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公开(公告)号：US20090226699A1
公开(公告)日：2009-09-10
申请号：US12394943
申请日：2009-02-27
申请人： Yukitaka MURATA , Keisuke Watanabe
发明人： Yukitaka MURATA , Keisuke Watanabe
CPC分类号： C04B35/50 , C04B35/505 , C04B41/009 , C04B41/5045 , C04B41/87 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/656 , C04B2235/6582 , C04B2235/72 , C04B2235/77 , C04B2235/963 , H01J37/32495 , Y10T428/24997 , Y10T428/31 , C04B41/4527 , C04B35/10
摘要： The present invention aims to provide a sintered body and a component used in a plasma processing apparatus. The sintered body and the component are mainly composed of a cerium oxide, which is excellent in corrosion resistance to halogen-based gas or plasma, and can reduce resistance. The cerium oxide can also suppress contamination of metal due to impurity caused by the constituent material of the ceramic even in a halogen plasma process, so that it can preferably be used, as a substitute of an yttria, for a component in a plasma processing apparatus for manufacturing a semiconductor or liquid crystal.A sintered body is used, wherein at least the portion exposed to plasma is formed by adding an yttria with a purity of 99% or more in an amount of 3 parts by weight or more and 100 parts by weight or less to 100 parts by weight of a cerium oxide having purity of 99% or more. Alternatively, a component covered by a sprayed film having the composition same as described above is used. Alternatively, a sintered body that is formed by adding a lanthanum oxide with a purity of 99% or more to a cerium oxide with a purity of 99% or more in an amount of 1 to 50 mol % in the total composition is used, wherein the surface roughness Ra of the portion at least exposed to plasma is less than 1.6 μm.
摘要翻译： 本发明的目的在于提供一种用于等离子体处理装置的烧结体和部件。 烧结体及其成分主要由氧化铈构成，其对卤素系气体或等离子体的耐腐蚀性优异，能够降低电阻。 即使在卤素等离子体工艺中，氧化铈也可以抑制由于陶瓷构成材料引起的杂质而导致的金属污染，因此优选使用等离子体处理装置中的成分作为氧化钇的替代物 用于制造半导体或液晶。 使用烧结体，其中至少暴露于等离子体的部分通过以3重量份以上且100重量份以下至100重量份的量添加纯度为99％以上的氧化钇而形成 的纯度为99％以上的氧化铈。 或者，使用由具有上述组成相同的喷涂膜覆盖的部件。 或者，使用通过向总组合物中的纯度为99％以上的氧化铈添加1〜50摩尔％的纯度为99％以上的氧化镧而形成的烧结体，其中， 至少暴露于等离子体的部分的表面粗糙度Ra小于1.6μm。
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公开(公告)号：US20080266431A1
公开(公告)日：2008-10-30
申请号：US12108828
申请日：2008-04-24
申请人： Tatsushi OHYAMA , Kaori Misawa , Keisuke Watanabe
发明人： Tatsushi OHYAMA , Kaori Misawa , Keisuke Watanabe
摘要： A sensor includes a first pixel for measuring a distance to an object by detecting reflected light applied from a light source and reflected by the object, wherein the first pixel includes a first charge increasing portion for increasing signal charges stored in the first pixel by impact ionization.
摘要翻译： 传感器包括：第一像素，用于通过检测从光源施加的并被物体反射的反射光来测量到物体的距离，其中第一像素包括第一电荷增加部分，用于通过冲击电离增加存储在第一像素中的信号电荷 。
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公开(公告)号：US20080154549A1
公开(公告)日：2008-06-26
申请号：US11960803
申请日：2007-12-20
申请人： Jun Koshoubu , Tetsuji Sunami , Kenichi Akao , Keisuke Watanabe
发明人： Jun Koshoubu , Tetsuji Sunami , Kenichi Akao , Keisuke Watanabe
IPC分类号： G06F15/00
CPC分类号： G06K9/0051
摘要： A noise-component removing method for removing a noise component from multipoint spectral data that has been generated through measurements performed at measurement points of a sample surface, the method comprising: a PLS analysis step of determining components of the multipoint spectral data for each measurement point in a descending order of eigenvalues of the components by subjecting the multipoint spectral data to multivariate analysis based on the partial least squares regression using a value obtained by quantifying characteristic information about a characteristic of each measurement point, other than spectral information of the measurement point and using the spectral information as an independent variable in the partial least squares regression; and a spectrum reconstruction step of reconstructing the multipoint spectral data for each measurement point to eliminate a component having an eigenvalue lower than a predetermined value, from the components determined in the PLS analysis step.
摘要翻译： 一种噪声分量去除方法，用于从通过在样本表面的测量点执行的测量产生的多点频谱数据中去除噪声分量，所述方法包括：PLS分析步骤，用于确定每个测量点的多点频谱数据的分量 通过使用通过量化关于每个测量点的特性的特性信息获得的值而获得多点频谱数据进行多变量分析的多点分析数据，除了测量点的光谱信息以外，以及 在偏最小二乘回归中使用光谱信息作为独立变量; 以及频谱重构步骤，根据在PLS分析步骤中确定的分量，重构每个测量点的多点频谱数据以消除具有低于预定值的特征值的分量。
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公开(公告)号：US20070079934A1
公开(公告)日：2007-04-12
申请号：US11512431
申请日：2006-08-30
IPC分类号： H01L21/306 , C23F1/00 , C23C16/00
CPC分类号： C23C16/45565 , C04B41/009 , C04B41/53 , C04B41/91 , C04B35/505
摘要： To provide an inexpensive gas dispersion plate having a high corrosion resistance to halogen-based corrosive gasses and a plasma thereof, and capable of preventing particle generation from the gas hole, thereby contributing to an improvement in the production yield of the semiconductor devices. The gas dispersion plate includes one or plural gas holes in a base material formed by a Y2O3 ceramic material having a relative density of 96% or more, in which an edge part of the gas hole is formed by a sand blasting process into a rounded shape with a radius of curvature of 0.2 mm or more.
摘要翻译： 为了提供对卤素类腐蚀性气体和其等离子体具有高耐蚀性的廉价的气体分散板，并且能够防止从气孔产生颗粒，从而有助于提高半导体器件的产量。 气体分散板包括由相对密度为96％以上的Y 2 O 3 O 3陶瓷材料形成的基材中的一个或多个气孔，其中 气孔的边缘部分通过喷砂处理形成为具有0.2mm或更大的曲率半径的圆形。
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公开(公告)号：US20070066478A1
公开(公告)日：2007-03-22
申请号：US11504102
申请日：2006-08-15
IPC分类号： C04B35/505
CPC分类号： C04B35/505 , B22F2998/00 , B22F2998/10 , C04B2235/404 , C04B2235/5436 , C04B2235/5445 , C04B2235/604 , C04B2235/6581 , C04B2235/6582 , C04B2235/77 , C04B2235/96 , C04B2235/9607 , C04B2235/9692 , C22C1/051 , C22C29/005 , C22C29/12 , H01J37/32431 , B22F3/1007 , B22F2201/013 , B22F9/026 , B22F1/0003 , B22F3/04
摘要： To provide a yttria sintered body having an excellent corrosion resistance to halogen-based corrosive gases and plasma and an excellent thermal shock resistance, and adapted for use as a component member in manufacturing apparatuses for semiconductor and liquid crystal devices, particularly in a plasma process apparatus. A yttria sintered body including tungsten of an average particle size of 3 μm or less dispersed in the yttria so that a ratio of the tungsten relative to the yttria is ranging from 1 to 50% in terms of weight, and having an open pore rate of 0.2% or less and a thermal shock resistance by water submersion method of 200° C. or larger.
摘要翻译： 为了提供一种对卤素类腐蚀性气体和等离子体具有优异的耐腐蚀性和优异的耐热冲击性的氧化钇烧结体，适合用作半导体和液晶装置的制造装置中的部件，特别是在等离子体处理装置 。 一种氧化钇烧结体，其包含平均粒度为3μm以下的均匀分布在氧化钇中的钨，使得钨相对于氧化钇的比例为1〜50重量％，开孔率为 0.2％以下，水浸方法的耐热冲击性为200℃以上。
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公开(公告)号：US20070047839A1
公开(公告)日：2007-03-01
申请号：US11509061
申请日：2006-08-24
申请人： Keisuke Watanabe , Tatsushi Ohyama
发明人： Keisuke Watanabe , Tatsushi Ohyama
IPC分类号： G06K9/36
CPC分类号： G06K9/4647
摘要： In an object recognition apparatus, a first division unit and a second division unit each partitions an image into a plurality of regions. A first calculation and a second calculation unit each derives, for each of the plurality of regions partitioned. A first comparison unit and a second comparison unit each compares the derived characteristic quantities in between at least two images, for each of the plurality of regions. A recognition unit recognizes a region where the object is located, based on the comparison result.
摘要翻译： 在物体识别装置中，第一分割单元和第二分割单元将图像分割成多个区域。 对于分割的多个区域中的每一个，第一计算和第二计算单元各自导出。 第一比较单元和第二比较单元各自对于多个区域中的每一个区别在至少两个图像之间的导出的特征量。 基于比较结果，识别单元识别对象所在的区域。
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67.发明授权Method and reagent for testing for multiple organ failure in SIRS by cytochrome C measurement 有权通过细胞色素C测量在SIRS中检测多器官功能衰竭的方法和试剂公开(公告)号：US07138239B2
公开(公告)日：2006-11-21
申请号：US10139933
申请日：2002-05-06
申请人： Fumio Endo , Naoto Adachi , Hiroyuki Nunoi , Keisuke Watanabe
发明人： Fumio Endo , Naoto Adachi , Hiroyuki Nunoi , Keisuke Watanabe
IPC分类号： G01N33/53
CPC分类号： G01N33/6893 , G01N2333/80 , Y10S436/811
摘要： A method for testing for multiple organ failure in SIRS, which comprises determining cytochrome C in body fluid and using the determined result as an index of the multiple organ failure, and a reagent for testing for multiple organ failure in SIRS, which comprises a reagent for determination of cytochrome C in body fluid.
摘要翻译： 一种用于测试SIRS中多器官功能衰竭的方法，其包括测定体液中的细胞色素C并使用确定的结果作为多器官功能衰竭的指标，以及用于测试SIRS中多器官功能衰竭的试剂，其包括用于 体液中细胞色素C的测定。
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公开(公告)号：US20060073354A1
公开(公告)日：2006-04-06
申请号：US11239678
申请日：2005-09-30
CPC分类号： H01J37/3244 , C22C21/00 , C23C4/11 , C25D1/08 , H01J37/32495 , Y10T428/12361 , Y10T428/12493 , Y10T428/12736
摘要： A gas diffusion plate has an alumina or an aluminum base material provided with one or more through holes and an yttria body shrink-fitted to one of the through holes and provided with one or more gas discharge holes.
摘要翻译： 气体扩散板具有设置有一个或多个通孔的氧化铝或铝基材料，并且将氧化钇体收缩配合到一个通孔并且设置有一个或多个排气孔。
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69.发明申请公开(公告)号：US20060023921A1
公开(公告)日：2006-02-02
申请号：US11188757
申请日：2005-07-26
申请人： Hirofumi Saitoh , Keisuke Watanabe
发明人： Hirofumi Saitoh , Keisuke Watanabe
IPC分类号： G06K9/00
CPC分类号： G06K9/3275 , G06K9/00067
摘要： An input unit inputs respectively a plurality of partial images corresponding to a user to be authenticated. An extraction unit extracts feature points of a fingerprint respectively from the plurality of partial images inputted. A generation unit synthesizes the feature points extracted respectively from the plurality of partial images and then generates feature point information for authentication. An acquisition unit acquires reference feature point information. A rotation unit performs phase rotation on the generated authentication feature point information so that a directional component, namely, a phase component, contained in the generated authentication feature point information approaches that contained in the acquired reference feature point information. An authentication unit authenticates the authentication feature point information whose phase has been rotated, based on the reference feature point information.
摘要翻译： 输入单元分别输入与要认证的用户对应的多个部分图像。 提取单元从输入的多个部分图像分别提取指纹的特征点。 生成单元合成从多个部分图像分别提取的特征点，然后生成用于认证的特征点信息。 采集单元获取参考特征点信息。 旋转单元对所生成的认证特征点信息执行相位旋转，使得包含在生成的认证特征点信息中的方向分量，即相位分量接近包含在所获取的参考特征点信息中。 认证单元基于参考特征点信息认证其相位旋转的认证特征点信息。
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公开(公告)号：US20050270386A1
公开(公告)日：2005-12-08
申请号：US11139022
申请日：2005-05-27
CPC分类号： G06K9/00906 , G06K9/00604 , G06K9/00912
摘要： A first image pickup unit mainly captures the image of whole face. A second image pickup unit mainly captures an image of iris in an eye. A display unit simultaneously displays both an image picked up by the first image pickup unit and an image picked up by the second image pickup unit on divided display regions, and naturally prompts a user to operate in such manner as to include himself/herself within an image pickup range. When the user moves his/her face or an authentication apparatus upon seeing this display, a relative position or direction of the iris and the image pickup device can be set to a desired state.
摘要翻译： 第一图像拾取单元主要捕获整个脸部的图像。 第二图像拾取单元主要捕获眼睛中的虹膜图像。 显示单元同时在划分的显示区域上同时显示由第一图像拾取单元拾取的图像和由第二图像拾取单元拾取的图像，并且自然地提示用户以将自身包括在内部的方式操作 图像拾取范围。 当用户在看到该显示时移动他/她的脸或认证设备时，可以将虹膜和图像拾取设备的相对位置或方向设置为期望状态。
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