公开(公告)号：US20060146305A1

公开(公告)日：2006-07-06

申请号：US11366743

申请日：2006-03-03

申请人： Nobutaka Magome ,  Naoyuki Kobayashi

发明人： Nobutaka Magome ,  Naoyuki Kobayashi

IPC分类号： G03B27/42

CPC分类号： G03F7/70866 ,  G03F7/70341 ,  G03F7/70525 ,  G03F7/70725 ,  G03F7/70858 ,  G03F7/709

摘要： An exposure apparatus exposes a substrate by projecting an image of a pattern on the substrate via a projection optical system and a liquid. The exposure device has a liquid supply mechanism which supplies the liquid between the projection optical system and the substrate. The liquid feeding mechanism stops the supply of the liquid when abnormality is detected. This suppresses influence to devices and members in the periphery of the substrate caused by leakage of the liquid forming a liquid immersion area, thereby realizing satisfactory exposure processing.

公开(公告)号：US06235180B1

公开(公告)日：2001-05-22

申请号：US09343471

申请日：1999-06-30

申请人： Naoyuki Kobayashi ,  Atsushi Moriyama ,  Shigemasa Takagi ,  Tomoaki Katsumata

发明人： Naoyuki Kobayashi ,  Atsushi Moriyama ,  Shigemasa Takagi ,  Tomoaki Katsumata

IPC分类号： C25D706

CPC分类号： C25D11/36 ,  C25F1/06

摘要： Method and appartus suitable for forming promptly a phosphate film of excellent performance for cold drawing on the steel wires are disclosed. The steel wires are descaled by cathodic electrolysis in acid solution, and thereafter, phosphate film are formed by cathodic electrolysis on the steel wires. Contacting with the solution containing colloidal titanium are preferable to be carried out between cathodic descaling process and phosphate film forming process. Descaling of cathodic electrolysis may preferably be performed in acid solution at a temperature of lower than 90° C. and in 1˜100 A/dm2. Phosphate film forming may preferably be performed by using electrolyte containing Zn ion, phosphoric acid ion and nitric acid ion, at a temperature of lower than 90° C., in 1˜100 A/dm2 and for 1˜30 seconds.

摘要翻译： 公开了适用于在钢丝上快速形成具有优异的冷拔性能的磷酸盐膜的方法和装置。在酸性溶液中对钢丝进行阴极电解除去，然后通过阴极电解在钢丝上形成磷酸盐膜。 与含有胶体钛的溶液接触，优选在阴极除垢工艺和磷酸盐成膜工艺之间进行。 阴极电解除垢可优选在低于90℃和1〜100A / dm 2的温度下在酸性溶液中进行。 优选通过使用含有Zn离子，磷酸离子和硝酸离子的电解液，在低于90℃，1〜100A / dm 2的温度和1〜30秒内进行磷酸盐成膜。

公开(公告)号：US6124933A

公开(公告)日：2000-09-26

申请号：US19565

申请日：1998-02-06

申请人： Hideo Mizutani ,  Naoyuki Kobayashi ,  Nobutaka Magome

发明人： Hideo Mizutani ,  Naoyuki Kobayashi ,  Nobutaka Magome

IPC分类号： G01B11/26 ,  G01B11/00 ,  G01B11/02 ,  G01C3/06 ,  G03F7/20 ,  G03F7/207 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G01B11/14

CPC分类号： G03F9/7026 ,  G01B11/026 ,  G03F7/70358

摘要： In an exposure apparatus and method utilizing a projection system, a surface state relating to an exposure area of the projection system is determined by illuminating the exposure area with light, receiving light from the exposure area, designating positions of a plurality of detection points in the exposure area in accordance with a size of the exposure area, and detecting, based on information of received light corresponding to the plurality of detection points, positions related to the plurality of detection points.

摘要翻译： 在利用投影系统的曝光装置和方法中，通过用光照射曝光区域来确定与投影系统的曝光区域相关的表面状态，从曝光区域接收光，指定多个检测点的位置 曝光区域，并且根据与所述多个检测点对应的接收光的信息，检测与所述多个检测点相关的位置。

公开(公告)号：US5801835A

公开(公告)日：1998-09-01

申请号：US940818

申请日：1997-09-30

申请人： Hideo Mizutani ,  Naoyuki Kobayashi ,  Nobutaka Magome

发明人： Hideo Mizutani ,  Naoyuki Kobayashi ,  Nobutaka Magome

IPC分类号： G01B11/26 ,  G01B11/00 ,  G01B11/02 ,  G01C3/06 ,  G03F7/20 ,  G03F7/207 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G01B11/14

CPC分类号： G03F9/7026 ,  G01B11/026 ,  G03F7/70358

摘要： In an apparatus and method for surface position detection, a position of a detection surface is determined by illuminating the detection surface with detection light, receiving detection light from the detection surface, designating different parts of the detection surface in accordance with a structure within an illuminated area on the detection surface, and detecting, based on information of the received light and information of the designated parts of the detection surface, positions corresponding to the designated parts of the detection surface.

摘要翻译： 在用于表面位置检测的装置和方法中，通过用检测光照射检测面来确定检测表面的位置，接收来自检测表面的检测光，根据照明中的结构指定检测表面的不同部分 并且根据所接收的光的信息和检测表面的指定部分的信息，检测与检测表面的指定部分相对应的位置。

公开(公告)号：US20130269408A1

公开(公告)日：2013-10-17

申请号：US13381497

申请日：2010-12-20

申请人： Naoyuki Kobayashi ,  Nobuo Torioka

发明人： Naoyuki Kobayashi ,  Nobuo Torioka

IPC分类号： B21D9/00

CPC分类号： B21D9/00 ,  B21J5/08 ,  B21K21/12

摘要： A method for processing a metal pipe 1 to make part of the metal pipe 1 in an axial direction thereof into a thick portion 10, the method includes: forming a shoulder as a stress concentration portion in an axial center of the metal pipe 1 to concentrate a stress thereon; setting the metal pipe 1 in an outer die 20; and forming the thick portion 10 by inserting an inner die 25 in the metal pipe 1 to provide space S for forming the thick portion 10 between the inner and outer dies 25 and 20, and applying the axial pressure to the metal pipe 1 to concentrate the stress on the shoulder to deform the shoulder after the forming and the setting, thereby forming the thick portion 10 from the deformed stress concentration portion as a starting point.

摘要翻译： 一种将金属管1的轴向一部分加工成厚壁部10的金属管1的加工方法，其特征在于，在金属管1的轴心部形成作为应力集中部的肩部， 对其施加压力 将金属管1设置在外模具20中; 并且通过将内模25插入金属管1中而形成厚部10，以提供用于在内模25和内模20之间形成厚部10的空间S，并且向金属管1施加轴向压力以集中 在成形和固化之后肩部应力使肩部变形，从而形成从变形的应力集中部分的厚部10作为起点。

公开(公告)号：US08552684B2

公开(公告)日：2013-10-08

申请号：US13355796

申请日：2012-01-23

申请人： Kenichiro Tabata ,  Tokuji Nishino ,  Akio Hidaka ,  Naoyuki Kobayashi

发明人： Kenichiro Tabata ,  Tokuji Nishino ,  Akio Hidaka ,  Naoyuki Kobayashi

IPC分类号： H02J7/02 ,  H02J7/00

CPC分类号： H02J7/0042 ,  H01F7/0247 ,  H01F38/14 ,  H02J7/025 ,  H02J50/12 ,  H02J50/40 ,  H02J50/70 ,  H02J50/90

摘要： It is an object to provide a non-contact charging module that prevents the magnet from negatively influencing particularly the inside portion of a coil and improves power transmission efficiency, even when a magnet is used for alignment. This non-contact charging module is a reception-side non-contact charging module, to which power is transmitted from a transmission-side non-contact charging module which is equipped with magnet, by electromagnetic induction, in which the non-contact charging module includes a planar coil portion around which spiral electric lines are wound, and a magnetic sheet disposed to face the surface of coil of the planar coil portion so that it faces the magnet of the transmission-side contact module, in which the inner diameter of the planar coil portion is larger than the magnet.

公开(公告)号：US20120234810A1

公开(公告)日：2012-09-20

申请号：US13512653

申请日：2010-09-09

申请人： Toshio Kudo ,  Naoyuki Kobayashi ,  Kazuya Sano ,  Toshiaki Seino ,  Mitsuhiro Toyoda

发明人： Toshio Kudo ,  Naoyuki Kobayashi ,  Kazuya Sano ,  Toshiaki Seino ,  Mitsuhiro Toyoda

IPC分类号： B23K26/00

CPC分类号： H01L21/268 ,  B23K26/352 ,  H01L21/2636 ,  H01L21/324 ,  H01L29/0834 ,  H01L29/66325 ,  H01L29/66333 ,  H01L29/7395

摘要： The present invention provides an efficient heat treatment such as activation treatment of impurities on a substrate such as a thick silicon wafer with large heat capacity by laser annealing.Provided is a laser annealing apparatus 1 for heat-treating a surface of a substrate 30 comprising: a pulse oscillation laser source 10 which generates a pulse laser with gentle rise time and long pulse width; a continuous wave laser source 20 which generates a near-infrared laser for assisting annealing; optical systems 12, 22 which shape and guide beams 15, 25 of the two types of lasers respectively so as to irradiate the surface of the substrate 30 therewith; and a moving device 3 which moves the substrate 30 relatively to the laser beams 15, 25 to allow scanning of the combined irradiation of the two types of laser beams. According to this apparatus, deep activation of impurities can be performed in a thick semiconductor substrate with large heat capacity while securing sufficient light penetration depth and thermal diffusion length therefor.

摘要翻译： 本发明提供了一种有效的热处理，例如通过激光退火在诸如具有大的热容量的厚硅晶片的基板上活化处理杂质。 提供一种用于对基板30的表面进行热处理的激光退火装置1，包括：脉冲振荡激光源10，其产生具有缓慢上升时间和长脉冲宽度的脉冲激光; 生成用于辅助退火的近红外激光的连续波激光源20; 光学系统12,22，其分别形成并引导两种类型的激光器的光束15,25，以便照射基板30的表面; 以及相对于激光束15,25移动基板30以允许对两种类型的激光束的组合照射的扫描的移动装置3。 根据该装置，可以在具有大的热容量的厚半导体衬底中进行杂质的深度激活，同时确保足够的光穿透深度和热扩散长度。

公开(公告)号：US08208119B2

公开(公告)日：2012-06-26

申请号：US10588297

申请日：2005-02-03

申请人： Naoyuki Kobayashi ,  Soichi Owa ,  Shigeru Hirukawa ,  Yasuhiro Omura

发明人： Naoyuki Kobayashi ,  Soichi Owa ,  Shigeru Hirukawa ,  Yasuhiro Omura

IPC分类号： G03B27/42

CPC分类号： G03F7/70875 ,  G03F7/2041 ,  G03F7/70341 ,  G03F7/7075 ,  G03F7/70891

摘要： An exposure apparatus (EX) exposes a substrate (P) by irradiating exposure light (EL) on the substrate (P) through liquid (LQ). The exposure apparatus (EX) has a substrate holder (PH) for holding the substrate (P), a substrate stage (PST) capable of moving the substrate (P) held by the substrate holder (PH), and a temperature adjusting system (60) for adjusting the temperature of the substrate holder (PH). The temperature of the substrate (P) is controlled so that there is no difference in temperature between the substrate (P) and the liquid (LQ), thereby preventing a reduction in exposure accuracy resulting from variation in temperature of the liquid (LQ).

摘要翻译： 曝光装置（EX）通过液体（LQ）在基板（P）上照射曝光光（EL）而曝光基板（P）。 曝光装置（EX）具有用于保持基板（P）的基板保持器（PH），能够移动由基板保持件（PH）保持的基板（P）的基板台（PST）和温度调节系统 60），用于调节衬底保持器（PH）的温度。 控制基板（P）的温度，使得基板（P）和液体（LQ）之间的温度没有差异，从而防止由液体（LQ）的温度变化引起的曝光精度的降低。

公开(公告)号：US20110257225A1

公开(公告)日：2011-10-20

申请号：US13126162

申请日：2009-10-26

申请人： Shiro Mita ,  Naoyuki Kobayashi

发明人： Shiro Mita ,  Naoyuki Kobayashi

IPC分类号： A61K31/47 ,  A61P25/00 ,  A61P25/16 ,  A61P25/28 ,  A61K31/138 ,  A61K31/137

CPC分类号： C07C217/16 ,  C07C211/40 ,  C07C217/20 ,  C07C217/62 ,  C07C323/25 ,  C07C2601/14 ,  C07D215/06

摘要： Disclosed is a novel cyclohexylamine derivative containing a phenyl group, which is useful as a novel sigma receptor ligand. Also disclosed is a therapeutic agent for diseases accompanied by a central nervous system disorder, which comprises the compound as an active ingredient. The therapeutic agent comprises a compound represented by general formula [1] or a pharmacologically acceptable salt thereof as an active ingredient: wherein X and Y independently represent a hydrogen atom, a halogen atom, a trihalomethyl group, a dihalomethyl group, a monohalomethyl group, a methoxy group, a hydroxyl group, or an alkyl group having 1 to 3 carbon atoms; R1, R2, R3 and R4 independently represent a hydrogen atom, a hydroxyl group, an alkoxyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 3 carbon atoms; R5 represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or an alkylene group which has 2 to 4 carbon atoms and can bind to a carbon atom other than carbon atoms that bind to a nitrogen atom on the cyclohexyl ring to form a ring; n represents an integer of 1 to 5; and Z represents a sulfur atom, a carbon atom, or an oxygen atom.

摘要翻译： 公开了一种含有苯基的新型环己胺衍生物，其可用作新的σ受体配体。 还公开了伴有中枢神经系统病症的疾病的治疗剂，其包含该化合物作为活性成分。 治疗剂包括由通式[1]表示的化合物或其药理学上可接受的盐作为活性成分：其中X和Y独立地表示氢原子，卤素原子，三卤代甲基，二卤代甲基，单卤代甲基， 甲氧基，羟基或碳原子数1〜3的烷基， R1，R2，R3和R4独立地表示氢原子，羟基，具有1至3个碳原子的烷氧基或具有1至3个碳原子的烷基; R5表示氢原子，碳原子数1〜5的烷基或碳原子数2〜4的亚烷基，可以与结合于环己基环上的氮原子的碳原子以外的碳原子结合形成 戒指; n表示1〜5的整数， Z表示硫原子，碳原子或氧原子。

公开(公告)号：US07990326B2

公开(公告)日：2011-08-02

申请号：US12349536

申请日：2009-01-07

申请人： Kouichi Nakamura ,  Kuniaki Kiyosue ,  Kenji Taniguchi ,  Naoyuki Kobayashi

发明人： Kouichi Nakamura ,  Kuniaki Kiyosue ,  Kenji Taniguchi ,  Naoyuki Kobayashi

IPC分类号： H01Q11/12

CPC分类号： H01Q7/06

摘要： An antenna apparatus includes a base member that has an antenna unit and a loop pattern. The loop pattern is wound in such a manner that a magnetic field of the loop pattern is generated along the same direction as that of the antenna unit. Additionally, the loop pattern is formed by a plurality of loops connected parallel to each other.

摘要翻译： 天线装置包括具有天线单元和环形图案的基座构件。 循环图案以与天线单元的方向相同的方向产生环形图案的磁场的方式缠绕。 此外，环形图案由彼此平行连接的多个环形成。