公开(公告)号：US20040212279A1

公开(公告)日：2004-10-28

申请号：US10829413

申请日：2004-04-21

发明人： Eric C. Williams ,  David F. Arnone ,  Manish Sharma

IPC分类号： H01L041/08

CPC分类号： H02N2/0095 ,  B23Q1/34 ,  B23Q1/58 ,  B23Q5/50 ,  H02N2/101 ,  H02N2/126

摘要： A mover assembly (16) that moves or positions an object (12) along a first axis includes a motor (20) and a coupling assembly (22). The motor (20) includes a motor output (332) that is moved along the first axis and about the first axis. The coupling assembly (22) includes a stage (344) that couples the motor output (332) to the object (12) and a stage guide (346) that guides the motion of the stage (344) along the first axis. In one embodiment, the stage guide (346) is a linear bearing that allows for motion of the stage (344) along the first axis and inhibits motion of the stage (344) about the first axis, along a second axis and along a third axis. Additionally, the coupling assembly (22) can include a measurement system (28) that monitors the movement of the stage (344).

摘要翻译： 沿着第一轴移动或定位物体（12）的动子组件（16）包括马达（20）和联接组件（22）。 马达（20）包括沿第一轴线和第一轴线移动的马达输出（332）。 联接组件（22）包括将马达输出（332）耦合到物体（12）的台（344）和引导台（344）沿着第一轴的运动的平台引导件（346）。 在一个实施例中，平台引导件（346）是线性轴承，其允许平台（344）沿着第一轴线的运动并且沿着第二轴线并沿着第三轴线阻止台架（344）围绕第一轴线的运动 轴。 另外，联接组件（22）可以包括监测台（344）的运动的测量系统（28）。

公开(公告)号：US06629584B1

公开(公告)日：2003-10-07

申请号：US10129805

申请日：2002-05-09

申请人： Willy Müller

发明人： Willy Müller

IPC分类号： B61H712

CPC分类号： F16C29/10 ,  B23Q1/28 ,  B23Q1/34 ,  B25B5/065 ,  F16C2322/39 ,  F16D55/2245 ,  F16D63/008 ,  F16D65/18 ,  F16D2121/02 ,  F16D2121/12 ,  F16D2127/007 ,  Y10T403/22

摘要： A clamping and/or braking device with a basic body (3) has a clamping and/or braking region for pressurizing an element (9). Basic body (3) has an actuating mechanism which, upon actuation, causes a substantially elastic deformation of the basic body (3), so that the clamping and/or braking region is moved into or out of a pressurizing position or that the pressurizing force which the clamping and/or braking region exerts on the element (9) is changed. The actuating mechanism comprises a minimum of one chamber (15), which can be pressurized and which is located on or incorporated in the basic body (3) and which is bounded at least in part by a minimum of one wall (13), at least partial regions of which are flexible but tension-proof and/or pressure-resistant. The wall (13) is connected to the basic body (3) so as to ensure that upon pressurization of the minimum of one chamber (15) forces are exerted on the basic body (3), which forces generate an essentially elastic deformation of said basic body or a change in the pressurizing force that is exerted by the clamping and/or braking region.

摘要翻译： 具有基体（3）的夹紧和/或制动装置具有用于对元件（9）加压的夹紧和/或制动区域。 基体（3）具有致动机构，其在致动时引起基体（3）的基本弹性变形，使得夹紧和/或制动区域进入或离开加压位置，或者加压力 夹紧和/或制动区域施加在元件（9）上的位置被改变。 致动机构包括至少一个室（15），其可被加压并且位于或并入基体（3）中并且至少部分地由至少一个壁（13）限定在 其最小部分区域是柔性的，但是具有抗张力和/或耐压性。 壁（13）连接到基体（3）上，以确保在最小的一个腔室（15）的加压时，力施加在基体（3）上，这就会产生基本上弹性的变形 基体或由夹紧和/或制动区域施加的加压力的变化。

公开(公告)号：US20030033703A1

公开(公告)日：2003-02-20

申请号：US10265661

申请日：2002-10-08

发明人： Edward G. Amatucci ,  Nicholas G. Dagalakis ,  Jason Marcinkoski ,  Frederic E. Scire ,  John A. Kramar

IPC分类号： B23P017/00

CPC分类号： G02B21/26 ,  B23Q1/34 ,  B23Q1/4866 ,  B23Q1/621 ,  G02B6/4226 ,  G02B7/005 ,  G02B26/00 ,  Y10T29/49794 ,  Y10T29/49798

摘要： A positioning device and method for positioning objects is provided. The device includes a movable stage and a pair of levers. The pair of levers is symmetric about a first axis of the movable stage. Additionally, the pair of levers is parallel to a second axis of the movable stage. This second axis is perpendicular to the first axis. Each of the pair of levers applies a force to the movable stage. Each of the pair of levers moves in an arc. The two levers move in opposite directions along their respective arc. The two arcs are symmetrical about an axis of the movable stage.

公开(公告)号：US06484602B1

公开(公告)日：2002-11-26

申请号：US09597242

申请日：2000-06-20

申请人： Nicholas G. Dagalakis ,  Edward G. Amatucci

发明人： Nicholas G. Dagalakis ,  Edward G. Amatucci

IPC分类号： G05B1100

CPC分类号： G02B6/4226 ,  B23Q1/34 ,  B23Q1/4866 ,  B23Q1/621 ,  G02B7/005 ,  G02B21/26 ,  G02B26/00 ,  Y10S977/724 ,  Y10S977/773 ,  Y10T74/20305 ,  Y10T74/20348

摘要： A positioning device is provided. The positioning device includes a movable platform and a monolithic base. Struts are attached to both the movable platform and the monolithic base. The monolithic base moves each of the attached struts to cause the movable platform to move.

摘要翻译： 提供定位装置。 定位装置包括可移动平台和整体式基座。 支柱连接在可移动平台和单片底座上。 单块基座移动每个附接的支柱以使可移动平台移动。

公开(公告)号：US20020138993A1

公开(公告)日：2002-10-03

申请号：US10150560

申请日：2002-05-17

申请人： The Regents of the University of California

发明人： Richard C. Montesanti ,  Stanley F. Locke ,  Samuel L. Thompson

IPC分类号： G01D021/00

CPC分类号： B23Q1/34 ,  B23Q1/48 ,  B23Q3/18 ,  B23Q17/2495

摘要： An apparatus and method is disclosed for ultra-precision positioning. A slide base provides a foundational support. A slide plate moves with respect to the slide base along a first geometric axis. Either a ball-screw or a piezoelectric actuator working separate or in conjunction displaces the slide plate with respect to the slide base along the first geometric axis. A linking device directs a primary force vector into a center-line of the ball-screw. The linking device consists of a first link which directs a first portion of the primary force vector to an apex point, located along the center-line of the ball-screw, and a second link for directing a second portion of the primary force vector to the apex point. A set of rails, oriented substantially parallel to the center-line of the ball-screw, direct movement of the slide plate with respect to the slide base along the first geometric axis and are positioned such that the apex point falls within a geometric plane formed by the rails. The slide base, the slide plate, the ball-screw, and the linking device together form a slide assembly. Multiple slide assemblies can be distributed about a platform. In such a configuration, the platform may be raised and lowered, or tipped and tilted by jointly or independently displacing the slide plates.

摘要翻译： 公开了一种用于超精密定位的装置和方法。 幻灯片基座提供基础支持。 滑板相对于滑动基座沿着第一几何轴线移动。 工作分离或联合的滚珠丝杠或压电致动器沿着第一几何轴线相对于滑动基座移动滑板。 连接装置将主力矢量引导到滚珠丝杠的中心线。 连接装置包括将主力矢量的第一部分引导到沿着滚珠丝杠的中心线定位的顶点的第一连杆和用于将主力矢量的第二部分引导到 顶点。 基本上平行于滚珠丝杠的中心线定向的一组导轨，使滑板相对于第一几何轴线相对于滑动基座直接运动，并且定位成使得顶点落入形成的几何平面内 通过轨道。 滑动基座，滑板，滚珠丝杠和连接装置一起形成滑动组件。 可以围绕平台分发多个滑动组件。 在这种构造中，平台可以通过联合地或独立地移动滑板来升高和降低，或倾斜和倾斜。

公开(公告)号：US06202521B1

公开(公告)日：2001-03-20

申请号：US09210971

申请日：1998-12-14

申请人： Dino J. Rossetti ,  William S. Jensen ,  John H. Highfill, III ,  Mark A. Norris

发明人： Dino J. Rossetti ,  William S. Jensen ,  John H. Highfill, III ,  Mark A. Norris

IPC分类号： B23B100

CPC分类号： B23Q1/34 ,  B23Q5/027 ,  B23Q5/10 ,  G05B2219/36197 ,  Y10S82/904 ,  Y10T82/10 ,  Y10T82/122 ,  Y10T82/125 ,  Y10T82/2585

摘要： A method, apparatus and controller for machining non-circular work pieces. The apparatus, method and controller are preferably used in combination with rotating, equipment, such as a turning center having an x-y table capable of gross movements. The apparatus includes at least one position sensor for deriving an angular position signal of the work piece, a preferably longitudinally-disposed, flexible tool holder attached to a rigid tool block which holds the machine tool, a preferably solid state vibration actuator imparting active vibrational forces to the end of the tool holder, thus vibrating the machine tool at high frequency to impart the desired ovality to the work piece, and a control system for generating the output signal to the vibration actuator. Preferably, the control system includes manually adjusted magnitude and phase thereby providing a non-circular work piece profile with the desired ovality and positioning thereof. The controller includes a wave form generator which provides an input signal which is phase locked to the work piece rotation regardless of small cutting speed changes.

摘要翻译： 一种用于加工非圆形工件的方法，设备和控制器。 该装置，方法和控制器优选地与旋转的设备结合使用，例如具有能够大体移动的x-y台的转动中心。 该装置包括用于导出工件的角位置信号的至少一个位置传感器，优选纵向设置的柔性工具架，其附接到保持机床的刚性工具块，优选地固态振动致动器，其施加主动振动力 到工具架的端部，从而以高频率振动机床以赋予工件所需的椭圆度，以及用于向振动致动器产生输出信号的控制系统。 优选地，控制系统包括手动调节的幅度和相位，从而提供具有期望的椭圆度和定位的非圆形工件轮廓。 该控制器包括波形发生器，其提供与工件转动相位锁定的输入信号，而不管小切割速度变化如何。

公开(公告)号：US5994820A

公开(公告)日：1999-11-30

申请号：US276605

申请日：1999-03-25

申请人： Stephan Kleindiek

发明人： Stephan Kleindiek

IPC分类号： B23Q1/28 ,  B23Q1/34 ,  B25J7/00 ,  B25J19/00 ,  G12B5/00 ,  H01J37/20 ,  H01L41/09 ,  H02N2/00 ,  G05D3/10 ,  H02N2/04

CPC分类号： H02N2/028 ,  B23Q1/34 ,  G12B5/00 ,  H01J37/20 ,  H02N2/025 ,  H02N2/101 ,  H01J2237/20264

摘要： The invention relates to an electromechanical positioning unit formed as an inertial drive to position objects with atomic scale positioning precision and with displacement ranges up to centimeters. The positioning unit contains at least one preferably tube shaped piezo electric actuator for transmitting electrically controllable inertial driving motions to a slider. The object of the invention is a slider consisting of at least one part of relatively high mass (mass unit) and of at least one flexible deformable part (flexible unit) allowing the frictional forces to be adjustable by bending the flexible parts and the mass part providing high loading capacity of the positioning unit. By combining these two parts it is possible to position heavy objects and to exert forces necessary to drive tools.

摘要翻译： 本发明涉及一种机电定位单元，其形成为惯性驱动器，用于以原子尺度定位精度定位物体并且具有高达厘米的位移范围。 定位单元包括至少一个优选管形的压电致动器，用于将电可控惯性驱动运动传递到滑块。 本发明的目的是由至少一部分相对高质量（质量单位）和至少一个柔性可变形部分（柔性单元）组成的滑块，允许摩擦力通过弯曲柔性部件和质量部分 提供定位单元的高负载能力。 通过组合这两个部分，可以定位重物并施加驱动工具所需的力。

公开(公告)号：US5898243A

公开(公告)日：1999-04-27

申请号：US968373

申请日：1997-11-12

申请人： Marinus J. J. Dona ,  Jadranko Dovic ,  Jacobus S. Van Galen

发明人： Marinus J. J. Dona ,  Jadranko Dovic ,  Jacobus S. Van Galen

IPC分类号： G12B5/00 ,  B23Q1/00 ,  B23Q1/26 ,  B23Q1/30 ,  B23Q1/34 ,  B23Q1/62 ,  B23Q1/72 ,  B23Q5/28 ,  H01L41/09 ,  H02N2/00

CPC分类号： B23Q1/621 ,  B23Q1/34 ,  B23Q5/28 ,  H01L41/0906

摘要： A displacement device with a first part (1) and a second part (3) which are mutually displaceable in a displacement direction. The first part (1) comprises a number of contact bodies (7) which are pressed against the second part (3) against a pretensioning force which is present between the first part (1) and the second part (3). The contact bodies (7) are movable stepwise relative to the first part (1) and are also displaceable perpendicularly to the displacement direction. A stepwise movement of the contact bodies (7) causes the first part (1) and the second part (3) to be displaced relative to one another in the displacement direction under the influence of a friction force present between the contact bodies (7) and the second part (3), while the first part (1) and the second part (3) are supported in an accurate position relative to one another perpendicular to the displacement direction through a displacement of the contact bodies (7) perpendicular to the displacement direction. The contact bodies (7) thus have a dual function.In a special embodiment, the contact bodies (7) have a spherical contact surface (23), the stepwise movement of the contact bodies (7) being a pure rolling motion of the spherical contact surface (23) over the second part (3).The displacement device according to the invention is used in an X-Y table provided with an object table (99) which is displaceable relative to a base (95) parallel to an X-direction and parallel to a Y-direction which is perpendicular to the X-direction by means of the displacement device.The displacement device according to the invention is further used in a spindle device provided with a shaft (121) which is rotatable in a bearing bush (117) and is displaceable in an axial direction relative to the bearing bush (117) by means of the displacement device.

摘要翻译： 一种具有第一部分（1）和第二部分（3）的位移装置，其在位移方向上可相互移位。 第一部分（1）包括多个接触体（7），其抵抗处于第一部分（1）和第二部分（3）之间的预张力而抵靠第二部分（3）。 接触体（7）可相对于第一部分（1）逐步移动，并且也可垂直于位移方向移位。 接触体（7）的逐步运动导致第一部分（1）和第二部分（3）在存在于接触体（7）之间的摩擦力的影响下沿位移方向相对于彼此移位， 和第二部分（3），而第一部分（1）和第二部分（3）通过垂直于第二部分（3）的接触体（7）的位移而被支撑在垂直于位移方向的彼此相对于彼此的准确位置 位移方向。 因此，接触体（7）具有双重功能。 在特殊实施例中，接触体（7）具有球形接触表面（23），接触体（7）的逐步移动是球形接触表面（23）在第二部分（3）上的纯滚动运动， 。 根据本发明的位移装置用于设置有能够相对于平行于X方向并平行于与X方向垂直的Y方向的基部（95）移动的物体台（99）的XY台 通过位移装置的方向。 根据本发明的位移装置进一步用于具有轴（121）的主轴装置，所述轴（121）可在轴承衬套（117）中旋转，并且可相对于轴承衬套（117）在轴向方向上通过 位移装置。

公开(公告)号：US5644951A

公开(公告)日：1997-07-08

申请号：US87699

申请日：1994-12-28

申请人： Yotaro Hatamura

发明人： Yotaro Hatamura

IPC分类号： B23Q1/34 ,  B23Q5/40 ,  F16H25/22 ,  F16H25/24

CPC分类号： B23Q1/34 ,  B23Q5/404 ,  F16H25/2209 ,  F16H25/24 ,  Y10S977/724 ,  Y10S977/725 ,  Y10S977/837 ,  Y10T74/18728 ,  Y10T74/19707 ,  Y10T74/19902

摘要： A feed screw apparatus comprises a fixed member, a feed screw shaft rotatably supported to the fixed member, a nut mounted to the feed screw shaft and a movable member attached to the nut, wherein a force is transferred from the fixed member through the feed screw shaft and the nut, and the device comprises an elastic member elastically deformable in the axial direction and provided with a portion through which a force is transferred. A force can be detected by an elastically deformed amount of the elastic member. Further, an axially expandable and contractable portion is formed by arranging a displacement generator in parallel with the elastic member, and by elastically deforming the elastic member, the precise and fine displacement can be generated. Furthermore, a preload to be applied to balls of the nut is made adjustable by utilizing the axially expandable and contractable portion.

摘要翻译： PCT No.PCT / JP92 / 01490 Sec。 371日期1994年12月28日第 102（e）日期1994年12月28日PCT提交1992年11月13日PCT公布。 第WO93 / 09911号公报 日期：1993年5月27日一种进料螺杆装置包括固定部件，可旋转地支撑在固定部件上的进给丝杠轴，安装在进给螺杆轴上的螺母和安装在螺母上的可动件，其中力从固定部件 通过进给螺杆轴和螺母，并且该装置包括沿轴向方向可弹性变形的弹性构件，并且具有通过该部分传递力的部分。 可以通过弹性构件的弹性变形量来检测力。 此外，通过将位移发生器与弹性构件平行布置而形成轴向可膨胀和收缩的部分，并且通过使弹性构件弹性变形，可以产生精确和精细的位移。 此外，通过利用轴向可膨胀和收缩的部分，可以将适用于螺母的球的预载荷调节。

公开(公告)号：US5252884A

公开(公告)日：1993-10-12

申请号：US875904

申请日：1992-04-28

申请人： Marinus J. J. Dona

发明人： Marinus J. J. Dona

IPC分类号： G05D3/00 ,  B23Q1/34 ,  B25J7/00 ,  G01B7/00 ,  G12B5/00 ,  H01J37/20 ,  H02N11/00 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18

CPC分类号： G01Q10/04 ,  B23Q1/34 ,  B25J7/00 ,  B82Y35/00 ,  G01B7/003 ,  G12B5/00 ,  H01J37/20 ,  H01J2237/202

摘要： The invention relates to a translation device comprising an actuator body and a coupling member which mechanically contacts said actuator body, the actuator body having at least one body of a solid electrolyte which is clamped between a pair of supporting surfaces and which is provided with at least one pair of electrodes between which mass transport takes place via the electrolyte under the influence of an electric potential difference, said mass transport causing the dimensions of the electrodes to change so that the coupling member is subject to a translation in a first coordination direction relative to a reference of the device. Preferably, AgI is used as the solid electrolyte and silver is used for the electrodes. On the basis of the above-mentioned principle, translation devices can be constructed for one, two or three-dimensional translations. Translations based on both translatory and rotatory motions are possible.