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公开(公告)号:US20090321859A1
公开(公告)日:2009-12-31
申请号:US12164357
申请日:2008-06-30
申请人: Xia Li , Seung H. Kang , Xiaochun Zhu
发明人: Xia Li , Seung H. Kang , Xiaochun Zhu
CPC分类号: H01L43/12 , G11C11/16 , H01L21/022 , H01L21/02282 , H01L21/312 , H01L21/31612 , H01L21/6715 , H01L27/222
摘要: A system and method to fabricate magnetic random access memory is disclosed. In a particular embodiment, the method includes depositing a cap layer on a magnetic tunnel junction (MTJ) structure, depositing a first spin-on material layer over the cap layer, and etching the first spin-on material layer and at least a portion of the cap layer.
摘要翻译: 公开了制造磁随机存取存储器的系统和方法。 在特定实施例中,该方法包括在磁性隧道结(MTJ)结构上沉积覆盖层,在顶盖层上沉积第一旋涂材料层,以及蚀刻第一旋涂材料层和至少一部分 盖层。
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公开(公告)号:US20090130779A1
公开(公告)日:2009-05-21
申请号:US11943042
申请日:2007-11-20
申请人: Xia Li , Seung H. Kang , Xiaochun Zhu
发明人: Xia Li , Seung H. Kang , Xiaochun Zhu
IPC分类号: H01L21/00
摘要: In a particular embodiment, a method is disclosed that includes forming a magnetic tunnel junction (MTJ) structure including a conductive layer on a substrate. The method also includes depositing a sacrificial layer on the conductive layer before depositing a patterning film layer.
摘要翻译: 在特定实施例中,公开了一种方法,其包括在衬底上形成包括导电层的磁性隧道结(MTJ)结构。 该方法还包括在沉积图案化膜层之前在导电层上沉积牺牲层。
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公开(公告)号:US09245610B2
公开(公告)日:2016-01-26
申请号:US13613168
申请日:2012-09-13
申请人: Jung Pill Kim , Taehyun Kim , Kangho Lee , Seung H. Kang , Xia Li , Wah Nam Hsu
发明人: Jung Pill Kim , Taehyun Kim , Kangho Lee , Seung H. Kang , Xia Li , Wah Nam Hsu
CPC分类号: G11C17/18 , G11C11/16 , G11C11/1673 , G11C11/1675 , G11C17/02 , G11C17/16 , G11C17/165
摘要: A one time programming (OTP) apparatus unit cell includes magnetic tunnel junctions (MTJs) with reversed connections for placing the MTJ in an anti-parallel resistance state during programming. Increased MTJ resistance in its anti-parallel resistance state causes a higher programming voltage which reduces programming time and programming current.
摘要翻译: 一次性编程(OTP)装置单元包括具有反向连接的磁隧道结(MTJ),用于在编程期间将MTJ置于反并联电阻状态。 在其反并联电阻状态下增加的MTJ电阻会导致更高的编程电压,从而减少编程时间和编程电流。
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公开(公告)号:US20140071741A1
公开(公告)日:2014-03-13
申请号:US13613168
申请日:2012-09-13
申请人: Jung Pill Kim , Taehyun Kim , Kangho Lee , Seung H. Kang , Xia Li , Wah Nam Hsu
发明人: Jung Pill Kim , Taehyun Kim , Kangho Lee , Seung H. Kang , Xia Li , Wah Nam Hsu
IPC分类号: G11C11/16
CPC分类号: G11C17/18 , G11C11/16 , G11C11/1673 , G11C11/1675 , G11C17/02 , G11C17/16 , G11C17/165
摘要: A one time programming (OTP) apparatus unit cell includes magnetic tunnel junctions (MTJs) with reversed connections for placing the MTJ in an anti-parallel resistance state during programming. Increased MTJ resistance in its anti-parallel resistance state causes a higher programming voltage which reduces programming time and programming current.
摘要翻译: 一次性编程(OTP)装置单元包括具有反向连接的磁隧道结(MTJ),用于在编程期间将MTJ置于反并联电阻状态。 在其反并联电阻状态下增加的MTJ电阻会导致更高的编程电压,从而减少编程时间和编程电流。
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75.
公开(公告)号:US08441850B2
公开(公告)日:2013-05-14
申请号:US12901074
申请日:2010-10-08
申请人: Kangho Lee , Tae Hyun Kim , Xia Li , Jung Pill Kim , Seung H. Kang
发明人: Kangho Lee , Tae Hyun Kim , Xia Li , Jung Pill Kim , Seung H. Kang
IPC分类号: G11C11/14
CPC分类号: G11C5/025 , G11C5/08 , G11C11/165 , H01L27/0207 , Y10T29/49117
摘要: A large scale memory array includes a uniform pattern of uniformly sized dummy bit cells and active bit cells. Sub-arrays within the large scale memory array are separated by the dummy bit cells. Signal distribution circuitry is formed with a width or height corresponding to the width or height of the dummy bit cells so that the signal distribution circuitry occupies the same footprint as the dummy bit cells without disrupting the uniform pattern across the large scale array. Edge dummy cells of a similar size or larger than the standard size bit cells may be placed around the edge of the large scale array to further reduce pattern loading affects.
摘要翻译: 大规模存储器阵列包括统一大小的虚拟位单元和有源位单元的均匀图案。 大规模存储器阵列中的子阵列由虚拟位单元分隔开。 信号分配电路形成为具有对应于虚拟位单元的宽度或高度的宽度或高度,使得信号分配电路占据与虚拟位单元相同的覆盖区,而不会破坏整个大规模阵列上的均匀图案。 类似大小或大于标准尺寸位单元的边缘虚拟单元可以放置在大规模阵列的边缘周围,以进一步减少图案负载影响。
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公开(公告)号:US20110229687A1
公开(公告)日:2011-09-22
申请号:US12727775
申请日:2010-03-19
CPC分类号: H01L23/15 , H01L21/486 , H01L23/49827 , H01L2924/0002 , H05K3/0041 , Y10T428/24273 , H01L2924/00
摘要: Fabrication of a through glass via in a relatively thick glass substrate includes patterning a through glass via hard mask on a surface of the glass substrate. The fabrication also includes wet etching a portion of the glass substrate, through the hard mask, to create a partial through glass via. The wet etching may involve applying a vapor of an oxide etch chemical, such as HF and XeF6, or applying a wet oxide etch chemical, such as HF and XeF6. The fabrication further includes passivating the etched partial through glass via, removing bottom passivation from the partial through glass via, and repeating the etching, passivating and removing to create the through glass via. The resulting through glass via has a scalloped side wall, a vertical profile and a high aspect ratio.
摘要翻译: 在相对厚的玻璃基板中制造直通玻璃通孔包括在玻璃基板的表面上通过硬掩模图案化通孔玻璃。 该制造还包括通过硬掩模湿法蚀刻玻璃基底的一部分,以产生部分透过玻璃通孔。 湿蚀刻可以包括施加氧化物蚀刻化学品的蒸气,例如HF和XeF 6,或者施加湿氧化物蚀刻化学品,例如HF和XeF 6。 该制造还包括钝化蚀刻的部分通过玻璃通孔,从部分通过玻璃通孔去除底部钝化,并重复蚀刻,钝化和去除以产生通孔玻璃通孔。 所产生的通过玻璃通孔具有扇形侧壁,垂直轮廓和高纵横比。
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公开(公告)号:US20130028010A1
公开(公告)日:2013-01-31
申请号:US13193689
申请日:2011-07-29
申请人: Xia Li , Xiaochun Zhu , Wuyang Hao
发明人: Xia Li , Xiaochun Zhu , Wuyang Hao
IPC分类号: G11C11/16
CPC分类号: G11C11/1657 , G11C11/1659 , G11C11/1675
摘要: A transmission gate is arranged between a current source and a resistive memory element, a PMOS gate of the transmission gate has no source loading effect and a write current passes from the current source, and in a first direction through the resistive memory element, setting the resistive memory element to a magnetization state. An NMOS gate of the of the transmission gate has no source loading effect and another write current, passes through the resistive memory element, in a second direction opposite the first direction, and through the transmission gate, setting the resistive memory element to an opposite magnetization state.
摘要翻译: 传输门被布置在电流源和电阻存储元件之间,传输门的PMOS栅极没有源负载效应,并且写入电流从电流源流过,并且在第一方向通过电阻存储元件,将 电阻性存储元件达到磁化状态。 传输门的NMOS栅极没有源负载效应,而另一写入电流在与第一方向相反的第二方向上通过电阻性存储元件,并且通过传输门将电阻性存储元件设置为相反的磁化 州。
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公开(公告)号:US08492858B2
公开(公告)日:2013-07-23
申请号:US12548678
申请日:2009-08-27
申请人: Xia Li , Seung H. Kang
发明人: Xia Li , Seung H. Kang
IPC分类号: H01L29/82
CPC分类号: G06F17/50 , G11C11/161 , H01L43/08 , H01L43/12
摘要: A magnetic tunnel junction (MTJ) device and fabrication method is disclosed. In a particular embodiment, a method of forming a magnetic tunnel junction (MTJ) device includes forming an MTJ cap layer on an MTJ structure and forming a top electrode layer over the MTJ cap layer. The top electrode layer includes a first nitrified metal.
摘要翻译: 公开了一种磁性隧道结(MTJ)器件及其制造方法。 在特定实施例中,形成磁性隧道结(MTJ)器件的方法包括在MTJ结构上形成MTJ覆盖层并在MTJ覆盖层上形成顶部电极层。 顶部电极层包括第一硝化金属。
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公开(公告)号:US20110049656A1
公开(公告)日:2011-03-03
申请号:US12557611
申请日:2009-09-11
申请人: Xia Li , Seung H. Kang
发明人: Xia Li , Seung H. Kang
IPC分类号: H01L29/82 , H01L21/8246 , G06F19/00
CPC分类号: H01L43/02 , G11C11/16 , G11C11/161 , H01L43/08 , H01L43/12
摘要: A magnetic tunnel junction (MTJ) device and fabrication method is disclosed. In a particular embodiment, a method of forming a magnetic tunnel junction (MTJ) device includes forming a top electrode layer over an MTJ structure. The top electrode layer includes a first nitrified metal.
摘要翻译: 公开了一种磁性隧道结(MTJ)器件及其制造方法。 在特定实施例中,形成磁性隧道结(MTJ)器件的方法包括在MTJ结构上形成顶部电极层。 顶部电极层包括第一硝化金属。
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公开(公告)号:US20140063895A1
公开(公告)日:2014-03-06
申请号:US13602666
申请日:2012-09-04
申请人: Xia Li , Seung H. Kang
发明人: Xia Li , Seung H. Kang
CPC分类号: G11C17/02 , G11C11/005 , G11C11/5607 , G11C11/5692 , G11C17/00 , G11C17/14 , G11C17/16 , G11C17/165 , H01L23/5252 , H01L23/5256 , H01L27/22 , H01L27/224 , H01L43/08 , H01L43/12 , H01L2924/0002 , H01L2924/00
摘要: A one time programmable (OPT) and multiple time programmable (MTP) structure is constructed in a back end of line (BEOL) process using only one, two or three masks. The OTP/MTP structure can be programmed in one of three states, a pre-programmed high resistance state, and a programmable low resistance state and a programmable very high resistance state. In the programmable low resistance state, a barrier layer is broken down during an anti-fuse programming so that the OTP/MTP structure exhibits resistance in the hundred ohm order of magnitude. In the very high resistance state a conductive fuse is blown open during programming so that the OTP/MTP structure exhibits resistance in the mega-ohm order of magnitude. The OTP/MTP structure may include a magnetic tunnel junction (MTJ) structure or a metal-insulator-metal (MIM) capacitor structure.
摘要翻译: 仅使用一个,两个或三个掩模,在后端(BEOL)过程中构造了一次性可编程(OPT)和多时间可编程(MTP)结构。 OTP / MTP结构可以编程为三种状态之一,预编程的高电阻状态,可编程低电阻状态和可编程非常高的电阻状态。 在可编程低电阻状态下,在抗熔丝编程期间阻挡层被分解,使得OTP / MTP结构呈现出百欧姆量级的电阻。 在非常高的电阻状态下,在编程期间导通熔丝被断开,使得OTP / MTP结构呈现以兆欧姆数量级的电阻。 OTP / MTP结构可以包括磁隧道结(MTJ)结构或金属 - 绝缘体 - 金属(MIM)电容器结构。
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