Method of Forming a Magnetic Tunnel Junction Structure
    72.
    发明申请
    Method of Forming a Magnetic Tunnel Junction Structure 有权
    形成磁隧道结结构的方法

    公开(公告)号:US20090130779A1

    公开(公告)日:2009-05-21

    申请号:US11943042

    申请日:2007-11-20

    IPC分类号: H01L21/00

    CPC分类号: H01L43/12 H01L43/02 H01L43/08

    摘要: In a particular embodiment, a method is disclosed that includes forming a magnetic tunnel junction (MTJ) structure including a conductive layer on a substrate. The method also includes depositing a sacrificial layer on the conductive layer before depositing a patterning film layer.

    摘要翻译: 在特定实施例中,公开了一种方法,其包括在衬底上形成包括导电层的磁性隧道结(MTJ)结构。 该方法还包括在沉积图案化膜层之前在导电层上沉积牺牲层。

    Magnetic random access memory (MRAM) layout with uniform pattern
    75.
    发明授权
    Magnetic random access memory (MRAM) layout with uniform pattern 有权
    具有均匀图案的磁性随机存取存储器(MRAM)布局

    公开(公告)号:US08441850B2

    公开(公告)日:2013-05-14

    申请号:US12901074

    申请日:2010-10-08

    IPC分类号: G11C11/14

    摘要: A large scale memory array includes a uniform pattern of uniformly sized dummy bit cells and active bit cells. Sub-arrays within the large scale memory array are separated by the dummy bit cells. Signal distribution circuitry is formed with a width or height corresponding to the width or height of the dummy bit cells so that the signal distribution circuitry occupies the same footprint as the dummy bit cells without disrupting the uniform pattern across the large scale array. Edge dummy cells of a similar size or larger than the standard size bit cells may be placed around the edge of the large scale array to further reduce pattern loading affects.

    摘要翻译: 大规模存储器阵列包括统一大小的虚拟位单元和有源位单元的均匀图案。 大规模存储器阵列中的子阵列由虚拟位单元分隔开。 信号分配电路形成为具有对应于虚拟位单元的宽度或高度的宽度或高度,使得信号分配电路占据与虚拟位单元相同的覆盖区,而不会破坏整个大规模阵列上的均匀图案。 类似大小或大于标准尺寸位单元的边缘虚拟单元可以放置在大规模阵列的边缘周围,以进一步减少图案负载影响。

    Through Glass Via Manufacturing Process
    76.
    发明申请
    Through Glass Via Manufacturing Process 审中-公开
    通过玻璃制造工艺

    公开(公告)号:US20110229687A1

    公开(公告)日:2011-09-22

    申请号:US12727775

    申请日:2010-03-19

    IPC分类号: B32B3/10 B44C1/22

    摘要: Fabrication of a through glass via in a relatively thick glass substrate includes patterning a through glass via hard mask on a surface of the glass substrate. The fabrication also includes wet etching a portion of the glass substrate, through the hard mask, to create a partial through glass via. The wet etching may involve applying a vapor of an oxide etch chemical, such as HF and XeF6, or applying a wet oxide etch chemical, such as HF and XeF6. The fabrication further includes passivating the etched partial through glass via, removing bottom passivation from the partial through glass via, and repeating the etching, passivating and removing to create the through glass via. The resulting through glass via has a scalloped side wall, a vertical profile and a high aspect ratio.

    摘要翻译: 在相对厚的玻璃基板中制造直通玻璃通孔包括在玻璃基板的表面上通过硬掩模图案化通孔玻璃。 该制造还包括通过硬掩模湿法蚀刻玻璃基底的一部分,以产生部分透过玻璃通孔。 湿蚀刻可以包括施加氧化物蚀刻化学品的蒸气,例如HF和XeF 6,或者施加湿氧化物蚀刻化学品,例如HF和XeF 6。 该制造还包括钝化蚀刻的部分通过玻璃通孔,从部分通过玻璃通孔去除底部钝化,并重复蚀刻,钝化和去除以产生通孔玻璃通孔。 所产生的通过玻璃通孔具有扇形侧壁,垂直轮廓和高纵横比。

    Fast MTJ Switching Write Circuit For MRAM Array
    77.
    发明申请
    Fast MTJ Switching Write Circuit For MRAM Array 审中-公开
    用于MRAM阵列的快速MTJ切换写入电路

    公开(公告)号:US20130028010A1

    公开(公告)日:2013-01-31

    申请号:US13193689

    申请日:2011-07-29

    IPC分类号: G11C11/16

    摘要: A transmission gate is arranged between a current source and a resistive memory element, a PMOS gate of the transmission gate has no source loading effect and a write current passes from the current source, and in a first direction through the resistive memory element, setting the resistive memory element to a magnetization state. An NMOS gate of the of the transmission gate has no source loading effect and another write current, passes through the resistive memory element, in a second direction opposite the first direction, and through the transmission gate, setting the resistive memory element to an opposite magnetization state.

    摘要翻译: 传输门被布置在电流源和电阻存储元件之间,传输门的PMOS栅极没有源负载效应,并且写入电流从电流源流过,并且在第一方向通过电阻存储元件,将 电阻性存储元件达到磁化状态。 传输门的NMOS栅极没有源负载效应,而另一写入电流在与第一方向相反的第二方向上通过电阻性存储元件,并且通过传输门将电阻性存储元件设置为相反的磁化 州。

    Magnetic tunnel junction device and fabrication
    78.
    发明授权
    Magnetic tunnel junction device and fabrication 有权
    磁隧道连接装置及制造

    公开(公告)号:US08492858B2

    公开(公告)日:2013-07-23

    申请号:US12548678

    申请日:2009-08-27

    申请人: Xia Li Seung H. Kang

    发明人: Xia Li Seung H. Kang

    IPC分类号: H01L29/82

    摘要: A magnetic tunnel junction (MTJ) device and fabrication method is disclosed. In a particular embodiment, a method of forming a magnetic tunnel junction (MTJ) device includes forming an MTJ cap layer on an MTJ structure and forming a top electrode layer over the MTJ cap layer. The top electrode layer includes a first nitrified metal.

    摘要翻译: 公开了一种磁性隧道结(MTJ)器件及其制造方法。 在特定实施例中,形成磁性隧道结(MTJ)器件的方法包括在MTJ结构上形成MTJ覆盖层并在MTJ覆盖层上形成顶部电极层。 顶部电极层包括第一硝化金属。

    Magnetic Tunnel Junction Device and Fabrication
    79.
    发明申请
    Magnetic Tunnel Junction Device and Fabrication 有权
    磁隧道结设备及制造

    公开(公告)号:US20110049656A1

    公开(公告)日:2011-03-03

    申请号:US12557611

    申请日:2009-09-11

    申请人: Xia Li Seung H. Kang

    发明人: Xia Li Seung H. Kang

    摘要: A magnetic tunnel junction (MTJ) device and fabrication method is disclosed. In a particular embodiment, a method of forming a magnetic tunnel junction (MTJ) device includes forming a top electrode layer over an MTJ structure. The top electrode layer includes a first nitrified metal.

    摘要翻译: 公开了一种磁性隧道结(MTJ)器件及其制造方法。 在特定实施例中,形成磁性隧道结(MTJ)器件的方法包括在MTJ结构上形成顶部电极层。 顶部电极层包括第一硝化金属。

    LOW COST PROGRAMMABLE MULTI-STATE DEVICE
    80.
    发明申请
    LOW COST PROGRAMMABLE MULTI-STATE DEVICE 有权
    低成本可编程多状态器件

    公开(公告)号:US20140063895A1

    公开(公告)日:2014-03-06

    申请号:US13602666

    申请日:2012-09-04

    申请人: Xia Li Seung H. Kang

    发明人: Xia Li Seung H. Kang

    IPC分类号: G11C17/02 H01L27/22 G11C17/00

    摘要: A one time programmable (OPT) and multiple time programmable (MTP) structure is constructed in a back end of line (BEOL) process using only one, two or three masks. The OTP/MTP structure can be programmed in one of three states, a pre-programmed high resistance state, and a programmable low resistance state and a programmable very high resistance state. In the programmable low resistance state, a barrier layer is broken down during an anti-fuse programming so that the OTP/MTP structure exhibits resistance in the hundred ohm order of magnitude. In the very high resistance state a conductive fuse is blown open during programming so that the OTP/MTP structure exhibits resistance in the mega-ohm order of magnitude. The OTP/MTP structure may include a magnetic tunnel junction (MTJ) structure or a metal-insulator-metal (MIM) capacitor structure.

    摘要翻译: 仅使用一个,两个或三个掩模,在后端(BEOL)过程中构造了一次性可编程(OPT)和多时间可编程(MTP)结构。 OTP / MTP结构可以编程为三种状态之一,预编程的高电阻状态,可编程低电阻状态和可编程非常高的电阻状态。 在可编程低电阻状态下,在抗熔丝编程期间阻挡层被分解,使得OTP / MTP结构呈现出百欧姆量级的电阻。 在非常高的电阻状态下,在编程期间导通熔丝被断开,使得OTP / MTP结构呈现以兆欧姆数量级的电阻。 OTP / MTP结构可以包括磁隧道结(MTJ)结构或金属 - 绝缘体 - 金属(MIM)电容器结构。