公开(公告)号：US07050209B2

公开(公告)日：2006-05-23

申请号：US11249406

申请日：2005-10-14

申请人： Manabu Kato

发明人： Manabu Kato

IPC分类号： G02B26/08

CPC分类号： G02B26/123 ,  G02B26/127

摘要： A scanning optical device including: a light source unit; a first optical element that inputs a light flux emitted from the light source unit to output the light flux; a second optical element that converts the light flux emitted from the first optical element into a longitudinal linear image in a main scanning direction; a deflection element that deflects the light flux emitted from the second optical element for scanning; a third optical element that guides the light flux deflected by the deflection element to a surface to be scanned; a synchronous detection element that obtains a synchronous signal; and a fourth optical element that guides the light flux from the deflection element to the synchronous detection element, in which the second optical element and the fourth optical element are independent of each other; and in the case where a point at which a main light beam traveling toward a scanning center on the surface to be scanned is deflected by the deflection element is assumed as a reference point, the second optical element is located at a position which is farther from the reference point than the fourth optical element.

公开(公告)号：US20060033799A1

公开(公告)日：2006-02-16

申请号：US11248255

申请日：2005-10-13

申请人： Keiichiro Ishihara ,  Hiroshi Sato ,  Manabu Kato ,  Hidekazu Shimomura

发明人： Keiichiro Ishihara ,  Hiroshi Sato ,  Manabu Kato ,  Hidekazu Shimomura

IPC分类号： B41J2/385

CPC分类号： G02B26/125 ,  G02B26/123 ,  G02B26/124

摘要： Disclosed is an optical scanning device which includes a light source device, a deflecting system for deflecting a light beam emitted from the light source device, and a scanning optical system for scanning a surface to be scanned, with the light beam deflected by the deflecting system, wherein the scanning optical system includes a scanning optical element disposed so that, with respect to a sub-scan direction, a principal ray of the deflected light beam passes a portion other than an optical axis, wherein the scanning optical element has a sagittal aspherical amount changing surface in which an aspherical amount of a sagittal changes along a main scan direction of the scanning optical element, and wherein, throughout the whole surface to be scanned, the position in the sub-scan direction upon which the deflected light beam impinges is made even.

摘要翻译： 公开了一种光学扫描装置，其包括光源装置，用于偏转从光源装置发射的光束的偏转系统和用于扫描待扫描表面的扫描光学系统，由偏转系统偏转的光束 其特征在于，所述扫描光学系统包括扫描光学元件，所述扫描光学元件相对于副扫描方向，所述偏转光束的主光线通过除了所述光轴以外的部分，其中所述扫描光学元件具有矢状非球面 其中矢量的非球面量沿着扫描光学元件的主扫描方向改变的量变化表面，并且其中在整个扫描的整个表面上，偏转的光束撞击的副扫描方向上的位置是 甚至连

公开(公告)号：US20050048797A1

公开(公告)日：2005-03-03

申请号：US10932816

申请日：2004-09-02

申请人： Atsuki Fukazawa ,  Kenichi Kagami ,  Manabu Kato

发明人： Atsuki Fukazawa ,  Kenichi Kagami ,  Manabu Kato

IPC分类号： C23C16/42 ,  C23C16/40 ,  C23C16/50 ,  C23C16/505 ,  C23C16/52 ,  H01L21/31 ,  H01L21/316 ,  H05H1/24 ,  H01L21/469

CPC分类号： H01L21/02126 ,  C23C16/401 ,  C23C16/505 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/31633

摘要： A method for forming a thin film includes: supplying an additive gas, a dilution gas, and a silicon-containing source gas into a reaction chamber wherein a substrate is placed; forming a thin film on the substrate by plasma CVD under a given pressure with a given intensity of radio-frequency (RF) power from a first point in time to a second point in time; at the second point in time, stopping the supply of the silicon-containing source gas; and at the second point in time, beginning reducing but not stopping the RF power, and beginning reducing the pressure, wherein the reduction of the RF power and the reduction of the pressure are synchronized up to a third point in time.

摘要翻译： 形成薄膜的方法包括：将添加气体，稀释气体和含硅源气体供给到其中放置基板的反应室中; 通过等离子体CVD在给定的压力下以从第一时间点到第二时间点的给定强度的射频（RF）功率在衬底上形成薄膜; 在第二时间点停止含硅源气体的供给; 并且在第二时间点，开始减少但不停止RF功率，并开始降低压力，其中RF功率的降低和压力的降低被同步到第三时间点。

公开(公告)号：US06816293B2

公开(公告)日：2004-11-09

申请号：US10405218

申请日：2003-04-03

申请人： Manabu Kato

发明人： Manabu Kato

IPC分类号： G02B2608

CPC分类号： G02B27/4211 ,  G02B26/125 ,  G02B27/0031 ,  G02B27/0037 ,  G02B27/4216 ,  G02B27/4227 ,  G02B27/4283

摘要： A scanning optical device and color image forming apparatus use a refraction element and diffraction element as the scanning optical element of a scanning optical device, the powers of the refraction element and diffraction element being set such that an imaging position deviation in the main scanning direction caused by a wavelength variation along with the environmental fluctuation of the scanning optical device and a imaging position deviation caused by the refractive index variation of the material of the scanning optical element are set to opposite directions at the two ends of an effective image region (effective scanning region). This reduces imaging position deviation caused by an environmental fluctuation, and limits imaging position deviation caused by a wavelength variation not accompanied by any environmental fluctuation. By this means it is possible with a simple arrangement at low cost to prevent color image misregistration between colors caused by a wavelength fluctuation or environmental fluctuation and largely to avoid density nonuniformity between colors.

摘要翻译： 扫描光学装置和彩色图像形成装置使用折射元件和衍射元件作为扫描光学装置的扫描光学元件，折射元件和衍射元件的功率被设定为使得主扫描方向上的成像位置偏差导致 随着扫描光学器件的环境波动的波长变化和由扫描光学元件的材料的折射率变化引起的成像位置偏差在有效图像区域的两端被设置为相反的方向（有效扫描 地区）。 这减少了由环境波动引起的成像位置偏差，并且限制了不伴随任何环境波动的波长变化引起的成像位置偏差。 通过这种方式，可以以低成本的简单布置来防止由波长波动或环境波动引起的颜色之间的颜色图像对准，并且很大程度上避免了颜色之间的密度不均匀性。

公开(公告)号：US06803942B2

公开(公告)日：2004-10-12

申请号：US10158887

申请日：2002-06-03

申请人： Hiroshi Sato ,  Manabu Kato ,  Hidekazu Shimomura ,  Keiichiro Ishihara

发明人： Hiroshi Sato ,  Manabu Kato ,  Hidekazu Shimomura ,  Keiichiro Ishihara

IPC分类号： G02B2608

CPC分类号： G02B26/125 ,  G02B13/0005

摘要： It is an object of this invention to provide a light scanning device capable of suppressing a scanning line bend to a low level, which is caused by the arrangement error of a single-element lens serving as an imaging optical element, and an image forming apparatus using the device. In order to achieve the object, according to this invention, an imaging optical system is formed from a single-element lens, and a sectional shape of an exit surface in the main scanning direction is an arcuated shape. The power in the sub scanning direction substantially concentrates on the exit surface having an arcuated sectional shape in the main scanning direction, and the arcuated shape (curvature) in the main scanning direction is so determined as to make the magnification in the sub scanning direction uniform.

摘要翻译： 本发明的目的是提供一种能够将作为成像光学元件的单像素透镜的布置误差引起的扫描线弯曲抑制到低电平的光扫描装置，以及图像形成装置 使用设备。 为了实现该目的，根据本发明，由单一元件透镜形成成像光学系统，并且主扫描方向上的出射面的截面形状为弧形。 副扫描方向上的功率基本上集中在主扫描方向上具有弧形截面形状的出射表面，并且确定主扫描方向上的弧形形状（曲率），以使副扫描方向上的倍率均匀 。

公开(公告)号：US06793137B2

公开(公告)日：2004-09-21

申请号：US10264222

申请日：2002-10-04

申请人： Manabu Kato

发明人： Manabu Kato

IPC分类号： G06K710

CPC分类号： G02B26/125

摘要： An optical scanner to be used for an image forming apparatus such as a digital copying machine comprises a light source such as a semiconductor laser for emitting a light beam, a deflection element such as a rotary polygon mirror for deflecting the emitted light beam, and an imaging optical system for focusing the deflected light beam on a surface to be scanned, typically a photosensitive drum surface. The imaging optical system includes at least first and second optical elements as well as a reflector mirror arranged on the optical path between the first optical element and the second optical element for reflecting the light beam coming from the former and leading it to the latter so that any displacement of the scanning spot in the sub-scanning direction may effectively be eliminated.

摘要翻译： 用于诸如数字复印机的图像形成装置的光学扫描仪包括诸如用于发射光束的半导体激光器的光源，用于偏转发射的光束的诸如旋转多面镜的偏转元件，以及 成像光学系统，用于将偏转的光束聚焦在待扫描的表面上，通常是感光鼓表面。 成像光学系统至少包括第一和第二光学元件以及布置在第一光学元件和第二光学元件之间的光路上的反射镜，用于反射来自前者的光束并将其引导到后者，使得 可以有效地消除扫描点在副扫描方向上的任何位移。

公开(公告)号：US06526826B2

公开(公告)日：2003-03-04

申请号：US09810229

申请日：2001-03-19

申请人： Hideya Kurachi ,  Manabu Kato

发明人： Hideya Kurachi ,  Manabu Kato

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： The angular speed sensor device includes a drive frame 11 and a detecting frame 12 which are supported on a silicon substrate 10 in a floating mode. The drive frame 11 and the detecting frame 12 are provided with an angular speed about the z-axis when the drive frame 11 and the detecting frame 12 are driven to vibrate in the x-direction, the resulting Corliolis force causing the detecting frame 12 to oscillate in the y-direction. Such a y-direction oscillation of the detecting frame 12 is detected as a displacement signal. On the basis of the displacement signal, the applied angular speed is calculated. The angular speed sensor device includes detecting electrodes 16a and 16b which drive the detecting frame 12 to vibrate in the y-direction when a drive signal is fed to each of the detecting electrodes 16a and 16b which changes the electrostatic capacitance between the detecting frame 12 and each of the detecting electrodes 16a and 16b. On the basis of the drive signal and the displacement signal which are fed to each of the detecting electrodes 16 and 16b, the resonant frequency of the detecting frame 12 when it is driven to vibrate in the y-direction and the corresponding Q-value are determined.

摘要翻译： 角速度传感器装置包括以浮动模式被支撑在硅衬底10上的驱动框架11和检测框架12。 当驱动框架11和检测框架12被驱动以沿x方向振动时，驱动框架11和检测框架12围绕z轴设置角速度，所得到的Corliolis力使检测框架12 在y方向上振荡。 检测框12的y方向振动被检测为位移信号。 基于位移信号，计算所施加的角速度。 角速度传感器装置包括检测电极16a和16b，当检测电极16a和16b中的每一个检测电极16a和16b被驱动时，驱动检测框架12沿y方向振动，这些检测电极16a和16b改变检测框架12和 每个检测电极16a和16b。 基于馈送到每个检测电极16和16b的驱动信号和位移信号，当驱动信号和位移信号被驱动以在y方向振动时，检测框架12的谐振频率和相应的Q值分别为 决心。

公开(公告)号：US6154245A

公开(公告)日：2000-11-28

申请号：US95547

申请日：1998-06-11

申请人： Manabu Kato

发明人： Manabu Kato

IPC分类号： G02B26/10 ,  B41J2/47 ,  G02B13/00 ,  G02B13/18 ,  G02B26/12 ,  B41J15/14

CPC分类号： G02B26/125 ,  B41J2/471 ,  G02B13/0005

摘要： An optical element which is a resinous optical element has optical surfaces longitudinal in a main scanning direction. A shape in the main-scanning direction of an image-ineffective portion of at least one optical surface out of image-effective portions and image-ineffective portions of the both optical surfaces of the optical element includes a shape formed by adding a spline function to a function representing a shape in the main-scanning direction of the image effective portion. Thicknesses in the optical-axis direction in the image-ineffective portions are set by addition of the spline function.

摘要翻译： 作为树脂光学元件的光学元件在主扫描方向上具有纵向的光学表面。 在光学元件的两个光学表面的图像有效部分和图像无效部分中的至少一个光学表面的无效图像部分的主扫描方向上的形状包括通过将样条函数加到 表示图像有效部的主扫描方向的形状的功能。 无效图像部分的光轴方向的厚度是通过添加样条函数来设定的。

公开(公告)号：US6044707A

公开(公告)日：2000-04-04

申请号：US100888

申请日：1998-06-22

申请人： Manabu Kato

发明人： Manabu Kato

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5719

摘要： A first floating body is supported by a silicon substrate so as to be movable in the x-direction and substantially unmovable in the y-direction. A second floating body is supported by the first floating body so as to be substantially unmovable in the x-direction and movable in the y-direction. A driving circuit and a pair of fixed electrodes having comb finger electrodes vibration-drive the first movable body in the x-direction. Fixed comb finger electrodes and a capacitance detection circuit detect a y-directional displacement of the second movable body and generate a displacement signal. A signal processing circuit converts the displacement signal into an angular rate signal.

摘要翻译： 第一浮体由硅基板支撑，以便在x方向上可移动并且在y方向上基本上不可移动。 第二浮体由第一浮体支撑，以便在x方向上基本上不可移动并且可在y方向上移动。 具有梳指电极的驱动电路和一对固定电极在x方向上振动驱动第一移动体。 固定梳状电极和电容检测电路检测第二可移动体的y方向位移并产生位移信号。 信号处理电路将位移信号转换为角速度信号。

公开(公告)号：US5995131A

公开(公告)日：1999-11-30

申请号：US991611

申请日：1997-12-16

申请人： Kazuo Fujibayashi ,  Koji Hoshi ,  Manabu Kato ,  Yoshihiro Ishibe

发明人： Kazuo Fujibayashi ,  Koji Hoshi ,  Manabu Kato ,  Yoshihiro Ishibe

IPC分类号： G02B26/10 ,  G02B13/00 ,  G02B13/18 ,  G02B26/12 ,  G02B26/08

CPC分类号： G02B26/125 ,  G02B13/0005

摘要： A scanning optical apparatus includes a light source device, a first optical element for converting a beam emitted from the light source device to a converging light beam, a deflecting element for deflecting the beam emitted from the light source device, a second optical element for focusing the beam emerging from the first optical element in a linear shape longitudinal in a main scanning direction on a deflective face of the deflecting element, and a third optical element for focusing the beam deflected by the deflecting element in a spot shape on a scanned surface. The third optical element has a spherical lens and a toric lens in order from the side of the deflecting element, surfaces of the spherical lens comprise a meniscus shape of positive refracting power with a concave surface faced toward the deflecting element, and the toric lens has two lens surfaces formed in aspherical shapes in a main scanning section and comprising a meniscus shape of positive refracting power with a convex surface faced toward the deflecting element in the vicinity of a center of scan.

摘要翻译： 一种扫描光学装置，包括光源装置，用于将从光源装置发射的光束转换成会聚光束的第一光学元件，用于偏转从光源装置发射的光束的偏转元件，用于聚焦的第二光学元件 在偏转元件的偏转面上以主扫描方向纵向呈线性形状的第一光学元件射出的光束，以及用于将由偏转元件偏转的光束以斑点形状聚焦在扫描表面上的第三光学元件。 第三光学元件具有从偏转元件一侧依次的球面透镜和复曲面透镜，球面透镜的表面包括正折射率的弯月形，凹面朝向偏转元件，复曲面具有 在主扫描部分中形成为非球面形状的两个透镜表面，并且包括在折射中心附近具有面向偏转元件的凸表面的正折射率的弯月形状。