公开(公告)号：US08555920B2

公开(公告)日：2013-10-15

申请号：US12303841

申请日：2007-06-13

申请人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F17D1/04

CPC分类号： G05D7/0664 ,  Y10T137/85938 ,  Y10T137/87314 ,  Y10T137/87539

摘要： A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.

摘要翻译： 流量比可变型流体供给装置包括：流量控制系统，其将具有规定流量Q1 / Q0的第一分流管路和第二分流管路的流量Q的气体供给到气室， 并且具有开口面积S1的第一孔口安装在第一分流通道上，第二分流通道连接到并联连接的多个支管通道，开口区域安装在分支通道上的开口/ 安装在所有或一些分支通道上的关闭阀，使得气体转向流动转向通道，流量比Q1 / Q0等于第一孔口与第二流量的可流通孔口的总开口面积S2o的比值 通过调节流通孔的总开口面积来分流通道。

公开(公告)号：US20120031500A1

公开(公告)日：2012-02-09

申请号：US13203866

申请日：2009-11-06

申请人： Jun Hirose ,  Kazuyuki Tezuka ,  Yohei Uchida ,  Mutsunori Koyonogi ,  Takahiro Matsuda ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Jun Hirose ,  Kazuyuki Tezuka ,  Yohei Uchida ,  Mutsunori Koyonogi ,  Takahiro Matsuda ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F17D1/16

CPC分类号： C23C16/45561 ,  H01L21/67017 ,  Y10T137/0396

摘要： To provide a fluid control apparatus capable of reducing the space, while reducing the cost.A fluid control apparatus 1 has a fluid controlling unit 2 and a fluid introducing unit 3. The fluid introducing unit 3 is divided into three parts: a first and a second inlet-side shutoff/open parts 5, 6 disposed on the inlet side, each made up of 2×N/2 on-off valves 23, and a fluid controlling unit-side shutoff/open part 7 made up of 4×M on-off valves 23, disposed between the first and second inlet-side shutoff/open parts 5, 6 and the fluid controlling unit 2.

摘要翻译： 提供能够减少空间的流体控制装置，同时降低成本。 流体控制装置1具有流体控制单元2和流体引入单元3.流体引入单元3被分成三部分：设置在入口侧的第一和第二入口侧截止/打开部分5,6， 每个都由2×N / 2开关阀23和由4×M开关阀23构成的​​流体控制单元侧关闭/打开部分7，其设置在第一和第二入口侧截止阀/ 打开部分5,6和流体控制单元2。

公开(公告)号：US20110139271A1

公开(公告)日：2011-06-16

申请号：US12996370

申请日：2009-04-06

申请人： Kaoru Hirata ,  Katsuyuki Sugita ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Takeo Sugimoto

发明人： Kaoru Hirata ,  Katsuyuki Sugita ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Takeo Sugimoto

IPC分类号： F16K31/02

CPC分类号： G05D7/0635 ,  Y10T137/7761

摘要： The invention prevents overshoot from occurring in flow rate on the output side of a flow rate regulator when output flow rate is changed or the gas type distributed is changed. Thus, an automatic pressure regulator is provided to supply gas pressure to a flow rate regulator that includes a piezoelectric element driving type pressure regulating valve, a control pressure detector provided on the output side of the pressure regulating valve, and a controller to which a detected value P2 of the control pressure detector and a set value Pst for control pressure are input, wherein the controller supplies a control signal to a piezoelectric element driving unit of the pressure regulating valve using a proportional control system to perform valve opening regulation, in which the proportional control system of the controller is set to control to bring about a residual deviation in control pressure by disabling an integral action.

摘要翻译： 本发明防止了当流量改变或气体分布改变时流量调节器的输出侧的流量发生过冲。 因此，提供了一种自动压力调节器，用于向包括压电元件驱动型压力调节阀的流量调节器，设置在压力调节阀的输出侧的控制压力检测器和控制器提供气体压力， 输入控制压力检测器的值P2和用于控制压力的设定值Pst，其中控制器使用比例控制系统向压力调节阀的压电元件驱动单元提供控制信号，以执行阀开启调节，其中 控制器的比例控制系统设置为通过禁用积分作用来控制控制压力的残留偏差。

公开(公告)号：US20110108138A1

公开(公告)日：2011-05-12

申请号：US12989614

申请日：2009-02-18

申请人： Katsuyuki Sugita ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Kaoru Hirata ,  Takatoshi Nakatani

发明人： Katsuyuki Sugita ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Kaoru Hirata ,  Takatoshi Nakatani

IPC分类号： F16K31/12

CPC分类号： G05D7/0635 ,  Y10T137/7762

摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.

摘要翻译： 为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能， 两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过 高速降压指令电路降压。

公开(公告)号：US20100229976A1

公开(公告)日：2010-09-16

申请号：US12303841

申请日：2007-06-13

申请人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Kaoru Hirata ,  Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16L41/00 ,  G01F1/42

CPC分类号： G05D7/0664 ,  Y10T137/85938 ,  Y10T137/87314 ,  Y10T137/87539

摘要： A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.

摘要翻译： 流量比可变型流体供给装置包括：流量控制系统，其将具有规定流量Q1 / Q0的第一分流管路和第二分流管路的流量Q的气体供给到气室， 并且具有开口面积S1的第一孔口安装在第一分流通道上，第二分流通道连接到并联连接的多个支管通道，开口区域安装在分支通道上，开口/ 安装在所有或一些分支通道上的关闭阀，使得气体转向流动转向通道，流量比Q1 / Q0等于第一孔口与第二流量的可流通孔口的总开口面积S2o的比值 通过调节流通孔的总开口面积来分流通道。

公开(公告)号：US20100207044A1

公开(公告)日：2010-08-19

申请号：US12439572

申请日：2007-08-21

申请人： Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Yohei Sewada

发明人： Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda ,  Yohei Sewada

IPC分类号： F16K31/02 ,  F16K1/36

CPC分类号： F16K31/04 ,  F16K7/16 ,  F16K31/52491

摘要： In a step motor driven cam valve a stem freely ascends and descends within a body having an in-flow passage, an out-flow passage, a valve chamber, and a valve seat. The stem is descended by an actuator, composed of a step motor and a cam mechanism located at a position above the stem, that changes a rotational motion of the step motor to a linear motion and transmits the linear motion to the stem. A diaphragm within a valve chamber or a valve body at a lower end part of the stem rests on the valve seat. A lift support mechanism that supports the actuator to freely ascend and descend is arranged at a bonnet that covers the valve chamber. A height fine-adjustment mechanism, arranged at the lift supporting mechanism, finely adjusts the height of the actuator relative to the stem so as to perform zero-point adjustment of the valve.

摘要翻译： 在步进马达驱动的凸轮阀中，杆在具有流入通道，​​流出通道，阀室和阀座的主体内自由上升和下降。 杆由致动器下降，该致动器由位于杆上方的位置的步进电动机和凸轮机构组成，其将步进电动机的旋转运动改变为线性运动，并将线性运动传递到杆。 阀室内的隔膜或阀杆的下端部的阀体位于阀座上。 支撑致动器自由上升和下降的提升支撑机构布置在覆盖阀室的发动机罩上。 布置在升降支撑机构处的高度精细调节机构，精细地调节致动器相对于杆的高度，以便执行阀的零点调节。

公开(公告)号：US08833730B2

公开(公告)日：2014-09-16

申请号：US13389671

申请日：2010-11-05

申请人： Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Yohei Sawada ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K31/02 ,  F16K25/00 ,  F16K31/44 ,  F16K31/00 ,  H02K5/00 ,  F16K31/04 ,  F16K7/16 ,  F16K31/524

CPC分类号： F16K7/16 ,  F16K31/047 ,  F16K31/52408

摘要： A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.

摘要翻译： 凸轮控制阀包括具有流体通道和阀座的阀壳体，阀座位于阀座上以打开和关闭流体通道;阀杆，其压紧阀盘，使其接触阀座;凸轮作用 在阀杆上保持下降，电动机旋转凸轮，保持电动机的电动机支架，固定在阀壳体上的支撑框架，并支撑电动机支架使其垂直移动;弹性构件，将电动机支架偏压 支撑框架的上侧部分和高度可调节的螺钉，使马达夹持器从支撑框架上悬挂起来，并且相对于支撑框架调节马达夹持器的高度，其中高度可调节螺钉可滑动地插入到上侧部分 的支撑框架并拧入电机支架。

公开(公告)号：US20140162094A1

公开(公告)日：2014-06-12

申请号：US14126445

申请日：2012-06-13

申请人： Atsushi Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Seichin Kinuta ,  Yoshiaki Saita ,  Masashi Kobayashi

发明人： Atsushi Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Kouji Nishino ,  Seichin Kinuta ,  Yoshiaki Saita ,  Masashi Kobayashi

IPC分类号： H01G11/04 ,  H01M2/36

CPC分类号： H01G11/04 ,  H01G11/14 ,  H01G11/58 ,  H01G11/84 ,  H01M2/361 ,  Y02E60/13

摘要： The purpose of the present invention is to provide an electrochemical element to which a high-concentration and high-viscosity electrolyte is supplied. The electrolyte is dispersed and supplied instantaneously to the electrochemical element in a small fixed quantity.

摘要翻译： 本发明的目的是提供一种供应高浓度和高粘度电解质的电化学元件。 电解液以小的固定量瞬时分散并供给电化学元件。

公开(公告)号：US08496022B2

公开(公告)日：2013-07-30

申请号：US10561514

申请日：2004-06-10

申请人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

发明人： Kazuhiko Sugiyama ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Toyomi Uenoyama

IPC分类号： G05D11/13

CPC分类号： G05D7/00 ,  G05D7/0623 ,  G05D7/0652 ,  G05D7/0658 ,  G05D7/0664 ,  G05D11/132 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/2521 ,  Y10T137/2529 ,  Y10T137/2562 ,  Y10T137/263 ,  Y10T137/2663 ,  Y10T137/7761 ,  Y10T137/8175

摘要： The invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL1 and GL2, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BL1 on the downstream side of the open/close valve OV1 and branched from GL1 ,bypass line BL2 on the downstream side of the open/close valve OV2 and branched from GL2 ,pressure type division quantity controller connected to the bypass line BL1 and the bypass line BL2 ,a sensor measuring pressure inside branch supply line GL1 ,and another sensor measuring pressure inside branch supply line GL2.

摘要翻译： 本发明提供一种气体量Q，同时以具有流量控制器的气体供给设备的流量比Q1 / Q2分压。 通过分别提供具有多个分支供应线GL1和GL2的开闭阀将气体的总量Q = Q1 + Q2以流量Q1和Q2供给到固定到分支供应管线的端部的喷淋板， 从气体供给装置供给规定量的气体，通过在开/关阀OV1的下游侧利用旁路管线BL1，从开关阀OV2的下游侧的GL1分支的旁通管线BL2， 从GL2分支，连接到旁路线BL1和旁路线BL2的压力分型量控制器，测量分支供给线GL1内的压力的传感器和测量分支供给线GL2内的压力的另一传感器。

公开(公告)号：US20070168150A1

公开(公告)日：2007-07-19

申请号：US10598290

申请日：2005-01-13

申请人： Kaoru Hirata ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi

发明人： Kaoru Hirata ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi

IPC分类号： G01K1/00

CPC分类号： G01L19/0023 ,  G01F1/6842 ,  G01F1/6845 ,  Y10T137/7761

摘要： The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed. More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion-resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrates, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.

摘要翻译： 本发明提供了用于流体的耐腐蚀金属制传感器和使用该传感器的流体供应装置。 更具体地说，用于流体的耐腐蚀金属制传感器配备有耐腐蚀金属基板，包含耐腐蚀金属基板的质量流量传感器部件，形成温度传感器的薄膜和安装在背面的加热器 耐腐蚀金属基板的流体接触面的表面侧，以及包含形成安装在耐腐蚀金属基板的流体接触面的背面侧的应变传感器元件的薄膜的压力传感器部， 传感器被构造成测量流体的质量流量和压力。