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121 条记录 (耗时 0.039 秒)

    CHARGED-PARTICLE BEAM LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICE
    71.
    发明申请
    CHARGED-PARTICLE BEAM LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICE 有权
    充电粒子束光刻设备及其制造方法

    公开(公告)号：US20120288799A1

    公开(公告)日：2012-11-15

    申请号：US13462013

    申请日：2012-05-02

    申请人： Hiromitsu Takase ,  Ichiro Tanaka ,  Akira Miyake

    发明人： Hiromitsu Takase ,  Ichiro Tanaka ,  Akira Miyake

    IPC分类号： G03F7/20 ,  G21K5/08

    CPC分类号： H01J37/3177 ,  B08B5/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/70925 ,  H01J2237/022 ,  H01J2237/03 ,  H01J2237/0435 ,  H01J2237/0453 ,  H01J2237/1205

    摘要： A lithographic apparatus which performs drawing on a substrate with a charged-particle beam, includes an optical system having an aperture plate in which a first number of apertures are formed to pass a first number of charged-particle beams to perform the drawing, a substrate holder, a cleaning unit configured to clean the aperture plate, and a chamber containing the optical system and the substrate holder. The cleaning unit includes a case having an emitting hole plate in which a second number of emitting holes are formed, the second number being smaller than the first number, an active species source configured to generate active species in the case, and a driving mechanism configured to move the case.

    摘要翻译： 在带有带电粒子束的基板上进行拉伸的光刻设备包括具有孔板的光学系统，其中形成有第一数量的孔以通过第一数量的带电粒子束以进行绘图;基板 配置为清洁孔板的清洁单元和容纳光学系统和基板保持器的室。 清洁单元包括具有发射孔板的壳体，其中形成有第二数量的发射孔，第二数量小于第一数量，被配置为在壳体中产生活性物种的活性物质源和被配置为 移动案件。

    Light Emitting Device and Illumination Apparatus
    72.
    发明申请
    Light Emitting Device and Illumination Apparatus 有权
    发光装置和照明装置

    公开(公告)号：US20090295265A1

    公开(公告)日：2009-12-03

    申请号：US11721807

    申请日：2005-07-27

    申请人： Tomoya Tabuchi ,  Akira Miyake ,  Daisuke Sakumoto

    发明人： Tomoya Tabuchi ,  Akira Miyake ,  Daisuke Sakumoto

    IPC分类号： F21V13/08

    CPC分类号： H01L33/56 ,  H01L33/507 ,  H01L2224/13

    摘要： A light emitting device includes a base on which a wiring conductor is formed from the top surface to the bottom surface or the side face; a light emitting chip mounted on the top surface of the base and electrically connected with the wiring conductor; a first light transmitting member which covers the light emitting chip; a second light transmitting member provided above the first light transmitting member to cover the first light transmitting member, the second light transmitting member being formed of a light transmitting material containing fluorescent materials for converting in wavelength the light emitted from the light emitting chip; and a third light transmitting member provided between the first and second light transmitting members, wherein the refractive index n1 of the first light transmitting member, the refractive index n2 of the second light transmitting member and the refractive index n3 of the third light transmitting member satisfy the relation: n3

    摘要翻译： 发光器件包括从顶表面到底表面或侧面形成布线导体的基底; 发光芯片安装在基座的顶表面上并与布线导体电连接; 覆盖发光芯片的第一透光构件; 第二透光构件，设置在第一透光构件上方以覆盖第一透光构件，第二透光构件由包含荧光材料的透光材料形成，用于使波长从发光芯片发射的光转换; 以及第三透光构件，设置在第一透光构件和第二透光构件之间，其中第一透光构件的折射率n1，第二透光构件的折射率n2和第三透光构件的折射率n3满足 关系：n3

    X-RAY GENERATOR AND EXPOSURE APPARATUS
    75.
    发明申请
    X-RAY GENERATOR AND EXPOSURE APPARATUS 有权
    X射线发生器和曝光装置

    公开(公告)号：US20080043922A1

    公开(公告)日：2008-02-21

    申请号：US11876746

    申请日：2007-10-22

    申请人： Fumitaro Masaki ,  Akira Miyake

    发明人： Fumitaro Masaki ,  Akira Miyake

    IPC分类号： G21K1/06

    CPC分类号： G03F7/70916 ,  B82Y10/00 ,  G03F7/70175

    摘要： An X-ray generator for generating plasma and X-ray emitted from the plasma includes a unit for generating the plasma, and plural reflection optical systems for introducing the X-ray through different optical paths.

    摘要翻译： 用于产生等离子体的X射线发生器和从等离子体发射的X射线包括用于产生等离子体的单元和用于通过不同光路引入X射线的多个反射光学系统。

    Optical apparatus, measurement method, and semiconductor device manufacturing method
    77.
    发明授权
    Optical apparatus, measurement method, and semiconductor device manufacturing method 失效
    光学装置，测量方法和半导体器件制造方法

    公开(公告)号：US07084982B2

    公开(公告)日：2006-08-01

    申请号：US10626744

    申请日：2003-07-25

    申请人： Takeshi Yamamoto ,  Akira Miyake

    发明人： Takeshi Yamamoto ,  Akira Miyake

    IPC分类号： G01N21/47

    CPC分类号： G01N21/95607 ,  G01N21/47

    摘要： An optical apparatus includes an optical device arranged on an optical path extending from a light source to a predetermined position, an optical sensor, and a measuring device which measures an optical characteristic or a change in an optical characteristic of the optical device on the basis of an output from the optical sensor. The optical sensor is arranged outside the optical path and senses light which is emitted from a second light source arranged outside the optical path and is reflected by the optical device.

    摘要翻译： 光学装置包括配置在从光源延伸到预定位置的光路上的光学装置，光学传感器和测量装置，其基于以下方式测量光学装置的光学特性或光学特性的变化： 来自光学传感器的输出。 光学传感器设置在光路的外侧，并且感测从布置在光路外侧的第二光源发射并被光学装置反射的光。

    Light-emitting apparatus and illuminating apparatus
    79.
    发明申请
    Light-emitting apparatus and illuminating apparatus 审中-公开
    发光装置和照明装置

    公开(公告)号：US20050211991A1

    公开(公告)日：2005-09-29

    申请号：US11088238

    申请日：2005-03-22

    申请人： Yuki Mori ,  Akira Miyake

    发明人： Yuki Mori ,  Akira Miyake

    IPC分类号： F21K7/00 ,  F21S2/00 ,  F21Y20060101 ,  H01L21/00 ,  H01L27/15 ,  H01L33/50 ,  H01L33/56

    CPC分类号： H01L33/501 ,  H01L33/56 ,  H01L2924/0002 ,  H01L2924/00

    摘要： There is provided a light-emitting apparatus with favorable radiation light intensity, which is excellent in light extraction efficiency, color temperature and color rendering property. The light-emitting apparatus includes a light-emitting element, a base body having, on its top surface, a placement portion for emplacing thereon the light-emitting element, a frame body attached to the top surface of the base body so as to surround the placement portion, a light transmitting member disposed inside the frame body so as to cover the light-emitting element, and phosphors contained in the light transmitting member, which performs wavelength conversion on the light emitted from the light-emitting element. The light transmitting member has a pre-cured viscosity ranging from 0.4 to 50 Pa.s.

    摘要翻译： 提供了具有良好的辐射光强度的发光装置，其具有优异的光提取效率，色温和显色性能。 发光装置包括发光元件，基体，其顶表面上具有用于放置发光元件的放置部，安装在基体的上表面上的框体， 放置部分，设置在框体内部以覆盖发光元件的透光构件，以及包含在透光构件中的荧光体，其对从发光元件发射的光进行波长转换。 透光部件的预固化粘度为0.4〜50Pa·s。