Opening degree detection device for manual valve
    72.
    发明授权
    Opening degree detection device for manual valve 有权
    手动阀门开度检测装置

    公开(公告)号:US09200725B2

    公开(公告)日:2015-12-01

    申请号:US13885463

    申请日:2011-11-14

    IPC分类号: F16K37/00

    摘要: A handle 13 is formed in a hollow shape. A displacement sensor 4 is fixed to an inner surface of the handle 13. The target 5 includes: a target body 22 which is arranged at a position away from a valve stem by a predetermined distance in the handle 13; a detection-use inclined surface 23 which is formed on a surface of the target body 22 which faces the displacement sensor 4 in an opposed manner; and a downwardly projecting portion 25 which projects downward from the target body 22. A lower surface of the downwardly projecting portion 25 of the target 5 is received by a valve body 11b so that the target 5 is rotated together with the handle 13 but is not upwardly and downwardly moved with respect to the valve body 11b.

    摘要翻译: 手柄13形成为中空形状。 位置传感器4固定在手柄13的内表面上。目标5包括:目标体22,其设置在手柄13上远离阀杆一定距离的位置; 检测用倾斜面23,其以相对的方式形成在目标体22的面向位移传感器4的表面上; 以及从目标体22向下方突出的向下突出部25.目标5的向下突出部25的下表面被阀体11b容纳,使得目标5与手柄13一起旋转,但不是 相对于阀体11b上下移动。

    Opening degree detection device for automatically operated valve
    73.
    发明授权
    Opening degree detection device for automatically operated valve 有权
    自动操作阀开度检测装置

    公开(公告)号:US09038663B2

    公开(公告)日:2015-05-26

    申请号:US13988836

    申请日:2011-11-17

    IPC分类号: F16K37/00 F16K31/122

    摘要: To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.

    摘要翻译: 为了提供容易组装成自动操作的阀的自动操作阀的开度检测装置,能够容易地确保组装开度检测装置时的检测精度,并且容易应用于现有的自动操作阀 。 开度检测装置包括:可拆卸地安装在自动操作的阀2上的基板4; 位移传感器5; 以及具有由位移传感器5检测出的倾斜检测面6a的目标6。目标6固定在基板4上。位移传感器5通过传感器支撑部件21支撑在阀杆14上, 并且传感器支撑构件21通过引导装置支撑在基板4上。

    OPENING DEGREE DETECTION DEVICE FOR MANUAL VALVE
    74.
    发明申请
    OPENING DEGREE DETECTION DEVICE FOR MANUAL VALVE 有权
    手动阀开启程度检测装置

    公开(公告)号:US20130333777A1

    公开(公告)日:2013-12-19

    申请号:US13885463

    申请日:2011-11-14

    IPC分类号: F16K37/00

    摘要: A handle 13 is formed in a hollow shape. A displacement sensor 4 is fixed to an inner surface of the handle 13. The target 5 includes: a target body 22 which is arranged at a position away from a valve stem by a predetermined distance in the handle 13; a detection-use inclined surface 23 which is formed on a surface of the target body 22 which faces the displacement sensor 4 in an opposed manner; and a downwardly projecting portion 25 which projects downward from the target body 22. A lower surface of the downwardly projecting portion 25 of the target 5 is received by a valve body 11b so that the target 5 is rotated together with the handle 13 but is not upwardly and downwardly moved with respect to the valve body 11b.

    摘要翻译: 手柄13形成为中空形状。 位置传感器4固定在手柄13的内表面上。目标5包括:目标体22,其设置在手柄13上远离阀杆一定距离的位置; 检测用倾斜面23,其以相对的方式形成在目标体22的面向位移传感器4的表面上; 以及从目标体22向下方突出的向下突出部25.目标5的向下突出部25的下表面被阀体11b容纳,使得目标5与手柄13一起旋转,但不是 相对于阀体11b上下移动。

    Valve with an integral orifice
    76.
    发明授权
    Valve with an integral orifice 有权
    带整体孔的阀

    公开(公告)号:US07150444B2

    公开(公告)日:2006-12-19

    申请号:US11011379

    申请日:2004-12-15

    IPC分类号: F16K47/00 F16K1/00

    摘要: A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

    摘要翻译: 具有用于气体供给设备的整体孔口的阀,其具有用于制造半导体和化学制品的压力型流量控制装置。 具有整体孔的阀具有优异的流量控制特性,通过提高喷嘴的加工精度并防止在组装时孔口的变形。 孔口形成为不锈钢制的孔盘。 具有通过分离处理形成的孔的金属制孔口盘和合成树脂制的阀座体可拆卸地组装,其中孔板和合成树脂制成的阀座体通过压制阀座而被气密地固定到阀主体 阀座主体经由金属内盘。

    Method for supplying gas while dividing to chamber from gas supply facility equipped with flow controller
    77.
    发明申请
    Method for supplying gas while dividing to chamber from gas supply facility equipped with flow controller 有权
    在配备有流量控制器的气体供给设备的同时向室供给气体的方法

    公开(公告)号:US20050005994A1

    公开(公告)日:2005-01-13

    申请号:US10495641

    申请日:2003-01-20

    IPC分类号: H01L21/205 G05D7/06 B67C3/00

    摘要: A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).

    摘要翻译: 一种用于在从配备有流量控制器的气体供给设备进入腔室的情况下,以期望的流量比Q1 / Q2精确而快速地分配处理气体的规定量Q的方法。 当通过多个分支供应管线和固定到所述流体控制器的淋浴板以期望的流量比Q1 / Q2从装备有流量控制器的气体供应设备分配到减压室C中时,供应指定量的气体 在多个分支供给线GL1和GL2中设置有压力分离量控制器FV1和FV2。 通过来自分割量控制板FRC的初始流量设定信号来开始分控数量控制器FV1和FV2的打开控制,以完全打开具有较高流量和压力P3'的压力型分配量控制器的控制阀CV,并且 在控制阀CV的下游侧的P3“被调节,从而通过在淋浴板(3,4)上形成的喷孔(3a,4a)分隔成室C,从而提供气体的总量Q = Q1 + Q2, 由公式Q1 = C1P3'和Q2 = C2P3“表示的期望分割量Q1和Q2(其中C1和C2是取决于孔口的横截面面积或其上游侧的气体温度的常数)。

    Solenoid valve
    79.
    发明授权
    Solenoid valve 有权
    电磁阀

    公开(公告)号:US08662471B2

    公开(公告)日:2014-03-04

    申请号:US12935119

    申请日:2009-03-26

    IPC分类号: F16K31/02

    摘要: There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.

    摘要翻译: 提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。 提供了能够瞬时打开和关闭的电磁阀,其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。 双电层电容器具有单电池电特性,包括1至5F的电容,额定电压为21至2.7V,直流内阻为0.01至0.1Ome,1KHz的等效串联电阻为0.03 为0.09Omega,并且包括比表面积为1〜500m 2 / g的玻璃碳制的可极化电极。

    CAM CONTROL VALVE
    80.
    发明申请
    CAM CONTROL VALVE 有权
    CAM控制阀

    公开(公告)号:US20120223265A1

    公开(公告)日:2012-09-06

    申请号:US13389671

    申请日:2010-11-05

    IPC分类号: F16K31/524 F16K31/04 F16K7/16

    摘要: A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.

    摘要翻译: 凸轮控制阀包括具有流体通道和阀座的阀壳体,阀座位于阀座上以打开和关闭流体通道;阀杆,其压紧阀盘,使其接触阀座;凸轮作用 在阀杆上保持下降,电动机旋转凸轮,保持电动机的电动机支架,固定在阀壳体上的支撑框架,并支撑电动机支架使其垂直移动;弹性构件,将电动机支架偏压 支撑框架的上侧部分和高度可调节的螺钉,使马达夹持器从支撑框架上悬挂起来,并且相对于支撑框架调节马达夹持器的高度,其中高度可调节螺钉可滑动地插入到上侧部分 的支撑框架并拧入电机支架。