摘要:
A method for producing a plasma display panel includes the steps of: evacuating air from a discharge space formed between a front plate and a rear plate which are substrates facing each other through piping; introducing a discharge gas into the discharge space through gas piping that branches from the piping; and recovering the discharge gas remaining in the piping system through the piping.
摘要:
The present invention provides a method and an apparatus for preparing a silicon-containing solid film, which can form a thin film uniformly over a wide area. Raw-material fluid comprising a silane derivative and a hydrocarbon derivative is mixed with carrier fluid comprising carbon dioxide to form a supercritical condition. Further, an active-state is produced in the raw-material fluid of the supercritical fluid by a catalytic reaction with at least one metal catalyst selected from a group consisting of platinum, tungsten, cobalt, nickel, iron or an alloy of each of them. The fluid is blown to the substrate, thereby forming a silicon-containing solid film or a hydrocarbon-containing solid film on the substrate.
摘要:
A pollution control element-mounting member suitable for mounting a pollution control element within a casing of a pollution control device. The pollution control element-mounting member comprises a mat of a fiber material having a predetermined thickness, with the mat having a combination of at least two types of binders having different glass transition temperatures (Tg) impregnated therein.
摘要:
An outboard engine unit having plural electronic components is disclosed. The electronic components are wholly supported by a single bracket which is mounted to a crankcase through a vibration damping rubber grommet.
摘要:
The mask defect inspection apparatus including an illumination optical system for illuminating a mask on which a pattern is formed; an objective lens facing the mask; at least a pair of detection optical systems having a detection sensor for obtaining an image of the pattern, respectively, and which receive illumination light from illumination areas different from each other through the objective lens, respectively; and focusing changing means for changing a position of focusing between sites of the pattern in a film-thickness direction of the mask and the pattern images obtained by the detection sensors, such that the pattern images obtained by the detection sensors are changed corresponding to the film-thickness direction of the mask.
摘要:
The mask defect inspection apparatus including an illumination optical system for illuminating a mask on which a pattern is formed; an objective lens facing the mask; at least a pair of detection optical systems having a detection sensor for obtaining an image of the pattern, respectively, and which receive illumination light from illumination areas different from each other through the objective lens, respectively; and focusing changing means for changing a position of focusing between sites of the pattern in a film-thickness direction of the mask and the pattern images obtained by the detection sensors, such that the pattern images obtained by the detection sensors are changed corresponding to the film-thickness direction of the mask.
摘要:
A pattern inspection apparatus comprises an illumination optics applying a first inspection light on a predetermined wavelength to a surface opposite to a pattern formed surface of the substrate, and a second inspection light whose wavelength is equal to the wavelength of the first inspection light to the pattern formed surface, a detector independently detecting a transmitted light from the substrate by irradiation of the first inspection light and a reflected light from the substrate by irradiation of the second inspection light, and a space separation mechanism provided in the vicinity of an optical focal plane toward the pattern formed surface, and spatially separates an irradiation area of the first and second inspection lights such that the transmitted and reflected lights from the substrate are imaged in two discrete areas separated on the optical focal plane.
摘要:
In a temperature control device which maintains an object to be controlled at a preset constant temperature and an arrayed waveguide grating optical wavelength multiplexer/demultiplexer, the adverse effect of the junction temperature of the semiconductor control element is eliminated for the purpose of simplifying the overall structure and improving operation efficiency. The object to be controlled and semiconductor control element are fixed on the soaking plate. A negative feedback control is applied to the conduction condition of the semiconductor control element. Consequently, the junction temperature of the semiconductor control element is effectively used as a heating source not as a loss, thereby reducing the power consumption and stabilizing the performance.
摘要:
A method of uniforming physical random numbers, capable of maintaining a random number generating rate and ensuring security concurrently. The method sequentially inputs a plurality of physical random numbers to a shift register to hold them there, and shifts them every time a reference pulse signal rises. Physical random numbers held in the shift register are randomly selected and output by a selector based on part of them. Accordingly, physical random numbers input to the shift register are uniformed and then output even thought they have a deviation, thereby eliminating the chance of not outputting random numbers or letting others recognize the deviation of random numbers.