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公开(公告)号：US11953813B2
公开(公告)日：2024-04-09
申请号：US18134671
申请日：2023-04-14
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: G03B21/008 , B81B3/0021 , G02B26/0858 , G02B26/105 , G03B21/28 , B81B2201/032 , B81B2201/042 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2203/058
Abstract: Disclosed herein is a microelectromechanical device that features a fixed structure defining a cavity, a tiltable structure elastically suspended within the cavity, and a piezoelectrically driven actuation structure that rotates the tiltable structure about a first rotation axis. The actuation structure includes driving arms with piezoelectric material, elastically coupled to the tiltable structure by decoupling elastic elements that are stiff to out-of-plane movements but compliant to torsional movements. The tiltable structure is elastically coupled to the fixed structure at the first rotation axis using elastic suspension elements, while the fixed structure forms a frame surrounding the cavity with supporting elements. A lever mechanism is coupled between a supporting element and a driving arm.
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62.发明授权公开(公告)号：US11681141B2
公开(公告)日：2023-06-20
申请号：US16705677
申请日：2019-12-06
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sonia Costantini , Riccardo Gianola , Linda Montagna , Francesca Maria Carla Carpignano
CPC classification number: G02B26/085 , B81B3/0045 , B81C1/00166 , G02B26/101 , B81B2201/042 , B81B2203/0127 , B81B2203/0154 , B81B2203/0163 , B81B2203/04 , B81C2201/016 , B81C2201/0188
Abstract: A MEMS device is obtained by forming a temporary biasing structure on a semiconductor body, and forming an actuation coil on the semiconductor body, the actuation coil having at least one first end turn, one second end turn and an intermediate turn arranged between the first and the second end turns and electrically coupled to the first end turn through the temporary biasing structure. In this way, the intermediate turn is biased at approximately the same potential as the first end turn during galvanic growth, and, at the end of growth, the actuation coil has an approximately uniform thickness. At the end of galvanic growth, portions of the temporary biasing structure are selectively removed to electrically separate the first end turn from the intermediate turn and from a dummy biasing region adjacent to the first end turn.
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公开(公告)号：US11656539B2
公开(公告)日：2023-05-23
申请号：US16704484
申请日：2019-12-05
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo′ Boni , Roberto Carminati , Massimiliano Merli
CPC classification number: G03B21/008 , B81B3/0021 , G02B26/0858 , G02B26/105 , G03B21/28 , B81B2201/032 , B81B2201/042 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2203/058
Abstract: A microelectromechanical device includes a fixed structure defining a cavity with a tiltable structure that is elastically suspended in the cavity. A piezoelectrically driven actuation structure, interposed between the tiltable structure and the fixed structure, is biased for causing rotation of the tiltable structure about a first rotation axis belonging to a horizontal plane in which the tiltable structure rests. The actuation structure includes a pair of driving arms carry respective regions of piezoelectric material and are elastically coupled to the tiltable structure on opposite sides of the first rotation axis through respective elastic decoupling elements. The elastic decoupling elements exhibit stiffness in regard to movements out of the horizontal plane and compliance to torsion about the first rotation axis.
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64.发明授权公开(公告)号：US11353694B2
公开(公告)日：2022-06-07
申请号：US17121961
申请日：2020-12-15
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Roberto Carminati , Massimiliano Merli
Abstract: A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.
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公开(公告)号：US10768408B2
公开(公告)日：2020-09-08
申请号：US15465019
申请日：2017-03-21
Applicant: STMicroelectronics S.r.l.
Inventor： Enri Duqi , Lorenzo Baldo , Roberto Carminati , Flavio Francesco Villa
Abstract: A buried cavity is formed in a monolithic body to delimit a suspended membrane. A peripheral insulating region defines a supporting frame in the suspended membrane. Trenches extending through the suspended membrane define a rotatable mobile mass carried by the supporting frame. The mobile mass forms an oscillating mass, supporting arms, spring portions, and mobile electrodes that are combfingered to fixed electrodes of the supporting frame. A reflecting region is formed on top of the oscillating mass.
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Patent Agency Ranking
公开(公告)号：US10725286B2
公开(公告)日：2020-07-28
申请号：US16130765
申请日：2018-09-13
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Roberto Carminati , Enri Duqi , Sebastiano Conti
IPC: H04N3/08 , G02B26/08 , H02M1/12 , H02M1/15 , B81B7/00 , G02B26/10 , B81B3/00 , G05F3/26 , H02M1/42 , H02M3/335 , H04N9/31 , H02M1/00
Abstract: A micro-electro-mechanical device, wherein a platform is formed in a top substrate and is configured to turn through a rotation angle. The platform has a slit and faces a cavity. A plurality of integrated photodetectors is formed in a bottom substrate so as to detect the light through the slit and generate signals correlated to the light through the slit. The area of the slit varies with the rotation angle of the platform and causes diffraction, more or less marked as a function of the angle. The difference between the signals of two photodetectors arranged at different positions with respect to the slit yields the angle.
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公开(公告)号：US10365475B2
公开(公告)日：2019-07-30
申请号：US15465742
申请日：2017-03-22
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Massimiliano Merli , Sebastiano Conti
IPC: G02B27/01 , G02B26/08 , G02B27/14 , G03B21/00 , H01L41/053 , H01L41/332
Abstract: An oscillating structure with piezoelectric actuation includes first and second torsional elastic elements constrained to respective portions of a fixed supporting body and defining an axis of rotation. A mobile element is positioned between, and connected to, the first and second torsional elastic elements by first and second rigid regions. A first control region is coupled to the first rigid region and includes a first piezoelectric actuator. A second control region is coupled to the second rigid region and includes a second piezoelectric actuator. The first and second piezoelectric actuators are configured to cause local deformation of the first and second control regions to induce a torsion of the first and second torsional elastic elements.
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68.发明申请公开(公告)号：US20190011694A1
公开(公告)日：2019-01-10
申请号：US16130765
申请日：2018-09-13
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Roberto Carminati , Enri Duqi , Sebastiano Conti
IPC: G02B26/08 , H04N9/31 , H02M3/335 , G05F3/26 , H02M1/12 , H02M1/15 , H02M1/42 , B81B3/00 , H02M1/00
Abstract: A micro-electro-mechanical device, wherein a platform is formed in a top substrate and is configured to turn through a rotation angle. The platform has a slit and faces a cavity. A plurality of integrated photodetectors is formed in a bottom substrate so as to detect the light through the slit and generate signals correlated to the light through the slit. The area of the slit varies with the rotation angle of the platform and causes diffraction, more or less marked as a function of the angle. The difference between the signals of two photodetectors arranged at different positions with respect to the slit yields the angle.
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公开(公告)号：US20180031822A1
公开(公告)日：2018-02-01
申请号：US15465019
申请日：2017-03-21
Applicant: STMicroelectronics S.r.l.
Inventor： Enri Duqi , Lorenzo Baldo , Roberto Carminati , Flavio Francesco Villa
Abstract: A buried cavity is formed in a monolithic body to delimit a suspended membrane. A peripheral insulating region defines a supporting frame in the suspended membrane. Trenches extending through the suspended membrane define a rotatable mobile mass carried by the supporting frame. The mobile mass forms an oscillating mass, supporting arms, spring portions, and mobile electrodes that are combfingered to fixed electrodes of the supporting frame. A reflecting region is formed on top of the oscillating mass.
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70.发明申请公开(公告)号：US20180003950A1
公开(公告)日：2018-01-04
申请号：US15368184
申请日：2016-12-02
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Roberto Carminati , Enri Duqi , Sebastiano Conti
CPC classification number: G02B26/0833 , B81B3/0045 , B81B2201/042 , B81B2203/0315 , B81B2203/056 , G05F3/26 , H02M1/12 , H02M1/15 , H02M1/42 , H02M1/4225 , H02M1/4258 , H02M3/33507 , H02M2001/0025 , H02M2001/0032 , H04N9/3155 , H04N9/3173 , Y02B70/126 , Y02B70/16
Abstract: A micro-electro-mechanical device, wherein a platform is formed in a top substrate and is configured to turn through a rotation angle. The platform has a slit and faces a cavity. A plurality of integrated photodetectors is formed in a bottom substrate so as to detect the light through the slit and generate signals correlated to the light through the slit. The area of the slit varies with the rotation angle of the platform and causes diffraction, more or less marked as a function of the angle. The difference between the signals of two photodetectors arranged at different positions with respect to the slit yields the angle.
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