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公开(公告)号：US20170170129A1
公开(公告)日：2017-06-15
申请号：US15445076
申请日：2017-02-28
IPC分类号： H01L23/544 , H01L21/308
CPC分类号： H01L23/544 , G02B5/1819 , G02B5/1823 , G02B5/1857 , G02B27/4255 , G03F7/20 , G03F9/7076 , G03F9/708 , H01L21/3065 , H01L21/3085 , H01L21/3086 , H01L2223/5442 , H01L2223/54426 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： A method is provided for fabricating a photolithography alignment mark structure. The method includes providing a substrate; forming a first grating, a second grating, a third grating and a fourth rating in the substrate; forming a photoresist layer on a surface of the substrate; obtaining a first alignment center along a first direction and a second alignment center alone a second direction based on the first grating and the fourth grating, respectively; providing a mask plate having a fifth grating pattern and a sixth grating pattern; aligning the mask plate with the substrate by using the first alignment center as an alignment center along the first direction and the second alignment center as an alignment center along the second direction; reproducing the fifth grating pattern and the sixth grating pattern in the photoresist layer; and forming a fifth grating and a sixth grating on the substrate by removing a portion of photoresist layer.
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公开(公告)号：US20170131460A1
公开(公告)日：2017-05-11
申请号：US15342033
申请日：2016-11-02
申请人： Magic Leap, Inc.
IPC分类号： F21V8/00
CPC分类号： G02B6/0076 , G02B5/1823 , G02B6/00 , G02B6/0013 , G02B6/0026 , G02B6/0031 , G02B6/005 , G02B6/0065 , G02B6/1226 , G02B6/29316 , G02B27/0172 , G02B2027/0134
摘要： A display system comprises a waveguide having light incoupling or light outcoupling optical elements formed of a metasurface. The metasurface is a multilevel (e.g., bi-level) structure having a first level defined by spaced apart protrusions formed of a first optically transmissive material and a second optically transmissive material between the protrusions. The metasurface also includes a second level formed by the second optically transmissive material. The protrusions on the first level may be patterned by nanoimprinting the first optically transmissive material, and the second optically transmissive material may be deposited over and between the patterned protrusions. The widths of the protrusions and the spacing between the protrusions may be selected to diffract light, and a pitch of the protrusions may be 10-600 nm.
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63.发明申请公开(公告)号：US20160093574A1
公开(公告)日：2016-03-31
申请号：US14861591
申请日：2015-09-22
IPC分类号： H01L23/544 , G03F7/20 , H01L21/308 , G02B5/18 , H01L21/3065
CPC分类号： H01L23/544 , G02B5/1819 , G02B5/1823 , G02B5/1857 , G02B27/4255 , G03F7/20 , G03F9/7076 , G03F9/708 , H01L21/3065 , H01L21/3085 , H01L21/3086 , H01L2223/5442 , H01L2223/54426 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： A method is provided for fabricating a photolithography alignment mark structure. The method includes providing a substrate; thrilling a first grating, a second grating, a third grating and a fourth grating in the substrate; forming a photoresist layer on a surface of the substrate; obtaining a first alignment center along a first direction and a second alignment center along a second direction based on the first grating and the fourth grating, respectively; providing a mask plate having a fifth grating pattern and a sixth grating pattern; aligning the mask plate with the substrate by using the first alignment center as an alignment center along the first direction and the second alignment center as an alignment center along the second direction; reproducing the fifth grating pattern and the sixth grating pattern in the photoresist layer: and forming a fifth grating and a sixth grating on the substrate by removing a portion of photoresist layer.
摘要翻译： 提供了一种用于制造光刻对准标记结构的方法。 该方法包括提供基板; 在衬底中刺激第一光栅，第二光栅，第三光栅和第四光栅; 在所述基板的表面上形成光致抗蚀剂层; 分别基于第一光栅和第四光栅沿着第二方向沿着第一方向和第二对准中心获得第一对准中心; 提供具有第五光栅图案和第六光栅图案的掩模板; 通过使用第一对准中心作为沿第一方向的对准中心和第二对准中心作为沿着第二方向的对准中心，将掩模板与基板对准; 在光致抗蚀剂层中再现第五光栅图案和第六光栅图案;以及通过去除光致抗蚀剂层的一部分在基板上形成第五光栅和第六光栅。
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64.发明授权公开(公告)号：US09255892B2
公开(公告)日：2016-02-09
申请号：US14825765
申请日：2015-08-13
IPC分类号： G01B11/00 , G01B11/14 , G03B27/32 , H01L23/544 , G01N21/95 , G03F7/20 , G01N21/47 , G02B5/18 , G03F9/00
CPC分类号： G01N21/9501 , G01N21/4738 , G01N2201/06113 , G01N2201/10 , G02B5/1823 , G02B5/1861 , G03F7/70058 , G03F7/70633 , G03F7/70683 , G03F9/70 , G03F9/7046 , G03F9/7076 , H01L23/544 , H01L2924/0002 , Y10T428/24612 , H01L2924/00
摘要： A second set of superimposed gratings are superposed over a first set of superimposed gratings. The second set of gratings have a different periodicity from the first set of gratings or a different orientation. Consequently the first order diffraction pattern from the second set of superimposed gratings can be distinguished from the first order diffraction pattern from the first set of superimposed gratings.
摘要翻译： 第二组叠加的光栅叠加在第一组叠加的光栅上。 第二组光栅具有与第一组光栅不同的周期性或不同的取向。 因此，来自第二组叠加光栅的一阶衍射图可以与来自第一组叠加光栅的一阶衍射图案区分开。
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公开(公告)号：US20150253570A1
公开(公告)日：2015-09-10
申请号：US14429782
申请日：2013-09-18
CPC分类号： G02B27/0101 , G02B5/1809 , G02B5/1823 , G02B6/0016 , G02B6/0026 , G02B6/0035 , G02B27/0172 , G02B27/4211 , G02B27/4272 , G02B27/4288 , G02B2027/0112
摘要： The invention relates to optical devices comprising a transparent substrate and a first transparent grating layer on the substrate, the grating layer comprising periodically alternating zones having different refractive indices. According to the invention, the device comprises a second transparent grating layer located on top of the first grating layer and also comprising periodically alternating zones having different refractive indices so that the zones of the first grating layer having higher refractive index are at least partly aligned with the zones of the second grating layer having lower refractive index and vice versa, the second grating layer reducing the amount of light diffracted to non-zero transmission orders. The invention allows for reducing the so-called rainbow effect for example in head-up displays (HUDs).
摘要翻译： 本发明涉及包括透明衬底和衬底上的第一透明光栅层的光学器件，光栅层包括周期性地具有不同折射率的交替区域。 根据本发明，该器件包括位于第一光栅层顶部的第二透明光栅层，并且还包括具有不同折射率的周期性交替区域，使得具有较高折射率的第一光栅层的区域至少部分地与 所述第二光栅层的区域具有较低折射率，反之亦然，所述第二光栅层将光量衍射减少到非零传输次数。 本发明允许例如在平视显示器（HUD）中减少所谓的彩虹效果。
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66.发明申请公开(公告)号：US20150036218A1
公开(公告)日：2015-02-05
申请号：US13954812
申请日：2013-07-30
发明人： Joshua E. Rothenberg
IPC分类号： G02B5/18
CPC分类号： G02B5/1814 , G02B5/18 , G02B5/1823 , G02B5/1861 , G02B27/1006 , G02B27/1073 , G02B27/1086
摘要： An integrated optical device that combines a diffractive optical element (DOE) to provide beam combining for coherent beams and a spectral beam combination (SBC) grating for combining beams of differing wavelengths. The device includes a substrate where a periodic pattern for the DOE is formed in the top surface of the substrate in a first direction. A plurality of reflective layers are deposited on the substrate over the periodic pattern so that the layers follow the shape of the pattern. A top dielectric layer is deposited on the plurality of reflective layers so that the top dielectric layer also follows the shape of the periodic pattern. A periodic grating for the SBC is formed into the top dielectric layer in a second direction substantially orthogonal to the first direction.
摘要翻译： 一种将衍射光学元件（DOE）组合以提供相干光束的光束组合和用于组合不同波长的光束的光谱束组合（SBC）光栅的集成光学器件。 该装置包括基板，其中在第一方向上在基板的顶表面中形成用于DOE的周期性图案。 多个反射层在周期性图案上沉积在基板上，使得这些层遵循图案的形状。 顶部绝缘层沉积在多个反射层上，使得顶部电介质层也遵循周期性图案的形状。 用于SBC的周期性光栅在与第一方向大致正交的第二方向上形成为顶部电介质层。
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67.发明授权公开(公告)号：US08885252B1
公开(公告)日：2014-11-11
申请号：US13622339
申请日：2012-09-18
IPC分类号： G02B5/18
CPC分类号： G02B5/18 , A44C17/00 , G02B5/1814 , G02B5/1823 , G02B5/1871 , G02B27/4272
摘要： A first article has a surface bearing a diffraction grating that comprises a plurality of elevated regions and recessed regions and a reflective coating that provides reflective diffraction within the article but is sufficiently thick to prevent diffraction outside the article. Alternatively, the reflective coating can be arranged to also provide reflective diffraction outside the article.A second article has a surface bearing a diffraction grating that comprises a plurality of elevated regions and recessed regions. Either (i) at least a portion of each ridge, or (ii) at least portion of each trench, comprises a material differing with respect to its refractive index or with respect to its optical transmissivity.
摘要翻译： 第一制品具有带有衍射光栅的表面，该衍射光栅包括多个升高区域和凹陷区域，以及反射涂层，该反射涂层在制品内提供反射衍射，但是足够厚以防止在制品外衍射。 或者，反射涂层可以被布置成还在制品外部提供反射衍射。 第二制品具有包含多个升高区域和凹陷区域的衍射光栅的表面。 （i）每个脊的至少一部分，或（ii）每个沟槽的至少部分包括相对于其折射率或相对于其光透射率而不同的材料。
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公开(公告)号：US08817208B2
公开(公告)日：2014-08-26
申请号：US13433703
申请日：2012-03-29
申请人： Wang-Yang Li , Ting-I Wu
发明人： Wang-Yang Li , Ting-I Wu
IPC分类号： G02F1/1335
CPC分类号： G02F1/133504 , G02B5/0252 , G02B5/0263 , G02B5/1819 , G02B5/1823 , G02F2001/133562 , G02F2201/305
摘要： A display apparatus and a liquid crystal display device are provided. The display apparatus comprises a display device for displaying an image and a diffractive optical element. The diffractive optical element comprises pixel unit regions. Each of the pixel unit regions has a long pixel side and a short pixel side adjacent to each other. The diffractive optical element is disposed on a light emitting side of the display device and comprises first grating regions and second grating regions. The first grating regions have a first diffraction grating. The second grating regions have a second diffraction grating. An azimuth angle of the first diffraction grating is different from an azimuth angle of the second diffraction grating.
摘要翻译： 提供了显示装置和液晶显示装置。 显示装置包括用于显示图像的显示装置和衍射光学元件。 衍射光学元件包括像素单元区域。 每个像素单元区域具有彼此相邻的长像素侧和短像素侧。 衍射光学元件设置在显示装置的发光侧，并且包括第一光栅区域和第二光栅区域。 第一光栅区域具有第一衍射光栅。 第二光栅区域具有第二衍射光栅。 第一衍射光栅的方位角与第二衍射光栅的方位角不同。
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公开(公告)号：US20130107691A1
公开(公告)日：2013-05-02
申请号：US13704700
申请日：2012-04-03
申请人： Seiji Nishiwaki
发明人： Seiji Nishiwaki
IPC分类号： G11B7/1353
CPC分类号： G11B7/1353 , G02B5/1823 , G02B5/1895 , G11B7/1367 , G11B7/1374 , G11B7/13922 , G11B2007/0006
摘要： In an embodiment, an optical pickup includes at least one light source for selectively emitting three light beams having blue, red, and infrared wavelengths, respectively, and an objective lens arranged so that each of the three light beams enters thereto. The objective lens includes a first grating, and a second grating formed in the same plane as the first grating. The first and second gratings each have phase steps arranged concentrically around a center axis of a lens in a region in which all the three light beams pass, and are different in phase step positions. The first grating diffracts the three light beams having the blue, red, and infrared wavelengths in a 2nd order, a 1st order, and the 1st order, respectively. On the other hand, the second grating diffracts the three light beams having the blue, red, and infrared wavelengths in the 1st order, the 1st order, and the 1st order, respectively. As a result, the three light beams having the blue, red, and infrared wavelengths, which have been transmitted through the first grating and the second grating, are diffracted in a 3rd order, the 2nd order, and the 2nd order, respectively.
摘要翻译： 在一个实施例中，光学拾取器包括分别用于选择性地发射具有蓝色，红色和红外波长的三个光束的至少一个光源，以及布置成使得三个光束中的每一个进入其中的物镜。 物镜包括第一光栅和形成在与第一光栅相同的平面中的第二光栅。 第一和第二光栅各自具有在所有三个光束通过的区域中同心地围绕透镜的中心轴布置的相位步长，并且在相位步长位置上是不同的。 第一光栅分别衍射出具有蓝色，红色和红外波长的三个光束，分别为二阶，一阶和一阶。 另一方面，第二光栅分别以1级，1级，1级衍射具有蓝色，红色和红色波长的三个光束。 结果，已经通过第一光栅和第二光栅传输的具有蓝色，红色和红色波长的三个光束分别以三阶，二阶和二阶衍射。
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70.发明授权公开(公告)号：US08279525B2
公开(公告)日：2012-10-02
申请号：US12469904
申请日：2009-05-21
申请人： John Hoose
发明人： John Hoose
IPC分类号： G02B5/18
CPC分类号： G02B6/2931 , G02B5/1823 , G02B27/4261
摘要： Three-dimensional grating device includes two (crossed) diffraction gratings, exhibits diffraction efficiency substantially independent of the incident polarization inside an optical communication spectral window from 1.5-1.6 μm. The gratings are characterized by different periods in two directions, chosen to support only one dispersive diffraction order in addition to the zero-(specular) order. Gratings may be orthogonal. Exemplary grating profiles include but are not limited to sinusoidal and truncated pyramidal (trapezoidal) profiles. A method for diffracting polarization independent light with 90% or higher efficiency. Applications include various wavelength control devices particularly useful in telecommunications.
摘要翻译： 三维光栅装置包括两个（交叉）衍射光栅，其衍射效率基本上与1.5-1.6μm的光通信光谱窗内的入射极化无关。 光栅的特征在于在两个方向上的不同周期，除了零（镜面）顺序之外，选择仅支持一个色散衍射级。 光栅可以是正交的。 示例性光栅轮廓包括但不限于正弦和截锥形（梯形）轮廓。 用于衍射具有90％或更高效率的偏振独立光的方法。 应用包括在电信中特别有用的各种波长控制装置。
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