公开(公告)号：US20160268120A1

公开(公告)日：2016-09-15

申请号：US15064294

申请日：2016-03-08

Applicant: KLA-Tencor Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer

IPC: H01J65/04 ,  H05H1/48 ,  H05H1/46 ,  H01J37/32

CPC classification number: H01J65/04 ,  H05G2/008

Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

Abstract translation: 用于通过光持续等离子体形成产生宽带光的光学系统包括腔室，照明源，一组聚焦光学器件和一组收集光学器件。 室被配置为在第一相中包含缓冲材料和第二相中的等离子体形成材料。 照明源产生连续波泵照明。 该组聚焦光学器件将连续波泵浦照明通过缓冲材料聚焦到缓冲材料和等离子体形成材料之间的界面上，以便通过激发至少等离子体形成材料产生等离子体。 该组收集光学器件接收从等离子体发出的宽带辐射。

公开(公告)号：US20160169814A1

公开(公告)日：2016-06-16

申请号：US14964065

申请日：2015-12-09

Applicant: Kohei Hashimoto ,  Nobuyuki Kimura ,  Wook-rae Kim ,  Byeong-hwan Jeon

Inventor： Kohei Hashimoto ,  Nobuyuki Kimura ,  Wook-rae Kim ,  Byeong-hwan Jeon

IPC: G01N21/88 ,  G02B27/14 ,  H05G2/00

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G02B21/06 ,  G02B21/082 ,  G02B21/16 ,  G02B27/141 ,  G03F7/70616 ,  H01J61/025 ,  H01J65/04 ,  H05G2/008

Abstract: Provided are a plasma light source capable of solving a problem occurring when an arc discharge lamp is used and an inspection apparatus capable of providing uniform and high-brightness plasma light. The plasma light source includes a pulse laser generator configured to generate a pulse laser beam, a continuous wave (CW) laser generator configured to generate an infrared ray (IR) CW laser beam, a first dichroic mirror configured to transmit or reflect the pulse laser beam and reflect or transmit the IR CW laser beam, a chamber configured to receive the pulse laser beam to ignite plasma and the IR CW laser beam to maintain the plasma in an ignited state, and discharge plasma light generated by the plasma, and a second dichroic mirror configured to transmit the pulse laser beam and the IR CW laser beam and reflect the plasma light.

Abstract translation: 提供能够解决使用电弧放电灯时发生的问题的等离子体光源和能够提供均匀且高亮度的等离子体光的检查装置。 等离子体光源包括被配置为产生脉冲激光束的脉冲激光发生器，被配置为产生红外线（IR）CW激光束的连续波（CW）激光发生器，构造成透射或反射脉冲激光器的第一分色镜 光束并且反射或透射IR CW激光束，被配置为接收脉冲激光束以点燃等离子体的腔室和IR CW激光束以将等离子体维持在点燃状态，并且排出由等离子体产生的等离子体光，以及第二 二向色镜配置为传输脉冲激光束和IR CW激光束并反射等离子体光。

公开(公告)号：US09360187B2

公开(公告)日：2016-06-07

申请号：US13877361

申请日：2011-08-17

Applicant: Shigeki Matsuura

Inventor： Shigeki Matsuura

IPC: F21V21/00 ,  F21V7/04 ,  H01J61/02 ,  H01J63/08 ,  H01J63/04

CPC classification number: F21V7/043 ,  H01J61/025 ,  H01J63/04 ,  H01J63/08 ,  H01J65/04

Abstract: This light source 1 is provided with a luminescent cylinder 3A housing a luminescent part 2 to generate light; a light guide cylinder 3B connected to the luminescent cylinder 3A on a one end side, and configured to guide the light generated by the luminescent part 2, to an exit window 4 provided on the other end side; and a cylindrical reflective cylinder 9 inserted and fixed between the exit window 4 of the light guide cylinder 3B and a portion connecting the luminescent cylinder 3A and the exit window 4, and having an inner wall surface as a reflective surface 9a to reflect the light.

Abstract translation: 该光源1设置有容纳发光部2以发光的发光筒3A; 导光筒3B，其在一端侧与发光筒3A连接，并被配置为将由发光部2产生的光引导到另一端侧的出射窗4; 以及插入并固定在导光筒3B的出射窗4与连接发光筒3A和出射窗4的部分之间并具有作为反射光的反射面9a的内壁面的筒状反射筒9。

公开(公告)号：US09185786B2

公开(公告)日：2015-11-10

申请号：US14448258

申请日：2014-07-31

Applicant: Energetiq Technology, Inc.

Inventor： Donald K. Smith

IPC: G01J1/00 ,  H05G2/00

CPC classification number: H05G2/008 ,  B82Y10/00 ,  G03F7/70033 ,  G21K5/00 ,  G21K5/04 ,  H01J61/16 ,  H01J65/04 ,  H05B41/382 ,  H05G2/001 ,  H05G2/003 ,  H05G2/005 ,  Y02B20/204 ,  Y10T29/49002

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

公开(公告)号：US20150311058A1

公开(公告)日：2015-10-29

申请号：US14650657

申请日：2013-08-23

Applicant: RND-IS-AN, LTD

Inventor： Pavel Stanislavovich ANTSIFEROV ,  Konstantin Nikolaevich KOSHELEV ,  Vladimir Mikhailovich KRIVTSUN ,  Aleksandr Andreevich LASH

IPC: H01J61/02 ,  H01J63/08

CPC classification number: H01J61/025 ,  H01J61/54 ,  H01J61/76 ,  H01J63/08 ,  H01J65/04

Abstract: The invention relates to light sources with laser pumping and to methods for generating radiation with a high luminance in the ultraviolet (UV) and visible spectral ranges. The technical result of the invention includes extending the functional possibilities of a light source with laser pumping by virtue of increasing the luminance, increasing the coefficient of absorption of the laser radiation by a plasma, and significantly reducing the numerical aperture of a divergent laser beam which is to be occluded and which is passing through the plasma. The device comprises a chamber containing a gas, a laser producing a laser beam, an optical element, a region of radiating plasma produced in the chamber by the focused laser beam, an occluder, which is mounted on the axis of the divergent laser beam on the second side of the chamber and an optical system for collecting plasma radiation.

Abstract translation: 本发明涉及具有激光泵浦的光源以及用于在紫外线（UV）和可见光谱范围内产生具有高亮度的辐射的方法。 本发明的技术结果包括通过增加亮度，增加等离子体激光辐射的吸收系数来扩大激光泵浦的光源的功能可能性，并显着减少发射激光束的数值孔​​径 被封闭并且正在通过等离子体。 该装置包括容纳气体的腔室，产生激光束的激光器，光学元件，通过聚焦激光束在腔室中产生的辐射等离子体的区域，封闭器，其安装在发散激光束的轴上 室的第二侧和用于收集等离子体辐射的光学系统。

公开(公告)号：US20150279628A1

公开(公告)日：2015-10-01

申请号：US14670210

申请日：2015-03-26

Applicant: KLA-Tencor Corporation

Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Gildardo Delgado

IPC: H01J37/32

CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

Abstract translation: 开放式等离子体灯包括空腔部分。 空腔部分的气体输入和气体输出被布置成使气体流过空腔部分。 等离子体灯还包括气体供应组件，其流体地耦合到空腔部分的气体输入并且被配置为将气体供应到空腔部分的内部容积。 等离子体灯还包括流体耦合到空腔部分的气体输出的喷嘴组件。 喷嘴组件和空腔部分布置成使得一定体积的气体从泵浦源接收泵送照明，其中持续等离子体发射宽带辐射。 喷嘴组件被配置成建立从空腔部分内到空腔部分外部的区域的对流气流，使得通过气流将一部分持续等离子体从空腔部分移除。

公开(公告)号：US20150214022A1

公开(公告)日：2015-07-30

申请号：US14335667

申请日：2014-07-18

Applicant: LG Electronics Inc.

Inventor： Donghun Kim ,  Junsung Kim ,  Byeongju Park

IPC: H01J65/04

CPC classification number: H01J65/044 ,  H01J61/523 ,  H01J65/04 ,  H05B41/24 ,  H05B41/3922

Abstract: A plasma lighting system includes a magnetron configured to generate microwaves, a bulb filled with a main dose and an additive dose, wherein the main dose and the additive dose generate light under the influence of microwaves and have the maximum intensities of respective intrinsic wavelengths at different wavelengths, a waveguide configured to guide the microwaves generated by the magnetron to the bulb, a motor configured to rotate the bulb, a sensor configured to sense the intensity of light having a specific wavelength emitted from the bulb, and a controller connected to the motor, wherein the controller adjusts Revolutions Per Minute (RPM) of the bulb based on the intensity of light having the specific wavelength sensed by the sensor.

Abstract translation: 等离子体照明系统包括配置成产生微波的磁控管，填充有主剂量的灯泡和添加剂量，其中主剂量和添加剂剂量在微波的影响下产生光，并且具有不同的固有波长的最大强度 波长，被配置为将由磁控管产生的微波引导到灯泡的波导，被配置为使灯泡旋转的电动机，被配置为感测从灯泡发射的具有特定波长的光的强度的传感器，以及连接到电动机的控制器 ，其中所述控制器基于由所述传感器感测到的具有特定波长的光的强度来调节所述灯泡的每分钟转数（RPM）。

公开(公告)号：US20150085516A1

公开(公告)日：2015-03-26

申请号：US14490966

申请日：2014-09-19

Applicant: QIOPTIQ PHOTONICS GMBH & CO. KG

Inventor： Ekkehard Brune ,  Dieter Frerking ,  Thomas Thöniß ,  Claus Spruch

IPC: F21V8/00 ,  H01S3/00

CPC classification number: G02B6/0006 ,  G02B6/14 ,  G02B27/0994 ,  H01J65/04 ,  H01S3/005

Abstract: A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source furthermore encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. In the case of the light source according to the invention, at least one mode scrambler is assigned to the optical fiber or the optical fibers.

Abstract translation: 激光操作的光源包括用于容纳可电离气体的室和用于电离室中的气体以产生等离子体的点火源。 光源还包括用于将激光能量输入到等离子体中的激光器，使得在激光辐射的冲击下，等离子体发射形成光源的输出信号的有用光，其中提供用于将 有用的光进入转移光纤。 在根据本发明的光源的情况下，至少一个模式扰频器被分配给光纤或光纤。

公开(公告)号：US08847473B2

公开(公告)日：2014-09-30

申请号：US13599252

申请日：2012-08-30

Applicant: Lianying Ye

Inventor： Lianying Ye

IPC: H01J1/02 ,  H01J7/24 ,  H01J61/52 ,  H01J1/58 ,  H01J1/50 ,  H01J65/04

CPC classification number: H01J61/523 ,  H01J65/04 ,  H01J65/044 ,  H01J65/048

Abstract: A self-cooling screw bulb-type electromagnetic induction lamp comprises a bulb body, an inner tube, amalgam and a coupler, wherein the inner tube is arranged inside the bulb body, and the coupler is arranged inside the inner tube; besides, the lamp further comprises a screw-type lamp cap and a radiating piece, wherein the bulb body is connected on the screw-type lamp cap through the radiating piece, and the coupler is connected with the radiating piece. The disclosure effectively solves the problem that the installation of the electromagnetic induction lamp is incompatible with the conventional lighting fitting, while effectively improving the heat-radiating efficiency and the performances, thereby facilitating the promotion, popularization, application and development of the electromagnetic induction lamp.

Abstract translation: 自冷却螺杆灯泡型电磁感应灯包括灯泡体，内管，汞齐和耦合器，其中内管布置在灯泡体内部，耦合器布置在内管的内部; 此外，灯还包括螺旋型灯头和散热片，其中灯泡体通过散热片连接在螺丝式灯头上，耦合器与散热片连接。 本公开有效地解决了电磁感应灯的安装与传统照明配件不兼容的问题，同时有效地提高了散热效率和性能，从而有助于电磁感应灯的推广，普及，应用和开发。

公开(公告)号：US20140240951A1

公开(公告)日：2014-08-28

申请号：US13774025

申请日：2013-02-22

Applicant: KLA-Tencor Corporation

Inventor： Gregory R. Brady ,  Andrei V. Shchegrov ,  Lawrence D. Rotter ,  Derrick Shaughnessy ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Muzammil A. Arain ,  Anatoly A. Vasiliev ,  James Andrew Allen ,  Oleg Shulepov ,  Andrew V. Hill ,  Ohad Bachar ,  Moshe Markowitz ,  Yaron Ish-Shalom ,  Ilan Sela ,  Amnon Manassen ,  Alexander Svizher ,  Maxim Khokhlov ,  Avi Abramov ,  Oleg Tsibulevsky ,  Daniel Kandel ,  Mark Ghinovker

IPC: F21V13/08 ,  F21V13/00 ,  F21V8/00 ,  F21V13/12

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 本公开涉及用于向用于光学测量的测量头提供照明的系统。 在本公开的一些实施例中，来自多个照明源的照明光束被组合以将一个或多个所选波长的照明传送到测量头。 在本公开的一些实施例中，控制传送到测量头的照明的强度和/或空间相干性。 在本公开的一些实施例中，一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。