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公开(公告)号：US4722092A
公开(公告)日：1988-01-26
申请号：US696648
申请日：1985-01-30
IPC分类号： H01S5/042 , H01S5/12 , H01S5/187 , H01S5/227 , H01L21/208
CPC分类号： H01S5/187 , H01S5/1228 , H01S5/227 , H01S5/0425 , H01S5/2275
摘要： A distributed feedback (DFB) type laser and a method and apparatus for forming same wherein a quaternary semiconductor active lasing strip of material is buried between a substrate of binary compound of one type conductivity material and a mesa binary compound body of opposite type conductivity and a periodic grating structure is etched into the plateau of the mesa. In one embodiment, ohmic contacts are provided on either side of the grating structure and the mesa is undercut adjacent the active strip to partly isolate the ohmic contacts from the homojunction formed when the active strip is buried, preferably using a mass-transport process. In another embodiment, the ohmic contacts are formed on the top of a deeply etched grating structure. A buried layer double heterostructure (DH) laser is also described with DFB grating formed on the side wallsGOVERNMENT SUPPORTThe Government has rights in this invention pursuant to Contract No. F19628-85C-0002, awarded by the Department of the Air Force.
摘要翻译： 一种分布式反馈（DFB）型激光器及其形成方法和装置，其中材料的四分半导体有源激光条被掩埋在一种导电材料的二元化合物的衬底和具有相反导电性的台面二元化合物体之间， 周期性光栅结构被蚀刻到台面的平台中。 在一个实施例中，欧姆接触提供在光栅结构的任一侧上，并且台面在有源条附近被切削，以部分地将欧姆接触与当有源带被埋入时形成的均质结合部分地隔离，优选使用质量传输过程。 在另一个实施例中，欧姆接触形成在深蚀刻的光栅结构的顶部。 还描述了掩埋层双异质结构（DH）激光器，其中形成在层的侧壁上的DFB光栅。 另外，描述了具有DFB的表面发射二极管激光器。
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公开(公告)号：US4618261A
公开(公告)日：1986-10-21
申请号：US570918
申请日：1984-01-16
CPC分类号： G03F9/7026 , G01B11/14 , G03F9/7049
摘要： A lens or fiberoptic cable focuses energy from a collimated helium neon laser beam upon a point on a mask. Some of the focused energy is reflected from the mask upon a photodetector array in an image plane, and some of this energy is reflected from a substrate closely adjacent to the mask after passing through the mask upon the photodetector array to produce an interference pattern that is sensed and characterized by a spatial frequency representative of the distance between the mask and substrate.
摘要翻译： 透镜或光纤电缆将来自准直的氦氖激光束的能量聚焦在掩模上的点上。 一些聚焦能量从掩模在图像平面中的光电检测器阵列上被反射，并且这些能量中的一些在通过光电检测器阵列上的掩模之后从与掩模紧密相邻的基板反射，以产生干涉图案， 感测并表征为代表掩模和衬底之间的距离的空间频率。
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73.发明授权Swept frequency laser for FD OCT with intracavity element and method of operation 有权扫频激光器用于具有腔内元件的FD OCT和操作方法公开(公告)号：US09337619B2
公开(公告)日：2016-05-10
申请号：US13271388
申请日：2011-10-12
申请人： Walid Atia , Mark E. Kuznetsov , Dale C. Flanders
发明人： Walid Atia , Mark E. Kuznetsov , Dale C. Flanders
IPC分类号： G01N21/47 , H01S5/14 , H01S5/022 , H01S5/0683 , H01S5/0687
CPC分类号： H01S5/141 , G01N21/4795 , H01S5/02284 , H01S5/0683 , H01S5/0687
摘要： A frequency swept laser source that generates an optical signal that is tuned over a spectral scan band at single discrete wavelengths associated with longitudinal modes of the swept laser source. Laser hopping over discrete single cavity modes allows long laser coherence length even under dynamic very high speed tuning conditions. A ramp drive to the laser is used to linearize laser frequency tuning. A beam splitter is used to divide the optical signal between a reference arm leading to a reference reflector and a sample arm leading to a sample. A detector system detects the optical signal from the reference arm and the sample arm for generating depth profiles and images of the sample.
摘要翻译： 频率扫描激光源，其产生在与扫描的激光源的纵向模式相关联的单独离散波长下在光谱扫描带上调谐的光信号。 在离散单腔模式下的激光跳跃即使在动态非常高速的调谐条件下也能实现长激光相干长度。 激光器的斜坡驱动用于线性化激光频率调谐。 分束器用于将通向参考反射器的参考臂和通向样品的样品臂之间的光信号分开。 检测器系统检测来自参考臂和样品臂的光信号，用于产生样品的深度分布和图像。
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74.发明授权公开(公告)号：US09036235B2
公开(公告)日：2015-05-19
申请号：US13467787
申请日：2012-05-09
CPC分类号： G02B26/001 , G02B26/0825
摘要： An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.
摘要翻译： 光学膜装置包括基底，在基底表面上的至少一个支撑块和至少一个板。 扭力梁将支撑块上的基板上方的板支撑。 光学膜装置还包括由基板上方的板支撑的光学膜结构和在板下方的基板上的至少一个电极。 在一个实施方式中，光学膜装置还包括用于将光学膜结构耦合到板的系绳。 系绳在光学膜结构和板之间延伸。 在另一实施方式中，光学膜装置的基板具有通过光学膜结构正下方的基板的光学端口。 该板在扭转梁周围基本平衡，以最小化对重力场中的取向的敏感性。
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公开(公告)号：US08675293B2
公开(公告)日：2014-03-18
申请号：US12693186
申请日：2010-01-25
IPC分类号： G02B7/02
CPC分类号： B29D11/0073 , G02B6/32 , G02B23/2423
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for a forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译： 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤终端和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并且沿着复合晶片材料的背面通过复合晶片材料的背面形成光学端口 折射透镜的光轴。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
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76.发明授权Method and system for avoiding package induced failure in swept semiconductor source 有权避免扫描半导体源中封装引起的故障的方法和系统公开(公告)号：US08660164B2
公开(公告)日：2014-02-25
申请号：US13428826
申请日：2012-03-23
申请人： Peter S. Whitney , Dale C. Flanders
发明人： Peter S. Whitney , Dale C. Flanders
IPC分类号： H01S3/08
CPC分类号： H01S5/026 , G01B9/02091 , H01S5/022 , H01S5/02216 , H01S5/0222 , H01S5/02224 , H01S5/02248 , H01S5/02284 , H01S5/02415 , H01S5/02438 , H01S5/068 , H01S5/06825 , H01S5/141 , H01S5/183
摘要： Dry oxygen, dry air, or other gases such as ozone are hermetically sealed within the package of the external cavity laser or ASE swept source to avoid packaging-induced failure or PIF. PIF due to hydrocarbon breakdown at optical interfaces with high power densities is believed to occur at the SLED and/or SOA facets as well as the tunable Fabry-Perot reflector/filter elements and/or output fiber. Because the laser is an external cavity tunable laser and the configuration of the ASE swept sources, the power output can be low while the internal power at surfaces can be high leading to PIF at output powers much lower than the 50 mW.
摘要翻译： 干氧，干燥空气或其他气体（如臭氧）密封在外腔激光器或ASE扫描源的封装内，以避免包装引起的故障或PIF。 相信在SLED和/或SOA面以及可调谐法布里 - 珀罗反射器/滤波器元件和/或输出光纤处发生由于在具有高功率密度的光学接口处的烃破坏引起的PIF。 因为激光器是外部可调谐激光器和ASE扫频源的配置，所以功率输出可能很低，而表面的内部功率可能很高，导致PIF的输出功率远低于50 mW。
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公开(公告)号：US20120300216A1
公开(公告)日：2012-11-29
申请号：US13568717
申请日：2012-08-07
IPC分类号： G01B9/02
CPC分类号： G01B9/02057 , A61B5/0066 , A61B5/0073 , G01B9/02004 , G01B9/0205 , G01B9/02091 , G01B2290/70 , G01N21/4795
摘要： Optical coherence tomography (OCT) probe and system designs are disclosed that minimize the effects of mechanical movement and strain to the probe to the OCT analysis. It also concerns optical designs that are robust against noise from the OCT laser source. Also integrated OCT system-probes are included that yield compact and robust electro-opto-mechanical systems along with polarization sensitive OCT systems.
摘要翻译： 公开了光学相干断层扫描（OCT）探针和系统设计，其最小化机械移动和应变对OCT分析的探针的影响。 它还涉及对来自OCT激光源的噪声强大的光学设计。 还包括集成的OCT系统探针，可产生紧凑且坚固的电光机械系统以及偏振敏感OCT系统。
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公开(公告)号：US20120162659A1
公开(公告)日：2012-06-28
申请号：US12980144
申请日：2010-12-28
CPC分类号： G01B9/02091 , A61B5/0066 , A61B5/0075 , G01N21/4795 , H01S5/02216 , H01S5/02248 , H01S5/02284 , H01S5/141 , H01S5/4012 , H01S5/4062 , H01S5/4068
摘要： An optical coherence analysis system comprising: a first swept source that generates a first optical signal that is tuned over a first spectral scan band, a second swept source that generates a second optical signal that is tuned over a second spectral scan band, a combiner for combining the first optical signal and the second optical signal for form a combined optical signal, an interferometer for dividing the combined optical signal between a reference arm leading to a reference reflector and a sample arm leading to a sample, and a detector system for detecting an interference signal generated from the combined optical signal from the reference arm and from the sample arm. In embodiments, the swept sources are tunable lasers that have shared laser cavities.
摘要翻译： 一种光学相干分析系统，包括：第一扫描光源，其产生在第一光谱扫描带上调谐的第一光信号，产生在第二光谱扫描带上调谐的第二光信号的第二扫描光源， 组合第一光信号和第二光信号以形成组合的光信号，用于将导通到参考反射器的参考臂与通向样本的采样臂之间的组合光信号分开的干涉仪，以及用于检测 由来自参考臂和来自采样臂的组合光信号产生的干扰信号。 在实施例中，扫描光源是具有共享激光腔的可调激光器。
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79.发明授权公开(公告)号：US08164748B1
公开(公告)日：2012-04-24
申请号：US12115335
申请日：2008-05-05
申请人： Dale C. Flanders , Petros Kotidis
发明人： Dale C. Flanders , Petros Kotidis
IPC分类号： G01J3/00
CPC分类号： G01J3/4338 , G01J3/0286 , G01J3/108 , G01J3/26 , G01N21/3504 , G01N21/359 , G01N21/39
摘要： A near infrared (NIR) semiconductor laser system is shown for gas sensing. An embodiment is centered on the use of a system with a much wider tunable laser, which today has a scan band of more than 150 nanometers (nm) to as much as 250 nm or more. In some cases the scan band is about 400 nm or more. This is achieved in the current embodiment through the use of a widely tunable microelectromechanical system (MEMS) based Fabry-Perot filter as an integral part of the laser cavity. Using this technology, these systems are capable of capturing a variety of gases in the any of the well-known spectroscopic scan bands, such as the OH, NH or CH. For example, a single laser with a 250 nm scan band window between 1550-1800 nm can capture ten or as many as twenty hydrocarbon-based gases simultaneously.
摘要翻译： 示出了用于气体感测的近红外（NIR）半导体激光系统。 一个实施例集中于使用具有更宽可调谐激光器的系统，该激光器今天具有超过150纳米（nm）至多达250nm或更多的扫描带。 在某些情况下，扫描带约为400nm或更大。 这在当前的实施例中通过使用基于广泛可调谐的微机电系统（MEMS）的法布里 - 珀罗滤波器作为激光腔的组成部分来实现。 使用这种技术，这些系统能够捕获任何众所周知的光谱扫描带，例如OH，NH或CH中的各种气体。 例如，在1550-1800nm之间具有250nm扫描带窗口的单个激光器可以同时捕获十个或多达二十个基于烃的气体。
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公开(公告)号：US20110181966A1
公开(公告)日：2011-07-28
申请号：US12693186
申请日：2010-01-25
CPC分类号： B29D11/0073 , G02B6/32 , G02B23/2423
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译： 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤终端和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
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