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521 条记录 (耗时 0.039 秒)

    Method for fabricating bulbous-shaped vias
    72.
    发明授权
    Method for fabricating bulbous-shaped vias 失效
    制造球状通孔的方法

    公开(公告)号：US07071088B2

    公开(公告)日：2006-07-04

    申请号：US10227105

    申请日：2002-08-23

    申请人： Michael P. C. Watts ,  Sidlgata V. Sreenivasan

    发明人： Michael P. C. Watts ,  Sidlgata V. Sreenivasan

    IPC分类号： H01L21/44

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/0272 ,  H01L21/28587 ,  H01L21/312 ,  H01L21/76804 ,  H01L21/76817

    摘要： The present invention provides a method for fabricating bulbous-shaped vias on a substrate, having a surface, by disposing, on the substrate, a polymerizable fluid composition. A mold is placed in contact with the polymerizable fluid composition. The mold includes a relief structure on a surface thereof to create a recess in a layer of the polymerizable fluid composition. The polymerizable fluid composition is subjected to conditions to cause polymerization, forming a polymerized layer having a solidified indentation. An opening to the surface of the substrate is formed by removing material disposed on the substrate surface through etch processes. In a further embodiment a conductive layer may be disposed in the opening to form a gate. A lift-off process may be employed to remove the polymerized layer.

    摘要翻译： 本发明提供一种在基板上制造球状通孔的方法，其具有通过在基板上设置可聚合流体组合物的表面。 将模具放置成与可聚合流体组合物接触。 模具在其表面上包括浮雕结构，以在可聚合流体组合物的层中形成凹部。 可聚合流体组合物经历引起聚合的条件，形成具有固化压痕的聚合层。 通过蚀刻处理去除设置在基板表面上的材料来形成通向基板表面的开口。 在另一个实施例中，导电层可以设置在开口中以形成栅极。 可以采用剥离工艺来除去聚合层。

    System for controlling a volume of material on a mold
    74.
    发明申请
    System for controlling a volume of material on a mold 有权
    用于控制模具上的材料体积的系统

    公开(公告)号：US20060121141A1

    公开(公告)日：2006-06-08

    申请号：US11101139

    申请日：2005-04-07

    申请人： Steven Shackleton ,  Ian McMackin ,  Pankaj Lad ,  Van Truskett

    发明人： Steven Shackleton ,  Ian McMackin ,  Pankaj Lad ,  Van Truskett

    IPC分类号： B29C35/08

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/887

    摘要： A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.

    摘要翻译： 一种用于控制模具上的液体体积的系统，其特征在于，具有限定体积的主体，所述体积具有形成在所述主体中并且定位成靠近所述模具的孔。 泵系统与主体流体连通，并且孔和泵系统被建立以产生在模具和体积之间移动的流体流。 以这种方式，除去一定量的流体，同时保留在模具上是流体的期望部分以进行压印光刻工艺。

    Method of forming an in-situ recessed structure
    79.
    发明申请
    Method of forming an in-situ recessed structure 有权
    形成原位凹陷结构的方法

    公开(公告)号：US20060063277A1

    公开(公告)日：2006-03-23

    申请号：US10946565

    申请日：2004-09-21

    申请人： David Vidusek ,  Sidlgata Sreenivasan ,  David Wang

    发明人： David Vidusek ,  Sidlgata Sreenivasan ,  David Wang

    IPC分类号： B44C1/22 ,  H01L21/00

    CPC分类号： B81C1/00626

    摘要： The present invention features a method of patterning a substrate that includes forming from a first material, disposed on the substrate, a first film having an original pattern that includes a plurality of projections. The projections extend from a nadir surface terminating in an apex surface defining a height therebetween. A portion of the first film in superimposition with the nadir surface defines a nadir portion. The nadir portion is removed to expose a region of the substrate in superimposition therewith, defining a plurality of recessions. A second material is disposed upon the first film to form a second film having a surface spaced-apart from the apex surface of the plurality of projections and filling the plurality of recessions to form a multi-film stack. The first film and portions of the second film are removed to create a plurality of spaced-apart projections of the second material on the substrate.

    摘要翻译： 本发明的特征在于一种图案化衬底的方法，其包括由设置在衬底上的第一材料形成具有包括多个突起的原始图案的第一膜。 突起从最终的表面延伸，终止于限定其间的高度的顶点表面。 第一膜中与最低点表面重叠的部分限定最低点部分。 去除最低点部分以暴露衬底的区域，从而限定多个凹陷。 第二材料设置在第一膜上以形成具有与多个突起的顶点表面间隔开的表面并填充多个凹陷以形成多层叠层的第二膜。 去除第一膜和第二膜的部分以在基板上产生多个间隔开的第二材料的突出部分。

    Method and system to control movement of a body for nano-scale manufacturing
    80.
    发明申请
    Method and system to control movement of a body for nano-scale manufacturing 审中-公开
    用于控制身体运动的方法和系统用于纳米级制造

    公开(公告)号：US20060005657A1

    公开(公告)日：2006-01-12

    申请号：US11142825

    申请日：2005-06-01

    申请人： Byung-Jin Choi ,  Sidlgata Sreenivasan

    发明人： Byung-Jin Choi ,  Sidlgata Sreenivasan

    IPC分类号： G05G11/00

    CPC分类号： G03F7/0002 ,  B29C43/021 ,  B29C59/022 ,  B29C2043/025 ,  B29C2043/5858 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  Y10T74/20341

    摘要： The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extends parallel to the plane in which the body translates. This facilitates proper orientation of the body with respect to a surface spaced-apart therefrom.

    摘要翻译： 本发明涉及一种控制耦合到致动系统的主体的运动的方法和系统，其特征在于，通过相对于两个间隔开的轴线在致动系统中施加角运动而延伸的平面中的本体运动。 具体地说，在两个间隔开的平面中产生旋转运动，其中一个平行于主体平移的平面。 这有助于身体相对于与其间隔开的表面的适当取向。