Kaneko

IPC分类号： G02F1/1337 ,  G02F1/1339 ,  G02F1/1368

CPC分类号： G02F1/1337 ,  G02F1/1333 ,  G02F1/133345 ,  G02F1/133723 ,  G02F1/13378 ,  G02F1/133788 ,  G02F1/1339 ,  G02F1/13394 ,  G02F1/136286 ,  G02F1/1368

摘要： The present invention prevents the shaving of an alignment film caused by a columnar spacer in a liquid crystal display device of an IPS method using photo-alignment. A plinth higher than a pixel electrode is formed at a part where a columnar spacer formed over a counter substrate touches a TFT substrate. When an alignment film of a double-layered structure is applied over the pixel electrode and the plinth, the thickness of the alignment film over the plinth reduces by a leveling effect. When photo-alignment is applied in the state, a photodegraded upper alignment film over the plinth disappears and a lower alignment film having a high mechanical strength remains. As a result, it is possible to prevent the shaving of the alignment film.

摘要翻译： 本发明防止了使用光取向的IPS方法的液晶显示装置中的柱状间隔物引起的取向膜的刮削。 在对置基板上形成的柱状间隔件与TFT基板接触的部分，形成比像素电极高的底座。 当在像素电极和底座上施加双层结构的取向膜时，底座上的取向膜的厚度减小了平整效应。 当在该状态下进行光对准时，在底座上的光降解的上取向膜消失，并且残留有机械强度较高的下取向膜。 结果，可以防止取向膜的刮削。