公开(公告)号：US06395152B1

公开(公告)日：2002-05-28

申请号：US09346699

申请日：1999-07-02

Applicant: Hui Wang

Inventor： Hui Wang

IPC: C25D1700

CPC classification number: H01L21/32115 ,  C25F3/22 ,  C25F7/00 ,  H01L21/32134 ,  H01L21/7684

Abstract: An electropolishing apparatus for polishing a metal layer formed on a wafer (31) includes an electrolyte (34), a polishing receptacle (100), a wafer chuck (29), a fluid inlet (5, 7, 9), and at least one cathode (1, 2, 3). The wafer chuck (29) holds and positions the wafer (31) within the polishing receptacle (100). The electrolyte (34) is delivered through the fluid inlet (5, 7, 9) into the polishing receptacle (100). The cathode (1, 2, 3) then applies an electropolishing current to the electrolyte to electropolish the wafer (31). In accordance with one aspect of the present invention, discrete portions of the wafer (31) can be electropolished to enhance the uniformity of the electropolished wafer.

Abstract translation: 用于抛光形成在晶片（31）上的金属层的电抛光设备包括电解质（34），抛光容器（100），晶片卡盘（29），流体入口（5,7,9） 一个阴极（1,2,3）。 晶片卡盘（29）将晶片（31）保持并定位在抛光容器（100）内。 电解质（34）通过流体入口（5,7,9）输送到抛光容器（100）中。 然后，阴极（1,2,3）将电解抛光电流施加到电解质以对晶片（31）进行电解抛光。 根据本发明的一个方面，晶片（31）的离散部分可以被电抛光以增强电抛光晶片的均匀性。

公开(公告)号：US06363659B1

公开(公告)日：2002-04-02

申请号：US09448331

申请日：1999-11-23

Applicant: Hui Wang

Inventor： Hui Wang

IPC: E05D1522

CPC classification number: E05D15/22 ,  E05Y2900/148 ,  E06B3/44 ,  E06B3/4407 ,  E06B3/5063

Abstract: A storm resistant device for a window that has a window frame enclosing at least one sash slidingly and pivotally mounted therein. The sash has side rails and the frame has vertical jambs that engage the side rails of the sash to raise and lower and pivot the sash. The storm resistant device comprises a first elongated bracket having a substantially Z-shaped cross section with two end segments and a middle segment connecting the two end segments. The middle segment is connectable to the side rails of the sashes with one of the end segments extending outward from the sash toward an adjacent jamb. There is a second elongated bracket having a substantially L-shaped cross section with two legs, one leg of the bracket adapted to be mounted to the jamb with a second leg of the L extending toward an adjacent side rail of the sash. The first and second brackets are mounted to the frame and sash, respectively, so that when the sash is closed, the one end segment of the first bracket interlocks with the second leg of the second bracket and prevents the sash from pivoting when pressure is applied to the sash.

Abstract translation: 一种用于窗户的防风雨装置，其具有围绕至少一个窗框的窗框，其滑动地并枢转地安装在其中。 窗框具有侧轨，框架具有垂直的边框，其接合窗框的侧轨以升高和降低并枢转窗扇。 防暴装置包括具有大致Z形截面的第一细长支架，其具有两个端部段和连接两个端部段的中间段。 中间部分可连接到窗扇的侧轨，其中一个端部段从窗扇向外延伸到相邻的边框。 存在具有两个腿的基本上L形横截面的第二细长支架，支架的一个支腿适于安装到侧柱，其中L的第二支腿朝向窗扇的相邻侧轨延伸。 第一和第二支架分别安装到框架和窗框上，使得当窗框关闭时，第一支架的一端部与第二支架的第二支腿互锁，并且防止当施加压力时窗框摆动 到窗扇

公开(公告)号：US06258407B1

公开(公告)日：2001-07-10

申请号：US09440297

申请日：1999-11-15

Applicant: Chung J. Lee ,  Hui Wang ,  Giovanni Antonio Foggiato

Inventor： Chung J. Lee ,  Hui Wang ,  Giovanni Antonio Foggiato

IPC: C23C1600

CPC classification number: B05D1/62 ,  C08J5/18 ,  C09D4/00 ,  C23C16/30 ,  C23C16/401 ,  H01L21/02131 ,  H01L21/02211 ,  H01L21/02216 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/02277 ,  H01L21/3122 ,  H01L21/3127 ,  H01L21/31629 ,  Y10T428/26 ,  C08G77/24

Abstract: Fluorinated chemical precursors, methods of manufacture, polymer thin filmswith low dielectric constants, and integrated circuits comprising primarily of sp2C—F and some hyperconjugated sp3C—F bonds are disclosed in this invention. Precursors are disclosed for creating fluorinated silanes and siloxanes, and fluorinated hydrocarbon polymers. Thermal transport polymerization (TP), chemical vapor deposition (CVD), plasma enhanced CVD (PECVD), high density PECVD (HDPCVD), photon assisted CVD (PACVD), and plasma-photon assisted (PPE) CVD and PPETP of these chemicals provides thin films with low dielectric constants and high thermal stabilities for use in the manufacture of integrated circuits.

Abstract translation: 氟化化学前体，制造方法，具有低介电常数的聚合物薄膜以及主要包含sp2C-F和一些超共轭sp3C-F键的集成电路在本发明中公开。 公开了用于制备氟化硅烷和硅氧烷的前体和氟化烃聚合物。 这些化学品的热转移聚合（TP），化学气相沉积（CVD），等离子体增强CVD（PECVD），高密度PECVD（HDPCVD），光子辅助CVD（PACVD）和等离子体光子辅助（PPE）CVD和PPETP提供 具有低介电常数和高热稳定性的薄膜用于集成电路的制造。

公开(公告)号：US06248222B1

公开(公告)日：2001-06-19

申请号：US09390458

申请日：1999-09-07

Applicant: Hui Wang

Inventor： Hui Wang

IPC: C25B1100

CPC classification number: C25D17/001 ,  C25D7/123 ,  C25D17/06 ,  C25F7/00

Abstract: A wafer chuck for holding a wafer during electropolishing and/or electroplating of the wafer includes a top section, a bottom section, and a spring member. In accordance with one aspect of the present invention, the top section and the bottom section are configured to receive the wafer for processing. The spring member is disposed on the bottom section and configured to apply an electric charge to the wafer. In accordance with another aspect of the present invention, the spring member contacts a portion of the outer perimeter of the wafer. In one alternative configuration of the present invention, the wafer chuck further includes a seal member to seal the spring member from the electrolyte solution used in the electropolishing and/or electroplating process.

Abstract translation: 用于在晶片的电抛光和/或电镀期间保持晶片的晶片卡盘包括顶部部分，底部部分和弹簧部件。 根据本发明的一个方面，顶部部分和底部部分构造成接收用于处理的晶片。 弹簧构件设置在底部上并构造成向晶片施加电荷。 根据本发明的另一方面，弹簧构件接触晶片外周的一部分。 在本发明的另一种配置中，晶片卡盘还包括密封件，用于将弹簧件与用于电抛光和/或电镀工艺中的电解液密封。

公开(公告)号：US6086679A

公开(公告)日：2000-07-11

申请号：US958352

申请日：1997-10-24

Applicant: Chung J. Lee ,  Hui Wang ,  Giovanni Antonio Foggiato

Inventor： Chung J. Lee ,  Hui Wang ,  Giovanni Antonio Foggiato

IPC: C23C16/448 ,  B05D3/06 ,  B05D7/24 ,  C23C16/26 ,  C23C16/40 ,  C23C16/44 ,  C23C16/507 ,  H01L21/31 ,  H01L21/312 ,  C23C16/00

CPC classification number: B05D1/60 ,  C23C16/26 ,  C23C16/401 ,  C23C16/4412 ,  C23C16/507 ,  H01L21/312 ,  B05D3/061

Abstract: The described deposition systems are designed to accommodate new precursors and chemical processes used for transport polymerization and chemical vapor deposition. The systems consist primarily of a reactor, a liquid injector or gas mass flow controller, a cracker and a deposition chamber under sub-atmospheres pressure. The cracker utilizes one or more types of energy, including heat, photons, and plasmas. This invention is especially useful for preparing F-PPX (fluorinated poly(para-xylylenes) and other fluorinated polymer thin films for intermetal dielectric (IMD) and interlevel dielectric (ILD) applications in the manufacture of integrated circuits with features

Abstract translation: 所描述的沉积系统被设计成适应用于运输聚合和化学气相沉积的新的前体和化学方法。 该系统主要由反应器，液体喷射器或气体质量流量控制器，裂化器和在亚压力下的沉积室组成。 裂解器利用一种或多种类型的能量，包括热，光子和等离子体。 本发明特别可用于制备具有<0.25μm特征的集成电路的制备中的金属间电介质（IMD）和层间电介质（ILD）应用的F-PPX（氟化聚（对 - 二甲苯））和其它氟化聚合物薄膜 尺寸。

公开(公告)号：US5317574A

公开(公告)日：1994-05-31

申请号：US999127

申请日：1992-12-31

Applicant: Hui Wang

Inventor： Hui Wang

IPC: H01S4/00 ,  H05G2/00 ,  H01S3/097 ,  H01S3/30

CPC classification number: H05G2/003 ,  H01S4/00

Abstract: A method and apparatus for producing x-ray and/or extreme ultraviolet (EUV) is described. A liquid edge 2 is electrically connected to a cathode 8 via a high voltage pulse power supply 10. Liquid edge 2 is set to be parallel to cathode 8. When high voltage pulse power supply 10 is turned on, a vacuum discharge will occur in a space between liquid edge 2 and cathode 8. The plasma will be confined into a high density and high temperature thin plasma column 4 in a space near liquid edge 2 by strong magnetic field induced by the huge discharge current. A population inversion in the confined plasma column will lead to a amplified simultaneous emission of x-ray and/or EUV 6 along the axis of plasma column 4. Moreover, a large power x-ray and/or EUV laser can be built by using multi-liquid edge-shape anodes placed in a straight line and operated in a traveling-wave mode.

Abstract translation: 描述了用于产生x射线和/或极紫外（EUV）的方法和装置。 液体边缘2通过高压脉冲电源10与阴极8电连接。液体边缘2被设定为与阴极8平行。当高电压脉冲电源10接通时，真空放电将发生在 液体边缘2和阴极8之间的空间。等离子体将通过由巨大放电电流引起的强磁场在液体边缘2附近的空间中被限制在高密度和高温薄的等离子体柱4中。 限制等离子体柱中的群体反转将导致沿着等离子体柱4的轴同时发射x射线和/或EUV 6。此外，可以通过使用大功率x射线和/或EUV激光器来构建大功率x射线和/或EUV激光器 放置在直线上并以行波模式操作的多液边缘形阳极。

公开(公告)号：US5243638A

公开(公告)日：1993-09-07

申请号：US848205

申请日：1992-03-10

Applicant: Hui Wang ,  Weimin Shi

Inventor： Hui Wang ,  Weimin Shi

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: A method and apparatus are provided for generating x-ray photon radiation. A liquid cone anode and an extraction electrode spaced therefrom are disposed in a vacuum chamber. The liquid cone anode comprises a liquid material, a reservoir for holding the liquid material having an opening for passage of the liquid material, and a liquid material feeding and cone forming mechanism operatively associated with the reservoir for feeding liquid material through the opening in the reservoir and for forming a liquid cone from the liquid material A power supply is connected to the liquid cone anode and the extraction electrode for creating an electric field therebetween of sufficient strength to cause particles to be extracted from the liquid cone anode to form a plasma ball in the space between the liquid cone anode and the extraction electrode which emits x-ray photon radiation.

Abstract translation: 提供了一种用于产生x射线光子辐射的方法和装置。 液体锥形阳极和与其分开的提取电极设置在真空室中。 液体锥体阳极包括液体材料，用于保持具有用于液体材料通过的开口的液体材料的储存器，以及与储存器可操作地相关联的液体材料供给和锥形成机构，用于通过储存器中的开口供给液体材料 并且用于从液体材料形成液体锥体电源连接到液体锥形阳极和引出电极，用于在其间产生足够强度的电场，以使得从液体锥形阳极中提取颗粒以形成等离子体球 液体锥形阳极和引出电极之间的空间，其发射x射线光子辐射。

公开(公告)号：US09965381B1

公开(公告)日：2018-05-08

申请号：US13135261

申请日：2011-06-30

Applicant: Adnan Sahin ,  Alexandr Veprinsky ,  Marik Marshak ,  Hui Wang ,  Xiaomei Liu ,  Owen Martin ,  Sean C. Dolan

Inventor： Adnan Sahin ,  Alexandr Veprinsky ,  Marik Marshak ,  Hui Wang ,  Xiaomei Liu ,  Owen Martin ,  Sean C. Dolan

IPC: G06F12/00 ,  G06F13/00 ,  G06F13/28 ,  G06F12/02 ,  G06F3/06

CPC classification number: G06F12/023 ,  G06F3/0605 ,  G06F3/0647 ,  G06F3/0683 ,  G06F3/0685

Abstract: Identifying data for placement in a storage system having a plurality of storage classes includes subdividing the data into portions, for each of the portions, independently determining at least one score for a particular portion based on a metric corresponding to access of the particular portion, where the at least one score for the particular portion is independent of scores for other ones of the portions, and identifying sub-portions of data for placement in a particular storage class based on the at least one score of a portion of data corresponding to the sub-portions. The at least one score may be based on short term access statistics and long term access statistics. The access statistics may include read misses, writes, and prefetches.

公开(公告)号：US09898224B1

公开(公告)日：2018-02-20

申请号：US13611868

申请日：2012-09-12

Applicant: Marik Marshak ,  Hui Wang ,  Xiaomei Liu ,  Sean C. Dolan ,  Alexandr Veprinsky

Inventor： Marik Marshak ,  Hui Wang ,  Xiaomei Liu ,  Sean C. Dolan ,  Alexandr Veprinsky

IPC: G06F12/00 ,  G06F3/06

CPC classification number: G06F3/0647 ,  G06F3/0604 ,  G06F3/0653 ,  G06F3/0676 ,  G06F3/0685

Abstract: When migrating data, a first message is received at a target data storage system from a source data storage system. The target data storage system includes a data storage optimizer that performs automated data movement optimizations. The first message requests a reservation of a first amount of storage on a first storage tier for performing a data migration to migrate data from the source to the target data storage system. A first capacity limit of the first storage tier is reduced by the first amount thereby representing the reservation of the first amount of storage for performing the data migration. If the first storage tier does not include an amount of available storage of at least the first amount, processing is performed to increase the amount of available storage of the first storage tier.

公开(公告)号：US09846625B2

公开(公告)日：2017-12-19

申请号：US13806784

申请日：2011-05-20

Applicant: Zongyou Shao ,  Xinchun Liu ,  Xiaojun Yang ,  Chenming Zheng ,  Ying Wang ,  Hui Wang ,  Shengjie Liu ,  Zhibin Hao ,  Faqing Liang ,  Wenhao Yao

Inventor： Zongyou Shao ,  Xinchun Liu ,  Xiaojun Yang ,  Chenming Zheng ,  Ying Wang ,  Hui Wang ,  Shengjie Liu ,  Zhibin Hao ,  Faqing Liang ,  Wenhao Yao

IPC: G06F11/22 ,  G06F11/36

CPC classification number: G06F11/2236 ,  G06F11/221 ,  G06F11/3648

Abstract: The present invention discloses a method and a device to debug the Loongson CPU (a MIPS-structure CPU) and bridge chips. The device, including HT bus interfaces and the corresponding switches, connects the Loongson CPU and bridge chips through HT bus interfaces. Southbridge chips and northbridge chips with HT buses are selected in the following order: introducing the pins on the Loongson CPU and bridge chips into the debug device; debugging the pins on the Loongson CPU to identify whether there are any bugs with the pins; connecting the pins from the CPU and bridge chips to debug them. If the HT bus of the Loongson CPU fails to accord with the standard protocol, the problematic signal can be identified and further adjusted to improve the CPU. With the help of FPGA, multiple HT bus interfaces can be simulated. As a result, multiple chipsets can be linked to the Loongson CPU, which may be debugged simultaneously.