公开(公告)号：US06810750B1

公开(公告)日：2004-11-02

申请号：US10393829

申请日：2003-03-20

Applicant: Karl F. Kiefer ,  Kevin Champaigne ,  Eric Krug ,  Gulnara Ajupova

Inventor： Karl F. Kiefer ,  Kevin Champaigne ,  Eric Krug ,  Gulnara Ajupova

IPC: G01N2904

CPC classification number: G01L1/165 ,  G01N2291/02827

Abstract: A passive SAW strain sensor for remotely sensing strain within a surface has a receiving SAW correlator with a signal input interdigitated transducer and a plurality of adjacent successive spaced interdigitated output transducers on a piezoelectric substrate, and a transmitting SAW correlator having a plurality of adjacent successive spaced interdigitated output transducers and a signal output interdigitated transducer on a piezoelectric substrate. The transmitting SAW correlator is affixed to or embedded in the surface such that its substrate will be stressed when the surface is strained and the receiving SAW correlator is not affixed to or embedded in the surface. The output transducers of the receiving SAW correlator and the transmitting SAW correlator are spatially placed to define a unique frequency of sensitivity, and their outputs are coupled together. A complex RF waveform signal applied to the receiving SAW correlator is transformed into an acoustic wave having a distinct output pulse that supplies power to the output transducers of the transmitting SAW correlator which is transformed into a complex RF output waveform. The application of stress on the transmitting SAW correlator shifts its center frequency proportionally and changes the frequency of the complex RF output waveform, and measurement of the center frequency change yields an indication of the applied stress.

Abstract translation: 用于在表面内远程感测应变的被动SAW应变传感器具有接收SAW相关器，其具有信号输入交叉换能器和在压电衬底上的多个相邻连续间隔的交错输出换能器，以及发射SAW相关器，具有多个相邻的相继间隔 交错输出传感器和压电基板上的信号输出交叉换能器。 传输SAW相关器固定在或嵌入在表面上，使得当表面被应变并且接收的SAW相关器不固定或嵌入在表面中时，其基片将受到应力。 接收SAW相关器和发射SAW相关器的输出换能器在空间上放置以定义唯一的灵敏度频率，并且它们的输出耦合在一起。 施加到接收SAW相关器的复合RF波形信号被变换为具有不同输出脉冲的声波，该输出脉冲向发射SAW相关器的输出换能器供电，该输出变换器被变换为复合RF输出波形。 应力在发射SAW相关器上的应用使其中心频率成比例地变化，并且改变复射频输出波形的频率，并且测量中心频率变化产生施加的应力的指示。

公开(公告)号：US4623813A

公开(公告)日：1986-11-18

申请号：US685779

申请日：1984-12-24

Applicant: Kazufumi Naito ,  Mitito Utsunomiya

Inventor： Kazufumi Naito ,  Mitito Utsunomiya

IPC: G01G3/13 ,  G01G3/16 ,  G01G9/00 ,  G01L1/16 ,  H01L41/08

CPC classification number: G01G3/16 ,  G01G3/13 ,  G01L1/165 ,  Y10S73/04

Abstract: A load sensor includes a fixed rigid portion, a movable rigid portion spaced from the fixed rigid portion and adapted to receive an applied load, and a shear-deformable member provided between the two rigid portions. The shear-deformable portion is provided with a transmission and a reception transducer constituting an elastic surface-wave oscillator. When a load is applied to the movable rigid portion, weight is sensed based on a deviation in the oscillation frequency of the elastic surface-wave oscillator. The fixed and movable rigid portions, as well as upper and lower beams interconnecting these portions, constitute a load-sensitive element. The latter has a side face which is closed off by a pliable membrane for sealing the shear-deformable element disposed within the load-sensitivie element. Alternatively, a corrugated bellows is connected across the fixed and movable rigid portions to seal the shear-deformable member within the bellows.

Abstract translation: 负载传感器包括固定的刚性部分，与固定的刚性部分间隔开并适于接收施加的负载的可移动的刚性部分以及设置在两个刚性部分之间的可剪切变形部件。 剪切变形部分设置有构成弹性表面波振荡器的变速器和接收换能器。 当向可动刚性部分施加负载时，基于弹性表面波振荡器的振荡频率的偏差来感测重量。 固定和可移动的刚性部分，以及互连这些部分的上部和下部梁构成负载敏感元件。 后者具有由柔性膜封闭的侧面，用于密封设置在负载敏感元件内的可剪切变形元件。 或者，波纹波纹管跨越固定和可移动的刚性部分连接，以密封波纹管内的可剪切变形构件。

公开(公告)号：US3888115A

公开(公告)日：1975-06-10

申请号：US34651673

申请日：1973-03-30

Applicant: TEXAS INSTRUMENTS INC

Inventor： SCHWARTZ ROBERT J

IPC: G01B17/04 ,  G01L1/16 ,  G01B7/16 ,  G01L1/10

CPC classification number: G01B17/04 ,  G01L1/165

Abstract: A strain sensor has a surface wave device deposited on a substrate. The surface wave device is connected into an oscillator circuit oscillating within a predetermined frequency range. A mechanical strain is induced in the substrate to alter the frequency of oscillation of the surface wave oscillator.

Abstract translation: 应变传感器具有沉积在基底上的表面波器件。 表面波器件连接到在预定频率范围内振荡的振荡器电路。 在衬底中感应出机械应变以改变表面波振荡器的振荡频率。

公开(公告)号：US3848144A

公开(公告)日：1974-11-12

申请号：US35027473

申请日：1973-04-11

Applicant: SPERRY RAND CORP

Inventor： SCHISSLER L

IPC: G01L1/00 ,  G01B17/00 ,  G01B17/04 ,  G01L1/16 ,  G01L1/25 ,  G01P15/097 ,  G10K11/36 ,  H01V7/00

CPC classification number: G10K11/36 ,  G01L1/165 ,  G01L1/255 ,  G01N2291/02827 ,  G01P15/0975

Abstract: Transducer devices employing relative changes in the acoustic propagation characteristics of waves of the Rayleigh type flowing along polished surfaces of a thin elastic member yield a measure of the degree of flexing or surface strain of the elastic member, which latter may take the form, for instance, of a cantilever beam. Signal processing circuits supply outputs proportional to strain and free of mode locking and other spurious interactions of oscillatory circuits that include the surface wave delay elements.

Abstract translation: 使用沿着薄弹性构件的抛光表面流动的瑞利型波的声传播特性的相对变化的传感器装置产生弹性构件的弯曲程度或表面应变的量度，后者可以采取形式，例如 ，悬臂梁。 信号处理电路提供与应变成比例的输出，无模式锁定和包括表面波延迟元件的振荡电路的其他杂散相互作用。

公开(公告)号：US12085460B2

公开(公告)日：2024-09-10

申请号：US17599896

申请日：2020-03-19

Applicant: Soitec

Inventor： Sylvain Ballandras ,  Emilie Courjon ,  Florent Bernard ,  Alexandre Raveski

IPC: G01L1/16

CPC classification number: G01L1/165

Abstract: A resonator device for measuring stress comprises at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, characterized in that the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators. A differential sensing device may comprise at least one resonator device as described wherein.

公开(公告)号：US20180359004A1

公开(公告)日：2018-12-13

申请号：US15616051

申请日：2017-06-07

Applicant: General Electric Company

Inventor： Yongjae Lee ,  Joseph Iannotti

IPC: H04B5/00 ,  G01K11/22 ,  G01L1/10 ,  H04B15/00

CPC classification number: H04B5/0056 ,  G01H1/003 ,  G01K11/22 ,  G01K11/265 ,  G01L1/10 ,  G01L1/165 ,  G01L3/10 ,  G01L9/0025 ,  G01N29/043 ,  G01N29/2462 ,  G01N29/2481 ,  G01N2291/0258 ,  G01N2291/0423 ,  H01P1/068 ,  H01Q7/00 ,  H01Q21/29 ,  H04B15/00

Abstract: A sensor system includes one or more rotor antennas on a shaft that moves within a stator bracket one or more of around an axis of the sensor system or along the axis of the sensor system, the one or more rotor antennas configured to communicate sensed data with one or more stator antennas on the stator bracket. Each rotor antenna has a rotor signal trace disposed on an outer rotor side of a dielectric substrate of the rotor antenna and a rotor return trace disposed on the outer rotor side of the dielectric substrate, wherein the rotor signal trace and the rotor return trace are not concentric with respect to each other. The one or more rotor antennas are configured to extend one or more of radially around an outer surface of the shaft of a sensor or along the outer surface of the shaft of the sensor.

公开(公告)号：US20180141217A1

公开(公告)日：2018-05-24

申请号：US15805777

申请日：2017-11-07

Applicant: Seiko Epson Corporation

Inventor： Toshiyuki KAMIYA

IPC: B25J13/08 ,  G01L1/16 ,  G01G3/16 ,  G01L5/22 ,  G01G3/13 ,  H01L41/047

CPC classification number: B25J13/085 ,  G01G3/13 ,  G01G3/165 ,  G01L1/165 ,  G01L1/167 ,  G01L5/226 ,  H01L41/047

Abstract: A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.

公开(公告)号：US09702772B2

公开(公告)日：2017-07-11

申请号：US14669579

申请日：2015-03-26

Applicant: Mnemonics, Inc.

Inventor： D Mark Haines ,  Robert J. Peterman ,  Nicholas Kozlovski

IPC: G01N29/04 ,  G01L1/16 ,  G01L9/00 ,  G01K11/26 ,  G01L19/00

CPC classification number: G01L1/165 ,  G01K11/265 ,  G01L9/0025 ,  G01L9/008 ,  G01L19/0092 ,  G01N29/041 ,  G01N2291/011 ,  G01N2291/0422 ,  G01N2291/0423 ,  G01N2291/106

Abstract: A sensor system for determining deformation of an object subject to forces. The sensor system comprises an object upon which forces are exerted and a cavity within the object, a first substrate for supporting surface acoustic waves in an upper surface of the first substrate, the first substrate disposed in the cavity, a first surface acoustic wave transducer disposed on the upper surface and responsive to an interrogation signal for generating an incident surface acoustic wave in the upper surface, a first reflector array responsive to the incident surface acoustic wave for creating reflected surface acoustic waves on the upper surface, the reflected surface acoustic waves received by the transducer and having characteristics indicative of strain deformation of the object due to a force exerted on the object.

公开(公告)号：US09618405B2

公开(公告)日：2017-04-11

申请号：US14453326

申请日：2014-08-06

Applicant: INVENSENSE, INC.

Inventor： Fang Liu ,  Julius Ming-Lin Tsai ,  Xiang Li ,  Mike Daneman

IPC: G06F3/043 ,  H03K17/96 ,  G01L1/16

CPC classification number: G01L1/165 ,  G06F3/0436 ,  H03K17/96 ,  H03K17/9643 ,  H03K2217/96003

Abstract: A piezoelectric acoustic resonator based sensor is presented herein. A device can include an array of piezoelectric transducers and an array of cavities that has been attached to the array of piezoelectric transducers to form an array of resonators. A resonator of the array of resonators can be associated with a first frequency response corresponding to a first determination that the resonator has been touched, and a second frequency response corresponding to a second determination that the resonator has not been touched. The array of piezoelectric transducers can include a piezoelectric material; a first set of electrodes that has been formed a first side of the piezoelectric material; and a second set of electrodes that has been formed on second side of the piezoelectric material.

公开(公告)号：US20160138981A1

公开(公告)日：2016-05-19

申请号：US14543124

申请日：2014-11-17

Applicant: OES, Inc.

Inventor： Kiet Ngo ,  Ashkan Rasouli ,  Jean-Paule Mongeau Grice

IPC: G01L1/16 ,  G01M99/00 ,  G01P15/02

CPC classification number: G01P15/133 ,  G01L1/16 ,  G01L1/162 ,  G01L1/165 ,  G01L5/0076 ,  G01P15/02 ,  G01P15/03 ,  G01P15/032 ,  G01P15/13

Abstract: An illustrative example embodiment of a sensing device includes a force sensor that detects a force and provides an output indicative of the detected force. An acceleration sensor detects acceleration and provides an output indicative of the detected acceleration. A processor receives the output from the force sensor and the acceleration sensor. The processor provides an indication of a relationship between the detected force and the detected acceleration.

Abstract translation: 感测装置的说明性示例实施例包括力传感器，其检测力并提供指示检测到的力的输出。 加速度传感器检测加速度并提供表示检测到的加速度的输出。 处理器接收力传感器和加速度传感器的输出。 处理器提供所检测的力与检测到的加速度之间的关系的指示。