Method and apparatus for generating phase-correlation
    61.
    发明申请
    Method and apparatus for generating phase-correlation 失效
    用于产生相位相关的方法和装置

    公开(公告)号:US20050152414A1

    公开(公告)日:2005-07-14

    申请号:US10752532

    申请日:2004-01-08

    Applicant: Mikio Fujii

    Inventor: Mikio Fujii

    CPC classification number: H01S3/10 H01S3/10076 H01S3/1303 H01S3/2383

    Abstract: According to each embodiment of the present invention, a phase-correlation can be generated between respective laser fields produced by a plurality of independent lasers. Specifically, based on a structure that first and second laser fields each having a mixed quantum state represented by a single-mode Glauber coherent state that a phase is completely indeterminate are mixed with each other and a quantum continuous measurement is performed by causing absorbers to individually cross two output quantum states, the phase-correlation can be generated between the first and second laser fields when absorption by the absorbers massively occurs in one of the two quantum states as a result of the quantum continuous measurement.

    Abstract translation: 根据本发明的每个实施例,可以在由多个独立激光器产生的各个激光场之间产生相位相关。 具体而言,基于以相位完全不确定的单模Glauber相干状态表示的具有混合量子态的第一激光场和第二激光场彼此混合的结构,并且通过使吸收体分别进行量子连续测量 通过交叉两个输出量子态,当吸收体的吸收作为量子连续测量的结果在两个量子态之一中大量发生时,可以在第一和第二激光场之间产生相位相关。

    Pulsed laser sources
    62.
    发明申请
    Pulsed laser sources 有权
    脉冲激光源

    公开(公告)号:US20040213302A1

    公开(公告)日:2004-10-28

    申请号:US10814502

    申请日:2004-03-31

    Abstract: Various embodiments include modelocked fiber laser resonators that may be coupled with optical amplifiers. An isolator may separate the laser resonator from the amplifier, although certain embodiments exclude such an isolator. A reflective optical element on one end of the resonator having a relatively low reflectivity may be employed to couple light from the laser resonator to the amplifier. Enhanced pulse-width control may be provided with concatenated sections of both polarization-maintaining and non-polarization-maintaining fibers. Apodized fiber Bragg gratings and integrated fiber polarizers may be also be included in the laser cavity to assist in linearly polarizing the output of the cavity. Very short pulses with a large optical bandwidth may be obtained by matching the dispersion value of the fiber Bragg grating to the inverse of the dispersion of the intra-cavity fiber. Frequency comb sources may be constructed from such modelocked fiber oscillators. In various exemplary embodiments, low dispersion and an in-line interferometer that provides feedback, assist in controlling the frequency components output from the comb source.

    Abstract translation: 各种实施例包括可与光放大器耦合的锁模光纤激光谐振器。 隔离器可以将激光谐振器与放大器分离,尽管某些实施例不包括这种隔离器。 可以使用具有相对较低反射率的谐振器的一端上的反射光学元件将来自激光谐振器的光耦合到放大器。 可以提供增强的脉冲宽度控制,其具有两个偏振保持和非偏振保持光纤的级联部分。 变形光纤布拉格光栅和集成光纤偏振器也可以包括在激光腔中,以帮助线性偏振空腔的输出。 可以通过将光纤布拉格光栅的色散值与腔内光纤的色散相反来获得具有大光学带宽的非常短的脉冲。 频率梳源可以由这种锁模光纤振荡器构成。 在各种示例性实施例中,提供反馈的低色散和在线干涉仪有助于控制从梳状源输出的频率分量。

    Master oscillator/power amplifier excimer laser system with pulse energy and pointing control
    63.
    发明申请
    Master oscillator/power amplifier excimer laser system with pulse energy and pointing control 有权
    具有脉冲能量和指向控制的主振荡器/功率放大器准分子激光系统

    公开(公告)号:US20040179571A1

    公开(公告)日:2004-09-16

    申请号:US10776404

    申请日:2004-02-11

    CPC classification number: H01S3/2366 H01S3/10 H01S3/225 H01S3/2333

    Abstract: Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.

    Abstract translation: 可以优化和控制气体放电激光系统的脉冲参数,用于精密应用,如微光刻。 重要的激光脉冲参数通常在脉冲脉冲串的开始时变化,并且输出光束的方向性通常在整个脉冲串中变化。 为了提高激光系统的性能,可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。 诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。 诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向,以便调整在脉冲串中的脉冲之间的波束方向上的变化。

    Method and apparatus to select a predetermined number of pulses from a laser
    65.
    发明授权
    Method and apparatus to select a predetermined number of pulses from a laser 失效
    从激光器选择预定数量的脉冲的方法和装置

    公开(公告)号:US06404787B1

    公开(公告)日:2002-06-11

    申请号:US09518200

    申请日:2000-03-03

    CPC classification number: H01S3/0057 H01S3/10

    Abstract: A method and apparatus of selecting a predetermined number of pulses from a stream of laser pulses is described. The number of pulses is determined by the operator from the laser pulse repetition rate and the desired number of pulses. The invention comprises synchronizing the laser pulses with the start of the pulse selection, allowing the predetermined count of laser pulses to pass a blocking mechanism; and finally blocking the pulses after the pulses have passed.

    Abstract translation: 描述了从激光脉冲流中选择预定数量的脉冲的方法和装置。 脉冲数由操作者根据激光脉冲重复率和期望脉冲数确定。 本发明包括使激光脉冲与脉冲选择的开始同步,允许激光脉冲的预定计数通过阻塞机构; 最后在脉冲通过后阻塞脉冲。

    Pulsed laser using a moving intracavity photon deflector as a beam
extractor
    66.
    发明授权
    Pulsed laser using a moving intracavity photon deflector as a beam extractor 失效
    脉冲激光器使用移动的腔内光子偏转器作为光束提取器

    公开(公告)号:US5329543A

    公开(公告)日:1994-07-12

    申请号:US933860

    申请日:1992-08-24

    CPC classification number: H01S3/10

    Abstract: A pulsed laser utilizing an oscillating or rotating intra cavity photon deflector means to extract a beam transverse to the long axis of the resonator from intracavity power. The moving photon deflector is supported and set into motion either mechanically or electromagnetically within the resonator and in the path of lasing photons, thereby intercepting and deflecting photons out of the resonator.Movement of the deflector within the path of lasing photons results in the circumferential deflection of photons with the most intense concentration being deflected from that portion of the surface of the deflector which first intercepts the circulating intracavity photon stream. As lasing photons are deflected from the leading edge of the deflector, lasing action is instantaneously reestablished after the trailing edge moves through the photon stream. Wherever the deflector does not intersect the normal trajectory of photons in the laser cavity, lasing action is automatically reestablished. The invention can be incorporated with both open and closed cavity laser designs.

    Abstract translation: 利用振荡或旋转的腔内光子偏转器的脉冲激光器意味着从腔内功率中提取横向于谐振器的长轴的光束。 移动的光子偏转器在谐振器内和激光光子的路径中被机械地或电磁地支撑和设置,从而拦截和偏转光子离开谐振器。 偏转器在激光光子的路径内的运动导致光子的周向偏转,其中最强烈的浓度从偏转器的表面的那部分偏转,其首先拦截循环的腔内光子流。 当激光光子从偏转器的前缘偏转时,在后缘移动通过光子流之后立即重建激光作用。 无论偏转器与激光腔中光子的正常轨迹相交不在哪里,激光作用都将自动重新建立。 本发明可以结合开放式和闭式激光器设计。

    Energy amount controlling device
    67.
    发明授权
    Energy amount controlling device 失效
    能量控制装置

    公开(公告)号:US5119390A

    公开(公告)日:1992-06-02

    申请号:US563057

    申请日:1990-08-06

    Applicant: Taro Ohmori

    Inventor: Taro Ohmori

    CPC classification number: G03F7/70058 H01S3/10

    Abstract: An irradiation control system includes a radiation energy source for producing radiation energy in the form of pulses; a path defined for the radiation energy, between the radiation energy source and a surface to be irradiated with the radiation energy from the radiation energy source; an energy changing member provided in relation to the path and being effective to change the proportion of the radiation energy, irradiating the surface, to the radiation energy produced by the radiation energy source; a detecting device for detecting the irradiation of the surface with a predetermined amount of radiation energy; a driving device for changing the state of the energy changing member at least during a period from start of irradiation of the surface with the radiation energy to the detection of irradiation of the surface with the predetermined amount of radiation energy through the detecting device; and a control device for controlling the timing of production of radiation energy by the radiation energy source, in relation to the state of the energy changing member.

    Abstract translation: 照射控制系统包括用于产生脉冲形式的辐射能量的辐射能源; 在辐射能量源与辐射能源辐射能量的表面之间定义的辐射能量的路径; 相对于路径设置的能量改变构件,并且有效地将照射表面的辐射能量的比例改变为由辐射能量源产生的辐射能量; 用于以预定量的辐射能量检测所述表面的照射的检测装置; 驱动装置,用于至少在从所述辐射能量的所述表面的照射开始到通过所述检测装置以预定量的辐射能量检测所述表面的照射的期间之间改变所述能量变化部件的状态; 以及控制装置,用于相对于能量改变构件的状态来控制由辐射能量源产生的辐射能量的定时。

    Fluid refraction optical path phase correction
    68.
    依法登记的发明
    Fluid refraction optical path phase correction 失效
    流体折射光路相位校正

    公开(公告)号:USH389H

    公开(公告)日:1987-12-01

    申请号:US816610

    申请日:1986-01-06

    Applicant: Lamar F. Moon

    Inventor: Lamar F. Moon

    CPC classification number: H01S3/0953 G02B26/00 H01S3/036 H01S3/10

    Abstract: An optical path length changing arrangement employing a selected cross-section of pressurized gases or other fluid and usable in a space weapon chemical laser and in other optical equipment for phase changes along a transmitted wavefront. Use of a heavy, high-refraction index gas such as Freon.RTM. or nitrogen as the optical path length correcting medium is disclosed, along with adjacent buffering streams of a light, low optical refraction gas such as helium.

    Semi-conductor laser device
    69.
    发明授权
    Semi-conductor laser device 失效
    半导体激光器件

    公开(公告)号:US4447136A

    公开(公告)日:1984-05-08

    申请号:US281727

    申请日:1981-07-09

    Inventor: Takashi Kitamura

    CPC classification number: H01S3/10 G02B6/4204 G02B6/4227

    Abstract: A semi-conductor laser device has a semi-conductor laser chip and an aspherical single lens for collimating the light beam from the laser chip, said aspherical single lens being mounted in a beam exit port of a casing for protecting the laser chip, and said exit port of the casing being adapted to align the optical axis of the aspherical single lens with that of the laser chip.

    Abstract translation: 半导体激光器件具有半导体激光器芯片和用于准直来自激光器芯片的光束的非球面单透镜,所述非球面单透镜安装在用于保护激光芯片的外壳的光束出射口中,并且所述 壳体的出口适于使非球面单透镜的光轴与激光芯片的光轴对准。

    Volume reflector for laser cavities
    70.
    发明授权
    Volume reflector for laser cavities 失效
    激光CAV的体积反射器

    公开(公告)号:US3626324A

    公开(公告)日:1971-12-07

    申请号:US3626324D

    申请日:1969-10-27

    Applicant: IBM

    CPC classification number: G02F1/11 H01S3/08 H01S3/10

    Abstract: A volume reflector which may be employed as one or both of the end mirrors of a laser cavity. A laser cavity is provided including an active medium which is excited to produce stimulated emissions of light. A reflective means is located at each end of the cavity to reflect the light back into the cavity. One or both of the reflective means is an acoustic cell which is connected to a source of input signal, preferably at a microwave frequency. When particular relationships are satisfied, the light impinging on the acoustic cell is reflected back 180* by the standing acoustic wave fronts throughout the volume of the acoustic cell.

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