公开(公告)号：US20100092141A1

公开(公告)日：2010-04-15

申请号：US12578958

申请日：2009-10-14

Applicant: Guifang Li ,  Fatih Yaman

Inventor： Guifang Li ,  Fatih Yaman

IPC: G02B6/02 ,  G02B6/00 ,  C01B33/023

CPC classification number: C01B33/023 ,  G02B6/02328 ,  G02B6/02361 ,  G02B6/102 ,  G02B2006/12061 ,  G02B2006/12169

Abstract: Methods of converting silica to silicon and fabricating silicon photonic crystal fiber (PCF) are disclosed. Silicon photonic crystal fibers made by the fabrication methods are also disclosed. One fabrication method includes: sealing silica PCF and a quantity of magnesium within a container, the quantity of magnesium defined by 2Mg(g)+SiO2(s)→2MgO(s)+Si(s); converting silica PCF to a reacted PCF through magnesiothermic reduction; and converting the reacted PCF to the fabricated silicon PCF by selective dissolution of the reacted PCF in an acid. Another fabrication method includes: adding silica PCF and a quantity of solid magnesium to an unsealed container, the quantity of magnesium substantially in excess of that defined by 2Mg(g)+SiO2(s)→2MgO(s)+Si(s); converting silica PCF to a reacted PCF through magnesiothermic reduction; and converting the reacted PCF to the fabricated silicon PCF by selective dissolution of the reacted PCF in an acid.

Abstract translation: 公开了将二氧化硅转化为硅并制造硅光子晶体光纤（PCF）的方法。 还公开了通过制造方法制造的硅光子晶体光纤。 一种制造方法包括：将二氧化硅PCF和一定量的镁密封在容器内，由2Mg（g）+ SiO 2（s）→2MgO（s）+ Si（s）定义的镁的量; 通过氧化镁还原将二氧化硅PCF转化为反应的PCF; 并通过将反应的PCF选择性溶解在酸中将反应的PCF转化成制造的硅PCF。 另一种制造方法包括：将二氧化硅PCF和一定量的固体镁添加到未密封的容器中，镁的量基本上超过由2Mg（g）+ SiO 2（s）→2MgO（s）+ Si（s）限定的镁; 通过氧化镁还原将二氧化硅PCF转化为反应的PCF; 并通过将反应的PCF选择性溶解在酸中将反应的PCF转化成制造的硅PCF。

公开(公告)号：US07361520B2

公开(公告)日：2008-04-22

申请号：US11692519

申请日：2007-03-28

Applicant: Shinya Watanabe

Inventor： Shinya Watanabe

IPC: H01L21/00 ,  G02B6/10 ,  B29D11/00

CPC classification number: G02B6/12004 ,  G02B6/136 ,  G02B6/4228 ,  G02B2006/12169 ,  G02B2006/12173 ,  G02B2006/12178

Abstract: An optical waveguide device which includes an optical waveguide part and a photonic device mounting part is provided. A mask is patterned after high-temperature annealing to form a pedestal block on which a light emitting device is mounted. Thus, there is no influence on the mask, even if the device undergoes the heat treatment at a high temperature during the manufacturing process. This enables formation of the pedestal block with high accuracy. Therefore, it is possible to achieve an optical coupling with high accuracy in mounting a light emitting device on the pedestal block.

Abstract translation: 提供了一种包括光波导部分和光子装置安装部分的光波导装置。 在高温退火之后对掩模进行图案化以形成其上安装有发光器件的基座块。 因此，即使在制造过程中装置在高温下进行热处理，对掩模也没有影响。 这使得能够高精度地形成基座块。 因此，可以在基座块上安装发光器件时实现高精度的光耦合。

公开(公告)号：US07192480B2

公开(公告)日：2007-03-20

申请号：US10919695

申请日：2004-08-16

Applicant: Lee J. Burrows

Inventor： Lee J. Burrows

IPC: C30B1/02

CPC classification number: G02F1/035 ,  C30B15/00 ,  C30B29/30 ,  C30B33/00 ,  G02B6/1345 ,  G02B2006/12169 ,  G02F2201/066 ,  G02F2201/07 ,  G02F2202/20 ,  Y10S117/91

Abstract: A method for fabricating ion exchange waveguides, such as lithium niobate or lithium tantalate waveguides in optical modulators and other optical waveguide devices, utilizes pressurized annealing to further diffuse and limit exchange of the ions and includes ion exchanging the crystalline substrate with a source of ions and annealing the substrate by pressurizing a gas atmosphere containing the lithium niobate or lithium tantalate substrate above normal atmospheric pressure, heating the substrate to a temperature ranging from about 150 degrees Celsius to about 1000 degrees Celsius, maintaining pressure and temperature to effect greater ion diffusion and limit exchange, and cooling the structure to an ambient temperature at an appropriate ramp down rate. In another aspect of the invention a powder of the same chemical composition as the crystalline substrate is introduced into the anneal process chamber to limit the crystalline substrate from outgassing alkaline earth metal oxide during the anneal period. In yet another aspect of the invention an anneal container is provided that allows for crystalline substrates to be annealed in the presence of powder without contaminating the substrate with the powder during the anneal process. Waveguides manufactured in accordance with the method exhibit superior drift performance.

Abstract translation: 用于制造离子交换波导的方法，如光调制器和其它光波导器件中的铌酸锂或钽酸锂波导，利用加压退火来进一步扩散和限制离子的交换，并且包括使晶体衬底与离子源离子交换， 通过将含有铌酸锂或钽酸锂衬底的气体气氛加压到正常大气压下来对衬底进行退火，将衬底加热至约150摄氏度至约1000摄氏度的温度，保持压力和温度以实现更大的离子扩散和限制 交换，并以适当的降速率将结构冷却至环境温度。 在本发明的另一方面，将与结晶基底相同的化学组成的粉末引入退火处理室中，以在退火期间限制结晶底物从脱气碱土金属氧化物。 在本发明的另一方面，提供一种退火容器，其允许结晶基材在粉末存在下进行退火，而不会在退火过程中用粉末污染基材。 根据该方法制造的波导显示出优异的漂移性能。

公开(公告)号：US06816648B2

公开(公告)日：2004-11-09

申请号：US10136154

申请日：2002-05-01

Applicant: Michael Goldstein

Inventor： Michael Goldstein

IPC: G02B634

CPC classification number: G02B6/132 ,  G02B6/124 ,  G02B6/1347 ,  G02B6/136 ,  G02B2006/12169

Abstract: Integrated semiconductor waveguide gratings, methods of manufacture thereof and methods of apodizing thereof are described. A semiconductor waveguide grating includes a substrate, a cladding layer disposed on the substrate, a guide structure that includes a plurality of discrete transverse sections implanted with ions disposed between adjacent transverse sections substantially free of implanted ions.

Abstract translation: 描述了集成半导体波导光栅，其制造方法及其变迹方法。 半导体波导光栅包括基板，设置在基板上的包覆层，引导结构，其包括多个离散的横向部分，所述多个离散横向部分植入基本上没有注入离子的相邻横截面之间的离子。

公开(公告)号：US20040180773A1

公开(公告)日：2004-09-16

申请号：US10770644

申请日：2004-02-03

Applicant: Schott Glas

Inventor： Bianca Schreder ,  Jose Zimmer ,  Matthias Brinkmann ,  Michael Kluge

IPC: C03C010/12

CPC classification number: C03C10/0027 ,  C03C4/04 ,  G02B6/12002 ,  G02B6/13 ,  G02B2006/12107 ,  G02B2006/12169

Abstract: The invention relates to a photostructurable body, in particular glass or glass-ceramic, in which the glass is a multicomponent glass and/or the glass-ceramic is a multicomponent glass-ceramic, in each case having a positive change in refractive index nulln as a result of the action of light.

Abstract translation: 本发明涉及一种可光致结构体，特别是玻璃或玻璃陶瓷，其中玻璃是多组分玻璃和/或玻璃陶瓷是多组分玻璃陶瓷，在每种情况下具有折射率的正变化Deltan为 光的作用的结果。

公开(公告)号：US06782177B2

公开(公告)日：2004-08-24

申请号：US10141637

申请日：2002-05-07

Applicant: Gian-Luca Bona ,  Roland Germann ,  Ingmar Meijer ,  Bert Offrein ,  Huub L. Salemink ,  Dorothea W Wiesmann

Inventor： Gian-Luca Bona ,  Roland Germann ,  Ingmar Meijer ,  Bert Offrein ,  Huub L. Salemink ,  Dorothea W Wiesmann

IPC: G02B610

CPC classification number: G02B6/132 ,  G02B6/105 ,  G02B6/122 ,  G02B6/126 ,  G02B2006/12169

Abstract: A method for manufacturing an optical device with a defined total device stress and a therefrom resulting defined birefringence and a therefrom resulting defined optical polarization dependence is disclosed. In a preferred embodiment, a lower cladding layer of an amorphous material with a first refractive index is provided and above that an upper cladding layer of an amorphous material with a second refractive index, which latter is manufactured from a material which is tunable in its stress. Between the lower and upper cladding layer an optical waveguide core is manufactured comprising an amorphous material having a third refractive index which is larger than the first and second refractive index. The optical waveguide core is thermally annealed, after which it has a defined waveguide core stress. The upper cladding layer is manufactured to have a cladding layer stress that together with the waveguide core stress results in the total device stress.

Abstract translation: 公开了一种用于制造具有限定的总装置应力的光学装置的方法，并且由此产生限定的双折射和由此产生限定的光学偏振依赖性的方法。 在一个优选实施例中，提供了具有第一折射率的非晶材料的下包层，并且在其上方具有第二折射率的非晶材料的上覆层，后者由其应力可调的材料制成 。 在下包层和上包层之间，制造包括具有大于第一和第二折射率的第三折射率的非晶材料的光波导芯。 光波导芯被热退火，之后它具有定义的波导芯应力。 制造上包层具有与波导芯应力一起导致总器件应力的包层应力。

公开(公告)号：US20040155252A1

公开(公告)日：2004-08-12

申请号：US10772112

申请日：2004-02-03

Applicant: HRL Laboratories, LLC

Inventor： Daniel Yap

IPC: H01L027/15

CPC classification number: G02B6/122 ,  G02B6/12004 ,  G02B6/12007 ,  G02B6/132 ,  G02B2006/12169 ,  G02F1/011 ,  G02F1/025 ,  G02F2001/0113 ,  G02F2203/15 ,  H01S3/0637 ,  H01S5/0215 ,  H01S5/0218 ,  H01S5/026 ,  H01S5/1014 ,  H01S5/50

Abstract: An optoelectronic device and a method of making same. The optoelectronic device comprises a substrate, at least one dielectric waveguide in the substrate, and at least one active semiconductor layer physically bonded to the substrate and optically coupled to the at least one dielectric waveguide in the substrate, the at least one active semiconductor layer being able to generate light, detect light, amplify light or otherwise modulate amplitude or phase of light.

Abstract translation: 一种光电器件及其制造方法。 光电子器件包括衬底，衬底中的至少一个电介质波导和物理地结合到衬底并且光耦合到衬底中的至少一个电介质波导的至少一个有源半导体层，所述至少一个有源半导体层是 能够产生光，检测光，放大光或以其他方式调制光的幅度或相位。

公开(公告)号：US20040076394A1

公开(公告)日：2004-04-22

申请号：US10415128

申请日：2003-12-04

Inventor： Federico Carniel ,  Raffaella Costa ,  Andrea Melloni

IPC: G02B006/10 ,  G02B006/26

CPC classification number: G02B6/29355 ,  G02B6/12007 ,  G02B6/122 ,  G02B6/1228 ,  G02B6/125 ,  G02B6/29343 ,  G02B2006/12097 ,  G02B2006/121 ,  G02B2006/12159 ,  G02B2006/12169

Abstract: A hybrid waveguide structure having a combination of buried waveguide sections and ridge waveguide sections on the same substrate, share a common core layer. The buried waveguide sections provide the low index contrast desirable for couplers and other device components. The ridge waveguide sections provide the high index contrast needed for efficient low-loss tightly curved waveguides. The devices are fabricated starting from a low index contrast buried waveguide. Cladding material is then selectively removed by etching down from an upper surface either side of the waveguide core to a lower surface. This forms an enhanced index contrast ridge section of the waveguide. The other sections of the waveguide core remain buried and thus retain lower index contrast. Using this approach, a variety of optical devices, such as add/drop or add-after-drop multiplexers for WDM applications based on microrings or Mach-Zehnder interferometers, can be made with large feature sizes of several microns using silica-on-glass or silica-on-silicon technology, for example, and without having to use nanofabricated semiconductor structures.

Abstract translation: 具有在相同基板上的掩埋波导部分和脊波导部分的组合的混合波导结构共享共同的核心层。 掩埋波导段提供耦合器和其它器件部件所需的低折射率对比度。 脊形波导部分提供了有效的低损耗紧密弯曲波导所需的高折射率对比度。 器件是从低折射率对比埋入波导开始制造的。 然后通过从波导芯的任一侧的上表面向下蚀刻来选择性地去除包覆材料。 这形成了波导的增强折射率对比脊部分。 波导芯的其他部分保持埋入，因此保持较低的折射率对比度。 使用这种方法，可以使用基于微环或马赫 - 策德尔干涉仪的WDM应用的各种光学器件（例如用于WDM应用的分插复用器或分插后置复用器），使用二氧化硅玻璃上的几微米的大特征尺寸 或硅二氧化硅技术，并且不必使用纳米制造的半导体结构。

公开(公告)号：US06650819B1

公开(公告)日：2003-11-18

申请号：US09981110

申请日：2001-10-16

Applicant: Konstantin P. Petrov

Inventor： Konstantin P. Petrov

IPC: G02B610

CPC classification number: G02F1/035 ,  G02B6/1345 ,  G02B2006/12119 ,  G02B2006/12147 ,  G02B2006/12169 ,  G02B2006/12173 ,  G02F1/3534 ,  G02F1/365 ,  G02F2202/20

Abstract: A method for forming plural waveguide structures in an optical substrate, such as lithium niobate, employs multiple stages of annealed proton exchange. In each stage, the substrate is masked to define a region corresponding to at least one waveguide structure. The mask-defined region is exposed to a proton exchange agent for a predetermined time and at a predetermined temperature, and the substrate is then annealed at predetermined time/temperature conditions. By selecting appropriate process parameters for each APE stage, each of the resultant waveguide structures may be optimized for desired physical and optical characteristics. The method may be utilized, for example, to fabricate sub-Rayleigh range couplers having high coupling efficiencies.

Abstract translation: 在诸如铌酸锂的光学衬底中形成多个波导结构的方法采用多级退火质子交换。 在每个阶段中，掩模衬底以限定对应于至少一个波导结构的区域。 将掩模限定区域暴露于质子交换剂预定时间并在预定温度下，然后在预定时间/温度条件下对基板进行退火。 通过为每个APE级选择适当的工艺参数，可以对所得到的波导结构中的每一个进行优化以获得所需的物理和光学特性。 该方法可以用于例如制造具有高耦合效率的亚瑞利范围耦合器。

公开(公告)号：US20030141096A1

公开(公告)日：2003-07-31

申请号：US10318961

申请日：2002-12-13

Inventor： Robert J. Saccomanno

IPC: H02G003/00

CPC classification number: G02B6/02 ,  C03C17/3607 ,  C03C17/42 ,  C03C25/104 ,  G02B6/02033 ,  G02B6/023 ,  G02B6/02395 ,  G02B6/1221 ,  G02B6/132 ,  G02B2006/12169

Abstract: A metal/dielectric construction comprises either an optically transmissive substrate adapted for channeling light therethrough, or a dielectric substrate, an optional adhesion-promoting layer comprising an oxide form of at least one metal or metalloid deposited onto the surface of the substrate, a layer composed of a highly reflective and/or electrically conductive/electromagnetic metal overlaying the adhesion-promoting layer, and a protective layer composed of a parylene polymer film formed over the metal layer.

Abstract translation: 金属/电介质结构包括适于将光通过其中的光学透射基底或电介质基底，任选的粘附促进层，其包含沉积在基底表面上的至少一种金属或准金属的氧化物形式， 覆盖粘合促进层的高反射和/或导电/电磁金属以及由在金属层上形成的聚对二甲苯聚合物膜构成的保护层。