Object transport apparatus having a floating conveying means
    61.
    发明授权
    Object transport apparatus having a floating conveying means 有权
    具有浮动传送装置的物体输送装置

    公开(公告)号:US06224298B1

    公开(公告)日:2001-05-01

    申请号:US09142329

    申请日:1998-11-27

    IPC分类号: B65G5316

    CPC分类号: H05K13/027 Y10S414/101

    摘要: Grooves for constructing transport passages 12 for transporting semiconductor chips 28 are provided (the grooves are provided in parallel to one another in a number corresponding to quality levels of the semiconductor chips 28). An air blow pipe 27 is provided at a starting end Pa of the transport passage 12 in a transport direction (direction indicated by the arrow in FIG. 7) to give the thrust for moving the semiconductor chips 28 in the transport direction. A large number of air-jetting holes 26 for floating the semiconductor chips 28 are provided through a transport surface. Especially, the air-jetting holes 26 are provided at a terminal end in the transport direction in a number larger than those for the other portions. Thus, the floating amount of the semiconductor chip 28 is maximized at the terminal end. A plurality of slits 29 are provided vertically through a terminal end wall 20a in the transport direction. Accordingly, a transport system is realized, in which the object is transported in one direction while floating the object by means of air. Especially, it is possible to realize the automatic operation for picking up individual objects one by one.

    摘要翻译: 设置用于构造用于输送半导体芯片28的输送通道12的凹槽(凹槽以对应于半导体芯片28的质量水平的数量彼此平行地设置)。 输送路径12的输送方向(图7中的箭头方向)的起始端Pa设置有吹送管27,以提供沿着输送方向移动半导体芯片28的推力。 通过输送面设置有用于使半导体芯片28浮起的大量喷射孔26。 特别地,空气喷射孔26设置在输送方向的末端,其数量大于其它部分的数量。 因此,半导体芯片28的浮动量在终端被最大化。 在输送方向上通过终端壁20a垂直设置多个狭缝29。 因此,实现了一种传送系统,其中物体沿着一个方向传送,同时通过空气浮动物体。 特别地,可以实现逐个拾取各个物体的自动操作。

    Method of and apparatus for inspecting honeycomb-shaped object having
plural through holes
    62.
    发明授权
    Method of and apparatus for inspecting honeycomb-shaped object having plural through holes 失效
    用于检查具有多个通孔的蜂窝状物体的方法和装置

    公开(公告)号:US5463462A

    公开(公告)日:1995-10-31

    申请号:US219381

    申请日:1994-03-29

    IPC分类号: G01N21/956 G01B9/02

    CPC分类号: G01N21/95692 G01N21/95623

    摘要: A parallel light beam is introduced from a collimator lens into through holes defined in a honeycomb-shaped object, and any light emitted from the honeycomb-shaped object is read by a CCD camera through a Fourier-transform lens to produce a Fourier-transform image of the honeycomb-shaped object. The honeycomb-shaped object is tilted such that the axis of the through holes is inclined at a certain angle to the optical axis of the parallel laser beam. If the partitions contain interstices spaced at intervals and light introduced into the through holes passes through such interstices, the Fourier-transform image includes a stripe pattern induced by diffracted light from the interstices. Since the stripe pattern can easily be distinguished from a dot-matrix pattern representing light emitted from the through holes, the interstices contained in the partitions can reliably be detected.

    摘要翻译: 将平行光束从准直透镜引入定义在蜂窝状物体中的通孔中,并且通过CCD照相机通过傅立叶变换透镜从蜂窝状物体发射的任何光被读取,以产生傅里叶变换图像 的蜂窝状物体。 蜂窝状物体倾斜使得通孔的轴线相对于平行激光束的光轴倾斜一定角度。 如果分隔件间隔间隔,并且引入通孔的光通过这些空隙,则傅立叶变换图像包括由来自间隙的衍射光引起的条纹图案。 由于条纹图案可以容易地与表示从通孔发出的光的点阵图案区分开,所以可以可靠地检测包含在分区中的间隙。

    Method of manufacturing piezoelectric element
    63.
    发明授权
    Method of manufacturing piezoelectric element 有权
    制造压电元件的方法

    公开(公告)号:US09240544B2

    公开(公告)日:2016-01-19

    申请号:US13115442

    申请日:2011-05-25

    摘要: A method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later, by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate.

    摘要翻译: 一种制造压电元件的方法,包括以下步骤:通过使用压电材料制备包括成为烧结压电体的部分的生片A. 在生坯片A的至少一个表面上接合具有开口的生坯片B,其后面部分成为烧结压电体的部分,然后进行烧制,以获得具有加强层的烧结压电体 安装由于生坯B的烧制而形成的加强板的板; 以及在设置有加强板的烧结压电体中通过焙烧生片A而获得的部分中形成膜状电极的步骤。

    Passage detection apparatus of object
    64.
    发明授权
    Passage detection apparatus of object 失效
    物体通过检测装置

    公开(公告)号:US08528408B2

    公开(公告)日:2013-09-10

    申请号:US13299584

    申请日:2011-11-18

    IPC分类号: G01N29/27 G01H13/00 G01H5/00

    摘要: A passage detection apparatus is configured to detect the change in the properties (propagation state of sound wave, dielectric constant, etc.) of a specific space, which changes according to the passage of an object in the specific space and the size of the object. The passage detection apparatus includes a pair of detection units and configured to transmit and receive signals to and from an external device. The specific space is formed by the space between the detection unit and the detection unit. The detection unit is supported by a first substrate. The detection unit is supported by a second substrate that is parallel to the first substrate, and arranged at the position corresponding to the detection unit supported by the first substrate.

    摘要翻译: 通过检测装置被配置为检测根据特定空间中的物体的通过和物体的尺寸而变化的特定空间的特性(声波的传播状态,介电常数等)的变化 。 通过检测装置包括一对检测单元,并且被配置为向外部设备发送信号和从外部设备接收信号。 特定空间由检测单元和检测单元之间的空间形成。 检测单元由第一基板支撑。 检测单元由与第一基板平行的第二基板支撑,并且布置在与由第一基板支撑的检测单元对应的位置。

    Method for manufacturing piezoelectric actuator
    66.
    发明授权
    Method for manufacturing piezoelectric actuator 失效
    制造压电致动器的方法

    公开(公告)号:US08375538B2

    公开(公告)日:2013-02-19

    申请号:US12729532

    申请日:2010-03-23

    IPC分类号: H04R17/10 H01L41/22

    摘要: There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.

    摘要翻译: 提供一种制造压电致动器的方法,其中通过使位于两个或更多个压电体层中的一个外表面上的压电体层进行极化处理来调节压电体层的残留极化,从而调整平面形状 。 压电致动器用作压电驱动型可变电容器的驱动部分。 可变电容器长时间具有高机械强度和优异的可靠性。 压电致动器的位移量与电容器的容量之间的关系是稳定的,并且可变容量很宽。

    Passage detection apparatus of object
    67.
    发明授权
    Passage detection apparatus of object 失效
    物体通过检测装置

    公开(公告)号:US07681451B2

    公开(公告)日:2010-03-23

    申请号:US11775427

    申请日:2007-07-10

    IPC分类号: G01N9/24

    摘要: Disclosed herein is a passage detection apparatus capable of detecting a passage of an object in a specific space. The passage detection apparatus includes a transmitting device, a receiving device, and a shielding member. The transmitting device is provided with a vibration generating source. The receiving device is arranged at the position corresponding to the transmitting device across the specific space. The shielding member has a through-hole, and is arranged so as to be interposed between the transmitting device and the receiving device. The vibration transmitted from the transmitting device reaches the receiving device via the through-hole and a passage route of the object. On the other hand, the reception of the vibration, reflected in the specific space, by the receiving device is suppressed by the shielding member.

    摘要翻译: 这里公开了一种能够检测物体在特定空间中的通过的通过检测装置。 通过检测装置包括发送装置,接收装置和屏蔽部件。 发送装置设有振动发生源。 接收装置布置在跨越特定空间的与发送装置对应的位置。 屏蔽构件具有通孔,并且布置成介于发送装置和接收装置之间。 从发送装置发送的振动经由通孔和物体的通过路径到达接收装置。 另一方面,通过遮光部件抑制由接收装置在特定空间中反射的振动的接收。

    PIEZOELECTRIC/ELECTROSTRICTIVE FILM ELEMENT
    68.
    发明申请
    PIEZOELECTRIC/ELECTROSTRICTIVE FILM ELEMENT 失效
    压电/电镀膜元件

    公开(公告)号:US20080111453A1

    公开(公告)日:2008-05-15

    申请号:US11960923

    申请日:2007-12-20

    IPC分类号: H01L41/00

    摘要: A lower electrode 4 and an auxiliary electrode 8, a piezoelectric/electrostrictive film 5, and an upper electrode 6 are sequentially arranged in layers on a substrate 1. The lower electrode 4 is continuously formed in a region ranging from a first portion of the thick-walled portion 2 to a thin-walled diaphragm portion 3. The auxiliary electrode 8 is continuously formed in a region ranging from a second portion of the thick-walled portion 2 opposite the first portion to a position on the thin-walled diaphragm portion 3, the position being separated from the lower electrode 4. The upper electrode 6 is formed in such a manner as to overlie the piezoelectric/electrostrictive film 5 and the auxiliary electrode 8. Furthermore, a connection electrode 20 is provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Thus, a plurality of paths are provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Therefore, even when connection through a certain path is cut off due to fracture of a portion of the upper electrode 6 caused by deterioration in insulating performance of the piezoelectric/electrostrictive film 5, electrical connection between the upper electrode 6 and the auxiliary electrode 8 can be maintained through the remaining path(s).

    摘要翻译: 下部电极4和辅助电极8,压电/电致伸缩膜5和上部电极6依次排列在基板1上。 下部电极4连续形成在从厚壁部2的第一部分到薄壁膜部3的范围内。 辅助电极8连续地形成在与第一部分相对的厚壁部分2的第二部分到薄壁隔膜部分3上的位置,该位置与下部电极4分离。 上电极6以覆盖压电/电致伸缩膜5和辅助电极8的方式形成。 此外,设置连接电极20用于电连接上电极6和辅助电极8。 因此,设置多个路径用于电连接上电极6和辅助电极8。 因此,即使由于由于压电/电致伸缩膜5的绝缘性能的劣化而导致的上部电极6的一部分的断裂,通过某一路径的连接被切断时,上部电极6与辅助电极8之间的电连接也可以 通过剩余的路径进行维护。

    INSPECTION METHOD, INSPECTION APPARATUS, AND POLARIZATION METHOD FOR PIEZOELECTRIC ELEMENT
    69.
    发明申请
    INSPECTION METHOD, INSPECTION APPARATUS, AND POLARIZATION METHOD FOR PIEZOELECTRIC ELEMENT 失效
    检测方法,检验装置和压电元件极化方法

    公开(公告)号:US20080030102A1

    公开(公告)日:2008-02-07

    申请号:US11856351

    申请日:2007-09-17

    IPC分类号: H01L41/09

    摘要: A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.

    摘要翻译: 一种用于检查压电元件的方法包括:第一检查信号施加步骤,向所述压电元件施加具有第一预定电压波形的第一检查信号Vp(1); 第一特征值测量步骤,在施加第一检查信号之后测量压电元件的电特性值作为第一特征值; 第二检查信号施加步骤,向所述压电元件施加具有大于所述第一检查信号的第二预定电压波形和电功率的第二检查信号Vp(2) 第二特征值测量步骤,在施加第二检查信号之后测量压电元件的电特性值作为第二特征值; 以及异常判定步骤,基于与所测量的第二特征值和测量的第一特征值之间的差对应的值,确定压电元件是否异常。