Substrate on which film is formed, and organic EL display device
    75.
    发明授权
    Substrate on which film is formed, and organic EL display device 有权
    形成有膜的基板和有机EL显示装置

    公开(公告)号:US08828856B2

    公开(公告)日:2014-09-09

    申请号:US13980873

    申请日:2012-01-13

    摘要: Provided is a TFT substrate (10) on which vapor-deposited sections are to be formed by use of a vapor deposition device (50) which includes a vapor deposition source (85) having injection holes (86); and a vapor deposition mask (81) having opening (82) through which vapor deposition particles are deposited to form the vapor-deposited sections. The TFT substrate (10) includes pixels two-dimensionally arranged in a pixel region (AG); and wires (14) electrically connected to the respective pixels. The vapor-deposited sections (Q) are formed with gaps (X) therebetween, and the wires (14) having respective terminals that are disposed in the gaps (X).

    摘要翻译: 提供了通过使用包括具有喷射孔(86)的气相沉积源(85)的蒸镀装置(50)形成蒸镀部的TFT基板(10)。 和具有开口(82)的气相沉积掩模(81),通过蒸镀掩模沉积气相沉积颗粒以形成气相沉积部分。 TFT基板(10)包括像素区域(AG)二维排列的像素。 以及电连接到各个像素的导线(14)。 气相沉积部分(Q)在它们之间形成有间隙(X),并且具有设置在间隙(X)中的各个端子的导线(14)。

    VAPOR DEPOSITION PARTICLE EMITTING DEVICE, VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD
    76.
    发明申请
    VAPOR DEPOSITION PARTICLE EMITTING DEVICE, VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD 有权
    蒸气沉积颗粒发射装置,蒸气沉积装置,蒸气沉积方法

    公开(公告)号:US20140010957A1

    公开(公告)日:2014-01-09

    申请号:US14004894

    申请日:2012-03-07

    IPC分类号: C23C16/448

    摘要: A vapor deposition particle emitting device (30) includes a hollow rotor (40) provided with a first and a second nozzle sections (50 and 60), a rolling mechanism, and heat exchangers (52 and 62), and when the rolling mechanism causes the rotor (40) to rotate, the heat exchangers (52 and 62) switch between cooling and heating in accordance with placement of the nozzle section so that that one of the nozzle sections which faces outward has a temperature lower than a temperature at which vapor deposition material turns into gas and the other nozzle section has a temperature equal to or higher than the temperature at which the vapor deposition material turns into the gas.

    摘要翻译: 气相沉积粒子发射装置(30)包括设置有第一和第二喷嘴部分(50和60),滚动机构和热交换器(52和62)的中空转子(40),并且当滚动机构引起 转子(40)旋转,热交换器(52和62)根据喷嘴部分的放置而在冷却和加热之间切换,使得面向外的喷嘴部分之一的温度低于蒸气 沉积材料变成气体,另一个喷嘴部分的温度等于或高于气相沉积材料变成气体的温度。

    VAPOR DEPOSITION PARTICLE PROJECTION DEVICE AND VAPOR DEPOSITION DEVICE
    77.
    发明申请
    VAPOR DEPOSITION PARTICLE PROJECTION DEVICE AND VAPOR DEPOSITION DEVICE 审中-公开
    蒸气沉积颗粒投影装置和蒸气沉积装置

    公开(公告)号:US20130340680A1

    公开(公告)日:2013-12-26

    申请号:US14004151

    申请日:2012-03-05

    IPC分类号: H01L21/02

    摘要: The vapor deposition particle injecting device (20) includes a crucible (22), a holder (21) having at least one injection hole (21a), and plate members (23 through 25) provided in the holder (21). The plate members (23 through 25) have respective openings (23a through 25a) corresponding to the injection hole (21a), and the plate members (23 through 25) are arranged away from each other in a direction perpendicular to the opening planes of the openings. The injection hole (21a) and the openings (23a through 25a) overlap each other in the plan view.

    摘要翻译: 气相沉积粒子注入装置(20)包括坩埚(22),具有至少一个注入孔(21a)的保持器(21)和设置在保持器(21)中的板构件(23至25)。 板构件(23至25)具有与喷射孔(21a)相对应的相应的开口(23a至25a),并且板构件(23至25)在与 开口 注射孔(21a)和开口(23a至25a)在平面图中彼此重叠。

    VAPOR DEPOSITION PARTICLE EMITTING DEVICE, VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD
    78.
    发明申请
    VAPOR DEPOSITION PARTICLE EMITTING DEVICE, VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD 有权
    蒸气沉积颗粒发射装置,蒸气沉积装置,蒸气沉积方法

    公开(公告)号:US20130323882A1

    公开(公告)日:2013-12-05

    申请号:US13985281

    申请日:2012-03-07

    IPC分类号: H01L51/56 H01L51/50

    摘要: A vapor deposition particle injection device (30) includes a vapor deposition particle generating section (41), at least one nozzle stage made of an intermediate nozzle section (51), a vapor deposition particle emitting nozzle section (61), and heat exchangers (43, 63, 53). The vapor deposition particle emitting nozzle section (61) is controlled so as to be at a temperature lower than a temperature at which a vapor deposition material turns into gas. Meanwhile, the intermediate nozzle section (51) is controlled by the heat exchanger (53) so as to be at a temperature between a temperature of the vapor deposition particle generating section (41) and a temperature of the vapor deposition particle emitting nozzle section (61).

    摘要翻译: 气相沉积粒子注入装置(30)包括气相沉积粒子产生部分(41),由中间喷嘴部分(51),气相沉积粒子发射喷嘴部分(61)和热交换器 43,63,53)。 气相沉积粒子发射喷嘴部分(61)被控制在低于气相沉积材料变成气体的温度的温度。 同时,中间喷嘴部(51)由热交换器(53)控制,处于蒸镀微粒生成部(41)的温度与蒸镀微粒发射喷嘴部的温度 61)。

    VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, ORGANIC EL ELEMENT AND ORGANIC EL DISPLAY DEVICE
    79.
    发明申请
    VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, ORGANIC EL ELEMENT AND ORGANIC EL DISPLAY DEVICE 有权
    蒸气沉积装置,蒸气沉积方法,有机EL元件和有机EL显示装置

    公开(公告)号:US20130295716A1

    公开(公告)日:2013-11-07

    申请号:US13980037

    申请日:2012-01-04

    IPC分类号: H01L51/00

    摘要: First and second vapor deposition particles (91a, 91b) discharged from first and second vapor deposition source openings (61a, 61b) pass through first and second limiting openings (82a, 82b) of a limiting plate unit (80), pass through mask opening (71) of a vapor deposition mask (70) and adhere to a substrate (10) so as to form a coating film. If regions on the substrate to which the first vapor deposition particles and the second vapor deposition particles adhere if the vapor deposition mask is assumed not to exist are respectively denoted by a first region (92a) and a second region (92b), the limiting plate unit limits the directionalities of the first vapor deposition particles and the second vapor deposition particles in a first direction (10a) that travel to the substrate such that the second region is contained within the first region. Accordingly, it is possible to form a light emitting layer with a doping method by using vapor deposition by color.

    摘要翻译: 从第一和第二气相沉积源开口(61a,61b)排出的第一和第二蒸镀颗粒(91a,91b)穿过限制板单元(80)的第一和第二限制开口(82a,82b),通过掩模开口 (70)的表面(71)并粘附到基底(10)上以形成涂膜。 如果假设不存在气相沉积掩模,则第一气相沉积颗粒和第二气相沉积颗粒附着的基板上的区域分别由第一区域(92a)和第二区域(92b)表示,限制板 单元限制第一气相沉积颗粒和第二气相沉积颗粒在向基板移动的第一方向(10a)上的方向性,使得第二区域包含在第一区域内。 因此,可以通过使用通过颜色的气相沉积形成具有掺杂方法的发光层。

    SUBSTRATE TO WHICH FILM IS FORMED AND ORGANIC EL DISPLAY DEVICE
    80.
    发明申请
    SUBSTRATE TO WHICH FILM IS FORMED AND ORGANIC EL DISPLAY DEVICE 有权
    衬底形成电影和有机EL显示设备

    公开(公告)号:US20130285038A1

    公开(公告)日:2013-10-31

    申请号:US13979845

    申请日:2012-01-12

    IPC分类号: H01L51/50

    摘要: On the TFT substrate (10), a vapor deposition layer is formed by use of a vapor deposition device (50) which includes (i) a vapor deposition source (85) having injection holes (86) and (ii) a vapor deposition mask (81) having openings (82) through which vapor deposition particles injected from the injection holes (86) are deposited so as to form the vapor deposition layer. The TFT substrate (10) has a plurality of pixels two-dimensionally arranged in a pixel region (AG), and terminals of a plurality of wires (14), which are electrically connected with the plurality of pixels, are gathered outside a vapor deposition layer formation region.

    摘要翻译: 在TFT基板(10)上,通过使用蒸镀装置(50)形成蒸镀层,该蒸镀装置包括:(i)具有喷射孔(86)的蒸镀源(85)和蒸镀掩模 (81),其具有开口(82),沉积从喷射孔(86)喷射的气相沉积颗粒以形成气相沉积层。 TFT基板(10)具有像素区域(AG)二维排列的多个像素,并且与多个像素电连接的多根电线(14)的端子聚集在气相沉积 层形成区域。