公开(公告)号：US20060044357A1

公开(公告)日：2006-03-02

申请号：US10927796

申请日：2004-08-27

申请人： Frank Anderson ,  Byron Bell ,  Robert Cornell ,  Yimin Guan

发明人： Frank Anderson ,  Byron Bell ,  Robert Cornell ,  Yimin Guan

IPC分类号： B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1628 ,  B41J2/164 ,  Y10T29/49401

摘要： A micro-fluid ejection device structure and method therefor having improved low energy design. The devices includes a semiconductor substrate and an insulating layer deposited on the semiconductor substrate. A plurality of heater resistors are formed on the insulating layer from a resistive layer selected from the group consisting of TaAl, Ta2N, TaAl(O,N), TaAlSi, Ti(N,O), WSi(O,N), TaAlN, and TaAl/TaAlN. A sacrificial layer selected from an oxidizable metal and having a thickness ranging from about 500 to about 5000 Angstroms is deposited on the plurality of heater resistors. Electrodes are formed on the sacrificial layer from a first metal conductive layer to provide anode and cathode connections to the plurality of heater resistors. The sacrificial layer is oxidized in a plasma oxidation process to provide a fluid contact layer on the plurality of heater resistors.

摘要翻译： 一种具有改进的低能量设计的微流体喷射装置结构及其方法。 这些器件包括沉积在半导体衬底上的半导体衬底和绝缘层。 在选自TaAl，Ta2N，TaAl（O，N），TaAlSi，Ti（N，O），WSi（O，N），TaAlN等的电阻层的绝缘层上形成多个加热电阻体， 和TaAl / TaAlN。 选自可氧化金属并且具有约500至约5000埃的厚度的牺牲层沉积在多个加热电阻器上。 电极从第一金属导电层形成在牺牲层上，以提供与多个加热电阻器的阳极和阴极连接。 牺牲层在等离子体氧化过程中被氧化以在多个加热电阻器上提供流体接触层。

公开(公告)号：US06929349B2

公开(公告)日：2005-08-16

申请号：US10685115

申请日：2003-10-14

申请人： Byron V. Bell ,  Yimin Guan

发明人： Byron V. Bell ,  Yimin Guan

IPC分类号： B41J2/14 ,  B41J2/135

CPC分类号： B41J2/14129

摘要： An ink jet printhead for an ink jet printer and method for making an improved printhead. The printhead includes a nozzle plate attached to a heater chip. The heater chip is a semiconductor substrate having a resistive layer deposited on the substrate, a dielectric layer deposited on the resistive layer, a cavitation layer for contact with ink, and an adhesion layer between the dielectric layer and cavitation layer. The adhesion layer is selected from the group consisting of tantalum nitride (TaN), tantalum oxide (TaO), silicon nitride (SiN), and titanium nitride (TiN), provided the adhesion layer and cavitation layer are selected so that the adhesion layer has no elemental component in common with the cavitation layer when the dielectric layer is comprised of SiC/SiN. Adhesion between the dielectric layer and cavitation layer is significantly enhanced by the invention.

摘要翻译： 一种用于喷墨打印机的喷墨打印头和用于制造改进的打印头的方法。 打印头包括附接到加热器芯片的喷嘴板。 加热器芯片是具有沉积在基板上的电阻层，沉积在电阻层上的介电层，与油墨接触的空穴层以及介电层和空化层之间的粘合层的半导体基板。 粘合层选自氮化钽（TaN），氧化钽（TaO），氮化硅（SiN）和氮化钛（TiN），只要选择粘合层和空穴层，使得粘附层具有 当介电层由SiC / SiN组成时，没有与空化层共同的元素分量。 通过本发明，电介质层和空化层之间的粘合力显着增强。

公开(公告)号：US20050157089A1

公开(公告)日：2005-07-21

申请号：US10760726

申请日：2004-01-20

申请人： Byron Bell ,  Robert Cornell ,  Yimin Guan ,  George Parish

发明人： Byron Bell ,  Robert Cornell ,  Yimin Guan ,  George Parish

IPC分类号： B41J2/14 ,  B41J2/05

CPC分类号： B41J2/14129 ,  B41J2202/03 ,  Y10T29/49082 ,  Y10T29/49098 ,  Y10T29/49099 ,  Y10T29/49163 ,  Y10T29/49346 ,  Y10T29/49401

摘要： A semiconductor substrate for a micro-fluid ejection head. The substrate includes a plurality of fluid ejection actuators disposed on the substrate. Each of the fluid ejection actuators includes a thin heater stack comprising a thin film heater and one or more protective layers adjacent the heater. The thin film heater is made of a tantalum-aluminum-nitride thin film material having a nano-crystalline structure consisting essentially of AlN, TaN, and TaAl alloys, and has a sheet resistance ranging from about 30 to about 100 ohms per square. The thin film material contains from about 30 to about 70 atomic % tantalum, from about 10 to about 40 atomic % aluminum and from about 5 to about 30 atomic % nitrogen.

摘要翻译： 一种用于微流体喷射头的半导体衬底。 衬底包括设置在衬底上的多个流体喷射致动器。 每个流体喷射致动器包括薄加热器堆叠，其包括薄膜加热器和与加热器相邻的一个或多个保护层。 薄膜加热器由具有主要由AlN，TaN和TaAl合金组成的纳米晶体结构的钽 - 氮化铝薄膜材料制成，并且具有约30至约100欧姆/平方的薄层电阻。 薄膜材料含有约30至约70原子％的钽，约10至约40原子％的铝和约5至约30原子％的氮。

公开(公告)号：US08891949B2

公开(公告)日：2014-11-18

申请号：US13556495

申请日：2012-07-24

申请人： Eunki Hong ,  Steven Bergstedt ,  Yimin Guan

发明人： Eunki Hong ,  Steven Bergstedt ,  Yimin Guan

IPC分类号： F24H1/08 ,  F04B19/24

CPC分类号： F04B19/24 ,  F04B19/006 ,  F28F3/12

摘要： A micro-fluidic pump comprises one or more channels having an array of resistive heaters, an inlet, outlet and a substrate as a heat sink and a means of cooling the device. The pump is operated with a fire-to-fire delay and/or a cycle-to-cycle delay to control the pumping rate and minimize heating of liquid inside the pump during its operation.

摘要翻译： 微流体泵包括一个或多个通道，其具有电阻加热器阵列，入口，出口和作为散热器的基板以及冷却装置的装置。 泵的运行时间为火焰延迟和/或周期到周期的延迟，以控制泵送速率并最大限度地减少泵在运行过程中液体的加热。

公开(公告)号：US08659158B2

公开(公告)日：2014-02-25

申请号：US11839671

申请日：2007-08-16

申请人： Xiaorong Cai ,  Michael John Dixon ,  Yimin Guan ,  Ann P. Holloway ,  Jeanne Marie Saldanha Singh ,  Zhigang Xiao

发明人： Xiaorong Cai ,  Michael John Dixon ,  Yimin Guan ,  Ann P. Holloway ,  Jeanne Marie Saldanha Singh ,  Zhigang Xiao

IPC分类号： H01L29/51

CPC分类号： C09D11/03 ,  B05D3/0209 ,  B05D3/0254 ,  C09D11/101 ,  C09D11/107 ,  C09D11/30 ,  H05K1/0373 ,  H05K1/162 ,  H05K2201/0209 ,  H05K2203/013

摘要： An aqueous composition for forming a micro-fluid jet printable dielectric film layer, methods for forming dielectric film layers, and dielectric film layers formed by the method. The aqueous composition includes from about 5 to about 20 percent by weight of a polymeric binder emulsion, from about 10 to about 30 percent by weight of a humectant, from about 0 to about 3 percent by weight of a surfactant, and an aqueous carrier fluid. The aqueous composition has a viscosity ranging from about 2 to about 6 centipoise at a temperature of about 23° C.

摘要翻译： 用于形成微流体喷射可印刷电介质膜层的水性组合物，用于形成电介质膜层的方法和通过该方法形成的电介质膜层。 水性组合物包含约5至约20重量％的聚合物粘合剂乳液，约10至约30重量％的湿润剂，约0至约3重量％的表面活性剂和水性载体流体 。 含水组合物在约23℃的温度下具有约2至约6厘泊的粘度。

公开(公告)号：US08608291B2

公开(公告)日：2013-12-17

申请号：US13191558

申请日：2011-07-27

申请人： Yimin Guan ,  Eunki Hong

发明人： Yimin Guan ,  Eunki Hong

IPC分类号： B41J2/045

CPC分类号： B41J2/161 ,  B41J2/1628 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  H01L41/0805 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314

摘要： A piezoelectric inkjet printhead is monolithically fabricated on a substrate. The printhead includes a plurality of cavities formed into the substrate, piezoelectric actuators disposed over the top of the cavities, a fluidic structure and an ink supply channel. The piezoelectric actuators are formed over the cavities using a sacrificial material which fills the cavities and is removed after the actuators are formed. The fluidic structure defines pressurizing chambers and channels connected to the ink supply channel. The fluidic structure has a plurality of nozzle holes formed on the top surface. The cavities are connected to either a venting channel formed from the backside of the substrate or a venting chamber formed inside the fluidic structures.

摘要翻译： 压电喷墨打印头被单片地制造在基板上。 打印头包括形成在基板中的多个空腔，设置在空腔顶部的压电致动器，流体结构和供墨通道。 使用填充空腔的牺牲材料在空腔上形成压电致动器，并且在致动器形成之后被移除。 流体结构限定了连接到供墨通道的加压室和通道。 流体结构具有形成在顶表面上的多个喷嘴孔。 空腔连接到从基板的背面形成的排气通道或形成在流体结构内部的排气室。

公开(公告)号：US20130202278A1

公开(公告)日：2013-08-08

申请号：US13556495

申请日：2012-07-24

申请人： EUNKI HONG ,  Steven Bergstedt ,  Yimin Guan

发明人： EUNKI HONG ,  Steven Bergstedt ,  Yimin Guan

IPC分类号： F24H1/10

CPC分类号： F04B19/24 ,  F04B19/006 ,  F28F3/12

摘要： A micro-fluidic pump comprises one or more channels having an array of resistive heaters, an inlet, outlet and a substrate as a heat sink and a means of cooling the device. The pump is operated with a fire-to-fire delay and/or a cycle-to-cycle delay to control the pumping rate and minimize heating of liquid inside the pump during its operation.

摘要翻译： 微流体泵包括一个或多个通道，其具有电阻加热器阵列，入口，出口和作为散热器的基板以及冷却装置的装置。 泵的运行时间为火焰延迟和/或周期到周期的延迟，以控制泵送速率并最大限度地减少泵在运行过程中液体的加热。

公开(公告)号：US07841702B2

公开(公告)日：2010-11-30

申请号：US12265092

申请日：2008-11-05

申请人： Yimin Guan ,  Burton Lee Joyner, II ,  Zachary Justin Reitmeier

发明人： Yimin Guan ,  Burton Lee Joyner, II ,  Zachary Justin Reitmeier

IPC分类号： B41J2/05

CPC分类号： B41J2/14129 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1639

摘要： A heater stack includes first strata configured to support and form a fluid heater element responsive to repetitive electrical activation and deactivation to produce cycles of fluid ejection and second strata overlying the first strata to protect the heater element. A decomposed sacrificial layer of a preselected polymer between the substrate and a heater substrata containing the heater element provides a decoupled relationship between them which, during a heat-up period of each cycle, results in the heater element buckling out of physical contact with substrate enabling the heater element to transfer heat energy for producing fluid ejection into the fluid without transferring any into the substrate whereas the decoupled relationship, during the next following cool-down period of each cycle, results in the heater element de-buckling back into physical contact with the substrate enabling the heater element transfer residual heat energy to the substrate.

摘要翻译： 加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用以产生流体喷射循环，并且覆盖第一层的第二层以保护加热器元件。 在基板和包含加热器元件的加热器基底之间的预选聚合物的分解的牺牲层提供了它们之间的去耦合关系，它们在每个循环的加热时段期间导致加热器元件屈曲于与基板的物理接触，使得能够 加热器元件以传递热能以产生流体喷射到流体中而不将任何物质转移到基板中，而在每个循环的接下来的冷却阶段期间的解耦关系导致加热器元件脱扣回到物理接触 该基板使得加热器元件将剩余的热能传递到基板。

公开(公告)号：US20100165054A1

公开(公告)日：2010-07-01

申请号：US12344706

申请日：2008-12-29

申请人： Yimin Guan ,  Burton Lee Joyner, II ,  Zachary Justin Reitmeier ,  Carl Edmond Sullivan

发明人： Yimin Guan ,  Burton Lee Joyner, II ,  Zachary Justin Reitmeier ,  Carl Edmond Sullivan

IPC分类号： B41J2/05 ,  B23P17/04

CPC分类号： B41J2/1412 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  Y10T29/49

摘要： A fin-shaped heater stack includes first strata configured to support and form fluid heater elements responsive to repetitive electrical activation and deactivation to produce repetitive cycles of ejection of a fluid, and second strata on the first strata to protect the fluid heater elements from adverse effects of the repetitive cycles of fluid ejection and of contact with the fluid. The first strata include a substrate having a front surface, and heater substrata supported on the front surface. The heater substrata have opposite facing side surfaces which extend approximately perpendicular to the front surface and an end surface interconnecting the side surfaces which extends approximately parallel to the front surface such that the heater substrata is provided in either an upright or inverted fin-shaped configuration on the substrate with the fluid heater elements forming the opposite facing side surfaces of the heat substrata.

摘要翻译： 鳍状加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用以产生流体的重复循环和第一层上的第二层，以保护流体加热器元件免受不利影响 流体喷射和与流体接触的重复循环。 第一层包括具有前表面的基底和支撑在前表面上的加热器基底。 加热器基体具有相对的前表面大致垂直延伸的相对的侧表面，以及使大致平行于前表面延伸的侧表面相互连接的端面，使得加热器基底以直立或倒立的翅片形状设置在 具有流体加热器元件的基底形成加热基底的相对面对的侧表面。

公开(公告)号：US20100110146A1

公开(公告)日：2010-05-06

申请号：US12265162

申请日：2008-11-05

申请人： Yimin Guan ,  Burton Lee Joyner, II ,  Zachary Justin Reitmeier

发明人： Yimin Guan ,  Burton Lee Joyner, II ,  Zachary Justin Reitmeier

IPC分类号： B41J2/05

CPC分类号： B41J2/1639 ,  B41J2/14129 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645

摘要： A heater stack includes first strata configured to support and form a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata overlying the first strata and contiguous with the ejection chamber to protect the heater element. The first strata includes a substrate with a cavity formed either in or above the substrate, a heater substrata overlying the cavity and substrate, and a decomposed layer of material between the substrate and heater substrata and processed to provide the cavity substantially empty of the layer of material such that the cavity provides a means which, during repetitive electrical activation, enables the heater element to transfer heat energy into the fluid in the ejection chamber for producing ejection of fluid therefrom substantially without transferring heat energy into the substrate.

摘要翻译： 加热器堆叠包括构造成支撑并形成流体加热器元件的第一层，其响应于重复的电激活和停用以产生从加热器元件上方的喷射室的液体喷射的重复循环，以及覆盖在第一层上并与喷射室邻接的第二层 以保护加热器元件。 第一层包括具有形成在基底中或上方的空腔的基底，覆盖空腔和基底的加热器基底，以及在基底和加热器基底之间的材料分解层，并且被处理以提供基本上空的层 材料，使得空腔提供了一种装置，其在重复的电激活期间使得加热器元件能够将热能传递到喷射室中的流体中，用于从基本上不将热能传递到基板中而产生从其流出的流体。