摘要:
The invention provides a plasma processing apparatus capable of minimizing the non-uniformity of potential distribution around wafer circumference, and providing a uniform process across the wafer surface. The apparatus is equipped with a focus ring formed of a dielectric, a conductor or a semiconductor and having RF applied thereto, the design of which is optimized for processing based on a design technique clarifying physical conditions for flattening a sheath-plasma interface above a wafer and the sheath-plasma interface above the focus ring. A surface voltage of the focus ring is determined to be not less than a minimum voltage for preventing reaction products caused by wafer processing from depositing thereon. The surface height, surface voltage, material and structure of the focus ring are optimized so that the height of an ion sheath formed on the focus ring surface is either equal or has a height difference within an appropriate tolerance range to the height of the ion sheath formed on the wafer surface. Optimization of the structure is realized by setting up an appropriate tolerance range taking into consideration the variation caused by consumption of the focus ring.
摘要:
Systems and methods related to game consoles, game software and games for play on a game console having a touch screen interface. A card having a pattern defined therein is overlaid on the touch screen. The defined pattern is used to activate portions of the touch screen by guiding user interaction with a touch pad or touch screen. The activated portions of the touch pad or touch screen launch responsive activity in a computer program implemented on the game console.
摘要:
Embodiments of the invention provide a manufacturing method for a disk drive which allows highly accurate recording of servo data without substituting the internal gas of the disk drive, and such a magnetic disk drive and servo track writer. In one embodiment, a disk, a magnetic head slider with a head for writing data onto and reading out data from the disk, a suspension for retaining the magnetic head slider, an arm for supporting the suspension, and a driving section for driving the arm are stored into an enclosure. When a servo track write operation is conducted, the enclosure interior is depressurized to an atmospheric pressure lower than normal pressure and then servo data is recorded on the disk.
摘要:
A hermetic compressor is equipped with a suction muffler including: a muffling space having two rooms; a communication space to communicate these two rooms with each other; a first communication passage to communicate a movable valve with the muffling space and extending to an opening into the muffling space; and a second communication passage to communicate an enclosed container with the muffling space and extending to an opening into the muffling space. The openings into the muffling space from the first and the second communication passages are disposed in one of the two rooms, and the other room of the two rooms forms a resonance muffler whose resonance frequency matches a cavity resonance frequency of the enclosed container. The configuration can provide the hermetic compressor with a reduced noise emission and a high compression efficiency.
摘要:
A magnetic head is provided with a substrate and a magnetic field generating coil formed on the substrate. The substrate has a principal surface facing a storage disk and divided into an inner area and an outer area surrounding the inner region. The magnetic head also includes a dielectric layer enclosing the coil and facing the storage disk. The dielectric layer is formed in the inner area of the principal surface of the substrate but not in the outer area. As tilting, the storage disk comes into contact with the dielectric layer, thereby being prevented from bumping into the outer area of the principal surface of the substrate.
摘要:
A rotary connector includes a stationary housing, a rotative housing, a rotative holder, floating spacers, and flat cables. The flat cables provide a low-current path to a steering wheel of a vehicle. The rotary connector also includes a slip ring mechanism to provide a large-current path to electrical apparatuses on the steering wheel. The slip ring mechanism includes annular stationary contacts, annular movable contacts, and floating contacts. The annular stationary contacts are provided on the stationary housing and oppose the floating spacers to extend along a path of pivotal movement thereof. The annular movable contacts are provided on the rotative housing and oppose the floating spacers to extend along the path of pivotal movement thereof. The movable contacts are connected to electrical apparatuses on the steering wheel side. The floating contacts are provided on the floating spacers and are in resilient contact with the stationary contacts and the movable contacts.
摘要:
The present invention is directed to a single crystal pulling crucible of carbon fiber reinforced carbon composite material formed by the filament windings by combination of axially reinforced layers as well as circumberentially reinforced layers, which combination is given in two or more sets, and to the producing method thereof. The circumferentially reinforced layers resist a force tending to exapand a drum portion of the crucible, and the axially reinforced layers resist a force tending to push down a bottom of the crucible. The axially reinforced layers extending from the bottom portion to the drum portion can be formed by at least either of a level winding of a contact angle of 0.degree. to 10.degree. with respect to the center axis and a poral winding, and the circumferentially reinforced layers in area adjacent to the drum portion out of the drum portion and the bottom portion can be formed by at least either of a parallel winding of a contact angle of 70.degree. to 90.degree. with respect to the center axis and a helical winding. When the axially reinforced layers cover the center of the bottom portion, an integral crucible of C/C composite material with no hole is provided. When the surface of the C/C composite material is impregnated and covered with a pyrolytic carbon, improved resistance to forming SiC is provided.
摘要:
This invention relates to ketones represented by the following formula ##STR1## and to drugs in which such a ketone or pharmacologically acceptable salt thereof is an effective component.The ketones of the present invention encourage the production of platelets, red blood cells, white blood cells and the like, and can be used to prevent or treat cytopaenia brought about by cancer chemotherapy, radiotherapy, bone marrow transplantation and drug therapy, or by immunological abnormality or anaemia, and the like.
摘要:
A rotary connector 1 has a fixed case 3 for being mounted on a base 5 for a switch 4. The fixed case 3 has a first screw insertion hole 3a formed open therein for insertion of a screw 6. The screw 6 has a flange 6a. The fixed case 3 or the base 5 has a resilient pawl 3f formed therein for engagement with the flange 6a. With such structure, it is possible to screw-fix both the rotary connector and the base onto the steering column. The screw is securely kept in the rotary connector during transport and assembly by the resilient pawl.
摘要:
A column switch is provided with a rotary connector that makes electrical connection between a steering wheel and a vehicle by means of a coiled, flexible, flat cable 5 accommodated in a housing. The housing includes a lower housing defined by a base 1 of the column switch and an upper housing defined by a rotor 6 with a cancel cam 6f. The base 1 has a hollow cylinder 1a through which a steering shaft 2 is inserted in line with the hollow cylinder, and an annular groove 1b surrounding the hollow cylinder 1a and accommodating the flat cable 5 therein. The rotor 6 has an accommodating section 6c that closes the annular groove 1b, and a resilient fastening strap 6e that rotatably engages a fastening portion 1e formed on the hollow cylinder 1a. Since the same construction serves as both the base of the column switch and the housing of a rotary connector, the number of parts and assembly costs are minimized.